Mask detection device
By combining a rotating clamping device and a thermal imaging unit, temperature holograms of the mask are acquired, solving the problems of timeliness and accuracy in mask contamination detection. This enables early detection and accurate identification of mask contamination, ensuring the stability of the solar cell manufacturing process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-15
- Publication Date
- 2026-03-24
AI Technical Summary
In existing technologies, mask contamination detection is neither timely nor accurate, leading to frequent occurrences of copper or tin leakage during the manufacturing process of solar cells.
A rotating clamp is used to rotate the mask, and a thermal imaging unit is used to acquire temperature holograms. Mask contamination is detected by the temperature difference between the substrate, the light-shielding film, and the contaminants, enabling early detection and accurate identification.
This improves the timeliness and accuracy of mask contamination detection, avoids anomalies caused by mask contamination during solar cell manufacturing, and ensures the stability of the electroplating process.
Smart Images
Figure CN224035303U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of solar cell manufacturing, in particular to a mask plate detection device. BACKGROUND
[0002] In the manufacturing process of a solar cell, a grid line is prepared on the solar cell by electroplating. First, a photosensitive adhesive layer is formed on a metal seed layer of the solar cell. Then, a light source of a printing mechanism is irradiated to the photosensitive adhesive layer through a mask to transfer a mask pattern of the mask to the photosensitive adhesive layer by exposure (printing). Subsequently, a patterned groove corresponding to the mask pattern is formed on the photosensitive adhesive layer by development. After electroplating a metal grid line in the patterned groove, the photosensitive adhesive layer serving as a mask layer is removed. If the mask is contaminated, it will cause abnormal exposure of the photosensitive adhesive of the solar cell, and then cause batch copper or tin leakage in the subsequent electroplating process.
[0003] Currently, mask contamination can only be found by detecting the patterned groove after development. When found, batch solar cell printing abnormalities have already occurred. The above detection method cannot timely find mask contamination, which is not conducive to improving the timeliness and accuracy of mask contamination detection. CONTENT OF THE INVENTION
[0004] Therefore, the present application provides a mask plate detection device to solve the technical problem that the timeliness and accuracy of mask contamination detection are not improved in the prior art.
[0005] The present application provides a mask plate detection device, which comprises:
[0006] A fixing frame, which comprises two first fixing plates oppositely arranged in a first direction and two second fixing plates oppositely arranged in a second direction, the first direction being perpendicular to the second direction;
[0007] A rotatable clamping member rotatable arranged on the first fixing plate, the rotatable clamping member comprising a rotating shaft arranged on the first fixing plate and a clamping portion connected to a side of the rotating shaft away from the first fixing plate, the clamping portion being used for clamping an edge of a mask plate, the rotatable clamping member rotating around the rotating shaft to drive the mask plate to rotate;
[0008] A first thermal imaging unit arranged on the second fixing plate, the first thermal imaging unit being used for shooting a temperature hologram of the mask plate.
[0009] Optionally, the rotating shaft is connected to the first fixing plate through a first bearing.
[0010] Optionally, the first bearing is a ball bearing, the first bearing comprises an inner ring connected to the rotating shaft, an outer ring arranged around an outer periphery of the inner ring, and balls arranged between the inner ring and the outer ring, an outer periphery of the inner ring is formed with first ball guide grooves matched with the balls, an inner periphery of the outer ring is formed with second ball guide grooves matched with the balls, and the first ball guide grooves and the second ball guide grooves jointly form a containing cavity for containing the balls.
[0011] Optionally, two rotating clamps are arranged on the two first fixed plates, and rotating shafts of the two rotating clamps are coaxially arranged, and the two rotating clamps clamp two sides of the mask along the first direction to drive the mask to rotate.
[0012] Optionally, the rotating clamp further comprises a limiting groove arranged on a side of the clamping portion away from the rotating shaft, and the limiting groove is used for containing an edge of the mask.
[0013] Optionally, a bottom wall of the limiting groove is provided with a buffer layer.
[0014] Optionally, a center of the mask is located in a first plane perpendicular to the first direction, and a center axis of a lens of the first thermal imaging unit is in the first plane.
[0015] Optionally, the mask detection device further comprises a second thermal imaging unit arranged on the first fixed plate, and the second thermal imaging unit is used for shooting a temperature hologram of the mask.
[0016] Optionally, two second thermal imaging units are arranged, and the two second thermal imaging units are arranged in axial symmetry with respect to the rotating shaft, and a center axis of a lens of the second thermal imaging unit is parallel to the rotating shaft.
[0017] Optionally, two first thermal imaging units are arranged, and the two first thermal imaging units are arranged on the two second fixed plates, respectively.
[0018] The mask detection device of the embodiment of the application comprises a fixing frame; a rotating clamping piece rotatably arranged on a first fixed plate of the fixing frame, the rotating clamping piece comprising a rotating shaft arranged on the first fixed plate and a clamping part connected to a side of the rotating shaft away from the first fixed plate, the clamping part being used for clamping the edge of the mask, the rotating clamping piece rotating around the rotating shaft to drive the mask to rotate; and a first thermal imaging unit arranged on a second fixed plate, the first thermal imaging unit being used for shooting a temperature hologram of the mask. In the foregoing manner, the rotating clamping piece drives the mask and the pollutants attached to the mask to rotate, and the mask and the pollutants respectively generate friction with air in the rotating process to cause temperature rise. Since the materials of the substrate of the mask, the light shielding film of the mask having a mask pattern and the pollutants attached to the mask are different, the temperatures of the substrate of the mask, the light shielding film of the mask and the pollutants after friction rise are different, a temperature difference is generated, the temperature hologram collected by the first thermal imaging unit can reflect the temperature difference, and the detection of the pollutants on the mask is realized through comparison of the temperature hologram and the mask pattern of the mask, so that the mask pollution can be found before batch solar cell printing abnormalities occur, the timeliness of mask pollution detection is improved, and the accuracy of mask pollution is improved through the principle of thermal imaging to directly transfer the mask pattern of the mask to the corresponding temperature hologram. BRIEF DESCRIPTION OF DRAWINGS
[0019] Figure 1 FIG. 1 is a structural schematic diagram of a mask detection device according to an embodiment of the application.
[0020] Figure 2 FIG. 2 is a structural schematic diagram of the mask detection device shown in FIG. 1. Figure 1
[0021] Figure 3 FIG. 3 is a front view of the mask detection device shown in FIG. 2. Figure 1
[0022] Figure 4 FIG. 4 is a top view of the mask detection device shown in FIG. 2. Figure 1
[0023] Figure 5 FIG. 5 is a sectional view of the mask detection device shown in FIG. 2 along the direction of A-A. Figure 4
[0024] Figure 6 FIG. 6 is a shooting schematic diagram of the mask detection device shown in FIG. 2. Figure 1
[0025] Figure 7 FIG. 7 is an exploded view of the mask detection device shown in FIG. 2. Figure 1
[0026] The meanings of the reference signs in the drawings are as follows:
[0027] 100-Mask inspection device; 10-Fixed frame; 11-First fixed plate; 12-Second fixed plate; 20-Rotating clamping component; 21-Rotating shaft; 22-Clamping part; 221-Limiting groove; 222-Buffer layer; 23-First bearing; 231-Inner ring; 231a-First ball guide groove; 232-Outer ring; 232a-Second ball guide groove; 233-Ball; 30-First thermal imaging unit; 31-Central axis; 40-Second thermal imaging unit; 41-Central axis; 200-Mask; 201-Substrate; 202-Light-shielding film; 200a-Center; 200b-First plane. Detailed Implementation
[0028] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings. Preferred embodiments of this application are shown in the drawings. However, this application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the disclosure of this application.
[0029] It should be noted that when a component is said to be "fixed to" another component, it can be directly attached to the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component.
[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
[0031] like Figures 1 to 7 The diagram illustrates a mask detection device according to an embodiment of this application. In each figure, arrows indicate the directions of up / down, front / back, left / right. Unless otherwise specified, the directions of up / down, front / back, and left / right are described according to the directions indicated by these arrows. Furthermore, in each figure, the up / down direction is the first direction, the left / right direction is the second direction, and the front / back direction is the third direction; the first, second, and third directions are perpendicular to each other. The first direction corresponds to the length extension direction of the rotation axis in the mask detection device.
[0032] like Figures 1 to 7 As shown, the mask detection device 100 includes: a fixing frame 10, a rotating clamping member 20, and a first thermal imaging unit 30.
[0033] The fixing frame 10 comprises two first fixing plates 11 and two second fixing plates 12, the two first fixing plates 11 are oppositely arranged in a first direction, the two second fixing plates 12 are oppositely arranged in a second direction, and the first direction and the second direction are perpendicular. Specifically, one of the first fixing plates 11, one of the second fixing plates 12, the other first fixing plate 11 and the other second fixing plate 12 are sequentially connected.
[0034] The rotating clamping piece 20 is rotatably arranged on the first fixing plate 11, and comprises a rotating shaft 21 and a clamping part 22 connected with the rotating shaft 21. The rotating shaft 21 is rotatably arranged on the first fixing plate 11, and the clamping part 22 is connected to a side of the rotating shaft 21 away from the first fixing plate 11. The clamping part 22 is used for clamping the edge of the mask plate 200, and the rotating clamping piece 20 can rotate around the rotating shaft 21 to drive the mask plate 200 to rotate.
[0035] The first thermal imaging unit 30 is arranged on the second fixing plate 12, and is used for shooting the temperature hologram of the mask plate 200. Specifically, when the rotating clamping piece 20 drives the mask plate 200 to rotate to a position where the mask plate 200 is parallel to the second fixing plate 12, the first thermal imaging unit 30 is oppositely arranged with the light shielding film 202 of the mask plate 200 in the second direction, as shown in Figure 6 At this time, the first thermal imaging unit 30 shoots the mask plate 200 to obtain the temperature hologram of the front view angle of the mask plate 200. Based on Figure 6 , the rotating clamping piece 20 drives the mask plate 200 to continue rotating by 180°, at this time, the first thermal imaging unit 30 is oppositely arranged with the substrate 201 of the mask plate 200 in the second direction, and the first thermal imaging unit 30 shoots the mask plate 200 to obtain the temperature hologram of the rear view angle of the mask plate 200.
[0036] In the rotating process, the substrate 201 of the mask 200, the light shielding film 202 of the mask 200 and the contaminants attached to the substrate 201 or the light shielding film 202 generate friction with the air, respectively, resulting in the temperature of the substrate 201 of the mask 200, the light shielding film 202 of the mask 200 and the contaminants rising, respectively, due to the different materials of the substrate 201 of the mask 200, the light shielding film 202 of the mask 200 and the contaminants. Specifically, the substrate 201 is the main support structure of the mask 200, which is usually made of quartz or soda, and these materials have good optical transparency and chemical stability, ensuring accurate transmission of the designed pattern during the printing exposure process; the light shielding film 202 is used to shield light, which is usually made of materials such as chromium and silicon, and these materials have good mechanical strength and corrosion resistance, which can ensure the stability of the pattern during the printing exposure process; the contaminants are usually fingerprints, residual glue, small particulate matter and dust. Therefore, the temperature rise caused by the friction of the three with the air is different, and the temperature of the substrate 201 of the mask 200, the temperature of the light shielding film 202 of the mask 200 and the temperature of the contaminants are different, respectively, which can reflect the difference between the mask pattern of the light shielding film 202 and the contaminants on the temperature hologram.
[0037] In the present embodiment, the rotating clamping member drives the mask and the contaminants attached thereto to rotate, and the mask and the contaminants generate friction with the air in the rotating process, respectively, resulting in the temperature rising. Since the substrate of the mask, the light shielding film of the mask having the mask pattern and the contaminants attached to the mask are different in material, respectively, the substrate of the mask, the light shielding film of the mask and the contaminants have different temperatures after friction and temperature rise, resulting in a temperature difference. The temperature hologram collected by the first thermal imaging unit can reflect the above-mentioned temperature difference. By comparing the temperature hologram with the mask pattern of the mask, the detection of the contaminants on the mask can be realized, and the mask contamination can be found before the batch of solar cells printing abnormally, which is beneficial to improve the timeliness of the mask contamination detection. Moreover, the thermal imaging principle directly transfers the mask pattern of the mask to the corresponding temperature hologram, which is beneficial to improve the accuracy of the mask contamination.
[0038] As an implementation manner, the rotating shaft 21 is connected to the first fixed plate 11 through the first bearing 23. The first bearing 23 can be a linear bearing or a ball bearing.
[0039] In some embodiments, the first bearing 23 is a ball bearing, the first bearing 23 comprises an inner ring 231 connected to the rotating shaft 21, an outer ring 232 arranged around the outer periphery of the inner ring 231, and a plurality of balls 233 arranged between the inner ring 231 and the outer ring 232, the outer periphery of the inner ring 231 is formed with a first ball guide groove 231a matched with the balls 233, the inner periphery of the outer ring 232 is formed with a second ball guide groove 232a matched with the balls 233, and the first ball guide groove 231a and the second ball guide groove 232a jointly form a receiving cavity for accommodating the balls 233. The balls 233 can roll in the receiving cavity.
[0040] In the present embodiment, the inner ring of the first bearing rotates together with the rotating shaft, and there is no relative rotation between the rotating shaft and the inner ring, which is beneficial to reduce the friction loss of the rotating shaft.
[0041] As an embodiment, two rotating clamps 20 are provided, and the two rotating clamps 20 are arranged on the two first fixed plates 11 respectively, the rotating shafts 21 of the two rotating clamps 20 are coaxially arranged, and the two rotating clamps 20 clamp the mask plate 200 on both sides in the first direction respectively to drive the mask plate 200 to rotate.
[0042] In the present embodiment, the mask plate is clamped in the first direction by the two rotating clamps respectively, which improves the support stability of the mask plate.
[0043] In some embodiments, the rotating clamp 20 further comprises a limiting groove 221 opened on the side of the clamping portion 22 away from the rotating shaft 21, and the limiting groove 221 is used for accommodating the edge of the mask plate 200.
[0044] In some embodiments, the bottom wall of the limiting groove 221 is provided with a buffer layer 222, when the mask plate 200 is placed in the limiting groove 221, the buffer layer 222 is located between the limiting groove 221 and the mask plate 200, and the buffer layer 222 can be made of rubber material with elasticity.
[0045] As an embodiment, the center of the mask plate 200 is located in a first plane 200b perpendicular to the first direction, and the central axis 31 of the lens of the first thermal imaging unit 30 is in the first plane 200b. The center 200a of the mask plate 200 is its geometric center, as shown in Figure 3 The first plane 200b is a cross section passing through the center 200a of the mask plate 200.
[0046] In the present embodiment, the central axis of the lens of the first thermal imaging unit is in the first plane, which makes the shooting angle of the first thermal imaging unit to the mask plate better, so as to improve the shooting effect of the temperature hologram.
[0047] As an implementation form, the mask plate detection device 100 further comprises a second thermal imaging unit 40, which is configured to capture a temperature hologram of the mask plate 200.
[0048] In the present embodiment, the second thermal imaging unit captures the side surface of the mask plate 200, and fully captures the contaminant from another perspective.
[0049] In some embodiments, two second thermal imaging units 40 are provided, which are arranged in axial symmetry with respect to the rotation axis 21, and the central axis 41 of the lens of the second thermal imaging unit 40 is parallel to the rotation axis 21. Specifically, when the rotating clamp 20 rotates the mask plate 200 to a position where the mask plate 200 is perpendicular to the second fixed plate 12, the two second thermal imaging units 40 are arranged opposite to the upper side of the mask plate 200 in the first direction, as shown in FIG. 4, at this time, the two second thermal imaging units 40 capture the upper side of the mask plate 200 respectively, and obtain the temperature hologram of the top view of the mask plate 200. Due to the shielding of the rotating clamp 20, one of the two second thermal imaging units 40 captures the left half of the image, and the other one captures the right half of the image, so that a relatively complete temperature hologram of the top view of the mask plate 200 can be obtained to assist the first thermal imaging unit 30 in detection. Figure 3
[0050] In the present embodiment, the two second thermal imaging units are arranged to make the capturing more complete, and the central axis of the lens of the second thermal imaging unit is parallel to the rotation axis, so that the second thermal imaging unit has a better capturing angle for the side surface of the mask plate, thereby improving the capturing effect of the temperature hologram.
[0051] In some embodiments, two first thermal imaging units 30 are provided, which are arranged on the two second fixed plates 12 respectively.
[0052] In the present embodiment, the two first thermal imaging units are arranged to capture a temperature hologram of the front view of the mask plate every 180° rotation.
[0053] The technical features of the above embodiments can be combined in any manner. In order to make the description concise, not all possible combinations of the technical features in the above embodiments are described, however, as long as the combinations of the technical features do not exist contradictions, they should be considered as the scope of the present disclosure.
[0054] The above embodiments only express the preferred embodiments of the present application, which are described in a more specific and detailed manner, but should not be construed as limiting the scope of the patent application. It should be noted that for ordinary skilled in the art, several modifications and improvements can be made without departing from the concept of the present application, which are all within the scope of protection of the present application. Therefore, the scope of protection of the patent of the present application should be subject to the appended claims.
Claims
1. A mask detection device, characterized in that, include: A fixing frame, the fixing frame including two first fixing plates arranged opposite each other in a first direction and two second fixing plates arranged opposite each other in a second direction, the first direction and the second direction being perpendicular to each other; A rotating clamping member rotatably disposed on the first fixed plate, the rotating clamping member including a rotating shaft disposed on the first fixed plate and a clamping part connected to the rotating shaft on the side away from the first fixed plate, the clamping part being used to clamp the edge of the mask, the rotating clamping member rotating around the rotating shaft to drive the mask to rotate; A first thermal imaging unit is disposed on the second fixed plate, and the first thermal imaging unit is used to capture a temperature hologram of the mask.
2. The mask detection device according to claim 1, characterized in that, The rotating shaft is connected to the first fixed plate via a first bearing.
3. The mask detection device according to claim 2, characterized in that, The first bearing is a ball bearing, which includes an inner ring connected to the rotating shaft, an outer ring surrounding the outer circumference of the inner ring, and balls disposed between the inner ring and the outer ring. The outer circumference of the inner ring has a first ball guide groove that mates with the balls, and the inner circumference of the outer ring has a second ball guide groove that mates with the balls. The first ball guide groove and the second ball guide groove together form a receiving cavity for accommodating the balls.
4. The mask detection device according to claim 1, characterized in that, Two rotating clamping members are provided, each of which is respectively disposed on one of the two first fixing plates. The rotation axes of the two rotating clamping members are coaxially arranged, and the two rotating clamping members respectively clamp the mask on both sides along the first direction to drive the mask to rotate.
5. The mask detection device according to claim 4, characterized in that, The rotating clamping member further includes a limiting groove formed on the side of the clamping portion away from the rotation axis, the limiting groove being used to accommodate the edge of the mask.
6. The mask detection device according to claim 5, characterized in that, The bottom wall of the limiting groove is provided with a buffer layer.
7. The mask detection device according to claim 1, characterized in that, The center of the mask is located in a first plane perpendicular to the first direction, and the central axis of the lens of the first thermal imaging unit is in the first plane.
8. The mask detection device according to claim 1, characterized in that, The mask detection device further includes a second thermal imaging unit disposed on the first fixed plate, the second thermal imaging unit being used to capture a temperature hologram of the mask.
9. The mask detection device according to claim 8, characterized in that, There are two second thermal imaging units, which are arranged symmetrically with respect to the rotation axis, and the central axis of the lens of the second thermal imaging unit is parallel to the rotation axis.
10. The mask detection device according to claim 1, characterized in that, There are two first thermal imaging units, which are respectively mounted on two second fixed plates.