Vacuum flow measuring device

Abstract

The utility model discloses a vacuum flow measuring device which comprises a tubular main body, and a pressure sensor, a temperature sensor, an electric cabinet and a thermal mass flow meter are arranged above the tubular main body and are distributed along the axial direction of the tubular main body; a PLC arithmetic unit is arranged in the electric control box, a touch display screen is arranged above the electric control box, and the PLC arithmetic unit is used for receiving detection data of the pressure sensor, the temperature sensor and the thermal mass flow meter and sending a calculation structure to the touch display screen. The pressure sensor, the temperature sensor, the thermal mass flow and PLC operation are integrated on the tubular main body, the actual volume flow under the working condition is calculated and displayed in real time, manual conversion errors are eliminated, and the operation efficiency of the vacuum pump is visually fed back.

Description

TECHNICAL FIELD

[0001] The utility model belongs to flow measurement technical field, especially relate to a vacuum flow measuring device. BACKGROUND

[0002] In industrial production, vacuum pumps are often used to meet process requirements, and the efficiency of the vacuum pump or vacuum pump system includes two main parameters: whether the target vacuum degree (absolute pressure) can be reached and the vacuum flow (actual volume flow) at the target vacuum degree.

[0003] However, there are few products for measuring vacuum flow, and thermal mass flow meters are commonly used for alternative measurement. The measurement of thermal mass flow meter products is based on standard volume flow as the output result, which cannot directly reflect the actual volume flow, but needs to be manually converted to vacuum flow, which is time-consuming and inaccurate. INVENTION CONTENTS

[0004] To solve the above problems, the utility model provides a vacuum flow measuring device, which can directly display the actual flow of the working condition and facilitate real-time feedback of the running efficiency of the vacuum pump and vacuum system.

[0005] Therefore, the technical scheme of the utility model is: a vacuum flow measuring device, comprising a tubular main body, a pressure sensor, a temperature sensor, an electric control box and a thermal mass flow meter are installed on the upper part of the tubular main body and are distributed along the axial direction of the tubular main body; a PLC calculation unit is arranged in the electric control box, a touch display screen is arranged on the upper part of the electric control box, and the PLC calculation unit is used for receiving the detection data of the pressure sensor, the temperature sensor and the thermal mass flow meter and sending the calculation structure to the touch display screen.

[0006] On the basis of the above scheme and as a preferred scheme of the above scheme: the PLC calculation unit obtains the actual working condition pressure and the actual working condition temperature through the pressure sensor and the temperature sensor, and the PLC calculation unit obtains the standard volume flow through the thermal mass flow meter.

[0007] On the basis of the above scheme and as a preferred scheme of the above scheme: the output value of the PLC calculation unit is the actual volume flow and the cumulative value of the actual volume flow, and is displayed on the touch display screen.

[0008] On the basis of the above scheme and as a preferred scheme of the above scheme: the middle part of the pipeline main body is a straight pipe section, and the two ends are flange connection ends; the pipeline main body is provided with an installation direction indicating mark.

[0009] On the basis of the above scheme and as a preferred scheme of the above scheme: the electric control box is fixed on the tubular main body through a support below the electric control box, and the electric control box is further provided with a power supply battery for supplying power to the PLC calculation unit and the PLC calculation unit.

[0010] As a preferred scheme of the above scheme and on the basis of the above scheme: a temperature sensor is arranged at the left side of the electric control box by 5 cm, and a pressure sensor is arranged at the left side of the electric control box by 10 cm; a thermal mass flow meter is arranged at the right side of the electric control box by 10 cm.

[0011] Compared with the prior art, the utility model has the beneficial effects that:

[0012] 1. The pressure sensor, the temperature sensor, the thermal mass flow and the PLC operation are integrated on the tubular body, the actual volume flow under the working condition is calculated and displayed in real time, the manual conversion error is eliminated, and the vacuum pump operation efficiency is intuitively fed back.

[0013] 2. The measurement (flow, temperature, pressure), data processing (PLC), display (touch screen) and statistical (cumulative value) functions are integrated in a single device to form a standardized product, simplify the system structure and reduce the maintenance cost.

[0014] 3. The tubular body adopts a straight pipe section design connected by national standard flanges, is suitable for industrial pipeline systems, reduces installation resistance, clearly marks the installation direction and sensor layout (distributed from upstream to downstream), avoids measurement interference and improves reliability. The straight pipe section structure reduces flow field disturbance, the sensors are distributed in axial order (flow -> temperature -> pressure), and the built-in power supply and operation unit in the electric control box ensure data acquisition stability and measurement accuracy.

[0015] 4. The utility model fills the gap of vacuum flow measurement instruments, creates a multi-sensor fusion scheme for gas flow measurement in a rough vacuum state, has real-time monitoring and data statistical (cumulative flow) functions, and solves the pain point of the lack of special vacuum flow measurement tools in the market. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a structural schematic view of the utility model;

[0017] Figure 2 It is a structural schematic view of the tubular body of the utility model;

[0018] Figure 3 It is a structural side view of the tubular body of the utility model.

[0019] In the drawing, the marks are: tubular body 1, straight pipe section 11, flange connection end 12, installation direction indicating mark 13, pressure interface 14, temperature interface 15, flow interface 16, electric control box 2, PLC operation unit 21, power supply battery 22, touch display screen 23, pressure sensor 3, temperature sensor 4, thermal mass flow meter 5. DETAILED DESCRIPTION

[0020] In the description of the utility model, it is necessary to explain that, for the direction words, if the terms "center", "transverse (X)", "longitudinal (Y)", "vertical (Z)", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation and positional relationship based on the orientation or positional relationship shown in the drawings, only for the convenience of describing the utility model and simplifying the description, and not indicating or implying that the device or element indicated must have a specific orientation, be constructed and operated in a specific orientation, and cannot be understood as limiting the specific protection scope of the utility model.

[0021] In addition, if the terms "first", "second" are only used for description purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. Therefore, the "first", "second" features can be explicitly or implicitly included one or more features, and in the description of the utility model, the meaning of "several", "several" is two or more than two, unless otherwise explicitly specified.

[0022] Referring to the drawings. The vacuum flow measuring device described in the embodiment comprises a tubular body 1, the tubular body 1 is a straight pipe section 11, both ends are flange connection ends 12, divided into carbon steel and stainless steel two materials, adapt to industrial pipeline system, reduce the installation resistance. The tubular body 1 is provided with an installation direction indicating mark 13 (right arrow), which clearly indicates the installation direction, can reduce the interference to the flow measurement, the thermal mass flow meter, temperature sensor, pressure sensor is distributed along the axial direction of the tubular body from the upstream to the downstream of the gas.

[0023] The tubular body 1 is provided with an electric control box 2 above, the electric control box 2 is fixed on the tubular body 1 through the support below, the electric control box 2 is provided with PLC operation unit 21 and power supply battery 22 inside, the electric control box 2 is provided with touch display screen 23 above, the power supply battery 22 is powered for PLC operation unit 21 and PLC operation unit 21.

[0024] The pressure interface 14 reserved above the tubular body 1 is used for installing pressure sensor 3, the installation position is located directly above the tubular body 1 and is distributed along the axial direction of the tubular body 1, and is located at the left side of the electric control box 10cm away, the pressure sensor 3 covers the lower limit of absolute pressure 0Kpa.

[0025] The temperature interface 15 reserved above the tubular body 1 is used for installing temperature sensor 4, the installation position is located directly above the tubular body 1 and is distributed along the axial direction of the tubular body 1, and is located at the left side of the electric control box 5cm away, covering the commonly used temperature range.

[0026] The flow interface 16 reserved above the tubular body 1 is used to install the thermal mass flow meter 5; the installation position is located directly above the tubular body 1 and distributed along the axial direction of the tubular body 1, 10cm away from the right side of the electrical control box 2.

[0027] The PLC processing unit 21 is used to receive detection data from the pressure sensor 3, temperature sensor 4, and thermal mass flow meter 5. The PLC processing unit 21 obtains the actual operating pressure and actual operating temperature through the pressure sensor 3 and temperature sensor 4, and obtains the standard volumetric flow rate through the thermal mass flow meter 5.

[0028] The actual flow rate under rough vacuum conditions is calculated by the PLC processing unit, which facilitates the measurement of the actual vacuum level and the actual flow rate under vacuum conditions, making it suitable for precise monitoring of vacuum gas flow.

[0029] The standard flow rate is acquired through thermal mass flow measurement, and then converted using real-time pressure and temperature signals. The conversion process is based on the calculation method of the mass flow meter and the definition of an ideal gas. The specific calculation logic of the PLC processing unit is as follows:

[0030]

[0031] Q 累计 =∑(Qact × time interval)

[0032] In the formula:

[0033] Tact represents the actual operating temperature, in Kelvin (K).

[0034] Pact represents the actual operating pressure, measured in kPa.

[0035] Qact represents the actual volumetric flow rate, measured in cubic meters (m³). 3 / min;

[0036] Tstd represents the standard temperature, Tstd = 273.15K (0℃);

[0037] Pstd represents the standard pressure, Pstd = 101.325 kPa (1 atm);

[0038] Qstd represents the standard volumetric flow rate, in Nm³. 3 / min;

[0039] Q 累计 Represents the cumulative value of actual volumetric flow rate, in cubic meters (m³). 3 / min.

[0040] Therefore, the output values ​​of the PLC calculation unit 21 are the actual volumetric flow rate Qact and the cumulative value Q of the actual volumetric flow rate.累计 And display on the touch display screen 23, convenient for user to read the actual volume flow and the cumulative value of the actual volume flow of the gas in the rough vacuum state in real time.

[0041] The preferred embodiments of the present application are described above, the protection scope of the present application is not limited to the above-mentioned embodiments, any technical solutions belonging to the idea of the present application are within the protection scope of the present application. It should be pointed out that, for ordinary skilled in the art, some improvements and decorations without departing from the principle of the present application, these improvements and decorations should also be considered as the protection scope of the present application.

Claims

1. A vacuum flow measurement device, characterized in that: It includes a tubular main body, on which pressure sensors, temperature sensors, an electrical control box, and a thermal mass flow meter are installed and distributed along the axial direction of the tubular main body; the electrical control box is equipped with a PLC computing unit, and a touch screen is installed on top of the electrical control box. The PLC computing unit is used to receive the detection data from the pressure sensor, temperature sensor, and thermal mass flow meter, and send the calculation results to the touch screen.

2. The vacuum flow measurement device as described in claim 1, characterized in that: The PLC processing unit obtains the actual operating pressure and actual operating temperature through pressure sensors and temperature sensors, and obtains the standard volumetric flow rate through a thermal mass flow meter.

3. The vacuum flow measurement device as described in claim 2, characterized in that: The output values ​​of the PLC calculation unit are the actual volumetric flow rate and the cumulative value of the actual volumetric flow rate, which are displayed on the touch screen.

4. The vacuum flow measurement device as described in claim 1, characterized in that: The tubular body has a straight pipe section in the middle and flange connection ends at both ends; the tubular body is provided with an installation direction indicator.

5. The vacuum flow measurement device as described in claim 1, characterized in that: The electrical control box is fixed to the tubular body by a bracket at the bottom. The electrical control box is also equipped with a power supply battery to power the PLC operation unit.

6. The vacuum flow measurement device as described in claim 1, characterized in that: A temperature sensor is located 5cm to the left of the electrical control box, and a pressure sensor is located 10cm to the left of the electrical control box; a thermal mass flow meter is located 10cm to the right of the electrical control box.

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