Tool for installing and adjusting concentricity of XY lead screws for WS unit of photoetching machine

Abstract

The utility model discloses a photoetching machine WS unit installation adjusting XY lead screw concentricity tool which comprises an installation plate, first connecting holes are formed in the upper portion of the installation plate, the first connecting holes are symmetrically arranged, a first installation frame is arranged at one end of the installation plate, a second connecting hole and a third connecting hole are formed in the first installation frame, and the second connecting hole and the third connecting hole are symmetrically arranged. A first clamping groove is formed in the inner side of the first mounting frame, and a first dial indicator is arranged in the first clamping groove. According to the tool, the mounting plate is mounted on the WS unit of the photoetching machine, the WS unit is moved to enable the contact to move on the lead screw, the dial indicator has reading numbers in the XY direction and record data, one end of the lead screw is adjusted to enable the reading numbers of XY of the dial indicator to be within 10 microns, after the tool is used, the problem of mounting depending on personal experience in the concentricity mounting process of the WS lead screw of the Nikon photoetching machine is solved, and the concentricity of the WS lead screw of the Nikon photoetching machine is ensured. The concentricity precision of the adjusting lead screw is visualized, meanwhile, the equipment precision is improved, and the product technology can be better improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a tool detection tool technical field of screw rod concentricity tool, more specifically to a photoetching machine WS unit installation adjustment XY screw rod concentricity tool. BACKGROUND

[0002] Semiconductor chip (also known as integrated circuit, Integrated Circuit, IC) production mainly divides into IC design, IC manufacturing, IC three major links of encapsulation and measurement. IC design mainly carries out logic design and rule formulation according to the design purpose of chip, and according to the design drawing, mask is made for subsequent photolithography step. IC manufacturing realizes that chip circuit diagram is transferred to silicon wafer from mask, and target chip function is realized, including chemical mechanical grinding, thin film deposition, photolithography, etching, ion implantation etc. IC encapsulation and measurement complete the package and performance, function test of chip, and it is the last process before product delivery.

[0003] The existing WS unit installation adjustment XY screw rod concentricity is installed by personal experience, the screw rod concentricity cannot be guaranteed, the precision is influenced, and the product process is reduced. Therefore, a new technical scheme needs to be provided to solve it. UTILITY MODEL CONTENT

[0004] The utility model discloses a photoetching machine WS unit installation adjustment XY screw rod concentricity tool, solve the existing WS unit installation adjustment XY screw rod concentricity, install by personal experience, the screw rod concentricity cannot be guaranteed, the precision is influenced, and the product process is reduced.

[0005] To realize the above-mentioned purpose, the utility model provides the following technical scheme: a photoetching machine WS unit installation adjustment XY screw rod concentricity tool, including: mounting plate, the upper portion of mounting plate is provided with first connecting hole and first connecting hole is symmetrically arranged, one end of mounting plate is provided with first mounting frame, and the inside of first mounting frame is provided with second connecting hole and third connecting hole, the inside of first mounting frame is provided with first clamping groove, and the inside of first clamping groove is provided with first dial gauge, the side of mounting plate is provided with second mounting frame, and the inside of second mounting frame is provided with fourth connecting hole, second mounting frame is fixedly connected between first mounting frame through bolt and penetrates third connecting hole and fourth connecting hole, the inside of second mounting frame is provided with second clamping groove, and the inside of second clamping groove is provided with second dial gauge, first dial gauge and second dial gauge structure are same and all are provided with connecting column in lower part, connecting column and first clamping groove and second clamping groove are mutually inlaid, the inside of connecting column is provided with adjusting rod, and the lower part of adjusting rod is provided with contact, and the contact and XY screw rod are mutually contacted.

[0006] As a preferred embodiment of the utility model, the first mounting frame and the second mounting frame are both provided in L-shaped structure.

[0007] As a preferred embodiment of the utility model, the first mounting frame is fixedly connected with the mounting plate through the second connecting hole and the first connecting hole penetrated by the bolt.

[0008] As a preferred embodiment of the utility model, the mounting plate is internally provided with two groups of mounting holes arranged in parallel.

[0009] As a preferred embodiment of the utility model, the first clamping groove and the second clamping groove are both internally provided with a penetrating fixing hole.

[0010] As a preferred embodiment of the utility model, the side surface of the first dial gauge and the second dial gauge is provided with an adjusting knob connected with the adjusting rod.

[0011] Compared with the prior art, the utility model has the beneficial effects as follows:

[0012] The utility model discloses a mounting plate, first mounting frame, second mounting frame, first clamping groove, second clamping groove, first dial gauge, second dial gauge, adjusting knob and adjusting rod. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is the whole structure schematic diagram of the utility model;

[0014] Figure 2 It is the front view structure schematic diagram of the utility model;

[0015] Figure 3 It is the second mounting rack structure schematic view of the utility model;

[0016] Figure 4 It is the first mounting rack structure schematic view of the utility model.

[0017] In the drawing: 1, mounting plate;2, first connecting hole;3, first mounting rack;4, first clamping groove;5, first dial gauge;6, adjusting knob;7, connecting column;8, adjusting rod;9, contact;10, second clamping groove;11, second dial gauge;12, second mounting rack;13, mounting hole;14, fourth connecting hole;15, fixed hole;16, second connecting hole;17, third connecting hole. Specific embodiments

[0018] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0019] Please refer to Figures 1-4The utility model provides a technical scheme: a photoetching machine WS unit installation adjustment XY screw rod concentricity tool, include: mounting plate 1, the upper portion of mounting plate 1 is provided with first connecting hole 2 and first connecting hole 2 is symmetrically arranged, one end of mounting plate 1 is provided with first mounting frame 3 and the inside of first mounting frame 3 is provided with second connecting hole 16 and third connecting hole 17, the inside of first mounting frame 3 is provided with first clamping groove 4 and the inside of first clamping groove 4 is provided with first dial gauge 5, the side of mounting plate 1 is provided with second mounting frame 12 and the inside of second mounting frame 12 is provided with fourth connecting hole 14, second mounting frame 12 is fixedly connected between first mounting frame 3 through bolt penetration third connecting hole 17 and fourth connecting hole 14, the inside of second mounting frame 12 is provided with second clamping groove 10 and the inside of second clamping groove 10 is provided with second dial gauge 11, first dial gauge 5 and second dial gauge 11 are same in structure and are provided with connecting column 7 in lower portion, connecting column 7 and first clamping groove 4 and second clamping groove 10 are mutually inlayed, the inside of connecting column 7 is provided with adjusting rod 8 and the lower portion of adjusting rod 8 is provided with contact 9, contact 9 and XY screw rod are mutually contacted, the upper portion of mounting plate 1 is provided with first connecting hole 2 and first connecting hole 2 is symmetrically arranged, one end of mounting plate 1 is provided with first mounting frame 3 and the inside of first mounting frame 3 is provided with second connecting hole 16 and third connecting hole 17, the inside of first mounting frame 3 is provided with first clamping groove 4 and the inside of first clamping groove 4 is provided with first dial gauge 5, the side of mounting plate 1 is provided with second mounting frame 12 and the inside of second mounting frame 12 is provided with fourth connecting hole 14, second mounting frame 12 is fixedly connected between first mounting frame 3 through bolt penetration third connecting hole 17 and fourth connecting hole 14, the inside of second mounting frame 12 is provided with second clamping groove 10 and the inside of second clamping groove 10 is provided with second dial gauge 11, first dial gauge 5 and second dial gauge 11 are same in structure and are provided with connecting column 7 in lower portion, connecting column 7 and first clamping groove 4 and second clamping groove 10 are mutually inlayed, the inside of connecting column 7 is provided with adjusting rod 8 and the lower portion of adjusting rod 8 is provided with contact 9, contact 9 and XY screw rod are mutually contacted, install mounting plate 1 on the WS unit of photoetching machine, move WS unit, make contact 9 in screw rod movement, the reading of dial gauge has XY direction, record data, adjust the reading of dial gauge in XY in 10um, after using the tool, solve the problem of installation in the Nikon photoetching machine WS screw rod concentricity installation process, the adjusting screw rod concentricity precision visualization can improve equipment precision, can improve product technology better.

[0020] Further improved, such as Figure 1As shown: the first mounting bracket 3 and the second mounting bracket 12 are both arranged in L-shaped structure, the design of L-shaped structure makes the mounting bracket more stable, can provide better supporting force, ensures the stability and accuracy of the dial gauge in the measurement process.

[0021] Further improved, as shown in Figure 1 , 4 As shown: the first mounting bracket 3 is fixedly connected between the second connecting hole 16 and the first connecting hole 2 and the mounting plate 1 through bolts, the bolt fixed connection makes the connection between the mounting bracket and the mounting plate 1 more firm and reliable, avoids the measurement error caused by loose connection.

[0022] Further improved, as shown in Figure 1 , 2 As shown: the inside of the mounting plate 1 is provided with two groups of parallel arranged mounting holes 13, the two groups of parallel arranged mounting holes 13 provide more installation options and flexibility for tools, and the appropriate installation position can be selected according to the actual needs.

[0023] Further improved, as shown in Figure 3 , 4 As shown: the inside of the first clamping groove 4 and the second clamping groove 10 is provided with a through fixing hole 15, the through fixing hole 15 provides a more stable fixing way for the connecting column 7 of the dial gauge, ensures the stability and accuracy of the dial gauge in the measurement process.

[0024] Further improved, as shown in Figure 1 As shown: the side of the first dial gauge 5 and the second dial gauge 11 is provided with an adjusting knob 6, and the adjusting knob 6 is connected with the adjusting rod 8, through the connection of the adjusting knob 6 and the adjusting rod 8, the user can accurately adjust the contact force and position between the contact 9 and the XY screw rod, so as to improve the accuracy and precision of the measurement.

[0025] Working principle: the utility model discloses a first connecting hole 2 is arranged on the upper portion of mounting plate 1 and the first connecting hole 2 is symmetrically arranged, a first mounting frame 3 is arranged on one end of mounting plate 1 and the inside of first mounting frame 3 is provided with second connecting hole 16 and third connecting hole 17, a first clamping groove 4 is arranged on the inner side of first mounting frame 3 and the inside of first clamping groove 4 is provided with first dial gauge 5, a second mounting frame 12 is arranged on the side of mounting plate 1 and the inside of second mounting frame 12 is provided with fourth connecting hole 14, second mounting frame 12 is fixedly connected between first mounting frame 3 through bolt penetration third connecting hole 17 and fourth connecting hole 14, a second clamping groove 10 is arranged in the inside of second mounting frame 12 and the inside of second clamping groove 10 is provided with second dial gauge 11, first dial gauge 5 and second dial gauge 11 are same in structure and are all provided with connecting column 7 at lower portion, connecting column 7 is mutually fitted between first clamping groove 4 and second clamping groove 10, adjusting rod 8 is arranged in the inside of connecting column 7 and the lower portion of adjusting rod 8 is provided with contact 9, contact 9 and XY lead screw are mutually contacted, mounting plate 1 is installed on the WS unit of photoetching machine, WS unit is moved, contact 9 is moved in lead screw, the reading of dial gauge in XY direction is recorded, data is adjusted, the reading of dial gauge in XY is made within 10um, after using the tool, the problem of installation by personal experience in the process of Nikon photoetching machine WS lead screw concentricity is solved, the precision of adjusting lead screw concentricity is visualized, the equipment precision is improved, and product technology can be better improved.

[0026] The above shows and describes the basic principles and main features of the present application and the advantages of the present application, and it is obvious for those skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be considered as limiting the claims involved.

[0027] Finally, it should be noted that: first, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connection" and "connection" should be understood broadly, which can be mechanical connection or electrical connection, or the communication between two elements, or direct connection, "up", "down", "left", "right" and the like are only used to represent the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may change.

[0028] Finally, it should be noted that the above only describes the preferred embodiments of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art will appreciate that the technical solutions described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalent ones. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A lithography machine WS unit installation adjustment XY-screw concentricity tool, characterized by: Include: The mounting plate (1), the upper part of the mounting plate (1) is provided with a first connecting hole (2) and the first connecting hole (2) is symmetrically arranged, one end of the mounting plate (1) is provided with a first mounting frame (3) and the inside of the first mounting frame (3) is provided with a second connecting hole (16) and a third connecting hole (17), the inner side of the first mounting frame (3) is provided with a first clamping groove (4) and the inside of the first clamping groove (4) is provided with a first dial gauge (5), the side of the mounting plate (1) is provided with a second mounting frame (12) and the inside of the second mounting frame (12) is provided with a fourth connecting hole (14), the second mounting frame (12) is fixedly connected between the first mounting frame (3) by penetrating the third connecting hole (17) and the fourth connecting hole (14) through the bolt, the inside of the second mounting frame (12) is provided with a second clamping groove (10) and the inside of the second clamping groove (10) is provided with a second dial gauge (11), the first dial gauge (5) and the second dial gauge (11) are the same structure and are provided with a connecting column (7) at the lower part, the connecting column (7) is embedded between the first clamping groove (4) and the second clamping groove (10), the inside of the connecting column (7) is provided with an adjusting rod (8) and the lower part of the adjusting rod (8) is provided with a contact (9), the contact (9) is in contact with the XY lead screw.

2. The tool for adjusting the concentricity of the XY lead screws of a wafer stage unit of a lithography machine according to claim 1, wherein: The first mounting frame (3) and the second mounting frame (12) are both provided in L-shaped structure.

3. The tool for adjusting the concentricity of the XY lead screws of a wafer stage unit mounting of a lithography machine according to claim 1, wherein: The first mounting frame (3) is fixedly connected between the mounting plate (1) by penetrating the second connecting hole (16) and the first connecting hole (2) through the bolt.

4. The tool for adjusting the concentricity of the XY lead screws of a wafer stage unit mounting of a lithography machine according to claim 1, wherein: The inside of the mounting plate (1) is provided with two groups of mounting holes (13) which are arranged in parallel.

5. The tool for adjusting the concentricity of the XY lead screws of a wafer stage unit mounting of a lithography machine according to claim 1, wherein: The inside of the first clamping groove (4) and the second clamping groove (10) is provided with a penetrating fixing hole (15).

6. The tool for adjusting the concentricity of the XY lead screws of a wafer stage unit mounting of a lithography machine according to claim 1, wherein: The side of the first dial gauge (5) and the second dial gauge (11) is provided with an adjusting knob (6) and the adjusting knob (6) is connected with the adjusting rod (8).

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