Graphite carrier visual inspection device

Abstract

The utility model discloses a graphite carrier visual detection device which comprises a detection frame used for supporting a graphite carrier, a visual detection mechanism is arranged above the detection frame, the visual detection mechanism is connected with a detection transverse moving mechanism used for driving the visual detection mechanism to perform horizontal reciprocating transmission, and a movable industrial light source is arranged below the visual detection mechanism; the visual detection mechanism comprises a first linear module which is horizontally arranged, the first linear module is connected with a second linear module which is vertically conveyed, the second linear module is connected with a mounting bracket, a second motor is mounted on the mounting bracket, the second motor is connected with a rotary mounting plate, and a camera for detection is mounted on the rotary mounting plate; the camera is connected with a double telecentric lens. The graphite carrier straightness detection device has the beneficial effects that the straightness of a clamping point, a ceramic sleeve, a nut gasket and a boat page on a graphite carrier can be detected, the detection efficiency is high, and the precision is high; the camera lens can be automatically adjusted, and the situation that shooting cannot be achieved or shooting is not in place due to the fact that the shooting position is blocked is avoided.

Description

Technical Field

[0001] This utility model relates to the field of graphite carrier inspection technology, specifically a graphite carrier visual inspection device. Background Technology

[0002] Graphite carriers, also known as graphite boats, consist of several boats arranged in parallel. The boats are connected in series by several boat rods and then fixed with nuts. Graphite carriers have good electrical conductivity and chemical stability, and can be used in high-temperature, high-pressure, and corrosive environments, making them an ideal choice for many applications. They play a key role in high-tech fields such as semiconductor manufacturing and photovoltaic cell production, mainly used to support wafers (silicon wafers) and transport them in high-temperature processes (such as annealing, diffusion, etching, etc.).

[0003] After a certain number of coating cycles on the graphite carrier, the graphite locking points on each boat blade need to be replaced. After replacement, the boat blades, ceramic sleeves, boat rods, graphite locking points, nuts, and washers need to be reassembled. The reassembled graphite carrier requires inspection of its locking points, ceramic sleeves, nuts, washers, and the straightness of its boat blades to prevent problems such as broken locking points, missing ceramic sleeves and nuts, and non-compliant straightness. Currently, most graphite carrier inspections are done manually, which is inefficient and prone to missed inspections, and cannot measure the straightness of all graphite boat blades. Although some intelligent vision inspection devices exist, these are easily obstructed, leading to either missed detections or only partial detection. This necessitates multiple inspection devices or multiple inspection mechanisms on a single device to avoid these problems, resulting in complex, large-scale, and costly manufacturing and maintenance systems. Utility Model Content

[0004] The purpose of this invention is to provide a visual inspection device for graphite carriers to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a graphite carrier visual inspection device, comprising an inspection frame for supporting the graphite carrier, a visual inspection mechanism for inspecting the graphite carrier being provided above the inspection frame, the visual inspection mechanism being connected to an inspection transverse movement mechanism for driving it to reciprocate horizontally along the length direction of the graphite carrier, and a movable industrial light source for assisting in the inspection being provided below the visual inspection mechanism.

[0006] The visual inspection mechanism includes a horizontally arranged first linear module, the transmission direction of which is perpendicular to the transmission direction of the inspection transverse movement mechanism. The first linear module is connected to a vertically conveying second linear module, and the second linear module is connected to a mounting bracket. A second motor is mounted on the mounting bracket, and the second motor is connected to a rotating mounting plate. An inspection camera is mounted on the rotating mounting plate, and the camera is connected to a dual telecentric lens.

[0007] Further preferably, a hollow rotating platform is provided between the second motor and the rotating mounting plate, the upper end of the rotating mounting plate is connected to the hollow rotating platform, the camera is mounted on the upper end of the rotating mounting plate, and the lower end of the rotating mounting plate is provided with a clamping and fixing plate for fixing the dual telecentric lenses.

[0008] Further preferably, the testing frame includes two carrier supports arranged along the length of the graphite carrier. Each carrier support is provided with a support plate, and each support plate is provided with a contour-following positioning support block. Each of the two positioning support blocks has a baffle on its opposite side. The positioning support block is used for positioning and supporting the graphite carrier, and the baffle is used for limiting the placement of the graphite carrier.

[0009] Further preferably, the positioning support block has an isosceles trapezoidal structure with a groove in the middle of its side away from the baffle. A micro switch is installed in the groove, and a photoelectric switch is installed at each end of the positioning support block. The micro switch and photoelectric switch ensure the placement accuracy and safety of the graphite carrier.

[0010] In a further preferred embodiment, the baffle is a rectangular plate with an inclined surface on its upper side near the positioning support block. The inclined surface has a guiding and avoidance effect, ensuring the safe placement of the graphite carrier.

[0011] Further preferably, the detection lateral movement mechanism includes a first motor and a drive shaft driven to rotate by the first motor. The drive shaft is horizontally positioned and perpendicular to the transmission direction of the detection lateral movement mechanism. A second pulley is connected to each end of the drive shaft, and each of the two second pulleys is connected to a second belt for driving the vision inspection mechanism. A first linear guide rail is provided on the side of each of the two second belts. The first motor drives the drive shaft to rotate, which in turn drives the second belts to rotate, ultimately causing the vision inspection mechanism to move horizontally along the first linear guide rail.

[0012] Further preferably, an encoder is provided at one end of the drive shaft, and a first pulley is provided in the middle of the drive shaft. A first belt is connected between the first motor and the first pulley. Each of the two second belts is provided with a first toothed plate for connection with the vision inspection mechanism. A support frame for supporting the vision inspection mechanism is provided between the two first toothed plates and the vision inspection mechanism. The support frame is connected to the sliders of the two first linear guides. The first motor drives the drive shaft to rotate through the first belt and the first pulley, which in turn drives the second belt to rotate. The second belt drives the support frame to move left and right through the first toothed plates, thereby driving the vision inspection mechanism to move horizontally.

[0013] Further preferably, the industrial light source is connected to a light source moving mechanism for its horizontal movement. The light source moving mechanism includes a vertically inverted third motor. The lower drive shaft of the third motor is connected to a third belt that drives the industrial light source. A second toothed plate connects the third belt to the industrial light source. A second linear guide rail is provided on the side of the third belt, and a light source bracket for supporting the industrial light source is provided on the slider of the second linear guide rail. The third motor can drive the third belt to rotate, thereby driving the industrial light source to move left and right along the second linear guide rail via the second toothed plate.

[0014] Beneficial effects: The graphite carrier visual inspection device of this utility model, through the cooperation of visual inspection mechanism, inspection transverse mechanism, industrial light source and light source moving mechanism, can inspect the jamming points, ceramic sleeves, nuts and washers on the graphite carrier, as well as the straightness of the boat blades of the graphite carrier, and can carry out all-round and accurate inspection with high inspection efficiency and high precision.

[0015] By setting up a second motor and a hollow rotating platform, the shooting angle of the camera and dual telecentric lenses can be automatically adjusted to ensure accurate imaging of the object being inspected. This avoids situations where the shooting position is blocked, preventing the object from being captured or resulting in incomplete imaging, and eliminates the need for manual adjustment. Furthermore, when inspecting different objects, the camera and dual telecentric lenses can be automatically adjusted by the second motor and the hollow rotating platform, eliminating the need for multiple vision inspection mechanisms to perform separate inspections. This simplifies and miniaturizes the structure of the vision inspection device for graphite carriers.

[0016] The visual inspection device features an ingenious structural design, a high degree of automation, high inspection accuracy, and high efficiency. At the same time, it has a simple structure, small size, and low manufacturing and maintenance costs. Attached Figure Description

[0017] Figure 1 This is an isometric structural diagram of the graphite carrier vision inspection device disclosed in the embodiment of this utility model;

[0018] Figure 2This is a schematic diagram of the main structure of the graphite carrier vision inspection device disclosed in the embodiment of this utility model;

[0019] Figure 3 This is a partial structural schematic diagram of the testing frame disclosed in the embodiment of this utility model;

[0020] Figure 4 This is a schematic diagram of the detection transverse movement mechanism disclosed in the embodiment of this utility model;

[0021] Figure 5 This is a schematic diagram of the structure of the visual inspection mechanism disclosed in the embodiments of this utility model;

[0022] Figure 6 This is a schematic diagram of the light source moving mechanism disclosed in the embodiment of this utility model;

[0023] Figure 7 This is a schematic diagram showing the state of the graphite carrier on the detection clamp as disclosed in the embodiment of this utility model.

[0024] Reference numerals: 1-Detection frame, 11-Carrier bracket, 12-Support plate, 13-Positioning support block, 131-Groove, 14-Baffle, 15-Micro switch, 16-Photoelectric switch, 2-Detection transverse movement mechanism, 21-First motor, 22-First belt, 23-Drive shaft, 24-First pulley, 25-Second pulley, 26-Second belt, 27-First linear guide rail, 28-First toothed plate, 29-Encoder, 3-Upright frame, 4-Vision inspection mechanism, 41-First linear module, 42-Second linear module, 43-Mounting bracket, 44-Second motor, 45-Hollow rotating platform, 46-Rotating mounting plate, 47-Camera, 48-Dual telecentric lens, 49-Clamping fixing plate, 6-Industrial light source, 7-Light source moving mechanism, 71-Third motor, 72-Third belt, 73-Second toothed plate, 74-Second linear guide rail, 75-Light source bracket. Detailed Implementation

[0025] The following are specific embodiments of the present invention, which are described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments.

[0026] Please refer to Figure 1 , Figure 2 , Figure 5 and Figure 7As shown, this application provides a solution, a graphite carrier visual inspection device, including an inspection frame 1 for supporting the graphite carrier, a visual inspection mechanism 4 for inspecting the graphite carrier is provided above the inspection frame 1, the visual inspection mechanism 4 is connected to an inspection transverse movement mechanism 2 for driving it to reciprocate horizontally along the length direction of the graphite carrier, and a movable industrial light source 6 for cooperating with the inspection is provided below the visual inspection mechanism 4.

[0027] The visual inspection mechanism 4 includes a horizontally arranged first linear module 41. The conveying direction of the first linear module 41 is perpendicular to the transmission direction of the inspection transverse movement mechanism 2. The first linear module 41 is connected to a vertically conveying second linear module 42. The second linear module 42 is connected to a mounting bracket 43. A second motor 44 is mounted on the mounting bracket 43. The second motor 44 is connected to a rotating mounting plate 46. An inspection camera 47 is mounted on the rotating mounting plate 46. The camera 47 is connected to a dual telecentric lens 48.

[0028] In this solution, the visual inspection device is used to inspect the graphite carrier, specifically the graphite boat. This includes inspecting the carrier's markings, ceramic sleeves, nuts, and washers, as well as the straightness of the boat's blades. The device checks for damage, missing parts, or broken markings, the presence of ceramic sleeves and nuts on the boat, and whether the straightness of the boat blades meets requirements. The inspection transverse mechanism 2 drives the visual inspection mechanism 4 along the length of the graphite carrier, performing omnidirectional photographic inspection. The transverse mechanism 2 drives the visual inspection mechanism 4 in continuous reciprocating motion, enabling comprehensive inspection of the graphite carrier with high accuracy and eliminating missed or incorrect detections. Furthermore, the use of a movable industrial light source 6 provides upward illumination, further improving inspection accuracy.

[0029] In this solution, the visual inspection mechanism 4 can move left and right under the action of the inspection lateral movement mechanism 2, while the visual inspection mechanism 4 itself can move back and forth, up and down, and rotate, achieving all-round and comprehensive inspection of the graphite carrier. The first linear module 41 can drive the camera 47 and the dual telecentric lens 48 to move back and forth, and the second linear module 42 can drive the camera 47 and the dual telecentric lens 48 to move up and down. In conjunction with the left and right movement of the inspection lateral movement mechanism 2, the camera 47 and the dual telecentric lens 48 can move arbitrarily within a specific space. Furthermore, the second motor 44 can drive the rotating mounting plate 46 to rotate, causing the camera 47 and the dual telecentric lens 48 to rotate, which can avoid obstructions and prevent jamming or obstruction of ceramic sleeves and nuts, which would prevent the camera 47 from capturing images or from capturing images completely, thus ensuring the inspection accuracy and precision of the visual inspection mechanism 4.

[0030] In this design, mounting bracket 43 is used to mount the second motor 44 and the hollow rotating platform 45, ensuring that the motor 44, the rotating mounting plate 46, the camera 47 mounted on the rotating mounting plate 46, and the dual telecentric lens 48 can all move synchronously back and forth and up and down with the mounting bracket 43. The dual telecentric lens 48 is connected to the camera 47. The dual telecentric lens 48 employs a telecentric optical path design on both the object side (object side) and the image side (camera side), ensuring that light enters the lens at a perpendicular angle. Regardless of the object's location within the depth of field (front, middle, or back), its image size and position remain consistent, completely eliminating measurement errors caused by object movement. Therefore, this further ensures the detection accuracy of the visual inspection mechanism 4.

[0031] Please refer to Figure 5 As shown, based on the above solution, in another solution of this application, a hollow rotating platform 45 is provided between the second motor 44 and the rotating mounting plate 46. The upper end of the rotating mounting plate 46 is connected to the hollow rotating platform 45. The camera 47 is installed on the upper end of the rotating mounting plate 46. The lower end of the rotating mounting plate 46 is provided with a clamping and fixing plate 49 for fixing the double telecentric lens 48.

[0032] In this design, by setting a hollow rotating platform 45 between the second motor 44 and the rotating mounting plate 46, intermediate connecting components such as gears and couplings can be reduced, resulting in a more compact structure and providing higher rotational and repeatability accuracy. Simultaneously, the transmission method is more stable, avoiding vibration and cost, thus improving the overall stability and reliability of the vision inspection mechanism 4 and ensuring its accuracy. The dual telecentric lenses 48 are mounted on the camera 47, and their lower ends are fixed to the rotating mounting plate 46, ensuring the installation stability of the dual telecentric lenses 48 and further guaranteeing the inspection accuracy of the vision inspection mechanism 4.

[0033] In this design, the dual telecentric lens 48 is fixed by a clamping and fixing plate 49. The clamping and fixing plate 49 consists of two plates with semi-circular grooves, which can hold the dual telecentric lens 48 in place and ensure the installation stability of the dual telecentric lens 48.

[0034] Please refer to Figure 3 As shown, in one embodiment of this application, the testing frame 1 includes two carrier supports 11 arranged along the length of the graphite carrier. Each carrier support 11 is provided with a support plate 12, and each support plate 12 is provided with a positioning support block 13 arranged in a similar shape. Each of the two positioning support blocks 13 has a baffle 14 on its opposite side.

[0035] In this design, the carrier bracket 11 supports the support plate 12. The graphite carrier is supported by two carrier brackets 11 positioned on the left and right sides. The support plate 12 houses the positioning support block 13 and the baffle 14. The positioning support block 13 provides positioning support for the graphite carrier, while the baffle 14 positions and limits the graphite carrier's left and right positions on the testing frame 1. The positioning support block 13 employs a contour-following structure, enabling precise positioning and support of the graphite carrier, ensuring accurate and stable placement on the testing frame 1.

[0036] Please continue to refer to Figure 3 As shown, based on the above scheme, in another scheme of this application, the positioning support block 13 is an isosceles trapezoidal structure, and a groove 131 is provided in the middle of the side away from the baffle 14. A micro switch 15 is provided in the groove 131, and a photoelectric switch 16 is provided at each end of the positioning support block 13.

[0037] In this design, the positioning support block 13 is designed as an isosceles trapezoid to match the bottom structure of the graphite carrier (i.e., the graphite boat). This ensures that the graphite carrier will not move forward or backward after being placed on the positioning support block 13, guaranteeing its stability and providing protection. The groove 131 facilitates the installation of the micro switch 15. The micro switch 15 has the advantages of low triggering force and fast response. By placing the micro switch 15 inside the positioning support block 13, the robot used to transport the graphite carrier will immediately stop its downward movement when the bottom of the graphite carrier just touches the positioning support block 13. This fast response effectively protects the graphite carrier. The photoelectric switches 16 at both ends of the positioning support block 13 are used to detect the accuracy of the graphite carrier's forward and backward position, ensuring precise positioning of the graphite carrier on the detection frame 1.

[0038] Please continue to refer to Figure 3 As shown, based on the above solution, in another solution of this application, the baffle 14 is a rectangular plate, and an inclined surface is provided on the side of the baffle near the positioning support block 13.

[0039] In this design, an inclined surface is provided above the baffle 14 to guide and avoid the graphite carrier, ensuring that the graphite carrier can be placed accurately and smoothly on the testing frame 1 without interfering with or touching the graphite carrier and causing damage to it.

[0040] Please refer to Figure 4As shown, in another embodiment of this application, the detection transverse mechanism 2 includes a first motor 21 and a drive shaft 23 driven to rotate by the first motor 21. The drive shaft 23 is horizontally arranged and perpendicular to the transmission direction of the detection transverse mechanism 2. A second pulley 25 is connected to each end of the drive shaft 23. The two second pulleys 25 are respectively connected to a second belt 26 for driving the vision detection mechanism 4. A first linear guide rail 27 is provided on the side of each of the two second belts 26.

[0041] In this design, the detection lateral movement mechanism 2 is driven by a first motor 21 to simultaneously pull the vision inspection mechanism 4 via two rear-mounted second belts 26. A first linear guide rail 27 serves as the guide, ensuring smooth and precise left-right movement of the vision inspection mechanism 4. Specifically, the first motor 21 drives the drive shaft 23 to rotate, such as via a chain, gear, or belt. The drive shaft 23 then drives the second pulleys 25 at both ends to rotate synchronously, which in turn drives the second belts 26. Furthermore, it should be noted that the drive shaft 23 is located on the right side. On the left side of the drive shaft 23, a driven pulley connected to the second belt 26 is located, which cooperates with the second pulley 25 to support and transmit power to the second belt 26. The vision inspection mechanism 4 is mounted on the first linear guide rail 27, which guides its movement.

[0042] Please continue to refer to Figure 4 As shown, in another embodiment of this application, an encoder 29 is provided at one end of the drive shaft 23, a first pulley 24 is provided in the middle of the drive shaft 23, a first belt 22 is connected between the first motor 21 and the first pulley 24, a first toothed plate 28 is provided on each of the two second belts 26 for connecting with the vision inspection mechanism 4, a support frame 3 for supporting the vision inspection mechanism 4 is provided between the two first toothed plates 28 and the vision inspection mechanism 4, and the support frame 3 is connected to the sliders of the two first linear guide rails 27.

[0043] In this scheme, the encoder 29 is used to monitor the rotational speed of the second belt 26, measuring the actual linear or angular velocity of the belt and comparing it with the set value. If an abnormal belt speed is detected, the controller immediately adjusts the motor output to maintain speed stability and prevent detection failures caused by speed fluctuations. The first belt 22 connects the first motor 21 and the first pulley 24, which is mounted on the drive shaft 23. When the first motor 21 rotates, the first belt 22 drives the first pulley 24 to rotate, which in turn drives the drive shaft 23 to rotate. The drive shaft 23 then drives the two second pulleys 25 to rotate, and the two second pulleys 25 drive the two second belts 26 synchronously, realizing the transmission capability of the detection transverse movement mechanism 2. The stand 3 supports and mounts the vision inspection mechanism 4, and connects the detection transverse movement mechanism 2 to the vision inspection mechanism 4. The second belt 26 is connected to the stand 3 via the first toothed plate 28.

[0044] Please refer to Figure 6 As shown, in another embodiment of this application, the industrial light source 6 is connected to a light source moving mechanism 7 for its horizontal movement. The light source moving mechanism 7 includes a vertically inverted third motor 71. The lower drive shaft of the third motor 71 is connected to a third belt 72 that drives the industrial light source 6 to move. A second toothed plate 73 is connected between the third belt 72 and the industrial light source 6. A second linear guide rail 74 is provided on the side of the third belt 72. A light source bracket 75 for supporting the industrial light source 6 is provided on the slider of the second linear guide rail 74.

[0045] In this design, the light source moving mechanism 7 drives the industrial light source 6 to move left and right, which, in conjunction with the vision inspection mechanism 4, enables precise inspection of the graphite carrier. Specifically, the third motor 71 drives the third belt 72, which in turn drives the industrial light source 6 to slide along the second linear guide rail 74, allowing the industrial light source 6 to move left and right with the vision inspection mechanism 4. The second toothed plate 73 connects the third belt 72 to the industrial light source 6, enabling the third belt 72 to drive the industrial light source 6 to move.

[0046] In this application, the operation process of the visual inspection device is as follows:

[0047] 1. Use a handling device (such as a robotic arm) to move the graphite carrier onto the positioning support block 13 of the testing frame 1:

[0048] II. The visual inspection mechanism 4 is used to inspect the check points of the graphite carrier, specifically including:

[0049] The industrial light source 6 is turned on, and simultaneously the second motor 44 drives the hollow rotating platform 45 to rotate, adjusting the camera 47 and the dual telecentric lens 48 to a set angle. Simultaneously, through the cooperation of the first linear module 41 and the second linear module 42, the camera 47 and the dual telecentric lens 48 are positioned to the left front side of the graphite carrier, allowing the camera 47 to completely capture the left-end locking points on several boat-shaped sections on the front of the graphite carrier. Then, the first motor 21 of the transverse movement mechanism 2 drives the two second belts 26 to rotate, causing the vision inspection mechanism 4 to move to the right. During this movement, the camera 47 continuously takes pictures of the locking points on several boat-shaped sections under its lens and uploads them to the upper-level control system. The system analyzes the received images to check for damage, missing or broken checkpoints and obtains the detection results. When the camera 47 moves to the far right, the first linear module 41 moves the camera 47 and the dual telecentric lens 48 backward a certain distance. Then, the detection lateral movement mechanism 2 moves the vision inspection mechanism 4 to the left. At the same time, the vision inspection mechanism 4 continuously takes pictures of the checkpoints on the boat page under the lens until all checkpoints on the boat page have been detected. While the vision inspection mechanism 4 is moving and taking pictures, the light source movement mechanism 7 drives the industrial light source 6 to move back and forth synchronously to ensure that the position of the industrial light source 6 and the camera 47 are synchronized.

[0050] Third, use the visual inspection mechanism 4 to inspect the ceramic sleeves and nut washers of the graphite carrier. The specific steps are the same as those in the second part above. The difference is that the camera 47 takes pictures of whether there are ceramic sleeves and nut washers on the boat rods until all the ceramic sleeves and nut washers on the boat rods have been inspected.

[0051] Fourth, the straightness of the boat pages of the graphite carrier is detected by the visual inspection mechanism 4. The specific steps are the same as those in the second part above. The difference is that the camera 47 takes pictures of the straightness of each boat page until all boat pages have been detected.

[0052] After the inspection is completed, the inspection transverse movement mechanism 2 drives the vision inspection mechanism 4 to reset, the light source movement mechanism 7 drives the industrial light source 6 to reset, and at the same time, the first linear module 41 and the second linear module 42 drive the camera 47 to reset.

[0053] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0054] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A device for visual inspection of graphite carriers, comprising an inspection rack (1) for support of graphite carriers, characterized in that: The upper side of the detection frame (1) is provided with a visual detection mechanism (4) for graphite carrier detection, the visual detection mechanism (4) is connected with a detection horizontal moving mechanism (2) for driving it to reciprocate horizontally along the length direction of the graphite carrier, and the lower side of the visual detection mechanism (4) is provided with a movable industrial light source (6) for matching detection. The visual detection mechanism (4) comprises a first linear module (41) arranged horizontally, the transmission direction of the first linear module (41) is perpendicular to the transmission direction of the detection horizontal moving mechanism (2), the first linear module (41) is connected with a second linear module (42) arranged vertically, the second linear module (42) is connected with a mounting bracket (43), the mounting bracket (43) is provided with a second motor (44), the second motor (44) is connected with a rotating mounting plate (46), the rotating mounting plate (46) is provided with a detection camera (47), and the camera (47) is connected with a double-telecentric lens (48).

2. The device for visual inspection of graphite carriers according to claim 1, characterized in that: The second motor (44) and the rotating mounting plate (46) are connected through a hollow rotating platform (45), the upper end of the rotating mounting plate (46) is connected with the hollow rotating platform (45), the camera (47) is arranged on the upper end of the rotating mounting plate (46), and the lower end of the rotating mounting plate (46) is provided with a clamping fixing plate (49) for fixing the double-telecentric lens (48).

3. The device for visual inspection of graphite carriers according to claim 1, characterized in that: The detection frame (1) comprises two carrier supports (11) arranged along the length direction of the graphite carrier, each carrier support (11) is provided with a supporting plate (12), each supporting plate (12) is provided with a positioning supporting block (13) arranged in a profile, and the opposite sides of the two positioning supporting blocks (13) are provided with a baffle (14).

4. The device for visual inspection of graphite carriers according to claim 3, characterized in that: The positioning supporting block (13) is in an isosceles trapezoidal structure, a groove (131) is arranged in the middle of the side away from the baffle (14), a microswitch (15) is arranged in the groove (131), and photoelectric switches (16) are arranged at the two ends of the positioning supporting block (13).

5. The apparatus of claim 4, wherein: The baffle (14) is a rectangular plate, and a slope is arranged on the upper side of the baffle (14) close to the side of the positioning supporting block (13).

6. The apparatus of claim 1, wherein: The detection horizontal moving mechanism (2) comprises a first motor (21) and a driving shaft (23) driven to rotate by the first motor (21), the driving shaft (23) is arranged horizontally and is perpendicular to the transmission direction of the detection horizontal moving mechanism (2), the two ends of the driving shaft (23) are connected with a second pulley (25), the two second pulleys (25) are connected with a second belt (26) for driving the visual detection mechanism (4) to transmit, and the side edges of the two second belts (26) are provided with a first linear guide rail (27).

7. The apparatus of claim 6, wherein: One end of the drive shaft (23) is provided with an encoder (29), the middle of the drive shaft (23) is provided with a first pulley (24), the first motor (21) and the first pulley (24) are connected with a first belt (22), two second belts (26) are provided with a first toothed plate (28) for connecting with the visual detection mechanism (4), two first toothed plates (28) and the visual detection mechanism (4) are provided with a stand (3) for supporting the visual detection mechanism (4), the stand (3) is connected with the sliders of two first linear guides (27).

8. The apparatus of claim 1, wherein: The industrial light source (6) is connected with a light source moving mechanism (7) for horizontal movement, the light source moving mechanism (7) comprises a third motor (71) arranged vertically, the lower end drive shaft of the third motor (71) is connected with a third belt (72) for driving the industrial light source (6) to move, the third belt (72) and the industrial light source (6) are connected with a second toothed plate (73), the side of the third belt (72) is provided with a second linear guide (74), the slider of the second linear guide (74) is provided with a light source support (75) for supporting the industrial light source (6).

Images