External air micro-pollution adsorption and filtration equipment

Abstract

The utility model provides external air micro-pollution adsorption and filtration equipment, which mainly adopts the combined design of external air, zeolite rotating wheel adsorption equipment, an external air conditioning unit (MAU) and a dust-free room, and the zeolite rotating wheel adsorption equipment is provided with a zeolite rotating wheel; the zeolite rotating wheel adsorption equipment is arranged in the dust-free room, so that micro-pollutants in the outer air can be filtered out through the zeolite rotating wheel of the zeolite rotating wheel adsorption equipment, then the outer air is fed into the outer air conditioning unit (MAU) and is fed into the dust-free room for use through the outer air conditioning unit (MAU), and therefore, the efficiency of greatly reducing the micro-pollutants entering the dust-free room is achieved, and the dust-free room can be used for cleaning the dust-free room. And the filtering burden of the chemical filter screen in the dust-free room can be reduced, and the service life of the chemical filter screen in the dust-free room is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of outside air micro-pollution adsorption filter removal equipment technical field, especially a kind of with the efficiency of substantially reducing the micro-pollutant that enters the clean room, and can let the filtration burden of the chemical filter screen in the clean room reduce, while increase the service life of the chemical filter screen in the clean room, and it is applicable to the place or factory area of semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field etc. BACKGROUND

[0002] Wafer manufacturing needs to be carried out in a clean room, and as the process evolves, its improved line diameter has reached the level of nanometers, so in a semiconductor high-order wafer manufacturing plant, the clean room has begun to care about the concentration of extremely small gaseous molecular pollutants (AMC) in addition to filtering out particulate pollutants, wherein the gaseous molecular pollutants (AMC) include VOC organic, acid, alkali, DOPANT, etc. four substances, and it is required that gaseous molecular pollutants (AMC) must also be filtered out, so chemical filter screens are used in clean rooms to remove such gaseous molecular pollutants (AMC). However, the source of gaseous molecular pollutants (AMC) is quite extensive, and how to effectively control it becomes a very important issue.

[0003] In addition, the clean room has another source of micro-pollution in addition to the above-mentioned gaseous molecular pollutants (AMC), which is outside air (Outside Air), i.e. the surrounding atmospheric environment. The concentration of volatile organic pollutants (VOC) in outside air (Outside Air) is very low, generally less than 1000 ppb, and the total volatile organic gas (TVOC) concentration is also about <1000 ppb, which contains isopropyl alcohol, acetone, toluene, etc. Because the total volatile organic gas (TVOC) concentration is relatively low, it does not exceed the hazardous or acceptable standards set by international WHO or the Institute of Occupational Health, so it has less harm to human health, but for high-order wafer processes, it will affect the yield of clean room products, especially the yield of processes below 7 nanometers, such as 3 nanometer or 2 nanometer wafer processes.

[0004] Therefore, the applicant, in view of the above-mentioned defects, hopes to provide an outside air micro-pollution adsorption filter removal equipment that substantially reduces the efficiency of micro-pollutants entering the clean room, so that users can easily assemble and operate, and thus designs and develops to provide user convenience, which is the motivation for the applicant to develop and create. UTILITY MODEL CONTENT

[0005] The utility model discloses a main purpose lies in providing a kind of outside air slightly polluted adsorption filter equipment, mainly through a outside air (Outside Air), a zeolite runner adsorption equipment, a outside air air conditioning box (MAU) and the combined design of a clean room, and the zeolite runner adsorption equipment is equipped with a zeolite runner, so that outside air (Outside Air) can first pass through the zeolite runner of the zeolite runner adsorption equipment to filter out the slightly polluted material of outside air (Outside Air), then is sent into the outside air air conditioning box (MAU) again, and is sent to the clean room by the outside air air conditioning box (MAU), thus, the efficiency of greatly reducing the slightly polluted material entering the clean room is obtained, and the filtration burden of chemical filter screen in the clean room can be reduced, the service life of chemical filter screen in the clean room is increased, and the overall practicability is increased.

[0006] Another purpose of the utility model lies in providing a kind of outside air slightly polluted adsorption filter equipment, the first kind of implementation of the zeolite runner adsorption equipment is equipped with a zeolite runner controller by the zeolite runner, and the zeolite runner controller has any one of continuous operation or timing operation, mainly the zeolite runner can be continuously operated for 24 hours to use adsorption and desorption, or can use timing operation to use adsorption and desorption. In addition, the second kind of implementation of the zeolite runner adsorption equipment is equipped with a zeolite runner desorption area controller, and the zeolite runner desorption area controller is any one of continuous desorption or timing desorption, mainly the zeolite runner desorption area can be continuously desorbed for 24 hours to use desorption, or can use timing desorption to use desorption, especially when the zeolite runner is running at 1RPH (per hour speed), that is, the zeolite runner takes one hour to rotate one circle, and after heating and desorbing for one hour by the heater, the zeolite runner can be used for 40.9 hours, and when the safety factor is set to SF=3.4, 40.9 / 3.4=12 hours, that is, desorption once every 12 hours, so the efficiency of greatly reducing desorption energy use is obtained, and the effect of saving operation electricity fee is obtained, and the purpose of effective energy-saving economic benefit is achieved, and the overall operability is increased.

[0007] Still another purpose of the utility model lies in providing a kind of outside air slightly polluted adsorption filter equipment, by being equipped with the zeolite runner adsorption equipment at the upstream end of the outside air air conditioning box (MAU), the slightly polluted material of outside air (Outside Air) can be directly filtered out first, and is adsorbed and desorbed by the zeolite runner, wherein the zeolite runner can be recycled, has no consumables, and has long service life, low maintenance cost, time-saving and material-saving efficiency, and the overall usability is increased.

[0008] In order to further understand the features, characteristics and technical content of the present application, please refer to the following detailed description and drawings of the present application. The attached drawings are provided for reference and illustration only, and are not intended to limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0009] Figure 1 Another embodiment of the present application is shown in the figure.

[0010] Figure 2 Another embodiment of the present application is shown in the figure.

[0011] The following is a description of the reference signs:

[0012] 1-Outside air;

[0013] 2-Zeolite rotary adsorption equipment;

[0014] 3-Outside air conditioning box (MAU);

[0015] 4-Clean room;

[0016] 10-Zeolite rotary adsorption equipment;

[0017] 101-Adsorption zone;

[0018] 102-Cooling zone;

[0019] 103-Desorption zone;

[0020] 11-Heater;

[0021] 12-Inlet pipeline;

[0022] 121-Fan;

[0023] 122-Inlet communication pipeline;

[0024] 1221-Inlet communication control valve;

[0025] 13-Clean gas delivery pipeline;

[0026] 131-Fan;

[0027] 14-Cooling gas inlet pipeline;

[0028] 15-Cooling gas delivery pipeline;

[0029] 16-Hot gas delivery pipeline;

[0030] 17-Desorption gas output pipeline;

[0031] 171-Fan;

[0032] 40 - box;

[0033] 401 - inlet;

[0034] 402 - outlet;

[0035] 41 - first filter device;

[0036] 42 - first temperature device;

[0037] 421 - pre-cooling coil;

[0038] 422 - pre-heating coil;

[0039] 423 - pre-cooler;

[0040] 424 - pre-heater;

[0041] 43 - water washing device;

[0042] 44 - second temperature device;

[0043] 441 - re-cooling coil;

[0044] 442 - re-heating coil;

[0045] 443 - re-cooler;

[0046] 444 - re-heater;

[0047] 45 - second filter device;

[0048] 46 - fan. DETAILED DESCRIPTION

[0049] Please refer to Fig. 1~Fig. 2, which are the schematic diagrams of the embodiments of the present application. The best embodiment of the present application, the outside air micro-pollution adsorption filtering equipment, is applicable to the places or factory areas related to the fields of semi-conductor, electronic technology, biological technology, food processing, precision instrument manufacturing, etc. The main function of the present application is to greatly reduce the micro-pollutants entering the clean room, to reduce the filtering burden of the chemical filter in the clean room, and to increase the service life of the chemical filter in the clean room.

[0050] The outside air micro-pollution adsorption filtering equipment of the present application is mainly composed of an outside air 1, a zeolite rotary adsorption equipment 2, an outside air air-conditioning box (MAU) 3 and a clean room 4 (as shown in Fig. 1~Fig. 2). Figure 1 Figure 2 The outside air 1 contains at least one or more gases or combinations, which is mainly composed of a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities. In addition, the outside air 1 is commonly known as air.​

[0051] The zeolite wheel adsorption device 2 is provided with a zeolite wheel 10, a heater 11, an intake pipe 12, a clean air delivery pipe 13, a cooling air intake pipe 14, a cooling air delivery pipe 15, a hot air delivery pipe 16, and a desorption gas output pipe 17 (as shown in Figure 1 and Figure 2 The zeolite wheel 10 is provided with an adsorption zone 101, a cooling zone 102, and a desorption zone 103, wherein the zeolite wheel 10 is a concentration wheel made of zeolite.

[0052] One end of the intake pipe 12 is connected to the outside air 1, and the other end of the intake pipe 12 is connected to one side of the adsorption zone 101 of the zeolite wheel 10, so that the intake pipe 12 can deliver the outside air 1 to one side of the adsorption zone 101 of the zeolite wheel 10, wherein the intake pipe 12 is provided with a fan 121 (as shown in Figure 1 and Figure 2 to push and pull the outside air 1 into the adsorption zone 101 of the zeolite wheel 10. One end of the clean air delivery pipe 13 is connected to the other side of the adsorption zone 101 of the zeolite wheel 10, and the other end of the clean air delivery pipe 13 is connected to the outside air conditioning box (MAU) 3, so that the outside air 1 can be delivered into the outside air conditioning box (MAU) 3 after being adsorbed by the adsorption zone 101 of the zeolite wheel 10. In addition, the clean air delivery pipe 13 is provided with a fan 131, so that the fan 131 can push and pull the adsorbed gas in the zeolite wheel 10 into the outside air conditioning box (MAU) 3 (as shown in Figure 1 and Figure 2 ).

[0053] In addition, one end of the cooling air intake pipe 14 is connected to one side of the cooling zone 102 of the zeolite wheel 10, so that gas can enter the cooling zone 102 of the zeolite wheel 10 for cooling use, and one end of the cooling air delivery pipe 15 is connected to the other side of the cooling zone 102 of the zeolite wheel 10, and the other end of the cooling air delivery pipe 15 is connected to one end of the heater 11 (as shown in Figure 1 and Figure 2 to deliver the gas entering the cooling zone 102 of the zeolite wheel 10 into the heater 11 for heating, wherein the heater 11 is any one of an electric heater, an electric tube heater, an electric sheet heater, a gas fuel heater, a liquid fuel heater, and a heat exchanger. In addition, one end of the hot air delivery pipe 16 is connected to the other side of the desorption zone 103 of the zeolite wheel 10, and the other end of the hot air delivery pipe 16 is connected to the other end of the heater 11 (as shown inFigure 1 and Figure 2 The high-temperature hot gas after heating by the heater 11 is delivered to the desorption area 103 of the zeolite wheel 10 through the hot gas delivery pipeline 16 for desorption use.

[0054] The cooling area 102 of the zeolite wheel 10 is provided with two embodiments, one of which is that the cooling gas inlet pipeline 14 connected to one side of the cooling area 102 of the zeolite wheel 10 is used for fresh air to enter (as shown in Figure 2 The cooling area 102 of the zeolite wheel 10 is provided with two embodiments, one of which is that the cooling gas inlet pipeline 14 connected to one side of the cooling area 102 of the zeolite wheel 10 is used for fresh air to enter (as shown in Figure 1 The cooling area 102 of the zeolite wheel 10 is provided with two embodiments, one of which is that the cooling gas inlet pipeline 14 connected to one side of the cooling area 102 of the zeolite wheel 10 is used for fresh air to enter (as shown in Figure 1 The cooling area 102 of the zeolite wheel 10 is provided with two embodiments, one of which is that the cooling gas inlet pipeline 14 connected to one side of the cooling area 102 of the zeolite wheel 10 is used for fresh air to enter (as shown in

[0055] In addition, one end of the desorption gas output pipeline 17 is connected to one side of the desorption area 103 of the zeolite wheel 10, and the other end of the desorption gas output pipeline 17 is directly connected to the outside air 1 (as shown in Figure 1 and Figure 2 In addition, one end of the desorption gas output pipeline 17 is connected to one side of the desorption area 103 of the zeolite wheel 10, and the other end of the desorption gas output pipeline 17 is directly connected to the outside air 1 (as shown in Figure 1 and Figure 2 In addition, one end of the desorption gas output pipeline 17 is connected to one side of the desorption area 103 of the zeolite wheel 10, and the other end of the desorption gas output pipeline 17 is directly connected to the outside air 1 (as shown in

[0056] In addition, the outside air conditioning box (MAU) 3 is provided with an inlet 401 and an outlet 402 (as shown in Figure 1 and Figure 2 In addition, the outside air conditioning box (MAU) 3 is provided with an inlet 401 and an outlet 402 (as shown in

[0057] The outdoor air conditioning unit (MAU) 3 is provided with a box 40, which is provided with a first filter device 41, a first temperature device 42, a water washing device 43, a second temperature device 44 and a second filter device 45 (as shown in Figure 1 and Figure 2 The outdoor air conditioning unit (MAU) 3 is provided with a box 40, which is provided with a first filter device 41, a first temperature device 42, a water washing device 43, a second temperature device 44 and a second filter device 45 (as shown in

[0058] The first temperature device 42 is any one or combination of a pre-cooling coil 421 and a pre-heating coil 422 (as shown in Figure 2 The pre-cooling coil 421 is provided with any one of cooling water and chilled water, so as to effectively reduce the temperature of the gas transported by the zeolite rotary adsorption device 2. The pre-heating coil 422 is provided with any one of hot water and steam, so as to transfer heat to the gas transported by the zeolite rotary adsorption device 2, thereby increasing the temperature of the gas. In addition, the first temperature device 42 can also be any one or combination of a pre-cooler 423 and a pre-heater 424 (as shown in Figure 1 The pre-cooler 423 is any one of a shell-and-tube cooler, a finned tube cooler or a plate heat exchanger cooler, and the pre-heater 424 is any one of an electric heater, a gas heater, a heat medium oil heater or a hot water heater.

[0059] In addition, the water washing device 43 is a washing humidifier, mainly composed of at least one pressurizing pump, at least one nozzle, at least one water supplement valve, at least one water discharge valve, and at least one pipeline (not shown in the figure). When the adsorbed gas transported through the clean gas conveying pipeline 13 of the zeolite wheel adsorption device 2 passes through the washing humidifier, water molecules will fully absorb the heat in the adsorbed gas and vaporize and evaporate, increasing the humidity of the adsorbed gas transported through the clean gas conveying pipeline 13 of the zeolite wheel adsorption device 2, to form humidified gas.

[0060] In addition, the second temperature device 44 is any one or a combination of the re-cooling coil 441 and the re-heating coil 442 (as shown in Figure 2 The re-cooling coil 441 is supplied with any one of cooling water or ice water to effectively lower the temperature of the adsorbed gas transported through the clean gas conveying pipeline 13 of the zeolite wheel adsorption device 2. The re-heating coil 442 is supplied with any one of hot water or steam to transfer heat energy to the adsorbed gas transported through the clean gas conveying pipeline 13 of the zeolite wheel adsorption device 2, to increase the temperature of the adsorbed gas. In addition, the second temperature device 44 can also be any one or a combination of the re-cooler 443 and the re-heater 444 (as shown in Figure 1 The re-cooler 443 is any one of a shell-and-tube cooler, a finned tube cooler, or a plate heat exchanger cooler, and the re-heater 444 is any one of an electric heater, a gas heater, a heat medium oil heater, or a hot water heater.

[0061] The second filter device 45 is any one or a combination of a high efficiency particulate air filter (HEPA) and an ultra low penetration air filter (ULPA). The high efficiency particulate air filter (HEPA) is suitable for end filtration, with an efficiency of 99.998% for 0.1 microns and 0.3 microns, and a removal efficiency of more than 99.7% for particles with a diameter of 0.3 microns (1 / 200 of the diameter of hair) or more, which is the most effective filter medium for smoke, dust, and bacteria, and the material is mainly superfine glass fiber paper or composite filter paper. The ultra low penetration air filter (ULPA) is mainly used to remove particles of 0.12 microns (120 nanometers) or more, with a filtration effect of more than 99.995% for DOP, and the material is mainly special superfine glass fiber paper.

[0062] Furthermore, the concentration of gaseous volatile organic pollutants in the outside air is very low, generally less than 1000 ppb, and the actual concentration of IPA in the outside air is about tens of ppb. Compared with the volatile organic exhaust treatment system used in air pollution prevention and control, the concentration of volatile organic gaseous exhaust in a semiconductor electronic factory is mostly between 100-800 ppm. The applicant analyzes that there is a big difference between the two, and the concentration difference is at least 100-1000 times. Therefore, the zeolite wheel adsorption equipment 2 (as shown in Figure 1 and Figure 2 shown) is installed at the upstream end of the outside air conditioning box (MAU) 3, which can directly filter out the micro-pollutants of the outside air (Outside Air) 1, and the zeolite wheel 10 is used for adsorption and desorption. The zeolite wheel 10 can be recycled, has no consumables, has a long service life, low maintenance cost, and saves time and consumables.

[0063] In addition, the zeolite runner adsorption equipment 2 has two kinds of embodiments, wherein the first kind of embodiment is that the zeolite runner 10 is provided with a zeolite runner controller (not shown in the figure), the zeolite runner controller is set to any one of continuous operation or timing operation, mainly the zeolite runner 10 can be continuously operated for 24 hours in a way of adsorption and desorption, or can be used in a timing operation mode for adsorption and desorption, and the zeolite runner controller can be connected with the heater 11, when the zeolite runner controller is set to continuous operation or timing operation, the heater 11 can be started at the same time to heat and output heat source to the desorption zone 103, and the zeolite runner 10 in the timing operation state is stopped for a period of time according to the setting of the time, and then continues to operate to perform the adsorption and desorption action. The zeolite runner controller can also close the heater 11, so that the cooling gas transported by the cooling gas conveying pipeline 15 can directly pass through the heater 11 without heating, and then is transported into the desorption zone 103. In addition, the second kind of embodiment of the zeolite runner adsorption equipment 2 is that the zeolite runner 10 is provided with a zeolite runner desorption zone controller (not shown in the figure), the zeolite runner desorption zone controller is set to any one of continuous desorption or timing desorption, mainly the desorption zone 103 of the zeolite runner 10 can be continuously desorbed for 24 hours in a way of desorption, or can be used in a timing desorption mode for desorption, and the zeolite runner desorption zone controller can be connected with the heater 11, when the zeolite runner desorption zone controller is set to continuous desorption or timing desorption, the heater 11 can be started at the same time to heat and output heat source to the desorption zone 103. The zeolite runner desorption zone controller can also close the heater 11, so that the cooling gas transported by the cooling gas conveying pipeline 15 can directly pass through the heater 11 without heating, and then is transported into the desorption zone 103, so that the desorption zone 103 of the zeolite runner 10 in the timing desorption state is stopped for a period of time according to the setting of the time, and then continues to heat to facilitate output of heat source to the desorption zone 103 for desorption.

[0064] Especially by experiment, it is found that by making a module (for example 400mm) of zeolite blocks with the same thickness as the zeolite wheel, carrying out desorption for one hour, and then carrying out saturated adsorption capacity test experiment, it is found that it can adsorb 3.5 hours under the condition that the adsorption efficiency decreases from 100% to 80%. When the test inlet condition is IPA 11.69ppm, the experimental results show that the inlet IPA 11.69ppm can be adsorbed for 210 minutes = 3.5 hours after desorption, but the actual operation of the external gas IPA is 20~60ppb, and the total volatile organic compounds (TVOC) is <1000ppb. The external gas IPA is less adsorbed than other general pollutants, such as toluene. Therefore, based on the above, it can be inferred that the adsorption time is equivalent, and we simply calculate the expected adsorption time a after regeneration = (11.69ppm*1000ppb / ppm)*3.5 hours / 1000ppb = 40.9 hours. Therefore, when using a heated gas stream to heat desorption (hereinafter referred to as heated desorption), we have designed an intermittent heated desorption. For example: desorption for one hour. Then use for 12 hours. In this way, 24 hours of continuous desorption is not required every day. Only one hour of desorption every 12 hours is required. Such operation can greatly reduce the energy of desorption.

[0065] The details are as follows. Based on the above design, the zeolite blocks are made into a honeycomb-shaped zeolite wheel, and the speed of the honeycomb-shaped zeolite wheel is 1 RPH, that is, it takes one hour for the honeycomb-shaped zeolite wheel to rotate one circle, and the entire honeycomb-shaped zeolite wheel uses a heated gas stream to heat desorption. The heated gas stream is used to heat desorption (hereinafter referred to as heated desorption) for one hour, and then it can be used for 40.9 hours, for example, we set the safety factor SF = 3.4, 40.9 / 3.4 = 12 hours, then design intermittent heated desorption. The honeycomb-shaped zeolite wheel can be used for 12 hours after intermittent heated desorption for one hour, and one day is 24 hours, that is, it is not necessary to continuously heat desorption for 24 hours. The unique intermittent heated desorption design of the present application has the advantage of saving the electricity cost of heating.

[0066] For example, a diameter 4250mm honeycomb zeolite wheel desorption needs 8000NCMH air volume, the cooling zone outlet temperature is 150℃, needs to be heated to 220℃, the electricity price is based on NTD 3.5 yuan / kW-hr, the continuous 24 hours heating desorption power consumption is calculated as 209kW*24hr=5,020kW-hr, and then the annual operation electricity fee is calculated as 5020*360*3.5=6,325,200 yuan / year. And the intermittent heating desorption honeycomb zeolite wheel is designed by the unique design of the utility model, and the intermittent heating desorption can be used for 12 hours after one hour, and one day is 24 hours, that is, it is not necessary to continuously heat and desorb for 24 hours, and the same is a diameter 4250mm honeycomb zeolite wheel desorption needs 8000NCMH air volume, the cooling zone outlet temperature is 150℃, needs to be heated to 220℃, the electricity price is based on NTD 3.5 yuan / kW-hr, the heating desorption power consumption within 24 hours is calculated as 209kW*(1 / 12)*24hr=418kW-hr, and then the annual operation electricity fee is calculated as 418*360*3.5=526,680 yuan / year, and the power consumption difference is very large, wherein the annual operation electricity fee difference is NTD 5,798,520, and obviously, the utility model has economic benefits in the annual operation cost difference.

[0067] Therefore, the utility model mainly is through a outside air (Outside Air) 1, a zeolite wheel adsorption equipment 2, a outside air conditioning box (MAU) 3 and a clean room 4 combination design (such as Figure 1 And Figure 2 As shown), and the zeolite wheel adsorption equipment 2 is provided with a zeolite wheel 10, so that the outside air (Outside Air) 1 can first pass through the zeolite wheel 10 of the zeolite wheel adsorption equipment 2 to filter out the micro-pollutants of the outside air (Outside Air), and then is sent into the outside air conditioning box (MAU) 3, and is sent to the clean room 4 through the outside air conditioning box (MAU) 3, so that the micro-pollutants entering the clean room 4 can be greatly reduced, the filtering burden of the chemical filter screen in the clean room 4 can be reduced, the service life of the chemical filter screen in the clean room 4 can be increased, and the overall practicability is increased.

[0068] Through the above detailed description, the person skilled in the art can understand that the utility model can achieve the above-mentioned purposes, and the utility model has met the requirements of the patent law, and therefore the patent application is proposed.

[0069] The above is only a preferred embodiment of the utility model, and cannot limit the scope of the utility model embodiment, therefore, all simple equivalent changes and modifications made according to the utility model claims and the utility model specification content should still belong to the scope covered by the utility model.

Claims

1. An adsorption and filtration device for removing micro-pollutants from external air, characterized in that, include: An external gas, which contains at least one or more gases or combinations thereof; A zeolite rotor adsorption device includes a zeolite rotor, a heater, an inlet pipe, a purified gas delivery pipe, a cooling gas inlet pipe, a cooling gas delivery pipe, a hot gas delivery pipe, and a desorption gas outlet pipe. The zeolite rotor has an adsorption zone, a cooling zone, and a desorption zone. One end of the inlet pipe supplies external gas, and the other end is connected to one side of the adsorption zone of the zeolite rotor. One end of the purified gas delivery pipe is connected to the adsorption zone of the zeolite rotor. On the other side, one end of the cooling gas inlet pipe is connected to one side of the cooling zone of the zeolite rotor, one end of the cooling gas delivery pipe is connected to the other side of the cooling zone of the zeolite rotor, the other end of the cooling gas delivery pipe is connected to one end of the heater, one end of the hot gas delivery pipe is connected to the other side of the desorption zone of the zeolite rotor, the other end of the hot gas delivery pipe is connected to the other end of the heater, and one end of the desorption gas outlet pipe is connected to one side of the desorption zone of the zeolite rotor. An outdoor air conditioning unit, having an inlet and an outlet, wherein the inlet of the outdoor air conditioning unit is connected to the other end of the clean air delivery pipeline of the zeolite rotary adsorption equipment; and A cleanroom is connected to the outlet of the external air conditioning unit.

2. The external air micro-pollution adsorption and filtration device according to claim 1, characterized in that, The zeolite rotor is further configured to operate either continuously or at set times.

3. The external air micro-pollution adsorption and filtration device according to claim 1, characterized in that, The desorption zone of the zeolite rotor is further configured as either continuous desorption or timed desorption.

4. The external air micro-pollution adsorption and filtration device according to claim 1, characterized in that, The external air conditioning unit is further provided with a housing, which contains a first filter device, a first temperature device, a water washing device, a second temperature device, and a second filter device.

5. The external air micro-pollution adsorption and filtration device according to claim 4, characterized in that, The first temperature device is further comprising any or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

6. The external air micro-pollution adsorption and filtration device according to claim 4, characterized in that, The second temperature device is further comprising any or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

7. The external air micro-pollution adsorption and filtration device according to claim 4, characterized in that, A fan is further installed inside the box.

8. The external air micro-pollution adsorption and filtration device according to claim 1, characterized in that, The heater is further classified as any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger.

9. The external air micro-pollution adsorption and filtration device according to claim 1, characterized in that, The zeolite rotor is further equipped with a blower in its air intake pipe.

10. The external air micro-pollution adsorption and filtration device according to claim 1, characterized in that, The intake pipe is further provided with an intake connecting pipe, which is connected to the cooling air intake pipe. The intake connecting pipe is further provided with an intake connecting control valve to control the air volume of the intake connecting pipe.

11. The external air micro-pollution adsorption and filtration device according to claim 1, characterized in that, The other end of the desorbed concentrated gas pipeline leads further to the outside gas.

12. The external air micro-pollution adsorption and filtration device according to claim 1, characterized in that, The desorption and concentration gas pipeline is further equipped with a blower.

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