Vertical graphite boat and coating equipment

Abstract

The utility model provides a vertical graphite boat and coating equipment. The vertical graphite boat comprises a plurality of graphite flakes which stand and are sequentially connected in series through a plurality of first connecting rods, the same axial ends or two axial ends of the adjacent graphite flakes are connected through connecting graphite blocks; the bearing grooves are distributed in the graphite flake at intervals along the axial direction of the graphite flake; the main clamping points are distributed on the graphite sheet at intervals and surround the periphery of the bearing groove; and the auxiliary clamping points are distributed on the graphite sheet at intervals and are arranged at the peripheries of the bearing groove and the corresponding main clamping points. According to the vertical graphite boat, main clamping points are arranged on the peripheral side of a bearing groove of a graphite sheet, silicon sheet inserting and taking actions are simulated to calculate the approximate moving track of the silicon sheet in the transportation process of the graphite boat and after thermal deformation, auxiliary clamping points are arranged at the positions, corresponding to the moving track, of the periphery of the main clamping points so as to compensate displacement of the silicon sheet, and sheet connecting structures are arranged below the auxiliary clamping points. And the risks of partial discharge arcing, scorching or damage of the silicon wafer below caused by fragmentation and falling of the silicon wafer due to displacement or subfissure of the silicon wafer are reduced.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell coating equipment technology, and in particular to a vertical graphite boat and coating equipment. Background Technology

[0002] In the current photovoltaic cell coating industry, the vacuum furnaces used in production processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD are generally of two types: vertical furnaces and horizontal furnaces. Both types of vacuum furnaces require the silicon wafers or crystals to be processed to be placed in a specific carrier and transported into the reaction chamber of the vacuum furnace for processing. By introducing specific reaction gases into the reaction chamber, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the silicon wafers or crystals.

[0003] Since both the graphite boat and the silicon wafers in a vertical furnace are placed vertically, if the silicon wafer is not inserted properly during insertion or if its position changes due to external impact during transport into the furnace, the silicon wafer is prone to colliding with the graphite boat and falling off. The fallen wafer will then fall vertically into the slots spaced below, affecting or impacting the silicon wafers in other slots and causing damage. Utility Model Content

[0004] This utility model proposes a vertical graphite boat and coating equipment to solve the technical problem that silicon wafers are prone to falling off due to position changes when using existing vertical graphite boats, causing damage to the silicon wafers in the lower slot.

[0005] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0006] This utility model provides a vertical graphite boat, comprising a plurality of graphite sheets in a standing position and connected in series by a plurality of first connecting rods; adjacent graphite sheets are connected by connecting graphite blocks at the same end or both ends of their axial direction; it also includes: a plurality of bearing grooves, which are spaced apart on the graphite sheets along their axial direction; a plurality of main locking points, which are spaced apart on the graphite sheets and surround the bearing grooves; and a plurality of secondary locking points, which are spaced apart on the graphite sheets and are located around the bearing grooves and their corresponding main locking points.

[0007] Furthermore, the vertical graphite boat also includes:

[0008] Several splice structures are disposed on the graphite sheet and located below the bearing groove, and lower than the secondary locking points on the periphery of the bearing groove.

[0009] Preferably, at least one main locking point is located below the bearing groove, and at least two main locking points are located on the side of the bearing groove.

[0010] Preferably, at least one secondary locking point is located below the bearing groove and its corresponding primary locking point.

[0011] Preferably, the tab structures are arranged between adjacent bearing grooves, respectively.

[0012] Further, the vertical graphite boat further comprises:

[0013] A plurality of insulating sleeves are sleeved on the first connecting rod and connected between adjacent graphite sheets.

[0014] Preferably, the bearing groove is provided with a plurality of gas guide holes penetrating through opposite surfaces of the graphite sheet.

[0015] Preferably, the connecting graphite block is provided with a compression joint parallel to the graphite sheet.

[0016] Further, the vertical graphite boat further comprises: a first compression sheet connected to an axial end of the outermost graphite sheet; and a first adjusting member installed on the first compression sheet and used to adjust the fitting distance of the first compression sheet between the graphite sheets.

[0017] The utility model also provides a kind of coating equipment, including reaction cavity, further including above-mentioned vertical graphite boat, and the conveying device for input and output reaction cavity of vertical graphite boat.

[0018] Compared with prior art, the utility model has the following beneficial effects:

[0019] The vertical graphite boat provided by the utility model not only sets main clamping points on the circumferential side of the bearing groove of the graphite sheet, but also obtains the approximate moving track of the silicon sheet in the graphite boat transportation process and after thermal deformation by simulating the action of the silicon sheet insertion and extraction sheet, at least one secondary clamping point is arranged at the position of the moving track of the bearing groove and the corresponding main clamping point periphery, to compensate and limit the displacement of the silicon sheet, avoid the silicon sheet from falling off from the bearing groove due to displacement and collision with the graphite boat, reduce the risk of local discharge arc, burning or damage to produce more fragments due to the falling of the silicon sheet in the lower bearing groove. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions provided by the utility model, the utility model will be described in detail below in combination with embodiments and drawings. It should be understood that the embodiments described in the following specific embodiments and the drawings of the specification are only some embodiments of the utility model, and those skilled in the art can change the drawings under the concept of the utility model.

[0021] Figure 1 The assembly three-dimensional structure schematic diagram of the embodiment of the vertical graphite boat provided by the utility model is shown in the figure.

[0022] Figure 2 The assembly three-dimensional structure schematic diagram of the embodiment of the vertical graphite boat provided by the utility model is shown in the figure. Figure 1 The local enlarged structure schematic diagram of the A area in the figure.

[0023] Figure 3The embodiment of the vertical graphite boat provided by the utility model provides an assembly front view structural schematic diagram.

[0024] Figure 4 The embodiment of the vertical graphite boat provided by the utility model provides an assembly side view structural schematic diagram.

[0025] Figure 5 The embodiment of the vertical graphite boat provided by the utility model provides an assembly top view structural schematic diagram.

[0026] Figure 6 The graphite sheet of the vertical graphite boat provided by the utility model provides a structural schematic diagram.

[0027] Figure 7 The B area in the Figure 6 The B area in the

[0028] Figure 8 The graphite sheet of the vertical graphite boat provided by the utility model provides a structural schematic diagram.

[0029] In the drawings, the main marks are as follows:

[0030] 1, graphite sheet; 11, bearing groove; 111, air guide hole; 12, main clamping point; 13, auxiliary clamping point; 14, first connecting hole; 15, second connecting hole; 16, protruding part; 161, fourth connecting hole; 17, connecting piece structure; 171, connecting piece stop; 18, first notch; 19, second notch; 2, first connecting rod; 21, insulating sleeve; 3, connecting graphite block; 31, compression joint; 4, third connecting rod; 5, locking nut; 6, first compression sheet; 62, taper protrusion; 621, taper surface; 7, first adjusting part; 71, tapered compression part; 711, contact inclined surface; 8, first electrode graphite block; 81, first electrode connecting part; 9, second electrode graphite block; 10, fourth connecting rod; 20, second compression sheet; 201, second adjusting part; 30, second connecting rod; 40, silicon sheet. DETAILED DESCRIPTION

[0031] In the existing PECVD film coating process, the silicon sheet is fixed and supported on the graphite boat sheet, and the film coating process is carried out on the silicon sheet by passing high-frequency current into the graphite boat sheet. At present, the vacuum reaction furnace used in the PECVD film coating in the industry is usually a horizontal furnace structure, such as the 6-tube horizontal furnace widely configured by various manufacturers. In the film coating process, the graphite boat is placed in the horizontal posture in the reaction chamber of the horizontal furnace. However, due to the development of the photovoltaic cell film coating industry, if the PECVD film coating process continues to use the traditional 6-tube horizontal furnace, the production capacity has reached a bottleneck, and if the production capacity needs to be further improved, the graphite boat can only be infinitely lengthened in the length direction of the horizontal placement.

[0032] However, the thermal deformation of the lengthened graphite boat increases, which causes the silicon wafer and the graphite boat sheet to be not tightly attached, resulting in abnormal discharge and arc; and with the lengthening of the graphite boat, the overall transportation difficulty and the disassembly and maintenance time also increase, thereby increasing the labor operation and maintenance cost of the equipment; at the same time, the length of the horizontal furnace and the area of the site also increase, which also increases the cost.

[0033] Therefore, in order to realize cost reduction and efficiency improvement, more and more manufacturers use vertical furnaces instead of horizontal furnaces, so that the graphite boat in the coating process is placed in a vertical posture in the reaction chamber of the vertical furnace, thereby doubling the production capacity.

[0034] In order to make the technical problems, technical solutions and beneficial effects of the utility model clearer and more apparent, the utility model will be further described in detail in the following combined with the accompanying drawings and embodiments. Figures 1-8

[0035] Please refer to Figures 1-8 The vertical graphite boat provided by the utility model comprises a plurality of graphite sheets 1 which are in a vertical posture and are sequentially connected through a plurality of first connecting rods 2, and graphite blocks 3 are connected between the same end or both ends of adjacent graphite sheets 1.

[0036] Please refer to Figures 1-5 In the embodiment, the vertical graphite boat comprises a plurality of graphite sheets 1, and the graphite sheets 1 are parallel and spaced apart from each other and are flush at the head and tail (axial two ends). A plurality of first connecting holes 14 are arranged at the axial two ends of each graphite sheet 1, and a plurality of first connecting rods 2 sequentially pass through the corresponding first connecting holes 14 to connect the graphite sheets 1 to each other to form an integral graphite boat. The first connecting rod 2 is made of insulating material, preferably a ceramic rod.

[0037] Please refer to Figure 1 , 2 , 5, as a preferred embodiment of the embodiment, the vertical graphite boat further comprises:

[0038] A plurality of insulating sleeves 21 are sleeved on the first connecting rod 2 and connected between adjacent graphite sheets 1, so that the adjacent graphite sheets 1 and the corresponding connecting parts of the first connecting rod 2 are isolated and insulated from each other. The insulating sleeve 21 is preferably made of a ceramic sleeve.

[0039] Please refer to Figure 1 , 2 ​, 6, 7, in one embodiment of the embodiment, the graphite sheet 1 is provided with a plurality of second connecting holes 15 at either end of the axial direction, and the connecting graphite block 3 is provided with a through hole (not shown in the figure) matching the second connecting hole 15, and the second connecting rod 30 passes through the corresponding second connecting hole 15 and the through hole, so that the connecting graphite block 3 is connected between the two ends of the axial direction of the adjacent graphite sheet 1, so that each graphite sheet 1 is conductive to each other. The second connecting rod 30 is preferably made of ceramic rod.

[0040] Please refer to Figure 1 、 2 , 5, as a preferred embodiment of the embodiment, the connecting graphite block 3 is provided with a compression joint 31 parallel to the graphite sheet 1, when the second connecting rod 30 passes through the corresponding second connecting hole 15 and the through hole, the outermost graphite sheet 1 is adjusted by adjusting the lock nut 5 at the end of the second connecting rod 30, so that the plurality of graphite sheets 1 constituting the graphite boat are deformed by the compression joint 31 and pressed tightly. That is, the second connecting rod 30 and the lock nut 5 constitute a connecting assembly that can lock the plurality of graphite sheets 1.

[0041] Please refer to Figures 1-5 , as a preferred embodiment of the embodiment, the vertical graphite boat further comprises:

[0042] The first pressing sheet 6 is connected to either end of the axial (length) direction of the outermost graphite sheet 1; the first adjusting member 7 is installed on the first pressing sheet 6, and is used to adjust the fitting distance between the graphite sheets 1 of the graphite boat.

[0043] Please refer to Figures 1-5 , as a more preferred embodiment of the embodiment, the first pressing sheet 6 is provided with a through hole (not shown in the figure) matching the first connecting hole 14 and the second connecting hole 15, the outer side of the first pressing sheet 6 away from the inner graphite sheet 1 is provided with a tapered protrusion 62, the first adjusting member 7 is an adjusting screw vertically installed at the tapered protrusion 62, the end of the adjusting screw is provided with an inverted tapered pressing member 71, and the side of the tapered pressing member 71 is provided with a contact inclined surface 711 matching the tapered surface 621 of the tapered protrusion 62.

[0044] When the first connecting rod 2 passes through the corresponding first connecting hole 14 and the through hole, and the second connecting rod 30 passes through the corresponding second connecting hole 15, the through hole and the through hole, the contact inclined surface 711 of the tapered pressing member 71 is moved up and down relative to the tapered surface 621 of the tapered protrusion 62 by rotating the adjusting screw, so as to adjust the degree of pressing the graphite sheet 1 by the tapered pressing member 71.

[0045] Please refer to Figure 1 、 3, 4, as the preferred embodiment of the present application, the graphite sheet 1 axial (length direction) in the middle of a number of third connecting hole (not shown in the figure), by the third connecting rod 4 through the corresponding third connecting hole, the adjacent graphite sheet 1 in turn connected.

[0046] Please see Figure 1 , 3 , 4, as the preferred embodiment of the present application, the graphite sheet 1 axial (length direction) in the middle of a number of third connecting hole (not shown in the figure), by the third connecting rod 4 through the corresponding third connecting hole, the adjacent graphite sheet 1 in turn connected.

[0047] Second pressing sheet 20, connected to the outermost graphite sheet 1 axial (length direction) in the middle; Second adjusting member 201, installed on the second pressing sheet 20, for adjusting the degree of pressing each graphite sheet 1 second pressing sheet 20; Second pressing sheet 20 and the first pressing sheet 6 structure is similar, when the third connecting rod 4 through the graphite sheet 1, second pressing sheet 20 on the corresponding connecting hole position, by rotating the adjusting screw makes the second adjusting member 201 up and down, so as to adjust the degree of pressing each graphite sheet 1.

[0048] Please see Figure 1 , 3 , 4, as the preferred embodiment of the present application, the graphite sheet 1 axial (length direction) in the middle of a number of third connecting hole (not shown in the figure), by the third connecting rod 4 through the corresponding third connecting hole, the adjacent graphite sheet 1 in turn connected.

[0049] Please see Figure 1 , 3 , 4, 6, as the preferred embodiment of the present application, the graphite sheet 1 is rectangular plate, each graphite sheet 1 axial (length direction) in the same end of the protruding part 16, protruding part 16 is provided with a plurality of fourth connecting hole 161, and the adjacent graphite sheet 1 is set to 180 degrees, so that the adjacent graphite sheet 1 protruding part 16 staggered in the graphite boat in the same end of the left and right sides. Vertical graphite boat also includes: the first electrode graphite block 8 and the second electrode graphite block 9, and the first electrode graphite block 8 and the second electrode graphite block 9 are provided with a plurality of through holes (not shown in the figure) matched with the fourth connecting hole 161.

[0050] Through the fourth connecting rod 10 through the corresponding fourth connecting hole 161 and the through hole, so that the graphite boat side of the adjacent protruding part 16 with the first electrode graphite block 8 connected, the graphite boat side of the adjacent protruding part 16 with the second electrode graphite block 9 connected. At the same time, the protruding part 16 is made of insulating material, so that the adjacent first electrode graphite block 8 and the adjacent second electrode graphite block 9 are isolated and insulated from each other.

[0051] Please see Figure 1 , 3, 4, 5, as a more preferred embodiment of the present embodiment, the first electrode graphite block 8 is provided with a first electrode connecting part 81, and the second electrode graphite block 9 is provided with a second electrode connecting part (not shown in the figure). When the first electrode graphite block 8 is connected to the positive electrode of the power supply, then the second electrode graphite block 9 is connected to the negative electrode of the power supply, at this time the first electrode connecting part 81 acts as a positive electrode connecting part, and the second electrode connecting part acts as a negative electrode connecting part; when the first electrode graphite block 8 is connected to the negative electrode of the power supply, then the second electrode graphite block 9 is connected to the positive electrode of the power supply, at this time the first electrode connecting part 81 acts as a negative electrode connecting part, and the second electrode connecting part acts as a positive electrode connecting part.

[0052] Please refer to Figure 1 , 4 , 6, 8, in the present embodiment, a plurality of bearing grooves 11 are distributed along the axial direction (length direction) of the graphite sheet 1, preferably uniformly distributed.

[0053] Please refer to Figure 1 , 4 , 6, 8, as a preferred embodiment of the present embodiment, the bearing groove 11 is rectangular (square), and can also be irregular in shape, such as setting any straight angle of the rectangle to be arc-shaped, etc.

[0054] Please refer to Figure 1 , 4 , 6, 8, in the present embodiment, at least one main clamping point 12 is arranged below the bearing groove 11, and at least two main clamping points 12 are arranged on the side of the bearing groove 11, so that the total number of main clamping points 12 is greater than or equal to three, in order to improve the stability of the graphite boat when carrying the silicon wafer 40.

[0055] Please refer to Figure 1 , 4 , 6, 8, as a preferred embodiment of the present embodiment, at least two main clamping points 12 are arranged below the bearing groove 11, in order to further improve the stability of the graphite boat when carrying the silicon wafer 40.

[0056] Please refer to Figure 1 , 4 , 6, 8, in the present embodiment, according to the approximate moving track of the silicon wafer in the graphite boat during transportation and after being heated and deformed, which is calculated according to the action of simulating the insertion and extraction of the silicon wafer 40, at least one auxiliary clamping point 13 is arranged below the bearing groove 11 and the corresponding main clamping point 12 at the position corresponding to the moving track.

[0057] Please refer to Figure 8 , 4 , 6, 8, as a preferred embodiment of the present embodiment, two or more auxiliary clamping points 13 are arranged below the position between the bearing groove 11 and the corresponding adjacent main clamping point 12, that is, below the corresponding main clamping point 12.

[0058] The vertical graphite boat provided by the utility model, when the silicon wafer 40 is placed in the bearing groove 11, the bottom end and the side face thereof are supported and fixed through the corresponding main clamping points 12 below and on the side of the bearing groove 11. When the silicon wafer 40 moves due to vibration, impact or thermal deformation in the transportation process, and then slips relative to the main clamping points 12, the sub clamping points 13 outside the main clamping points 12 abut against the silicon wafer 40 to support and fix the silicon wafer 40, so that the movement of the silicon wafer 40 is compensated and limited, the silicon wafer 40 is prevented from colliding with the graphite boat and falling from the bearing groove 11 due to continuous displacement, the risk of the silicon wafer 40 falling due to excessive movement and colliding with the graphite boat in the transportation and heating process is reduced, and the risk of local arc striking, scorching or damage of the silicon wafer 40 in the bearing groove 11 below due to falling of the silicon wafer 40 above is reduced.

[0059] Due to the placing mode of the graphite boat of the vertical furnace, especially during the heating process of the silicon wafer 40 in the furnace, the hidden cracks or damaged parts of the silicon wafer 40 are also extremely easy to produce fragments due to heating at high temperature.

[0060] Please refer to Figure 8 To solve the problem that the silicon wafer 40 in the upper bearing groove 11 moves excessively and falls or breaks due to hidden cracks during the heating process of the silicon wafer 40, and the silicon wafer 40 placed in the bearing groove 11 below is also caused to arc strike, scorch, fall or break, in the embodiment, the vertical graphite boat further comprises:

[0061] The plurality of tab structures 17 are arranged on the graphite sheet 1 and located below the bearing groove 11 and lower than the sub clamping points 13 outside the bearing groove 11, so as to receive the falling or broken silicon wafer 40 when the silicon wafer 40 above falls or breaks abnormally, and avoid further damage to the silicon wafer 40 below.

[0062] Please refer to Figure 8 As a preferred embodiment of the embodiment, the tab structure 17 is a tab blocking strip 171.

[0063] Please refer to Figure 8 As an embodiment of the embodiment, the tab structure 17 is a tab blocking strip 171 in the shape of a long strip.

[0064] As another embodiment of the embodiment, the tab structure 17 is a tab blocking strip 171 in the shape of a U, a circular arc, a half rhombus or a V.

[0065] As another embodiment of the embodiment, the tab structure 17 is a plurality of tab clamping points (not shown in the figure) arranged at intervals.

[0066] Please refer to Figure 4 As a preferred embodiment of the embodiment, the plurality of tab structures 17 are arranged between adjacent bearing grooves 11.

[0067] As a more preferred embodiment of the present embodiment, two or more tab structures 17 are provided on the graphite sheet 1 and between adjacent carrier grooves 11, and are located below the carrier grooves 11 and below the peripheral sub-clamping points 13 of the carrier grooves 11, so that the tab structure 17 can bear more falling or broken pieces, and avoid damage to the tab structure 17 when there are too many falling or broken pieces, causing the falling or broken pieces to fall into the lower carrier groove 11 along with the tab structure 17, thereby affecting the smooth plating of other silicon wafers 40 in the lower carrier groove 11.

[0068] In an embodiment of the present embodiment, the tab structure 17 can also not be provided below the lowermost carrier groove 11 of the graphite sheet 1, because the falling or broken pieces in the lowermost carrier groove 11 can be directly caught by the cavity of the graphite boat, and will not fall into the lower carrier groove 11 to damage other silicon wafers 40.

[0069] The vertical graphite boat provided by the present application simultaneously sets the tab structure 17 below the carrier groove 11 and the peripheral sub-clamping point 13 of the graphite sheet 1, and between adjacent carrier grooves 11, to receive the falling or broken pieces of the silicon wafers 40 in the upper carrier groove 11 due to their own hidden cracks or excessive displacement, thereby reducing the influence of the falling or broken pieces on the smooth plating of the silicon wafers 40 in the lower carrier groove 11.

[0070] Please refer to Figure 1 , 6 , 8, in the present embodiment, the carrier groove 11 is provided with a plurality of gas guide holes 111 penetrating through the opposite surfaces of the graphite sheet 1. When the graphite boat is placed in the vacuum environment inside the reaction chamber, the reaction gas introduced into the reaction chamber can smoothly diffuse through the gas guide holes 111 to the corresponding carrier grooves 11 of the inner layer of the graphite sheet 1 in the graphite boat, thereby realizing the circulation of the reaction gas in the graphite boat, and avoiding the difficulty of the silicon wafers 40 carried by the corresponding carrier grooves 11 of the inner layer of the graphite sheet 1 to fully contact the reaction gas on the surface, thereby making it difficult to complete the gas reaction and deposit the film on the surface.

[0071] As a preferred embodiment of the present embodiment, the carrier grooves 11 at both ends of the graphite sheet 1 in the axial (lengthwise) direction are not provided with gas guide holes 111, and the carrier grooves 11 in the middle of the graphite sheet 1 in the axial (lengthwise) direction are all provided with gas guide holes 111.

[0072] As a preferred embodiment of the present embodiment, the side of the graphite sheet 1 opposite to the other end of the protruding portion 16 in the axial (lengthwise) direction is provided with a first notch 18, so as to facilitate the clamping of the graphite boat or the graphite sheet 1 by the transfer device.

[0073] Please refer to ​ , 2, 4, 6-8, as a more preferred embodiment of the present embodiment, the graphite sheet 1 of the axial (length direction) relative to the other end of the protruding part 16 is provided with a second notch 19 at the other side edge corner of the first notch 18, the area of the second notch 19 is larger than that of the first notch 18, so that the adjacent graphite sheet 1 arranged in 180 degrees can be covered in the second notch 19 of one of the graphite sheet 1, and a plurality of connecting holes are provided on the side of the first notch 18 of the adjacent graphite sheet 1, so that the axial (length direction) of the graphite boat can be connected and fixed with more second connecting rods 30 and corresponding locking nuts 5 to form a connecting assembly, thereby improving the overall stability of the connection between the plurality of graphite sheets 1 in the graphite boat.

[0074] The utility model also provides a kind of coating equipment, including reaction cavity (not shown in drawing), also including above-mentioned vertical graphite boat, and conveying device (not shown in drawing) for input and output reaction cavity of vertical graphite boat.

[0075] As a preferred embodiment of the present embodiment, the reaction cavity is a vertical furnace matched with the vertical graphite boat, i.e., the coating equipment is a vertical coating equipment. The coating equipment further includes:

[0076] The gas extraction device (not shown in drawing) is used to extract air in the vertical furnace (reaction cavity) to form a vacuum environment in the vertical furnace (reaction cavity); the gas supply device (not shown in drawing) is used to introduce reaction gas into the vertical furnace (reaction cavity) so that the graphite boat is introduced into the reaction gas in the vacuum environment and the powered state, and then the reaction gas is reacted under the voltage to generate a coating layer and deposit on the surface of the silicon wafer 40.

[0077] As a preferred embodiment of the present embodiment, when the graphite boat is loaded with silicon wafers 40, each graphite sheet 1 needs to be placed horizontally; when the graphite boat is unloaded with silicon wafers 40, the graphite boat needs to be set at 90 degrees.

[0078] In other embodiments of the present utility model, the reaction cavity can also be a horizontal furnace, i.e., the vertical graphite boat provided by the present utility model can also be used for a horizontal coating equipment.

[0079] The above is only a preferred embodiment of the present utility model, and is not used to limit the present utility model. Those skilled in the art should understand that any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A vertical graphite boat comprising a plurality of graphite pieces (1) in vertical position and connected in series by a plurality of first connecting rods (2); the adjacent graphite pieces (1) are connected by connecting graphite blocks (3) at the same axial end or both ends; characterized in that, Further comprising: a plurality of bearing grooves (11) distributed on the graphite sheet (1) along the axial direction; a plurality of main clamping points (12) distributed on the graphite sheet (1) and surrounding the bearing grooves (11); a plurality of auxiliary clamping points (13) distributed on the graphite sheet (1) and located outside the bearing grooves (11) and the corresponding main clamping points (12).

2. The vertical graphite boat of claim 1, wherein Further comprising: a plurality of web structures (17) located below the bearing grooves (11) on the graphite sheet (1) and lower than the auxiliary clamping points (13) outside the bearing grooves (11).

3. The vertical graphite boat of claim 1, wherein, At least one of the main clamping points (12) is located below the bearing grooves (11), and at least two of the main clamping points (12) are located on the sides of the bearing grooves (11).

4. The vertical graphite boat of claim 3, wherein, At least one of the auxiliary clamping points (13) is located below the bearing grooves (11) and the corresponding main clamping points (12).

5. The vertical graphite boat of claim 2, wherein, The web structures (17) are respectively located between adjacent bearing grooves (11).

6. The vertical graphite boat according to any one of claims 1 to 5, wherein Further comprising: a plurality of insulating sleeves (21) sleeved on the first connecting rods (2) and connected between adjacent graphite sheets (1).

7. The vertical graphite boat according to any one of claims 1 to 5, wherein The bearing grooves (11) are provided with gas guide holes (111) penetrating through opposite surfaces of the graphite sheet (1).

8. The vertical graphite boat according to any one of claims 1 to 5, wherein The connecting graphite block (3) is provided with a compression joint (31) parallel to the graphite sheet (1).

9. The vertical graphite boat of claim 8, wherein, Further comprising: a first compression sheet (6) connected to one axial end of the outermost graphite sheet (1); a first adjusting member (7) installed on the first compression sheet (6) for adjusting the fitting distance between the first compression sheet (6) and each graphite sheet (1).

10. A coating apparatus comprising a reaction chamber, characterized in that, Further comprising the vertical graphite boat according to any one of claims 1 to 9 and a conveying device for inputting and outputting the vertical graphite boat into and out of the reaction cavity.

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