Outer air tool double-rotating-wheel purification equipment of dust-free room

Abstract

The utility model provides an outer air tool double-rotating-wheel purification device of a clean room, which mainly adopts the combined design of an outer air tool, a zeolite rotating wheel adsorption device, an outer air conditioning unit (MAU) and the clean room, and the zeolite rotating wheel adsorption device is provided with a first zeolite rotating wheel and a second zeolite rotating wheel. The zeolite rotating wheel adsorption equipment is arranged in the dust-free room, so that external air can firstly pass through the first zeolite rotating wheel and the second zeolite rotating wheel of the zeolite rotating wheel adsorption equipment to filter out micro-pollutants of the external air, then the external air is fed into the external air conditioning unit (MAU) and is fed into the dust-free room for use through the external air conditioning unit (MAU), and therefore, the efficiency of greatly reducing the micro-pollutants entering the dust-free room is achieved, and the dust-free room can be used in the dust-free room. And the filtering burden of the chemical filter screen in the dust-free room can be reduced, and the service life of the chemical filter screen in the dust-free room is prolonged.

Description

Technical Field

[0001] This utility model relates to the technical field of a dual-rotor purification device for external air in a cleanroom, and more particularly to a device that significantly reduces the amount of micro-polluting substances entering the cleanroom, reduces the filtration burden on the chemical filter in the cleanroom, and increases the service life of the chemical filter. It is applicable to places or factories in the semiconductor, electronics, biotechnology, food processing, and precision instrument manufacturing fields. Background Technology

[0002] Wafer manufacturing requires cleanrooms, and with advancements in technology, wire diameters have reached the nanometer level. Therefore, in high-end semiconductor wafer fabrication plants, cleanrooms must not only filter particulate contaminants but also address the concentration of extremely small airborne molecular contaminants (AMCs). AMCs include four types of substances: VOCs (volatile organic compounds), acids, alkalis, and pods. Removal of AMCs is mandatory, requiring the use of chemical filters in cleanrooms. However, the sources of AMCs are quite diverse, making effective control a crucial challenge.

[0003] In addition to the aforementioned gaseous molecular contaminants (AMC), the cleanroom also has another source of micro-contamination: outside air, i.e., the surrounding atmospheric environment. The concentration of volatile organic compounds (VOCs) in outside air is very low, generally less than 1000 ppb, and the total volatile organic compound (TVOC) concentration is also approximately <1000 ppb. This includes gaseous contaminants such as isopropanol, acetone, and toluene. Because the TVOC concentration is low and does not exceed the hazard or acceptable standards set by the WHO or occupational health societies, the risk to human health is relatively small. However, for advanced wafer fabrication processes, it can affect the yield rate of products manufactured in the cleanroom, especially the yield rate of processes below 7 nanometers, such as 3-nanometer or 2-nanometer wafer fabrication processes.

[0004] Therefore, in view of the above-mentioned deficiencies, the applicant hopes to propose a cleanroom external air dual-rotor purification device that can significantly reduce the effectiveness of micro-contaminants entering the cleanroom, and can be easily operated and assembled by users. Thus, the applicant has devoted itself to research, design and assembly in order to provide convenience for users, which is the motivation for the applicant's research and development. Utility Model Content

[0005] The main objective of this invention is to provide a dual-rotor purification device for outside air in a cleanroom. This device primarily utilizes a combination design of outside air, a zeolite rotor adsorption device, an outside air conditioning unit (MAU), and a cleanroom. The zeolite rotor adsorption device comprises a first zeolite rotor and a second zeolite rotor. Outside air is first filtered through the first and second zeolite rotors of the adsorption device to remove micro-pollutants before being sent into the outside air conditioning unit (MAU) and then to the cleanroom. This significantly reduces the amount of micro-pollutants entering the cleanroom, reduces the filtration burden on the cleanroom's chemical filters, increases their lifespan, and ultimately enhances the overall practicality.

[0006] Another objective of this utility model is to provide a dual-rotor purification device for external air in a cleanroom. A first embodiment of this zeolite rotor adsorption device involves a first zeolite rotor controller for the first zeolite rotor, which can be set to either continuous operation or timed operation. Similarly, a second zeolite rotor controller for the second zeolite rotor can also be set to either continuous operation or timed operation. Essentially, the first and second zeolite rotors can be used for adsorption and desorption in a continuous 24-hour operation mode, or they can be used in a timed operation mode. In another embodiment of the zeolite rotor adsorption device, the first zeolite rotor is equipped with a first zeolite rotor desorption zone controller, which is set to either continuous desorption or timed desorption. The second zeolite rotor is equipped with a second zeolite rotor desorption zone controller, which is also set to either continuous desorption or timed desorption. Essentially, the first and second zeolite rotor desorption zones can be used for continuous desorption for 24 hours or for timed desorption. This is particularly relevant when the first and second zeolite rotors... When the rotor is running, it operates at 1 RPH (speed per hour), meaning that it takes one hour for the first and second zeolite rotors to complete one revolution. After desorption by the first and second heaters respectively for one hour, the first and second zeolite rotors can be used for 40.9 hours. With a safety factor of SF=3.4, 40.9 / 3.4=12 hours, meaning desorption only needs to be performed once every 12 hours. Therefore, it has the efficiency of significantly reducing the energy used for desorption and can save on operating electricity costs. This achieves the goal of effective energy saving and economic benefits, thereby increasing the overall operability.

[0007] Another objective of this invention is to provide a dual-rotor purification device for outside air in a cleanroom. By installing the zeolite rotor adsorption device at the upstream end of the outside air conditioning unit (MAU), it can directly filter out micro-pollutants in the outside air. The adsorption and desorption are carried out by the first zeolite rotor and the second zeolite rotor. The first zeolite rotor and the second zeolite rotor are reusable, have no consumables, and have a long service life. Their maintenance costs are low, thus saving time and consumables and increasing overall usability.

[0008] To further understand the features, characteristics, and technical contents of this utility model, please refer to the following detailed description and accompanying drawings. The accompanying drawings are for reference and illustration only and are not intended to limit this utility model. Attached Figure Description

[0009] Figure 1 A schematic diagram of installing a dual-rotor purification device upstream of the outdoor air conditioning unit;

[0010] Figure 2 This is a schematic diagram of a third embodiment of the second desorption gas output pipeline;

[0011] Figure 3 This is a schematic diagram of a fourth embodiment of the second desorption gas output pipeline;

[0012] Figure 4 This is a schematic diagram showing the connection of the first desorbed gas output pipeline to the incineration equipment.

[0013] The annotations in the attached figures are explained as follows:

[0014] 1-Outside Air;

[0015] 2-Zeolite rotor adsorption equipment;

[0016] 3-Outdoor air conditioning unit (MAU);

[0017] 4-Cleanroom;

[0018] 10 - First zeolite rotor;

[0019] 101 - Adsorption region;

[0020] 102 - Cooling Zone;

[0021] 103 - Desorption zone;

[0022] 11-First heater;

[0023] 12-First intake pipe;

[0024] 121-Fan;

[0025] 122 - First intake connecting pipe;

[0026] 1221 - First intake air connection control valve;

[0027] 13-First clean air delivery pipeline;

[0028] 14-First cooling air inlet pipe;

[0029] 15 - First cooling gas delivery pipeline;

[0030] 16-First hot gas delivery pipeline;

[0031] 17-First desorption gas output pipeline;

[0032] 20 - Second zeolite rotor;

[0033] 201 - Adsorption region;

[0034] 202 - Cooling Zone;

[0035] 203 - Desorption zone;

[0036] 21-Second heater;

[0037] 22-Second clean air delivery pipeline;

[0038] 221-Fan;

[0039] 23-Second cooling air inlet pipe;

[0040] 24 - Second cooling gas delivery pipeline;

[0041] 25 - Second hot gas delivery pipeline;

[0042] 26 - Second desorption gas output pipeline;

[0043] 261-Fan;

[0044] 40 - Box;

[0045] 401 - Entrance;

[0046] 402 - Export;

[0047] 41 - First filter screen device;

[0048] 42 - First temperature device;

[0049] 421 - Precooling coil;

[0050] 422 - Preheating coil;

[0051] 423 - Precooler;

[0052] 424 - Preheater;

[0053] 43-Water washing equipment;

[0054] 44 - Second temperature device;

[0055] 441 - Recooling coil;

[0056] 442 - Reheat Coil;

[0057] 443 - Recooler;

[0058] 444 - Reheater;

[0059] 45 - Second filter screen device;

[0060] 46-Fan. Detailed Implementation

[0061] Please refer to Figures 1 to 4, which are schematic diagrams of embodiments of this utility model. The optimal implementation of the dual-rotor purification device for external air in cleanrooms provided by this utility model is applicable to places or factories related to the semiconductor, electronics, biotechnology, food processing, and precision instrument manufacturing fields. It mainly has the effect of significantly reducing the micro-polluting substances entering the cleanroom and can reduce the filtration burden of the chemical filter in the cleanroom, thereby increasing the service life of the chemical filter in the cleanroom.

[0062] The cleanroom external air dual-rotor purification device provided by this utility model is mainly a combination design of an external air (OutsideAir) 1, a zeolite rotor adsorption device 2, an external air conditioning unit (MAU) 3, and a cleanroom 4 (e.g., Figures 1 to 4 As shown), the outside air 1 contains at least one gas or combination thereof, mainly a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities. In addition, the outside air 1 is commonly known as air.

[0063] The zeolite rotor adsorption device 2 is equipped with a first zeolite rotor 10, a first heater 11, a first air inlet pipe 12, a first clean gas delivery pipe 13, a first cooling gas inlet pipe 14, a first cooling gas delivery pipe 15, a first hot gas delivery pipe 16, a first desorbed gas output pipe 17, a second zeolite rotor 20, a second heater 21, a second clean gas delivery pipe 22, a second cooling gas inlet pipe 23, a second cooling gas delivery pipe 24, a second hot gas delivery pipe 25, and a second desorbed gas output pipe 26 (e.g., ...). Figures 1 to 4As shown), the first zeolite rotor 10 is provided with an adsorption zone 101, a cooling zone 102 and a desorption zone 103, and the second zeolite rotor 20 is provided with an adsorption zone 201, a cooling zone 202 and a desorption zone 203, wherein the first zeolite rotor 10 and the second zeolite rotor 20 are concentration rotors made of zeolite.

[0064] One end of the first air inlet pipe 12 allows the outside air 1 to enter, and the other end of the first air inlet pipe 12 is connected to one side of the adsorption zone 101 of the first zeolite rotor 10, so that the first air inlet pipe 12 can deliver the outside air 1 to one side of the adsorption zone 101 of the first zeolite rotor 10. The first air inlet pipe 12 is equipped with a fan 121 (e.g., Figures 1 to 4 As shown), the outside air 1 is pushed and pulled into the adsorption zone 101 of the first zeolite rotor 10. One end of the first purified gas delivery pipe 13 is connected to the other side of the adsorption zone 101 of the first zeolite rotor 10, and the other end of the first purified gas delivery pipe 13 is connected to one side of the adsorption zone 201 of the second zeolite rotor 20, so that the outside air 1 can be adsorbed in the adsorption zone 101 of the first zeolite rotor 10 and then delivered to the adsorption zone 201 of the second zeolite rotor 20 by the first purified gas delivery pipe 13. In addition, the other side of the adsorption zone 201 of the second zeolite rotor 20 is connected to the second purified gas delivery pipe 22, and the second purified gas delivery pipe 22 is equipped with a fan 221, so that the adsorbed gas in the second zeolite rotor 20 can be pushed and pulled into the outside air conditioning unit (MAU) 3 (e.g., Figures 1 to 4 (As shown).

[0065] Furthermore, one end of the first cooling gas inlet pipe 14 is connected to one side of the cooling zone 102 of the first zeolite rotor 10, so that gas can enter the cooling zone 102 of the first zeolite rotor 10 for cooling. One end of the first cooling gas delivery pipe 15 is connected to the other side of the cooling zone 102 of the first zeolite rotor 10, and the other end of the first cooling gas delivery pipe 15 is connected to one end of the first heater 11 (e.g., Figures 1 to 3 As shown), the gas entering the cooling zone 102 of the first zeolite rotor 10 is transported to the first heater 11 for heating. The first heater 11 can be any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gaseous fuel heater, a liquid fuel heater, or a heat exchanger. Furthermore, one end of the first hot gas delivery pipe 16 is connected to the other side of the desorption zone 103 of the first zeolite rotor 10, and the other end of the first hot gas delivery pipe 16 is connected to the other end of the first heater 11 (e.g., ...). Figures 1 to 3As shown, the high-temperature hot gas heated by the first heater 11 can be transported through the first hot gas delivery pipeline 16 to the desorption zone 103 of the first zeolite rotor 10 for desorption.

[0066] The cooling zone 102 of the aforementioned first zeolite rotor 10 has two implementation methods. In the first implementation method, the first cooling air inlet pipe 14 connected to one side of the cooling zone 102 of the first zeolite rotor 10 is for the intake of fresh air (e.g., Figure 2 As shown), the fresh air is used to cool the cooling zone 102 of the first zeolite rotor 10. Alternatively, in a second embodiment, the first air intake pipe 12 is provided with a first air intake connecting pipe 122, and the other end of the first air intake connecting pipe 122 is connected to the first cooling air intake pipe 14 (e.g., ...). Figure 1 As shown), the outside air 1 in the first intake pipe 122 can be delivered to the cooling zone 102 of the first zeolite rotor 10 for cooling through the first intake pipe 122. In addition, the first intake pipe 122 is provided with a first intake control valve 1221 (as shown). Figure 1 As shown), to control the airflow of the first air intake connecting pipe 122.

[0067] Furthermore, one end of the second cooling gas inlet pipe 23 is connected to one side of the cooling zone 202 of the second zeolite rotor 20, so that gas can enter the cooling zone 202 of the second zeolite rotor 20 for cooling. One end of the second cooling gas delivery pipe 24 is connected to the other side of the cooling zone 202 of the second zeolite rotor 20, and the other end of the second cooling gas delivery pipe 24 is connected to one end of the second heater 21 (e.g., Figures 1 to 3 As shown), the gas entering the cooling zone 202 of the second zeolite rotor 20 is transported to the second heater 21 for heating. The second heater 21 can be any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gaseous fuel heater, a liquid fuel heater, or a heat exchanger. Furthermore, one end of the second hot gas delivery pipe 25 is connected to the other side of the desorption zone 203 of the second zeolite rotor 20, and the other end of the second hot gas delivery pipe 25 is connected to the other end of the second heater 21 (e.g., ...). Figures 1 to 3 As shown, the high-temperature hot gas heated by the second heater 21 can be transported through the second hot gas delivery pipeline 25 to the desorption zone 203 of the second zeolite rotor 20 for desorption.

[0068] The cooling zone 202 of the aforementioned second zeolite rotor 20 has two implementation methods. In the first implementation method, the second cooling air inlet pipe 23 connected to one side of the cooling zone 202 of the second zeolite rotor 20 is for the intake of fresh air (e.g., ...). Figure 1 As shown in Figure 2, the fresh air is used to cool the cooling zone 202 of the second zeolite rotor 20. Alternatively, in a second embodiment, the first clean air supply pipe 13 is provided with a first clean air connecting pipe 131, which is connected to the second cooling air inlet pipe 23 (as shown in Figure 2). This allows the gas in the first clean air supply pipe 13 to be transported to the cooling zone 202 of the second zeolite rotor 20 for cooling. Furthermore, the first clean air connecting pipe 131 is provided with a first clean air connecting control valve 1311 (as shown in Figure 2) to control the airflow of the first clean air connecting pipe 131.

[0069] Furthermore, one end of the first desorption gas output pipe 17 is connected to one side of the desorption zone 103 of the first zeolite rotor 10, while the other end of the first desorption gas output pipe 17 has two implementations. The first implementation is that the other end of the first desorption gas output pipe 17 is directly connected to the outside air 1 (e.g., outside air 1). Figures 1 to 3 As shown), the desorbed gas is directly discharged to the outside through the first desorbed gas output pipe 17. Alternatively, in the second embodiment, the other end of the first desorbed gas output pipe 17 is connected to an incineration device 30 (e.g., Figure 4 As shown), the incineration equipment 30 is any one of a direct-fired incinerator (TO) 301, a catalytic incinerator (not shown), or a regenerative thermal oxidizer (RTO) (not shown). The incineration equipment 30 is connected to a chimney 35, allowing the desorbed gas to be transported to the incineration equipment 30 for combustion via the first desorbed gas output pipe 17, and then discharged through the chimney 35. Furthermore, the first desorbed gas output pipe 17 is equipped with a fan 171 (e.g., ...). Figure 2 and Figure 3 As shown), the desorbed gas can be pushed or pulled to the outside to mix with the outside air 1, or the desorbed gas can be pushed or pulled to the incineration device 30 for combustion (e.g. Figure 4 (as shown), and then discharged through the chimney 35.

[0070] Furthermore, when the aforementioned incineration equipment 30 is a direct-fired incinerator (TO) 301, the direct-fired incinerator (TO) 301 is equipped with any one of two, three, or four heat exchangers 31, 32, 33, or 34 (e.g., Figure 4As shown), any one of the two, three, or four heat exchangers 31, 32, 33, or 34 located within the incineration device 30 can replace the first heater 11 and the second heater 21, so that the high-temperature hot gas generated by the incineration device 30 can be transported through the first hot gas delivery pipeline 16 to the desorption zone 103 of the first zeolite rotor 10 for desorption (e.g., Figure 4 (as shown), or it can be transported through the second hot gas conveying pipeline 25 to the desorption zone 203 of the second zeolite rotor 20 for desorption (e.g. Figure 4 (As shown).

[0071] Furthermore, one end of the second desorption gas output pipe 26 is connected to one side of the desorption zone 203 of the second zeolite rotor 20, while the other end of the second desorption gas output pipe 26 has four implementations, the first of which is that the other end of the second desorption gas output pipe 26 is directly connected to the outside air 1 (such as...). Figure 1 As shown), the desorbed gas is directly discharged to the outside through the second desorbed gas output pipe to mix with the outside air 1. In another embodiment, the other end of the second desorbed gas output pipe 26 is connected to an incineration device 30 (not shown in the figure). The incineration device 30 is any one of a direct-fired incinerator (TO) 301, a catalytic incinerator (not shown in the figure), or a regenerative thermal oxidizer (RTO) (not shown in the figure). The incineration device 30 is connected to a chimney 35, so that the desorbed gas is transported to the incineration device 30 through the second desorbed gas output pipe 26 for combustion, and then discharged through the chimney 35. In a third embodiment, the other end of the second desorbed gas output pipe 26 is connected to the first air inlet pipe 12 (e.g., Figure 2 As shown), the desorbed gas is then re-entered into the adsorption zone 101 of the first zeolite rotor 10 via the first inlet pipe 12 for re-adsorption. In the fourth embodiment, the other end of the second desorbed gas outlet pipe 26 is connected to the first cooling gas inlet pipe 14 (as shown). Figure 3 As shown), the desorbed gas can then enter the cooling zone 102 of the first zeolite rotor 10 through the first cooling gas inlet pipe 14 for cooling. Furthermore, the second desorbed gas outlet pipe 26 is equipped with a fan 261 (as shown). Figure 1 and Figure 4 As shown), so that the desorbed gas can be pushed and pulled to the outside to mix with the outside air 1 (as shown). Figure 1(As shown), or the desorbed gas is pushed or pulled into the incineration device 30 for combustion (not shown in the figure), and then discharged through the chimney 35, or the desorbed gas is pushed or pulled into the first cooling gas inlet pipe 14 for cooling (as shown in the figure). Figure 3 and Figure 4 (As shown).

[0072] In addition, the external air conditioning unit (MAU) 3 is provided with an inlet 401 and an outlet 402 (e.g. Figures 1 to 4 As shown), the inlet 401 of the external air conditioning unit (MAU) 3 is connected to the other end of the second clean air delivery pipeline 22 of the zeolite rotor adsorption device 2, and the cleanroom 4 is connected to the outlet 402 of the external air conditioning unit (MAU) 3, so that the outside air 1 can first pass through the first zeolite rotor 10 and the second zeolite rotor 20 of the zeolite rotor adsorption device 2 to filter out the micro-pollutants in the outside air 1, and then be sent into the external air conditioning unit (MAU) 3, and then sent to the cleanroom 4 for use through the external air conditioning unit (MAU) 3.

[0073] The external air conditioning unit (MAU) 3 is provided with a housing 40, which contains a first filter device 41, a first temperature device 42, a water washing device 43, a second temperature device 44, and a second filter device 45 (e.g., Figures 1 to 4 As shown), the external air conditioning unit (MAU) 3 has a fan 46 inside its housing 40. The fan 46 is located before the second filter device 45 and mainly provides airflow to ensure that the gas transported by the second purified gas delivery pipeline 22 of the zeolite rotor adsorption device 2 after adsorption can sequentially pass through the first filter device 41, the first temperature device 42, the water washing device 43, the second temperature device 44, and the second filter device 45, thereby ensuring the efficient operation of the external air conditioning unit (MAU) 3. The at least one first filter device 41 is either a pre-filter or a medium efficiency filter, or a combination thereof. The pre-filter is mostly plate-shaped and suitable for primary filtration, mainly used to filter dust particles larger than 5μm. The materials are primarily non-woven fabric, nylon mesh, activated carbon filter material, and metal mesh. In addition, these medium efficiency filters are mostly bag-shaped and widely used in intermediate filtration. They are mainly used to filter dust particles larger than 1-5μm, and the materials are mainly synthetic fibers and non-woven fabrics.

[0074] Furthermore, the first temperature device 42 is any one or a combination of the precooling coil 421 and the preheating coil 422 (e.g., Figure 2 and Figure 4As shown), the precooling coil 421 is supplied with either cooling water or ice water to effectively reduce the temperature of the adsorbed gas transported via the second purified gas transport pipeline 22 of the zeolite rotor adsorption device 2. The preheating coil 422 is supplied with either hot water or steam to transfer heat energy to the adsorbed gas transported via the second purified gas transport pipeline 22 of the zeolite rotor adsorption device 2, thereby raising its temperature. Furthermore, the first temperature device 42 can also be any one or a combination of the precooler 423 and the preheater 424 (e.g., [example missing]). Figure 1 and Figure 3 As shown), the precooler 423 is any one of a shell-and-tube cooler, a finned tube cooler, or a plate heat exchanger cooler, and the preheater 424 is any one of an electric heater, a gas heater, a thermal oil heater, or a hot water heater.

[0075] In addition, the washing device 43 is a washing humidifier, mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown in the figure). When the gas after adsorption is transported through the second clean gas transport pipeline 22 of the zeolite rotor adsorption device 2 and passes through the washing humidifier, the water molecules will fully absorb the heat in the adsorbed gas and vaporize and evaporate, thereby increasing the humidity of the gas after adsorption transported through the second clean gas transport pipeline 22 of the zeolite rotor adsorption device 2 to form a humid gas.

[0076] Furthermore, the second temperature device 44 is any one or a combination of the recooling coil 441 and the reheating coil 442 (e.g., Figure 2 and Figure 4 As shown), the recooling coil 441 is supplied with either cooling water or ice water to effectively reduce the temperature of the adsorbed gas transported via the second purified gas transport line 22 of the zeolite rotor adsorption device 2. The reheating coil 442 is supplied with either hot water or steam to transfer heat energy to the adsorbed gas transported via the second purified gas transport line 22 of the zeolite rotor adsorption device 2, thereby raising its temperature. Furthermore, the second temperature device 44 can also be any one or a combination of the recooler 443 and the reheater 444 (e.g., ...). Figure 1 and Figure 3 As shown), the recooler 443 is any one of a shell-and-tube cooler, a finned tube cooler, or a plate heat exchanger cooler, and the reheater 444 is any one of an electric heater, a gas heater, a thermal oil heater, or a hot water heater.

[0077] The second filter device 45 is either a High Efficiency Particulate Air Filter (HEPA) or an Ultra Low Penetration Air Filter (ULPA), or a combination thereof. The HEPA filter is suitable for end-point filtration, achieving an efficiency of 99.998% for particles of 0.1 microns and 0.3 microns, and a removal efficiency of over 99.7% for particles larger than 0.3 microns in diameter (1 / 200th the diameter of a human hair). It is the most effective filtration medium for pollutants such as smoke, dust, and bacteria, and its material is primarily ultra-fine glass fiber paper or composite filter paper. The ULPA filter is mainly used to remove particles larger than 0.12µm (120 nanometers), with a filtration efficiency of approximately 99.995% or higher (DOP), and its material is primarily special ultra-fine glass fiber paper.

[0078] Furthermore, the concentration of gaseous volatile organic pollutants in the outside environment is very low, generally less than 1000 ppb, while the actual concentration of IPA in the outside air is only a few tens of ppb. Compared to existing volatile organic exhaust gas treatment systems used for air pollution control, the concentration of gaseous volatile organic compounds in semiconductor and electronics factories is mostly between 100 and 800 ppm. Although zeolite rotors are also used in the treatment of this type of gaseous volatile organic compound exhaust gas, the applicant believes that there is a significant difference between the two, with the concentration difference being at least 100 to 1000 times. Therefore, this utility model installs the zeolite rotor adsorption device 2 (e.g., at the upstream end of the outside air conditioning unit (MAU) 3) Figures 1 to 4 As shown), it can directly filter out micro-pollutants from outside air 1, and adsorb and desorb them through the first zeolite rotor 10 and the second zeolite rotor 20. The first zeolite rotor 10 and the second zeolite rotor 20 can be recycled, have no consumables, have a long service life, and have low maintenance costs, thus saving time and consumables.

[0079] Furthermore, the zeolite rotor adsorption device 2 of this utility model has two implementation methods. In the first implementation method, the first zeolite rotor 10 is equipped with a first zeolite rotor controller (not shown in the figure), which can be set to either continuous operation or timed operation. The second zeolite rotor 20 is equipped with a second zeolite rotor controller (not shown in the figure), which can also be set to either continuous operation or timed operation. The first zeolite rotor 10 and the second zeolite rotor 20 can be used for adsorption and desorption in a continuous operation mode for 24 hours or in a timed operation mode. The first zeolite rotor controller can be connected to the first heater 11. When the first zeolite rotor controller is set to continuous operation or timed operation, the first heater 11 can be started at the same time to heat and output heat source to the desorption zone 103. In the timed operation mode, the first zeolite rotor 10 stops for a period of time according to the time setting and then continues to operate to perform adsorption and desorption. The first zeolite rotor controller can also shut down the first heater 11, allowing the cooling gas supplied by the first cooling gas supply pipe 15 to pass directly through the first heater 11 without heating before being supplied to the desorption zone 103. Furthermore, the second zeolite rotor controller can be connected to the second heater 21. When the second zeolite rotor controller is set to continuous or timed operation, it can simultaneously start the second heater 21 to provide heat and output heat to the desorption zone 203. In timed operation mode, the second zeolite rotor 20 stops for a set period before resuming operation to perform adsorption and desorption. The second zeolite rotor controller can also shut down the second heater 21, allowing the cooling gas supplied by the second cooling gas supply pipe 24 to pass directly through the second heater 21 without heating before being supplied to the desorption zone 203. In addition, in a second embodiment of the zeolite rotor adsorption device 2, the first zeolite rotor 10 is equipped with a first zeolite rotor desorption zone controller (not shown in the figure). The first zeolite rotor desorption zone controller is set to either continuous desorption or timed desorption. The second zeolite rotor 20 is equipped with a second zeolite rotor desorption zone controller (not shown in the figure). The second zeolite rotor desorption zone controller is set to either continuous desorption or timed desorption. The first zeolite rotor desorption zone and the second zeolite rotor desorption zone can be used for continuous desorption for 24 hours or for timed desorption. The first zeolite rotor desorption zone controller can be connected to the first heater 11. When the first zeolite rotor desorption zone controller is set to continuous desorption or timed desorption, the first heater 11 can be started at the same time to heat and output heat to the desorption zone 103.The first zeolite rotor desorption zone controller can also shut down the first heater 11, allowing the cooling gas supplied by the first cooling gas supply pipeline 15 to pass directly through the first heater 11 without being heated before being supplied to the desorption zone 103. This ensures that, in timed desorption mode, the first heater 11 stops for a set period before resuming heating, facilitating the output of heat to the desorption zone 103 for desorption. Furthermore, the second zeolite rotor desorption zone controller can be connected to the second heater 21. When the second zeolite rotor desorption zone controller is set to continuous desorption or timed desorption, it can simultaneously start the second heater 21 to provide heat and output heat to the desorption zone 203. The controller of the second zeolite rotor desorption zone can also shut down the second heater 21, so that the cooling gas delivered by the second cooling gas delivery pipeline 24 can pass directly through the second heater 21 without being heated, and then be delivered to the desorption zone 203. In the case of timed desorption, the second heater 21 stops for a period of time according to the time setting and then continues to heat, so as to facilitate the output of heat source to the desorption zone 203 for desorption.

[0080] In particular, experiments revealed that by creating modules of zeolite blocks with the same thickness as the zeolite rotor (e.g., 400 mm), desorbing them for one hour, and then conducting saturated adsorption capacity tests, it was found that adsorption could last for 3.5 hours, even when the adsorption efficiency decreased from 100% to 80%. When the inlet gas condition was IPA 11.69 ppm, the experimental results showed that after desorption, the inlet IPA of 11.69 ppm could adsorb for 210 minutes = 3.5 hours. However, in actual operation, the outside gas IPA is 20~60 ppb, and the total volatile organic compounds (TVOC) are <1000 ppb. Outside gas IPA is less readily adsorbed than other common pollutants, such as toluene. Therefore, based on the above, the adsorption time can be equivalently deduced. We simply calculated the expected adsorption time after regeneration as a = (11.69 ppm * 1000 ppb / ppm) * 3.5 hours / 1000 ppb = 40.9 hours. Therefore, when using heated gas flow for desorption (hereinafter referred to as heated desorption), we designed an intermittent heated desorption system. For example, desorption for one hour, followed by 12 hours of use. This means that continuous desorption for 24 hours is not required. Desorption for one hour every 12 hours is sufficient. This operation significantly reduces the energy consumption for desorption.

[0081] The detailed explanation is as follows: Based on the above design, the zeolite blocks are made into modules (e.g., 400mm) and replaced with a honeycomb-shaped zeolite rotor. The honeycomb-shaped zeolite rotor rotates at a speed of 1 RPH, meaning it takes one hour for the honeycomb-shaped zeolite rotor to complete one revolution. The entire honeycomb-shaped zeolite rotor is heated and desorbed using a heated airflow. After one hour of heated and desorbed use (hereinafter referred to as heated desorption), it can be used for 40.9 hours. For example, if we set the safety factor SF=3.4, 40.9 / 3.4=12 hours. Therefore, the design is for intermittent heated desorption. After one hour of intermittent heated desorption, the honeycomb-shaped zeolite rotor can be used for 12 hours. A day is 24 hours, meaning that continuous 24-hour heated desorption is not required. The unique intermittent heated desorption design of this utility model has an advantage: saving on heating electricity costs.

[0082] For example, a honeycomb zeolite rotor with a diameter of 4250mm requires an air volume of 8000 NCMH for desorption. The outlet temperature of the cooling zone is 150℃, which needs to be heated to 220℃. Based on an electricity price of NTD 3.5 / kW-hr, the electricity consumption for continuous heating and desorption for 24 hours is calculated to be 209kW * 24hr = 5,020 kW-hr. Therefore, assuming 360 days of operation per year, the annual operating electricity cost is 5020 * 360 * 3.5 = 6,325,200 yuan / year. The unique design of this invention, using an intermittently heated honeycomb zeolite rotor for desorption, allows for 12 hours of continuous operation after one hour of intermittent heating and desorption, or 24 hours a day. This eliminates the need for continuous 24-hour heating and desorption. For example, a 4250mm diameter honeycomb zeolite rotor requires 8000 NCMH of airflow for desorption. With a cooling zone outlet temperature of 150℃, it needs to be heated to 220℃. Based on an electricity price of NTD 3.5 / kW-hr, the electricity consumption for heating and desorption in 24 hours is calculated as 209kW * (1 / 12) * 24hr = 418kW-hr. Assuming 360 operating days per year, the annual electricity cost would be 418 * 360 * 3.5 = 526,680 NTD / year. The difference in electricity consumption is significant, with an annual difference in operating costs of NTD 5,798,520. Clearly, this invention offers economic benefits in terms of the difference in annual operating costs.

[0083] Therefore, this utility model mainly utilizes a combination design of an outside air unit 1, a zeolite rotary adsorption device 2, an outside air conditioning unit (MAU) 3, and a cleanroom 4 (such as...). Figures 1 to 4As shown, the zeolite rotor adsorption device 2 is equipped with a first zeolite rotor 10 and a second zeolite rotor 20, so that the outside air 1 can first pass through the first zeolite rotor 10 and the second zeolite rotor 20 to filter out the micro-pollutants in the outside air, and then be sent into the outside air conditioning unit (MAU) 3, and then sent to the cleanroom 4 for use through the outside air conditioning unit (MAU) 3. Therefore, it has the effect of greatly reducing the micro-pollutants entering the cleanroom 4, and can reduce the filtration burden of the chemical filter in the cleanroom 4, thereby increasing the service life of the chemical filter in the cleanroom 4, and thus increasing the overall practicality.

[0084] Through the above detailed description, those skilled in the art can understand that this utility model can indeed achieve the above-mentioned objectives and has met the requirements of the Patent Law. Therefore, a utility model patent application is filed.

[0085] The above description is merely a preferred embodiment of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any simple equivalent changes and modifications made in accordance with the claims and the description of the present utility model should still fall within the scope of the claims of the present utility model.

Claims

1. A dual-rotor purification device for external air in a cleanroom, characterized in that, The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room.

2. The dual-rotor purification device for outside air of a clean room according to claim 1, characterized by The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room.

3. The dual-rotor purification device for outside air of a clean room according to claim 2, characterized by The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room.

4. The dual-rotor purification device for outside air of a clean room according to claim 2, characterized by The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room.

5. The dual-rotor purification device for outside air of a clean room according to claim 2, characterized by The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. 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The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. 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The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The application relates to a zeolite wheel adsorption device, an outside air conditioning box and a clean room. The 6. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The first zeolite wheel is further provided with a first zeolite wheel controller, which is set to either continuous operation or timed operation.

7. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The first zeolite wheel is further provided with a first zeolite wheel desorption zone controller, which is set to either continuous desorption or timed desorption.

8. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The first heater is further any one of an electric heater, an electric tube heater, an electric sheet heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger.

9. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The first zeolite wheel is further provided with a fan.

10. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The first clean air delivery line is further provided with a first clean air communication line, which is connected to the second cooling air inlet line.

11. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The first inlet air line is further provided with a first inlet air communication line, which is connected to the first cooling air inlet line.

12. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The other end of the first desorption gas outlet line is further connected to an incineration device, which is any one of a direct-fired incinerator, a catalytic incinerator, or a regenerative incinerator.

13. The dual-zeolite wheel air purification device for clean rooms according to claim 12, wherein when the incineration device is a direct-fired incinerator, the direct-fired incinerator is further provided with any one of two heat exchangers, three heat exchangers, or four heat exchangers.

14. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The other end of the first desorption gas outlet line is further connected to the outside air.

15. The dual-rotor purification device for clean room outside air according to claim 1, wherein The first desorption gas outlet line is further provided with a fan.

16. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The second heater is further any one of an electric heater, an electric tube heater, an electric sheet heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger.

17. The dual-rotor purification device for outside air of a clean room according to claim 1, characterized by The second clean air delivery line is further provided with a fan.

18. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The second desorption gas outlet line is further provided with a fan.

19. The dual-rotor purification device for clean room outside air according to claim 1, wherein The other end of the second desorption gas outlet line is further connected to the first cooling air inlet line.

20. The dual-rotor purification device for clean room outside air according to claim 1, wherein The other end of the second desorption gas outlet line is further connected to the first inlet air line.

21. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The other end of the second desorption gas outlet line is further connected to the outside air.

22. The dual-rotor purification device for outside air of a clean room according to claim 1, wherein The other end of the second desorption gas outlet line is further connected to an incineration device, which is any one of a direct-fired incinerator, a catalytic incinerator, or a regenerative incinerator.

23. The dual-zeolite wheel air purification device for clean rooms according to claim 22, wherein when the incineration device is a direct-fired incinerator, the direct-fired incinerator is further provided with any one of two heat exchangers, three heat exchangers, or four heat exchangers.

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