Vacuum annealing furnace

Abstract

The utility model discloses a vacuum annealing furnace. The vacuum annealing furnace comprises a furnace body and a temperature measuring mechanism, the furnace body comprises a heat insulation layer, a furnace wall, a heating assembly, a low temperature measuring channel and a high temperature measuring channel, the furnace wall is arranged on the outer side of the heat insulation layer, the heat insulation layer defines a treatment cavity, the treatment cavity extends in the direction of a first straight line, and the heating assembly is arranged in the treatment cavity; the low-temperature measuring channel and the high-temperature measuring channel penetrate through the furnace wall and the heat insulation layer in the direction of a second straight line; the temperature measuring mechanism comprises a low temperature measuring assembly and a high temperature measuring assembly. The low temperature measuring assembly extends along the direction of the second straight line, the low temperature measuring assembly comprises a low temperature measuring piece and a driving piece for driving the low temperature measuring piece to move along the direction of the second straight line, and the low temperature measuring piece is a contact type temperature measuring piece; and the high temperature measuring assembly extends along the direction of the second straight line and comprises a high temperature measuring piece which is a non-contact temperature measuring piece. According to the invention, accurate measurement of the full temperature range in the vacuum annealing furnace can be realized, and the control accuracy of the vacuum annealing furnace is improved.

Description

Technical Field

[0001] This application relates to the field of annealing equipment technology, and more particularly to a vacuum annealing furnace. Background Technology

[0002] Existing vacuum annealing furnaces only have fixed temperature measurement schemes, resulting in a limited range of methods for measuring the temperature of the furnace. Some temperature measurement methods are only suitable for low-temperature measurements in vacuum annealing furnaces, and their accuracy cannot meet the requirements when the furnace is at a high temperature. Other temperature measurement methods are only suitable for high-temperature measurements in vacuum annealing furnaces, and their accuracy decreases when the furnace is at a low temperature, failing to meet the measurement requirements. Utility Model Content

[0003] To address the aforementioned issues, the purpose of this application is to provide a vacuum annealing furnace capable of precise temperature measurement.

[0004] To achieve the above objectives, this application provides a vacuum annealing furnace, comprising: a furnace body and a temperature measuring mechanism. The furnace body includes a heat insulation layer, a furnace wall, a heating assembly, a low-temperature measuring channel, and a high-temperature measuring channel. The furnace wall is located outside the heat insulation layer, which encloses a processing cavity. The processing cavity extends along a first straight line, and the heating assembly is located within the processing cavity. Both the low-temperature measuring channel and the high-temperature measuring channel penetrate the furnace wall and the heat insulation layer along a second straight line, the direction of which is perpendicular to the direction of the first straight line. The temperature measuring mechanism includes a low-temperature measuring assembly and a high-temperature measuring assembly distributed along the first straight line. The low-temperature measuring assembly extends along the second straight line and includes a low-temperature measuring element capable of extending into the low-temperature measuring channel and a driving element that drives the low-temperature measuring element to move along the second straight line. The low-temperature measuring element is a contact temperature measuring element. The high-temperature measuring assembly extends along the second straight line and includes a high-temperature measuring element that acquires the temperature inside the furnace through the high-temperature measuring channel. The high-temperature measuring element is a non-contact temperature measuring element.

[0005] Furthermore, the cryogenic measurement component also includes a temperature-conducting tube, which is embedded in the cryogenic measurement channel, and a channel is formed inside the temperature-conducting tube that allows the cryogenic measurement component to extend in.

[0006] Furthermore, the cryogenic measuring component also includes a bellows and a connecting frame. The cryogenic measuring component is connected to the driving component through the connecting frame. One end of the bellows is connected to the furnace wall, and the other end of the bellows is connected to the connecting frame. The bellows is sleeved on the outside of the cryogenic measuring component.

[0007] Furthermore, the temperature measuring mechanism also includes a fixed base, and the low temperature measuring component also includes a drive component bracket. One end of the drive component bracket is connected to the fixed base, the other end of the drive component bracket is connected to the furnace body, and the drive component is connected to the drive component bracket.

[0008] Furthermore, the high-temperature measuring component also includes a temperature-conducting rod, at least a portion of which is disposed within the high-temperature measuring channel, with one end of the temperature-conducting rod abutting against the heating component.

[0009] Furthermore, the high-temperature measuring component also includes an observation window, which is located at the opening of the high-temperature measuring channel.

[0010] Furthermore, the high-temperature measurement component also includes a cooling element for cooling the observation window, which is at least partially located outside the observation window.

[0011] Furthermore, the temperature measuring mechanism also includes a fixed base, and the high-temperature measuring component also includes an adjusting bracket, with the high-temperature measuring element connected to the fixed base via the adjusting bracket.

[0012] Furthermore, the vacuum annealing furnace is equipped with at least two sets of temperature measuring mechanisms, which are distributed along the direction of the first straight line. The furnace body is provided with a low temperature measuring channel and a high temperature measuring channel corresponding to the number of temperature measuring mechanisms. One low temperature measuring channel or one high temperature measuring channel is connected to the top of the processing chamber, and one high temperature measuring channel or one low temperature measuring channel is connected to the bottom of the processing chamber.

[0013] Furthermore, the low-temperature measuring element is a thermocouple measuring element, and the high-temperature measuring element is an infrared measuring element.

[0014] In summary, the vacuum annealing furnace provided in this application improves the accuracy of temperature measurement by combining low-temperature measuring components and high-temperature measuring components. Attached Figure Description

[0015] Figure 1 This is a three-dimensional schematic diagram of the vacuum annealing furnace provided in this application;

[0016] Figure 2 This is a cross-sectional schematic diagram of the furnace body of the vacuum annealing furnace provided in this application;

[0017] Figure 3 It is the vacuum annealing furnace provided in this application. Figure 2 A schematic diagram at point A in the middle;

[0018] Figure 4 It is the vacuum annealing furnace provided in this application. Figure 2 A schematic diagram at point B in the middle;

[0019] Figure 5 This is a cross-sectional schematic diagram of the vacuum annealing furnace provided in this application;

[0020] In the diagram: 100, Vacuum annealing furnace; 101, First straight line; 102, Second straight line; 11, Furnace body; 111, Insulation layer; 112, Furnace wall; 113, Heating assembly; 114, Low-temperature measuring channel; 115, High-temperature measuring channel; 12, Temperature measuring mechanism; 121, Low-temperature measuring assembly; 1211, Low-temperature measuring component; 1212, Driving component; 1213, Temperature-conducting pipe; 1214, Corrugated pipe; 1215, Connecting frame; 1216, Driving component support; 122, High-temperature measuring assembly; 1221, High-temperature measuring component; 1222, Temperature-conducting rod; 1223, Observation window; 1224, Cooling component; 1225, Adjusting bracket; 123, Fixing base. Detailed Implementation

[0021] To enable those skilled in the art to better understand the present application, the technical solutions in specific embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0022] like Figure 1 As shown, this application embodiment provides a vacuum annealing furnace 100, which includes a furnace body 11 and a temperature measuring mechanism 12. Wherein, as Figure 2 As shown, the furnace body 11 includes a heat insulation layer 111, a furnace wall 112, a heating assembly 113, a low-temperature measuring channel 114, and a high-temperature measuring channel 115. The furnace body 11 is an annular cavity, with the furnace wall 112 disposed outside the heat insulation layer 111. The heat insulation layer 111 adheres to the furnace wall 112 and is used to insulate the high temperature of the annealing furnace and maintain the internal temperature of the vacuum annealing furnace 100. The heat insulation layer 111 encloses and forms a processing cavity. A first straight line 101 parallel to the extension direction of the furnace wall 112 is defined, meaning the processing cavity extends along the direction of the first straight line 101. The processing cavity is used for annealing operations. The heating assembly 113 is disposed within the processing cavity, forming a heating space around it. The heating assembly 113 is used to heat the internal temperature of the furnace to achieve the annealing operation. Optionally, in this embodiment, the heating assembly 113 is configured as a graphite heater for heating the internal temperature of the furnace.

[0023] like Figure 2 As shown, both the low-temperature measuring channel 114 and the high-temperature measuring channel 115 penetrate the furnace wall 112 and the insulation layer 111 along the direction of the second straight line 102. The temperature measuring mechanism 12 measures the temperature of the furnace environment through the low-temperature measuring channel 114 and the high-temperature measuring channel 115, thereby improving the comprehensiveness and accuracy of the temperature measurement. Optionally, in this embodiment, the low-temperature measuring channel 114 and the high-temperature measuring channel 115 are located on the same side of the furnace wall 112, with the low-temperature measuring channel 114 located above the high-temperature measuring channel 115.

[0024] The temperature measuring mechanism 12 includes a low temperature measuring component 121 and a high temperature measuring component 122. A second straight line 102 is defined that is perpendicular to the first straight line 101. The low temperature measuring component 121 and the high temperature measuring component 122 are configured to be distributed along the direction of the first straight line 101, and the low temperature measuring component 121 and the high temperature measuring component 122 are configured to be located on the same side of the furnace body 11.

[0025] The low temperature measuring component 121 extends along the direction of the second straight line 102. One end of the low temperature measuring component 121 is used for fixing, and the other end of the low temperature measuring component 121 is close to the furnace wall 112. The low temperature measuring component 121 is close to the low temperature measuring channel 114 on the furnace wall 112 so as to measure the temperature of the vacuum annealing furnace 100.

[0026] like Figure 3 As shown, the low-temperature measuring assembly 121 includes a low-temperature measuring element 1211 and a driving element 1212. The low-temperature measuring element 1211 can extend into the low-temperature measuring channel 114 on the furnace wall 112 to measure the temperature of the vacuum annealing furnace 100. The driving element 1212 drives the low-temperature measuring element 1211 to move along the direction of the second straight line 102, providing power for the low-temperature measuring element 1211 to extend into the low-temperature measuring channel 114 for temperature measurement. Optionally, in this embodiment, the low-temperature measuring element 1211 is configured as a contact temperature measuring element for measuring the temperature of the vacuum annealing furnace 100.

[0027] like Figure 4 As shown, the high-temperature measuring component 122 extends along the direction of the second straight line 102. One end of the high-temperature measuring component 122 is fixed, and the other end is close to the furnace wall 112. The high-temperature measuring component 122 is close to the high-temperature measuring channel 115 on the furnace wall 112 to measure the temperature of the vacuum annealing furnace 100. The high-temperature measuring component 122 includes a high-temperature measuring element 1221, which measures the temperature of the vacuum annealing furnace 100 through the high-temperature measuring channel 115. Optionally, in this embodiment, the high-temperature measuring element 1221 is configured as a non-contact temperature measuring element for measuring the temperature of the vacuum annealing furnace 100.

[0028] In this embodiment, the low-temperature measuring component 121 has high accuracy when measuring temperatures of 1600°C and below (referred to as the low-temperature state), and the high-temperature measuring component 122 has high accuracy when measuring temperatures of 1900°C and above (referred to as the high-temperature state). When the vacuum annealing furnace 100 is in a low-temperature state, using the low-temperature measuring component 121 to measure the temperature inside the vacuum annealing furnace 100 provides higher accuracy. When the vacuum annealing furnace 100 is in a high-temperature state, using the high-temperature measuring component 122 to measure the temperature inside the vacuum annealing furnace 100 provides higher accuracy. When the vacuum annealing furnace is in an intermediate temperature state (i.e., the temperature is between 1600°C and 1900°C), a relatively accurate temperature value can be obtained by simultaneously measuring with both the low-temperature measuring component 121 and the high-temperature measuring component 122 and then calibrating the measurement.

[0029] As one implementation method, such as Figure 5 As shown, the vacuum annealing furnace 100 is equipped with at least two sets of temperature measuring mechanisms 12, both of which are distributed along the direction of the first straight line 101 to achieve more accurate and comprehensive temperature measurement of the vacuum annealing furnace 100. The furnace body 11 of the vacuum annealing furnace 100 is provided with low-temperature measuring channels 114 and high-temperature measuring channels 115 corresponding to the number of temperature measuring mechanisms 12. With at least two sets of temperature measuring mechanisms 12, the furnace body 11 has at least two sets of low-temperature measuring channels 114 and two sets of high-temperature measuring channels 115. Furthermore, one low-temperature measuring channel 114 or one high-temperature measuring channel 115 is connected to the top of the processing chamber of the vacuum annealing furnace 100, and one high-temperature measuring channel 115 or one low-temperature measuring channel 114 is connected to the bottom of the processing chamber. The low-temperature measuring component 121 and the high-temperature measuring component 122 measure the temperature through the temperature measuring channels located at the top or bottom of the processing chamber, achieving full-range temperature measurement along the direction of the first straight line 101 of the vacuum annealing furnace 100, thereby improving the accuracy of the measured temperature.

[0030] In one implementation, the low-temperature measuring element 1211 is a thermocouple, and the high-temperature measuring element 1221 is an infrared thermocouple. The thermocouple can be configured with both high-temperature and low-temperature ranges, switching between them based on temperature changes within the vacuum annealing furnace 100. Similarly, the infrared thermocouple can be configured with both high-temperature and low-temperature ranges, switching between them based on temperature changes within the vacuum annealing furnace 100.

[0031] As one implementation method, such as Figure 5As shown, the temperature measuring mechanism 12 also includes a fixed base 123. One end of the low-temperature measuring component 121 is fixed to the fixed base 123 to maintain the other end of the low-temperature measuring component 121 aligned with the low-temperature measuring channel 114. The low-temperature measuring component 121 also includes a drive member bracket 1216. One end of the drive member bracket 1216 is connected to the fixed base 123, and the other end of the drive member bracket 1216 is connected to the furnace body 11. The drive member 1212 of the low-temperature measuring component 121 is connected to the drive member bracket 1216. The drive member 1212 of the low-temperature measuring component 121 is configured to have a sliding degree of freedom on the drive member bracket 1216. The drive member 1212 of the low-temperature measuring component 121 can slide along the direction of the second straight line 102 on the drive member bracket 1216, thereby driving the low-temperature measuring component 1211 of the low-temperature measuring component 121 to extend into the low-temperature measuring channel 114 for temperature measurement.

[0032] As one implementation, the low temperature measuring component 121 also includes a temperature conducting tube 1213, which is embedded in the low temperature measuring channel 114 of the furnace body 11. The temperature conducting tube 1213 forms a channel that allows the low temperature measuring component 1211 to extend into it. The low temperature measuring component 1211 measures the temperature of the vacuum annealing furnace 100 by extending into the channel.

[0033] In one implementation, the cryogenic measuring component 121 also includes a bellows 1214 and a connecting frame 1215. The cryogenic measuring element 1211 is connected to the driving element 1212 through the connecting frame 1215. The driving element 1212 drives the connecting frame 1215 to move along the direction of the second straight line 102, thereby driving the cryogenic measuring element 1211 to extend into the cryogenic measuring channel 114 to measure the temperature of the vacuum annealing furnace 100. One end of the bellows 1214 is connected to the furnace wall 112, and the other end of the bellows 1214 is connected to the connecting frame 1215. Furthermore, the bellows 1214 is sleeved on the outside of the cryogenic measuring element 1211 to ensure the vacuum level of the cryogenic channel 114. When the driving component 1212 drives the connecting frame 1215 to move along the direction of the second straight line 102, the bellows 1214 is subjected to the squeezing force from the direction of the second straight line 102. The bellows 1214 folds up so that the low temperature measuring component 1211 can extend into the low temperature measuring channel 114 to measure the temperature of the vacuum annealing furnace 100.

[0034] As one implementation method, such as Figure 5 As shown, the high-temperature measuring component 122 also includes an adjusting bracket 1225. The high-temperature measuring element 1221 is connected to the fixed base 123 through the adjusting bracket 1225 to keep the high-temperature measuring element 1221 aligned with the high-temperature measuring channel 115 for temperature measurement. The adjusting bracket 1225 can also adjust the position of the high-temperature measuring element 1221 to meet different temperature measurement requirements.

[0035] As one implementation method, such as Figure 5As shown, the high-temperature measuring component 122 also includes a temperature-conducting rod 1222. At least a portion of the temperature-conducting rod 1222 is disposed within the high-temperature measuring channel 115, and one end of the temperature-conducting rod 1222 abuts against the heating component 113. The temperature inside the vacuum annealing furnace 100 is conducted to the temperature-conducting rod 1222. The high-temperature measuring element 1221 measures the temperature of the temperature-conducting rod 1222 via a high-temperature measuring device on the furnace body 11, thereby obtaining the temperature inside the vacuum annealing furnace 100. Optionally, in this embodiment, the temperature-conducting rod 1222 is configured as a graphite temperature-conducting rod 1222. Graphite material has excellent thermal conductivity to ensure the accuracy of the temperature measurement of the vacuum annealing furnace 100 by the high-temperature measuring element 1221.

[0036] As one implementation method, such as Figure 5 As shown, the high-temperature measuring component 122 also includes an observation window 1223. The observation window 1223 is used to acquire the furnace temperature of the vacuum annealing furnace 100 and to ensure the vacuum level of the high-temperature measuring channel 115. The observation window 1223 is located on the outside of the furnace wall 112 and covers the opening of the high-temperature measuring channel 115. The temperature conducting rod 1222 can be observed through the observation window 1223. The high-temperature measuring component 1221 measures the temperature on the temperature conducting rod 1222 through the observation window 1223, thereby acquiring the temperature data of the vacuum annealing furnace 100. Optionally, in this embodiment, the observation window 1223 is made of glass.

[0037] Furthermore, such as Figure 5 As shown, the high-temperature measuring component 122 also includes a cooling element 1224. At least a portion of the cooling element 1224 is disposed outside the observation window 1223. The cooling element 1224 is used to cool the observation window 1223 to reduce the temperature of the observation window 1223 outside the furnace wall 112. Optionally, in this embodiment, the cooling element 1224 can be configured as two water-cooled connectors, which are sleeved on the observation window 1223 to reduce the temperature of the observation window 1223 by cooling water.

[0038] According to the above description, the vacuum annealing furnace 100 provided in this application ensures the accuracy of temperature measurement of the vacuum annealing furnace 100 by combining the temperature measurement of the low-temperature measuring component 121 and the high-temperature measuring component 122 when the temperature inside the vacuum annealing furnace 100 reaches the critical value of the temperature measurement range of the low-temperature measuring component 121. Furthermore, by setting two sets of temperature measuring components with different temperature measurement ranges and placing the two sets of temperature measuring components on one side of the vacuum annealing furnace 100, the temperature measuring mechanism 12 can comprehensively measure the temperature inside the vacuum annealing furnace 100, making the measurement range of the temperature measuring mechanism 12 more comprehensive and the obtained measured temperature more accurate.

[0039] Finally, it should be noted that the above are only some preferred embodiments of this application and are not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vacuum annealing furnace, characterized by, The vacuum annealing furnace comprises: a furnace body, which comprises an insulating layer, a furnace wall, a heating assembly, a low-temperature measuring channel and a high-temperature measuring channel, the furnace wall is arranged outside the insulating layer, the insulating layer is enclosed to form a processing cavity, the processing cavity extends along a first straight line, and the heating assembly is arranged in the processing cavity; the low-temperature measuring channel and the high-temperature measuring channel both penetrate the furnace wall and the insulating layer along a second straight line, and the second straight line is perpendicular to the first straight line; a temperature measuring mechanism, which comprises a low-temperature measuring assembly and a high-temperature measuring assembly distributed along the first straight line; the low-temperature measuring assembly extends along the second straight line, the low-temperature measuring assembly comprises a low-temperature measuring element capable of extending into the low-temperature measuring channel, and a driving element for driving the low-temperature measuring element to move along the second straight line, and the low-temperature measuring element is a contact type temperature measuring element; the high-temperature measuring assembly extends along the second straight line, the high-temperature measuring assembly comprises a high-temperature measuring element for acquiring the temperature in the furnace body through the high-temperature measuring channel, and the high-temperature measuring element is a non-contact type temperature measuring element.

2. The vacuum annealing furnace according to claim 1, wherein: the low-temperature measuring assembly further comprises a temperature guide pipe, the temperature guide pipe is embedded in the low-temperature measuring channel, and a channel capable of allowing the low-temperature measuring element to extend into is formed in the temperature guide pipe.

3. The vacuum annealing furnace according to claim 1, wherein: the low-temperature measuring assembly further comprises a bellows and a connecting frame, the low-temperature measuring element is connected to the driving element through the connecting frame, one end of the bellows is connected to the furnace wall, the other end of the bellows is connected to the connecting frame, and the bellows is sleeved outside the low-temperature measuring element.

4. The vacuum annealing furnace according to claim 1, wherein: the temperature measuring mechanism further comprises a fixing seat, the low-temperature measuring assembly further comprises a driving element support, one end of the driving element support is connected to the fixing seat, the other end of the driving element support is connected to the furnace body, and the driving element is connected to the driving element support.

5. The vacuum annealing furnace according to claim 1, wherein: the high-temperature measuring assembly further comprises a temperature guide rod, at least part of the temperature guide rod is arranged in the high-temperature measuring channel, and one end of the temperature guide rod abuts against the heating assembly.

6. The vacuum annealing furnace according to claim 1, wherein: the high-temperature measuring assembly further comprises an observation window, and the observation window is arranged at an opening of the high-temperature measuring channel.

7. The vacuum annealing furnace according to claim 6, wherein: the high-temperature measuring assembly further comprises a cooling element for cooling the observation window, and the cooling element is at least partially arranged outside the observation window.

8. The vacuum annealing furnace according to claim 1, wherein: the temperature measuring mechanism further comprises a fixing seat, the high-temperature measuring assembly further comprises an adjusting support, and the high-temperature measuring element is connected to the fixing seat through the adjusting support.

9. The vacuum annealing furnace according to claim 1, wherein: The vacuum annealing furnace is provided with at least two groups of temperature measuring mechanisms, and the two groups of temperature measuring mechanisms are distributed along the direction of the first straight line.

10. The vacuum annealing furnace according to claim 1, wherein: The low-temperature measuring element is a thermocouple temperature measuring element, and the high-temperature measuring element is an infrared temperature measuring element.

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