Target core with magnetic field adjusting function

Abstract

The utility model discloses a target core with a magnetic field adjusting function, which comprises a plurality of adjusting mechanisms which are uniformly distributed along the length direction of a target core body, one end of the adjusting mechanism is fixedly connected with the target core body, and the other end of the adjusting mechanism is connected with a magnet assembly in the target core body; and each adjusting mechanism works independently, so that the height of the magnet assembly at the corresponding position is adjusted through the single adjusting mechanism, and the magnetic field intensity of the two end parts of the target material and the magnetic field intensity of the middle part of the target material are adjusted to be consistent. According to the target core with the magnetic field adjusting function, a plurality of first adjusting gaskets and second adjusting gaskets which are arranged in a stacked mode are arranged in an adjusting mechanism, the height of a magnet assembly can be adjusted upwards by increasing the number of the first adjusting gaskets, and the height of the magnet assembly can be adjusted downwards by increasing the number of the second adjusting gaskets; the height of the magnet assembly at the corresponding position is adjusted along with the movement of the adjusting rod, so that the magnetic field intensity at two ends of the target and the magnetic field intensity in the middle of the target are adjusted to be consistent.

Description

TECHNICAL FIELD

[0001] The utility model relates to target core structure technical field, especially a target core with magnetic field adjusting function. BACKGROUND

[0002] The magnetron sputtering coating is a widely used coating deposition process. The principle of sputtering coating is that inert gas is bombarded on the surface of a target material under the action of an electric field, and molecules, atoms, ions and electrons on the surface of the target material are sputtered and fly to a substrate to deposit a film.

[0003] In the coating process, the quality of the magnetron sputtering coating equipment is very high, and the magnetic field intensity distribution of the magnetron sputtering cathode is particularly important.

[0004] In the coating process, the magnetic field intensity ratio of the two ends of the target material to the middle of the target material is improper, which causes the etching speed of the end region of the target material to be faster than that of the middle region of the target material, and the etching profile of the surface of the target material is uneven. SUMMARY

[0005] The utility model discloses a target core with magnetic field adjusting function, which solves the problem of uneven magnetic field intensity of the two ends of the target material and the middle of the target material in the coating process.

[0006] To solve the above technical problems, the utility model provides a target core with magnetic field adjusting function, which comprises a plurality of adjusting mechanisms uniformly arranged along the length direction of the target core body.

[0007] One end of the adjusting mechanism is fixedly connected with the target core body, and the other end is connected with the magnet assembly inside the target core body.

[0008] Each adjusting mechanism works independently, so that the height of the magnet assembly at the corresponding position is adjusted by a single adjusting mechanism, and the magnetic field intensity of the two ends of the target material is adjusted to be consistent with the magnetic field intensity of the middle of the target material.

[0009] Preferably, the adjusting mechanism comprises an upper fixed seat and a lower fixed seat, and the upper fixed seat and the lower fixed seat are clamped and fixed on the target core body.

[0010] Preferably, the adjusting mechanism further comprises an adjusting rod, one end of the adjusting rod is slidably inserted into the lower fixed seat, and the other end is connected with the magnet assembly.

[0011] Preferably, the part of the adjusting rod located in the lower fixed seat is sequentially sleeved with a supporting sleeve and a pressing sleeve; and the supporting sleeve is arranged on the step in the lower fixed seat.

[0012] And the end of the adjusting rod is also provided with a threaded hole, and the adjusting rod is fixedly installed in the lower fixing seat through an adjusting bolt.

[0013] Preferably, a gasket assembly is arranged between the supporting sleeve and the pressing sleeve, and the height of the adjusting rod is adjusted by increasing or decreasing the number of gaskets, i.e. the height of the corresponding magnet assembly is adjusted.

[0014] Preferably, the gasket assembly comprises a plurality of first adjusting gaskets and second adjusting gaskets arranged in layers; one end of the first adjusting gasket abuts against the top of the supporting sleeve, and the other end abuts against the bottom of the pressing sleeve, and the height of the magnet assembly is adjusted upward by increasing the number of the first adjusting gaskets; one end of the second adjusting gasket abuts against the step of the adjusting rod, and the other end abuts against the bottom of the pressing sleeve, and the height of the magnet assembly is adjusted downward by increasing the number of the second adjusting gaskets.

[0015] Preferably, the inner diameter of the first adjusting gasket is greater than the outer diameter of the second adjusting gasket, so that the first adjusting gasket and the second adjusting gasket are arranged in a sleeved manner.

[0016] Preferably, the thickness of the first adjusting gasket is greater than the thickness of the second adjusting gasket.

[0017] Preferably, a threaded head is formed at the lower end of the adjusting rod, and the threaded head is in threaded connection with the mounting seat.

[0018] Preferably, the magnet assembly comprises a magnetic shoe and a magnetic strip arranged on the magnetic shoe; the mounting seat is provided with a plurality of magnetic shoes arranged at intervals along the length direction of the magnetic shoe, and the height of the corresponding magnet assembly is adjusted along with the movement of the adjusting rod, so that the magnetic field intensity of the two ends of the target material is adjusted to be consistent with the magnetic field intensity of the middle part of the target material.

[0019] Compared with the prior art, the target core with the magnetic field adjusting function has the following beneficial effects:

[0020] The adjusting mechanism in the target core with the magnetic field adjusting function is provided with a plurality of first adjusting gaskets and second adjusting gaskets arranged in layers, the height of the magnet assembly can be adjusted upward by increasing the number of the first adjusting gaskets, and the height of the magnet assembly can be adjusted downward by increasing the number of the second adjusting gaskets; the height of the corresponding magnet assembly is adjusted along with the movement of the adjusting rod, so that the magnetic field intensity of the two ends of the target material is adjusted to be consistent with the magnetic field intensity of the middle part of the target material. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structural schematic view of the target core with the magnetic field adjusting function provided by the utility model;

[0022] Figure 2It is the internal structure schematic diagram of the target core with the magnetic field adjusting function provided by the utility model;

[0023] Figure 3 It is the sectional view of the adjusting mechanism provided by the utility model;

[0024] Figure 4 It is the local enlarged view of the adjusting mechanism provided by the utility model;

[0025] Figure 5 It is the structure schematic diagram of the pressing sleeve provided by the utility model;

[0026] Figure 6 It is the structure schematic diagram of the supporting sleeve provided by the utility model;

[0027] Figure 7 It is the structure schematic diagram of the adjusting rod provided by the utility model.

[0028] In the figure: 10, adjusting mechanism;20, target core body;30, magnet assembly;31, magnetic shoe;32, magnetic strip;11, upper fixed seat;12, lower fixed seat;13, adjusting rod;131, threaded head;14, supporting sleeve;15, pressing sleeve;16, adjusting bolt;17, gasket assembly;171, first adjusting gasket;172, second adjusting gasket;18, mounting seat. DETAILED DESCRIPTION

[0029] The utility model makes further detailed description in combination with the drawings and specific embodiments. The advantages and features of the utility model will be more apparent according to the following description and claims. It should be noted that the drawings all adopt very simplified form and all use non-precise proportion, only to facilitate, clearly assist the purpose of the description of the embodiment of the utility model.

[0030] In the description of the utility model, it should be understood that the orientation or position relationship indicated by the terms 'center', 'longitudinal', 'transverse', 'upper', 'lower', 'front','rear', 'left', 'right','vertical', 'horizontal', 'top', 'bottom', 'inner', 'outer' and the like is the orientation or position relationship based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms 'first','second' and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by 'first','second' and the like can explicitly or implicitly include one or more features. In the description of the utility model, unless otherwise specified, the meaning of 'a plurality of' is two or more.

[0031] In the description of the utility model, it is necessary to explain, unless there is definite stipulation and limitation, the term "installation", "link", "connection" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be direct connection, also can indirectly connect through intermediate medium, can be two element internal communication. For ordinary skilled person in the art, the specific meaning of the above-mentioned term in the utility model can be understood through specific circumstances. Embodiment

[0032] The utility model provides a target core with magnetic field adjusting function, please refer to Figures 1-2 , including a plurality of adjusting mechanism 10, along the target core body 20 length direction even distribution, adjusting mechanism 10 one end with target core body 20 fixed connection, the other end with the magnet assembly 30 in target core body 20 is connected, and every adjusting mechanism 10 is independent work, thereby through single adjusting mechanism 10 adjusts the height of corresponding position magnet assembly 30, thereby the magnetic field intensity of target material both ends and the magnetic field intensity of target material middle part are adjusted consistent.

[0033] Specifically, please refer to 3-7, the adjusting mechanism 10 includes upper fixed seat 11 and lower fixed seat 12, the upper fixed seat 11 and the lower fixed seat 12 are clamped and fixed on the target core body 20.

[0034] Further, the adjusting mechanism 10 further includes adjusting rod 13, one end of the adjusting rod 13 is slidably inserted into the lower fixed seat 12, and the other end is connected with the magnet assembly 30. The part of the adjusting rod 13 located in the lower fixed seat 12 is sequentially sleeved with a support sleeve 14 and a pressing sleeve 15; the support sleeve 14 is arranged on the step in the lower fixed seat 12; and the end of the adjusting rod 13 is also provided with a threaded hole, and the adjusting rod 13 is fixedly installed in the lower fixed seat 12 by adjusting bolt 16.

[0035] Further, a gasket assembly 17 is arranged between the support sleeve 14 and the pressing sleeve 15, and the height of the adjusting rod 13 is adjusted by increasing or decreasing the number of gaskets, that is, the height of the magnet assembly 30 at the corresponding position is adjusted. The gasket assembly 17 includes a plurality of first adjusting gaskets 171 and second adjusting gaskets 172 stacked; one end of the first adjusting gasket 171 abuts against the top of the support sleeve 14, and the other end abuts against the bottom of the pressing sleeve 15, and the height of the magnet assembly 30 is adjusted upward by increasing the number of first adjusting gaskets 171; one end of the second adjusting gasket 172 abuts against the step of the adjusting rod 13, and the other end abuts against the bottom of the pressing sleeve 15, and the height of the magnet assembly 30 is adjusted downward by increasing the number of second adjusting gaskets 172.

[0036] In an embodiment, the inner diameter of the first adjusting washer 171 is larger than the outer diameter of the second adjusting washer 172, so that the first adjusting washer 171 is arranged in a sleeving manner with the second adjusting washer 172, and the thickness of the first adjusting washer 171 is larger than the thickness of the second adjusting washer 172.

[0037] Specifically, please refer to Figure 7 The lower end of the adjusting rod 13 is provided with a threaded head 131, and the threaded head 131 is threadedly connected with the mounting seat 18. The magnet assembly 30 comprises a magnetic shoe 31 and a magnetic strip 32 arranged on the magnetic shoe 31. The mounting seat 18 is provided with a plurality of magnetic shoe 31 along the length direction, and the height of the corresponding position magnet assembly 30 is adjusted along with the movement of the adjusting rod 13, so as to adjust the magnetic field intensity of the two ends of the target material to be consistent with the magnetic field intensity of the middle part of the target material.

[0038] The adjusting mechanism in the target core with the magnetic field adjusting function is provided with a plurality of first adjusting washers and second adjusting washers arranged in a stacking manner, and the height of the magnet assembly can be adjusted upward by increasing the number of the first adjusting washers, and the height of the magnet assembly can be adjusted downward by increasing the number of the second adjusting washers. The height of the corresponding position magnet assembly is adjusted along with the movement of the adjusting rod, so as to adjust the magnetic field intensity of the two ends of the target material to be consistent with the magnetic field intensity of the middle part of the target material.

[0039] The above description is only a description of the preferred embodiments of the present application, and does not limit the scope of the present application in any way. Any modification or modification of the above-mentioned disclosure by a person skilled in the art falls within the protection scope of the claims.

Claims

1. A target core with magnetic field adjustment function, characterized in that, The adjusting mechanism (10) is fixedly connected with the target core body (20) at one end and connected with the magnet assembly (30) inside the target core body (20) at the other end. The adjusting mechanism (10) is fixedly connected with the target core body (20) at one end and connected with the magnet assembly (30) inside the target core body (20) at the other end. The adjusting mechanism (10) is fixedly connected with the target core body (20) at one end and connected with the magnet assembly (30) inside the target core body (20) at the other end.

2. The target core having a magnetic field adjusting function according to claim 1, wherein, The adjusting mechanism (10) includes an upper fixing seat (11) and a lower fixing seat (12), and the upper fixing seat (11) and the lower fixing seat (12) are clamped and fixed on the target core body (20).

3. The target core having a magnetic field adjusting function according to claim 2, wherein The adjusting mechanism (10) further includes an adjusting rod (13), one end of the adjusting rod (13) is slidably inserted into the lower fixing seat (12), and the other end is connected with the magnet assembly (30).

4. The target core having a magnetic field adjusting function according to claim 3, wherein The part of the adjusting rod (13) located in the lower fixing seat (12) is sequentially sleeved with a supporting sleeve (14) and a pressing sleeve (15); the supporting sleeve (14) is arranged on the step in the lower fixing seat (12); And the end of the adjusting rod (13) is also provided with a threaded hole, and the adjusting rod (13) is fixedly installed in the lower fixing seat (12) through an adjusting bolt (16).

5. The target core having a magnetic field adjusting function according to claim 4, wherein A gasket assembly (17) is arranged between the supporting sleeve (14) and the pressing sleeve (15), and the height of the adjusting rod (13) is adjusted by increasing or decreasing the number of gaskets.

6. The target core having a magnetic field adjusting function according to claim 5, wherein The gasket assembly (17) includes a plurality of first adjusting gaskets (171) and second adjusting gaskets (172) arranged in layers; one end of the first adjusting gasket (171) abuts against the top of the supporting sleeve (14), and the other end abuts against the bottom of the pressing sleeve (15), and the height of the magnet assembly (30) is adjusted upward by increasing the number of the first adjusting gaskets (171); one end of the second adjusting gasket (172) abuts against the step of the adjusting rod (13), and the other end abuts against the bottom of the pressing sleeve (15), and the height of the magnet assembly (30) is adjusted downward by increasing the number of the second adjusting gaskets (172).

7. The target core having a magnetic field adjusting function according to claim 6, wherein The inner diameter of the first adjusting gasket (171) is greater than the outer diameter of the second adjusting gasket (172), so that the first adjusting gasket (171) and the second adjusting gasket (172) are arranged in a sleeved manner.

8. The target core having a magnetic field adjusting function according to claim 6, wherein The thickness of the first adjusting gasket (171) is greater than the thickness of the second adjusting gasket (172).

9. The target core having a magnetic field adjusting function according to claim 3, wherein The lower end of the adjusting rod (13) is provided with a threaded head (131), and the threaded head (131) is threadedly connected with a mounting seat (18).

10. The target core having a magnetic field adjusting function according to claim 9, wherein, The magnet assembly (30) includes a magnetic shoe (31) and a magnetic strip (32) arranged on the magnetic shoe (31); the mounting seat (18) is provided with a plurality of intervals arranged along the length direction of the magnetic shoe (31), and the height of the magnet assembly (30) at the corresponding position is adjusted with the movement of the adjusting rod (13), so that the magnetic field intensity of the two ends of the target material is adjusted to be consistent with the magnetic field intensity of the middle part of the target material.

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