Photomask substrate damage prevention device for transmission box and transmission box

Abstract

The utility model relates to the technical field of semiconductor production, in particular to a photomask substrate anti-damage device for a transmission box and the transmission box, the anti-damage device comprises a frame body matched with an opening of the transmission box in shape and size, and the frame body is detachably connected to the opening of the transmission box. A plurality of vertical partition plates are arranged in the middle of the frame body, every two adjacent partition plates and the frame body define an insertion through groove, and the minimum width of each insertion through groove is matched with the thickness of an optical substrate; the device is directly arranged at the opening of the transmission box through the frame body, the gaps between the adjacent partition plates form the insertion through grooves matched with the thickness of the optical substrates, and the photomask substrates are arranged in the insertion through grooves, so that shaking of the photomask substrates can be limited, the photomask substrates are stably placed in the transmission box, and the transmission efficiency of the transmission box is improved. Damage caused by shaking of the photomask substrate in the transportation process is effectively reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and specifically provides a device for preventing damage to a photomask substrate and a transmission box for use in a transmission box. Background Technology

[0002] Photomask substrates are core materials in semiconductor manufacturing, especially in high-end photolithography technology where demand is high. Currently, the storage and transportation of produced photomask substrates are generally carried out using transport boxes. These boxes typically hold multiple photomask substrates vertically, and workers use photomask clamps to remove them from the transport box. Traditional transport boxes place the photomask substrates in corresponding slots, and to facilitate placement and removal, the width of these slots is generally slightly larger than the thickness of the photomask substrate. However, this design makes the photomask substrates prone to shaking during transportation due to uneven road surfaces or other factors, leading to damage from impacts. Utility Model Content

[0003] To solve the above problems, this utility model can be directly installed on a traditional transmission box to prevent the photomask substrate from shaking during transportation.

[0004] The technical solution of this utility model is as follows:

[0005] A damage prevention device for a photomask substrate in a transmission box includes a frame adapted to the shape and size of the transmission box opening. The frame is detachably connected to the transmission box opening. Multiple vertical partitions are provided in the middle of the frame. Two adjacent partitions and the frame enclose an insertion slot. The minimum width of the insertion slot is adapted to the thickness of the optical substrate.

[0006] In this solution, the device is directly placed at the opening of the transmission box through the frame. The gap between adjacent dividing plates forms an insertion slot that matches the thickness of the optical substrate. The photomask substrate is placed in the insertion slot, which can limit the shaking of the photomask substrate and allow the photomask substrate to be placed stably in the transmission box, effectively reducing the damage to the photomask substrate caused by shaking during transportation.

[0007] Since the minimum spacing between the vertically arranged partitions is compatible with the optical substrate, it is also inconvenient to place the photomask substrate between the partitions. To improve this problem, preferably, the bottom surface of the partitions is chamfered.

[0008] In this solution, the photomask substrate can be placed in the transmission box beforehand, and then the entire device can be installed from top to bottom on the opening of the transmission box. Due to the chamfer at the bottom of the dividing plate, the width of the insertion slot gradually increases downwards. Even if the photomask substrate has some wobbling in the transmission box, it can still be within the range of the bottom opening size of the insertion slot. As the frame is installed, the photomask substrate is inserted into the insertion slot from the bottom, which ensures the stability of the photomask substrate in the transmission box.

[0009] In addition to increasing the size of the bottom opening of the insertion slot, to reduce the number of times the device and the transmission box are disassembled and reassembled, preferably, the partition plate extends a protrusion in the vertical direction, and the gap between two adjacent protrusions decreases from top to bottom.

[0010] In this solution, by setting protrusions, the depth of the insertion slot can be extended in a different direction, and the gap between the protrusions decreases from top to bottom, which is equivalent to increasing the width of the insertion slot from the top. This device can be directly installed on the transmission box. By increasing the width of the opening, it is easier for the light-emitting substrate to be placed in the transmission box along the insertion slot.

[0011] When manually handling photomask substrates using photomask clamps, the substrates often collide with other placed substrates due to hand movement during the handling process, causing scratches. To avoid this problem (which can be mitigated by sequential placement and removal, which increases labor intensity), the height of the protrusion is greater than the height of the photomask substrate placed in the transmission box.

[0012] In this solution, by increasing the height of the protrusions, the placed photomask substrate is completely positioned between the two protrusions. No matter how the photomask substrate held by the photomask clamp shakes, it will not collide with or be scratched by the placed photomask substrate.

[0013] Since the photomask substrate is completely between the two protrusions, it is difficult to clamp the photomask substrate out with the photomask clamp without disassembling the device. Therefore, the thickness of the two ends of the protrusions in the horizontal direction gradually decreases.

[0014] This solution reduces the thickness at both ends of the protrusion and increases the gap width at both ends of the photomask substrate, thus providing clamping space for the photomask clamp.

[0015] Preferably, the partition plate is a flexible plate, and the protrusion is a flexible protrusion. Both are flexible components and will not cause scratches to the photomask substrate (the flexible outer layer is a Teflon layer or a plastic layer).

[0016] Preferably, the partition plate and / or protrusion are further provided with a rigid inner layer. The rigid inner layer increases the strength of the structure.

[0017] Preferably, the frame extends downward to form a connecting part, the outer dimensions of which are adapted to the outer dimensions of the transmission box opening, and the opening of the transmission box can be inserted into the connecting part, facilitating the installation of the device.

[0018] A photomask substrate transmission box includes a box body and the aforementioned photomask substrate anti-damage device for the transmission box.

[0019] This transmission box is equipped with a damage prevention device, which prevents the photomask substrate from colliding with or scratching other photomask substrates when it is picked up and placed. At the same time, it can also keep the photomask substrate stable in the transmission box and prevent it from shaking during transportation.

[0020] Preferably, the two opposite side walls of the box are provided with a plurality of vertical slots at intervals, and the partition plate corresponds to the intervals of the vertical slots.

[0021] The beneficial effects of this utility model are:

[0022] 1. In this utility model, the frame is directly placed at the opening of the transmission box. The gap between the adjacent dividing plates forms an insertion slot that matches the thickness of the optical substrate. The photomask substrate is placed in the insertion slot, which can limit the shaking of the photomask substrate and allow the photomask substrate to be placed stably in the transmission box, effectively reducing the damage to the photomask substrate caused by shaking during transportation.

[0023] 2. By increasing the height of the protrusions, this utility model ensures that the placed photomask substrate is completely between the two protrusions, thus fully protecting the placed photomask. It can effectively prevent the photomask held by the photomask clamp from colliding with other placed photomask substrates and causing scratches due to shaking when the photomask substrate is picked up or placed. Attached Figure Description

[0024] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a three-dimensional schematic diagram of the present invention;

[0026] Figure 2 This is a side sectional view of one embodiment of the present invention;

[0027] Figure 3 This is a side sectional view of another embodiment of the present invention;

[0028] Figure 4 This is a top view of the present invention;

[0029] Figure 5 This is a three-dimensional schematic diagram of the transmission box of this utility model;

[0030] Figure 6 This is a schematic diagram of the transmission box of this utility model after the photomask substrate is mounted.

[0031] In the above figures, the corresponding reference numerals are as follows:

[0032] 1-Frame, 2-Divider, 201-Chamfer, 3-Insert through slot, 4-Protrusion, 5-Connecting part, 6-Box, 601-Vertical slot. Detailed Implementation

[0033] The technical solution of the present invention will be clearly and completely described in conjunction with the accompanying drawings and through specific implementation methods of the embodiments of the present invention.

[0034] like Figures 1 to 4 The device shown is a damage prevention device for the photomask substrate of a transmission box. It includes a frame 1 that is adapted to the shape and size of the transmission box opening. The frame 1 is detachably connected to the opening of the transmission box. Multiple vertical partitions 2 are provided in the middle of the frame 1. Two adjacent partitions 2 and the frame 1 enclose an insertion slot 3. Of course, the two outermost insertion slots 3 can be formed by only one partition 2 plus the frame 1. The minimum width of the insertion slot 3 is adapted to the thickness of the optical substrate.

[0035] Specifically, the transmission box opening is generally rectangular, with a connecting part 5 extending downwards from the frame 1. The dimensions of the connecting part 5 are adapted to the dimensions of the transmission box opening, allowing the transmission box opening to be inserted into the connecting part 5. The device is stably positioned on the transmission box opening by its own weight, facilitating installation and quick unloading. Alternatively, the device can be directly positioned at the transmission box opening via the frame 1. Adjacent dividing plates are preferably arranged parallel to each other, ensuring uniform spacing. This creates an insertion slot 3 that matches the thickness of the optical substrate, meaning the width of the insertion slot 3 is only slightly larger than the photomask substrate. This ensures that the photomask substrate's sway in the width direction of the insertion slot 3 does not exceed 1mm. Therefore, placing the photomask substrate in the insertion slot 3 restricts its sway, allowing it to be stably placed in the transmission box and effectively reducing damage caused by swaying during transportation.

[0036] Example 1:

[0037] Because the minimum spacing between the vertically arranged partition plates 2 is compatible with the optical substrate, it is also inconvenient to place the photomask substrate between the partition plates 2. To improve this problem, such as Figure 2 As shown, the bottom surface of the partition plate 2 is provided with a chamfer 201.

[0038] In this embodiment, the photomask substrate can be placed in the transmission box in advance, and then the entire device can be installed from top to bottom on the opening of the transmission box. Due to the chamfer 201 at the bottom of the dividing plate, the width of the insertion slot 3 gradually increases downwards. Even if the photomask substrate has some shaking in the transmission box, it can still be within the range of the bottom opening size of the insertion slot 3. As the frame 1 is installed, the photomask substrate is inserted into the insertion slot 3 from the bottom, which can ensure the stability of the photomask substrate in the transmission box.

[0039] Example 2:

[0040] Unlike Embodiment 1, in addition to enlarging the bottom opening of the insertion slot 3, this embodiment also reduces the number of times the device and transmission box are disassembled and reassembled. Figure 3 As shown, the partition plate 2 extends a protrusion 4 in the vertical direction, and the gap between two adjacent protrusions 4 decreases from top to bottom.

[0041] Specifically, by setting the protrusion 4, the depth of the insertion slot 3 can be extended in a different direction, and the gap between the protrusions 4 decreases from top to bottom, which is equivalent to increasing the width of the insertion slot 3 from the top. This device can be directly installed on the transmission box. By increasing the width of the opening, it is easier for the light-emitting substrate to be placed in the transmission box along the insertion slot 3.

[0042] Furthermore, when manually handling and placing photomask substrates using photomask clamps, the gripping motion often causes the substrate to collide with other placed substrates, resulting in scratches. To avoid this problem, such as... Figure 6 The height of the protrusion 4 shown is greater than the height of the photomask substrate placed in the transmission box. By increasing the height of the protrusion 4, the placed photomask substrate is completely positioned between the two protrusions 4, so that no matter how the photomask substrate held by the photomask clamp shakes, it will not collide with or be scratched.

[0043] Furthermore, since the photomask substrate is completely situated between the two protrusions 4, it is difficult to remove the photomask substrate using the photomask clamp without disassembling the device. Therefore, as follows: Figure 4 The thickness of the protrusion 4 gradually decreases at both ends in the horizontal direction. By reducing the thickness at both ends of the protrusion 4, the gap width at both ends of the photomask substrate is increased, providing clamping space for the photomask clamp.

[0044] Example 3:

[0045] Based on the above embodiments, to ensure that the photomask substrate is not scratched by collisions during the entire process of picking up, placing, and transporting, the partition plate 2 is a flexible plate, and the protrusion 4 is a flexible protrusion 4. Both are flexible components and will not cause scratches to the photomask substrate. The flexible plate and the flexible part are made of materials such as Teflon or plastic. Furthermore, since the protrusion 4 is an extension of the partition plate 2, the partition plate 2 and the protrusion 4 can be integrally formed.

[0046] Furthermore, a rigid inner layer is also provided in the partition plate 2 and / or the protrusion 4. Providing a rigid inner layer in the partition plate 2 and the protrusion 4 can effectively increase the strength of the structure, and the rigid inner layer is preferably made of materials such as 304 stainless steel.

[0047] It should be noted that the material of the frame 1 is the same as that of the partition plate 2 and / or the protrusion 4, so as to facilitate integrated molding. At the same time, these materials need to be able to prevent the generation of static electricity.

[0048] Example 4:

[0049] A photomask substrate transmission box, such as Figure 5 As shown, it includes a housing 6 and a photomask substrate anti-damage device for the transmission box as described above.

[0050] Specifically, the box body 6 has multiple vertical slots 601 spaced apart on its two opposite side walls, and the partition plate 2 corresponds to the spacing of the vertical slots 601. This transmission box is equipped with a damage prevention device to prevent the photomask substrate from colliding or being scratched with other photomask substrates when it is picked up and placed, and also to ensure that the photomask substrate is placed stably in the transmission box without shaking during transportation.

[0051] The photomask substrate anti-damage device is detachably connected to the housing 6 via the connecting part 5 below. Specifically, the connecting part 5 can be connected by inserting the housing 6 into the connecting part 5 and locking it laterally with bolts or screws, or by interference fit. Of course, if disassembly is not a concern, the two can also be fixed together with adhesive.

[0052] During use, such as Figure 6 As shown, it is preferable to directly install the photomask substrate anti-damage device on the box 6. The photomask substrate, which is picked up by the photomask clamp, is directly inserted between any two adjacent protrusions 4 and placed in the box 6 along the insertion slot 3 until the entire box 6 is filled. When taking it out, any photomask substrate can be selected for removal without controlling the order of taking out and placing it.

[0053] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A damage prevention device for a photomask substrate used in a transmission box, characterized in that, The device comprises a frame (1) which is matched with the shape and size of the opening of the transport box, and the frame (1) is detachably connected to the opening of the transport box, and a plurality of vertical partition plates (2) are arranged in the frame (1), and two adjacent partition plates (2) and the frame (1) form an insertion slot (3), and the minimum width of the insertion slot (3) is matched with the thickness of the optical substrate.

2. The damage prevention apparatus for a mask substrate of a transport cassette according to claim 1, wherein The bottom surface of the partition plate (2) is provided with a chamfer (201).

3. The damage prevention apparatus for a mask substrate of a transport cassette according to claim 1, wherein The partition plate (2) extends a convex part (4) in the vertical direction, and the gap between two adjacent convex parts (4) decreases from top to bottom.

4. The device for preventing damage to a mask substrate of a transport cassette according to claim 3, wherein The height of the convex part (4) is greater than the height of the mask substrate placed in the transport box.

5. The device for preventing damage to a mask substrate of a transport cassette according to claim 4, wherein The thickness of the convex part (4) gradually decreases at both ends in the horizontal direction.

6. The device for preventing damage to a mask substrate of a transport cassette according to claim 3, wherein The partition plate (2) is a flexible plate, and the convex part (4) is a flexible convex part.

7. The reticle substrate damage prevention apparatus for a transport cassette of claim 6, wherein, A rigid inner layer is further arranged in the partition plate (2) and / or the convex part (4).

8. The apparatus for preventing damage to a mask substrate of a transport cassette according to any one of claims 1 to 7, wherein The frame (1) extends a connecting part (5) downward, and the shape and size of the connecting part (5) are matched with the shape and size of the opening of the transport box, and the opening of the transport box can be inserted into the connecting part (5).

9. A reticle substrate transport box comprising a box body (6), characterized in that The device further comprises a mask substrate damage prevention device for a transport box according to any one of claims 1-8.

10. The reticle pod of claim 9, wherein, A plurality of vertical slots (601) are arranged on the two opposite side walls of the box body (6) at intervals, and the interval of the partition plate (2) corresponds to the interval of the vertical slot (601).

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