Silane cracking gradient temperature control fluidized bed reaction chamber

Abstract

The utility model discloses a silane cracking gradient temperature control fluidized bed reaction cavity, which relates to the technical field of fluidized bed reactors and comprises a base, a fluidized bed reactor is arranged at the top of the base, a containing groove is formed in the bottom of the base, a mounting plate is fixedly connected in the containing groove, and two mounting rods are rotatably connected in the containing groove. And connecting plates are fixedly connected to the outer sides of the two mounting rods, moving wheels are fixedly connected to the bottoms of the connecting plates, through grooves are formed in the tops of the mounting plates at equal intervals, and adjusting assemblies are arranged in the containing grooves. According to the silane cracking gradient temperature control fluidized bed reaction cavity disclosed by the utility model, the adjusting assembly can push out the moving wheels for use when needed, an operator can quickly move or carry equipment, and the moving wheels can be stored when not needed, so that the abrasion to the wheels and other parts is reduced, and the service life of the equipment is prolonged. And the service life of equipment is prolonged. Meanwhile, the base is used for providing stable support for the fluidized bed reactor.

Description

TECHNICAL FIELD

[0001] The utility model relates to fluidized bed reactor technical field especially relates to a silane cleavage gradient temperature control fluidized bed reaction cavity. BACKGROUND

[0002] The silane cleavage gradient temperature control fluidized bed reaction cavity is a special equipment for silane chemical reaction, and is usually used for manufacturing silicon materials in the fields of semiconductors and solar cells.

[0003] The reaction cavity utilizes the cleavage reaction of silane (such as trichlorosilane or dichlorosilane) at high temperature to decompose silane into solid silicon and other by-products. This process can be optimized by adjusting the temperature to achieve higher silicon deposition efficiency and quality

[0004] The reaction cavity is equipped with a gradient temperature control system, which can set different temperatures in different reaction areas. This design can effectively control the heat distribution of the reaction, avoid local overheating or overcooling, and is beneficial to improve the reaction uniformity and thus improve the quality of the final product.

[0005] The patent document with the application number CN105170037B discloses a fluidized bed reactor, which comprises a reactor body (1) and a fluid distributor (2). The reactor body (1) comprises a reaction section (4) with a plurality of fluid distribution holes (3) formed at the bottom. The fluid distributor (2) comprises a delivery pipeline connected to each fluid distribution hole (3) to deliver fluid material into the reaction section (4) through the delivery pipeline. The fluidized bed reactor has the advantage of corrosion resistance of the fluid distributor.

[0006] Many conventional fluidized bed reactors have a fixed base design at the bottom, which limits the mobility of the entire device. This makes it necessary to use additional equipment support for handling and moving when the production line layout needs to be changed or the device needs to be maintained, increasing the complexity of operation. To solve the above problems, we propose a silane cleavage gradient temperature control fluidized bed reaction cavity. UTILITY MODEL CONTENT

[0007] The utility model discloses a silane cleavage gradient temperature control fluidized bed reaction cavity, and researches and improves the above -mentioned existing structure and the loss, provides a silane cleavage gradient temperature control fluidized bed reaction cavity to reach the better practical value's purpose.

[0008] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0009] The utility model provides a silane cracking gradient temperature control fluidized bed reaction cavity, including the base, the top of base is provided with fluidized bed reactor, the bottom of base is opened with the containing groove, the inside fixed connection of containing groove has the mounting panel, the inside rotationally connected of containing groove has two installation rod, the outside fixed connection of two installation rod all has the connecting plate, the bottom fixed connection of connecting plate has the moving wheel, the top equidistance of mounting panel is opened with the tunnel, the inside of containing groove is provided with adjusting assembly, adjusting assembly is used to drive installation rod rotation.

[0010] In a preferred scheme, the adjusting assembly includes a drive motor, the drive motor is arranged on the top of the mounting plate, one end of the output shaft of the drive motor is fixedly connected with a first gear, the top of the inner wall of the containing groove is fixedly connected with a fixed plate, one side of the fixed plate is rotatably connected with a connecting rod, the outer side of the connecting rod is fixedly connected with a second gear, and the first gear is engaged with the second gear.

[0011] In a preferred scheme, the outer side of the drive motor output shaft and the outer side of one of the installation rods are fixedly connected with a first sprocket, and the outer side of the first sprocket is provided with a first chain.

[0012] In a preferred scheme, the outer side of the connecting rod and the outer side of the other installation rod are fixedly connected with a second sprocket, and the outer side of the second sprocket is provided with a second chain.

[0013] In a preferred scheme, one side of the connecting plate is fixedly connected with a movable rod, the outer side of the movable rod is rotatably connected with a supporting link, the inside of the movable rod is provided with a movable slot, and the inside of the movable slot is slidably connected with the outer side of the supporting link.

[0014] In a preferred scheme, the top of the mounting plate is fixedly connected with a resisting plate, and one side of the resisting plate is in abutment with one side of the connecting plate.

[0015] In a preferred scheme, the drive motor is electrically connected with an external controller.

[0016] The silane cracking gradient temperature control fluidized bed reaction cavity has the following advantages:

[0017] Firstly, when needed, the adjusting assembly can push the moving wheel out for use, improving the convenient mobility of the fluidized bed reactor, making the maintenance and maintenance of the equipment more efficient, the operator can quickly check and repair the equipment, reducing the downtime, and when not needed, it can be stored, reducing the wear of the wheels and other parts, prolonging the service life of the equipment, and at the same time ensuring that the base can provide stable support for the fluidized bed reactor.

[0018] Secondly, when the installation rod rotates, the position of the movable rod changes, the supporting connecting rod is limited by the sliding rod, and the position also changes, the arrangement of the supporting connecting rod can ensure the synchronous movement of the two groups of installation rods, guarantee the overall coordination of the system, can also provide certain supporting force for the connecting plate, and the stability of the connecting plate is enhanced. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 A three-dimensional schematic view of a silane cracking gradient temperature control fluidized bed reaction cavity is provided for the utility model.

[0020] Figure 2 A sectional view schematic view of a silane cracking gradient temperature control fluidized bed reaction cavity is provided for the utility model.

[0021] Figure 3 A first explosion schematic view of a silane cracking gradient temperature control fluidized bed reaction cavity is provided for the utility model.

[0022] Figure 4 A second explosion schematic view of a silane cracking gradient temperature control fluidized bed reaction cavity is provided for the utility model.

[0023] Figure 5 A third explosion schematic view of a silane cracking gradient temperature control fluidized bed reaction cavity is provided for the utility model.

[0024] In the drawings: 1, base; 2, fluidized bed reactor; 3, container groove; 4, mounting plate; 5, mounting rod; 6, connecting plate; 7, moving wheel; 8, through groove; 9, resisting plate; 10, driving motor; 11, first gear; 12, fixed plate; 13, connecting rod; 14, second gear; 15, first sprocket; 16, first chain; 17, second sprocket; 18, second chain; 19, movable rod; 20, supporting connecting rod; 21, sliding rod; 22, movable groove. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application. The components of the embodiments of the application described and indicated in the drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the application provided in the drawings is not intended to limit the scope of the claimed application, but only represents selected embodiments of the application. Based on the embodiments of the application, all other embodiments obtained by those skilled in the art without creative work belong to the scope of protection of the application.

[0026] The silane cracking gradient temperature control fluidized bed reaction cavity disclosed by the utility model is mainly applied to the scene of a fluidized bed reactor.

[0027] Referring to Figures 1 to 5 A silane cracking gradient temperature control fluidized bed reaction cavity, comprising: a base 1, the top of the base 1 is provided with a fluidized bed reactor 2, the bottom of the base 1 is provided with a containing groove 3, the inside of the containing groove 3 is fixedly connected with a mounting plate 4, the inside of the containing groove 3 is rotatably connected with two mounting rods 5, the outside of the two mounting rods 5 is fixedly connected with a connecting plate 6, the bottom of the connecting plate 6 is fixedly connected with a moving wheel 7, the top of the mounting plate 4 is provided with a through groove 8 at equal intervals, the inside of the containing groove 3 is provided with an adjusting assembly, and the adjusting assembly is used to drive the mounting rod 5 to rotate;

[0028] The adjusting assembly comprises a driving motor 10, the driving motor 10 is arranged on the top of the mounting plate 4, one end of the output shaft of the driving motor 10 is fixedly connected with a first gear 11, the top of the inner wall of the containing groove 3 is fixedly connected with a fixed plate 12, one side of the fixed plate 12 is rotatably connected with a connecting rod 13, the outside of the connecting rod 13 is fixedly connected with a second gear 14, and the first gear 11 is engaged with the second gear 14.

[0029] The outside of the output shaft of the driving motor 10 and the outside of one of the mounting rods 5 are fixedly connected with a first chain wheel 15, and the outside of the first chain wheel 15 is provided with a first chain 16.

[0030] The outside of the connecting rod 13 and the outside of the other mounting rod 5 are fixedly connected with a second chain wheel 17, and the outside of the second chain wheel 17 is provided with a second chain 18.

[0031] In the above technical scheme, considering that many traditional fluidized bed reactors adopt fixed base design at the bottom, the mobility of the whole device is limited. This makes it necessary to use additional equipment support for carrying and moving when the production line layout needs to be changed or the device needs to be maintained, increasing the complexity of operation. In order to solve such problems, the specific operation is as follows: by setting the adjusting assembly, when the fluidized bed reactor 2 needs to be moved, the driving motor 10 is started, and the transmission action of the first sprocket 15 and the first chain 16 can drive one group of mounting rods 5 to rotate and drive the first gear 11 to rotate, and the meshing relationship between the first gear 11 and the second gear 14 can drive the second gear 14 and the connecting rod 13 to rotate, and then the transmission action of the second sprocket 17 and the second chain 18 can further drive the other group of mounting rods 5 to rotate in the opposite direction, and then the connecting plate 6 rotates in the opposite direction, so that the moving wheel 7 can rotate out of the through slot 8, and finally the base 1 is supported to move the fluidized bed reactor 2, and when it is moved to the specified position, the driving motor 10 is started again. Reverse rotation, and then through the first gear 11, the second gear 14, the first sprocket 15, the first chain 16, the second sprocket 17 and the second chain 18, the two groups of mounting rods 5 are reset, and the connecting plate 6 is rotated in the opposite direction, and the moving wheel 7 is slowly collected into the containing groove 3 from the through slot 8, and the base 1 supports the fluidized bed reactor 2. When needed, the adjusting assembly can push the moving wheel 7 out for use, improve the convenient mobility of the fluidized bed reactor 2, make the maintenance and maintenance of the equipment more efficient, and the operator can quickly check and repair the equipment, reduce the downtime, and when not needed, it can be collected to reduce the wear of the wheels and other parts, prolong the service life of the equipment, and at the same time ensure that the base 1 can provide stable support for the fluidized bed reactor 2.

[0032] Referring to Figures 1 to 5 In a preferred embodiment, one side of the connecting plate 6 is fixedly connected with a movable rod 19, the outer side of the movable rod 19 is rotatably connected with a supporting connecting rod 20, the inside of the containing groove 3 is fixedly connected with a sliding rod 21, the inside of the movable rod 19 is provided with a movable slot 22, and the inside of the movable slot 22 is slidably connected with the outer side of the supporting connecting rod 20; when the mounting rod 5 rotates, the position of the movable rod 19 changes, the supporting connecting rod 20 is limited by the sliding rod 21, and the position of the supporting connecting rod 20 also changes. The arrangement of the supporting connecting rod 20 can ensure the synchronous movement of the two groups of mounting rods 5, guarantee the overall coordination of the system, and also provide a certain supporting force for the connecting plate 6, enhancing the stability of the connecting plate 6.

[0033] Referring to Figures 1 to 5In a preferred embodiment, the top of the mounting plate 4 is fixedly connected with a resisting plate 9, one side of the resisting plate 9 abutting against one side of the connecting plate 6; by arranging the resisting plate 9, the connecting plate 6 can be limited to avoid rotating beyond the vertical state, thereby increasing the supporting burden of the connecting plate 6.

[0034] With reference to Figures 1 to 5 In a preferred embodiment, the driving motor 10 is electrically connected with an external controller.

[0035] Working principle: in use, by arranging the adjusting assembly, when the fluidized bed reactor 2 needs to be moved, the driving motor 10 is started, at the same time, the transmission of the first sprocket 15 and the first chain 16 can drive one set of mounting rods 5 to rotate, and drive the first gear 11 to rotate, by the meshing relationship between the first gear 11 and the second gear 14, the second gear 14 and the connecting rod 13 are driven to rotate, then the transmission of the second sprocket 17 and the second chain 18 further drives the other set of mounting rods 5 to rotate reversely, then the two sets of connecting plates 6 reversely rotate, the moving wheel 7 can rotate out of the through slot 8, the connecting plate 6 abuts against the resisting plate 9, and finally the base 1 is supported, thereby the fluidized bed reactor 2 is moved by the moving wheel 7, when it is moved to the designated position, the driving motor 10 is started reversely again, and then the first gear 11, the second gear 14, the first sprocket 15, the first chain 16, the second sprocket 17 and the second chain 18 are used to reset the two sets of mounting rods 5, and the connecting plate 6 reversely rotates, the moving wheel 7 is slowly collected into the containing groove 3 from the through slot 8, and the fluidized bed reactor 2 is supported by the base 1, the contents not described in detail in the specification all belong to the prior art known by the professional technical personnel.

[0036] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. The substitution can be the substitution of part of the structure, device, method step, or the complete technical scheme. According to the technical scheme of the present application and the inventive concept, equivalent substitution or change should be covered in the protection scope of the present application.

Claims

1. A silane pyrolysis gradient temperature controlled fluidized bed reactor cavity comprising a base (1) characterized in that, The top of the base (1) is provided with a fluidized bed reactor (2), the bottom of the base (1) is provided with a containing groove (3), the inside of the containing groove (3) is fixedly connected with a mounting plate (4), the inside of the containing groove (3) is rotatably connected with two mounting rods (5), the outer sides of the two mounting rods (5) are fixedly connected with connecting plates (6), the bottoms of the connecting plates (6) are fixedly connected with moving wheels (7), the top of the mounting plate (4) is provided with equidistantly arranged through grooves (8), and the inside of the containing groove (3) is provided with an adjusting assembly.

2. A fluidized bed reactor chamber with silane decomposition temperature gradient according to claim 1, characterized in that, The adjusting assembly comprises a driving motor (10), the driving motor (10) is arranged on the top of the mounting plate (4), one end of the output shaft of the driving motor (10) is fixedly connected with a first gear (11), the top of the inner wall of the containing groove (3) is fixedly connected with a fixed plate (12), one side of the fixed plate (12) is rotatably connected with a connecting rod (13), the outer side of the connecting rod (13) is fixedly connected with a second gear (14), and the first gear (11) is engaged with the second gear (14).

3. A temperature controlled fluidized bed reactor chamber for silane pyrolysis according to claim 2, wherein, The outer side of the output shaft of the driving motor (10) and the outer side of one of the mounting rods (5) are fixedly connected with first chain wheels (15), and the outer side of the first chain wheel (15) is provided with a first chain (16).

4. The temperature-controlled fluidized bed reactor chamber of claim 3, wherein the temperature gradient is a linear temperature gradient. The outer side of the connecting rod (13) and the outer side of the other mounting rod (5) are fixedly connected with second chain wheels (17), and the outer side of the second chain wheel (17) is provided with a second chain (18).

5. The temperature-controlled fluidized bed reactor chamber of claim 1, wherein, One side of the connecting plate (6) is fixedly connected with a movable rod (19), the outer side of the movable rod (19) is rotatably connected with a supporting connecting rod (20), the inside of the containing groove (3) is fixedly connected with a sliding rod (21), the inside of the movable rod (19) is provided with a movable groove (22), and the inside of the movable groove (22) is slidably connected with the outer side of the supporting connecting rod (20).

6. The temperature-controlled fluidized bed reactor chamber of claim 1, wherein, The top of the mounting plate (4) is fixedly connected with a resisting plate (9), and one side of the resisting plate (9) abuts against one side of the connecting plate (6).

7. The temperature-controlled fluidized bed reactor chamber of claim 4, wherein the temperature gradient is a linear temperature gradient. The driving motor (10) is electrically connected with an external controller. The driving motor (10) is electrically connected with an external controller.

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