Filtering system and protection mechanism applied to filtering device in filtering system

Abstract

The utility model relates to the technical field of semiconductor filtering, and provides a filtering system and a protection mechanism applied to a filtering device in the system, and the protection mechanism comprises a controller which is configured to generate different control instructions according to different states of a filter element assembly; the blocking piece can move in the axial direction of the barrel body under the indication of the control instruction; when the control instruction is a protection instruction, the blocking piece surrounds the periphery of at least part of the connecting piece, and at least one end of the blocking piece abuts against the disassembling and assembling piece so as to prevent the disassembling and assembling piece from driving the connecting piece to rotate. According to the scheme, when the blocking piece is located at the connecting position, it is indicated that the filter element assembly does not need to be replaced at the current time node, a worker cannot disassemble the connecting piece through the disassembling and assembling piece to disconnect the base and the barrel body and take out the filter element assembly, and unnecessary filter element assembly replacement operation is avoided; the technical problem that the replacement cycle of the filter element assembly is wrongly judged due to manual judgment errors is solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor filtration technology, and more particularly to a filtration system and a protection mechanism for the filtration device used in the system. Background Technology

[0002] For semiconductor equipment, the cleanliness of chemicals is crucial to the equipment's utilization efficiency, performance, and operating costs. To achieve and maintain the required high purity of chemicals, appropriate filters must be selected to remove impurities, minimizing contaminant levels and improving chemical purity, thereby ensuring the yield of equipment processing at every stage of chip manufacturing.

[0003] For example, in a grinding slurry supply system, the grinding slurry needs to be finely filtered before entering the supply pipeline to remove impurities and particles, ensuring the uniformity of the grinding slurry. Similarly, in a chemical filling system, a filter element with an appropriate pore size is selected to filter the chemicals before filling, intercepting fine particles to avoid the impact of particulate impurities on subsequent processes and improve product quality.

[0004] Over prolonged use, filter elements gradually wear down, age, and become clogged, leading to a decrease in filtration accuracy. Currently, filter element replacement is done manually. Workers subjectively judge whether filter element replacement is necessary based on equipment operating status, log information, and the filter's operating status. This method is prone to errors in human judgment regarding equipment or filter conditions, resulting in incorrect filter element replacement cycles. For example, if a worker observes fluctuations in equipment operating parameters over a certain period, they might mistakenly assume the filter element is clogged and disassemble the filter to replace it. In reality, the problem isn't with the filter element itself; it could still be used. The issue lies in equipment fatigue damage requiring timely maintenance. This increases the cost of frequent filter element replacements. Furthermore, each filter element replacement requires stopping the production line and waiting for the replacement to complete before restarting, which is time-consuming. If misjudgments of equipment or filter conditions lead to unnecessary filter element replacements, significant time is wasted, hindering production line efficiency. Utility Model Content

[0005] The purpose of this application is to provide a filtration system and a protective mechanism for the filtration device in the system. When the blocking part is located at the connection, the operator cannot remove the connecting part to disconnect the base from the cylinder and take out the filter element assembly, thus avoiding unnecessary filter element replacement operations.

[0006] The solution to the technical problem provided in this application is:

[0007] In a first aspect, a protective mechanism for a filtration device is provided. The filtration device includes a base, a cylindrical body, a filter element assembly disposed inside the cylindrical body, and a connector disposed between the base and the cylindrical body. The connector can rotate in a fastening or loosening direction under the action of a mating component, thereby fixing or separating the base from the cylindrical body. The protective mechanism includes:

[0008] The controller is configured to generate different control commands based on different states of the filter element assembly;

[0009] The blocking element can move axially along the cylinder body under the instruction of the control command;

[0010] When the control command is a protection command, the blocking member surrounds at least a portion of the outer periphery of the connector, and at least one end of the blocking member abuts against the disassembly / assembly member to prevent the disassembly / assembly member from driving the connector to rotate.

[0011] Preferably, the shape of the body of the blocking member matches the shape of the outer periphery of the connecting member.

[0012] Preferably, the connector is annular, the blocking member is arc-shaped, the blocking member is concentrically arranged with the connector, and the radius of the blocking member is larger than the radius of the connector.

[0013] Preferably, the disassembly component includes an arc-shaped disassembly portion, the blocking component is concentrically arranged with the disassembly portion, and the sum of the arc of the blocking component and the arc of the disassembly portion is greater than or equal to 360°.

[0014] Preferably, both the connector and the blocking member are annular, and the blocking member and the connector are concentrically arranged, with the radius of the blocking member being larger than the radius of the connector.

[0015] Preferably, the protection mechanism further includes a driving component, which includes an output portion connected to the blocking component. The driving component drives the output portion to move the blocking component along the axial direction of the cylinder according to the control command.

[0016] Preferably, the protection mechanism further includes an adapter connecting the blocking member and the output section.

[0017] Preferably, the range of movement of the blocking member is between the top surface of the connector and the base.

[0018] In the second aspect, a filtration system is provided, comprising:

[0019] At least one row of connected groups of filter devices, each group of filter devices including at least one filter device, each filter device being equipped with the protection mechanism of the first aspect for the filter device.

[0020] According to the specific embodiments provided in this application, the following technical effects are disclosed:

[0021] This application provides a filtration system and a protective mechanism for the filtration device within the system. The filtration device includes a base, a cylinder, a filter element assembly disposed inside the cylinder, and a connector disposed between the base and the cylinder. The connector can rotate in a tightening or loosening direction under the action of a mating / removing component, fixing or separating the base from the cylinder. The protective mechanism includes: a controller configured to generate different control commands based on different states of the filter element assembly; and a blocking component that can move axially along the cylinder under the instruction of the control command. When the control command is a protection command, the blocking component surrounds at least a portion of the outer periphery of the connector, with at least one end of the blocking component abutting against the mating / removing component to prevent the mating / removing component from rotating the connector. In this solution, when the blocking component is located at the connection point, it indicates that the filter element assembly does not need to be replaced at the current time. Workers cannot remove the connector using the mating / removing component to disconnect the base from the cylinder and remove the filter element assembly, thus avoiding unnecessary filter element replacement operations and solving the technical problem of incorrect filter element replacement cycle judgment caused by human error. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the blocking member provided in the embodiment of this application located at the connector to block the disassembly and assembly of the member;

[0024] Figure 2 This is a schematic diagram showing that the blocking member provided in the embodiment of this application is not located at the connector;

[0025] Figure 3 This is a schematic diagram of the filtering system provided in the embodiments of this application.

[0026] Figure label:

[0027] 10. Base; 20. Cylinder; 30. Connector; 40. Assembly / Disassembly Part; 50. Blocking Part; 60. Drive Part; 70. Adapter Part; 100. Filter Unit Assembly; 400. Assembly / Disassembly Part; 410. Holding Part; 600. Output Part; 1000. Filter Unit; A. Chemical Inlet; B. Chemical Outlet. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] As described in the background section, filter elements gradually wear out, age, and become clogged during prolonged use, leading to a decrease in filtration accuracy. Currently, filter element replacement is done manually. Workers subjectively judge whether filter element replacement is necessary based on equipment operating status, log information, and the filter's operating status. This method is prone to errors in human judgment regarding equipment or filter conditions, resulting in incorrect filter element replacement cycles. For example, if a worker observes fluctuations in equipment operating parameters over a certain period, they might mistakenly assume the filter element is clogged and disassemble the filter to replace it. In reality, the problem isn't with the filter element itself; it could still be used. The issue lies in fatigue damage to the equipment, requiring timely maintenance. This increases the cost of frequent filter element replacements. Similarly, if a worker observes slight fluctuations in the parameters of chemicals being delivered to a particular device, they might mistakenly consider it normal error and believe the filter element doesn't need replacement and can continue to be used. However, the filter element may already be clogged and requires immediate replacement; otherwise, the quality of the filtered chemicals will not meet standards. Furthermore, each time the filter element needs to be replaced, the equipment on the production line needs to be stopped and restarted after the filter element is replaced. This process is time-consuming, and if there is a misjudgment of the status of the equipment or the filter element, and the filter element is replaced unnecessarily, a lot of working time is wasted, which is not conducive to improving the operating efficiency of the production line.

[0030] Based on this, this application provides a filtration system and a protection mechanism for the filtration device in the system, aiming to solve the technical problem of incorrect judgment of filter element replacement cycle caused by human error in the prior art.

[0031] Example 1

[0032] Embodiment 1 of this application provides a protective mechanism applied to a filtration device, referencing... Figure 1 and Figure 2The filtration device includes a base 10, a cylinder 20, a filter element assembly (not shown) disposed inside the cylinder 20, and a connector 30 disposed between the base 10 and the cylinder 20. The connector 30 can rotate in a tightening or loosening direction under the action of a disassembly / assembly member 40 that cooperates with it, thereby fixing or separating the base 10 from the cylinder 20. The protection mechanism includes: a controller configured to generate different control commands according to different states of the filter element assembly; and a blocking member 50 that can move axially along the cylinder 20 under the instruction of the control command. When the control command is a protection command, the blocking member 50 surrounds at least part of the outer periphery of the connector 30, and at least one end of the blocking member 50 abuts against the disassembly / assembly member 40 to prevent the disassembly / assembly member 40 from driving the connector 30 to rotate.

[0033] The filter element assembly is the main component of the filtration device, used to filter chemicals flowing through it to remove impurities. During use, the unfiltered chemicals flow into the cylinder 20 from the chemical inlet (not shown in the figure) of the base 10. The filter element assembly filters the chemicals, and the filtered chemicals flow to the processing equipment from the chemical outlet (not shown in the figure) on the cylinder 20. To replace the filter element assembly, the operator needs to use the disassembly / removal component 40 to rotate in the loosening direction to unscrew the connector 30, remove the old filter element assembly from the cylinder 20, replace it with a new one, close the cylinder 20 and base 10, and then use the disassembly / removal component 40 again in the tightening direction to tighten the connector 30. The loosening direction is opposite to the tightening direction. The blocking member 50 can be a closed body. When it surrounds the entire periphery of the connector 30, the disassembly and assembly member 40 cannot be engaged with the connector 30, so the operator cannot disassemble the filter device to remove the filter element assembly. The blocking member 50 can also be a non-closed body. When it surrounds part of the connector 30, if the surrounding area of ​​the blocking member 50 is large and can cover most of the connector 30, the disassembly and assembly member 40 cannot be engaged with the connector 30. If the surrounding area of ​​the blocking member 50 is small and cannot cover most of the connector 30, the disassembly and assembly member 40 can be engaged with the connector 30 depending on the actual working conditions, but it will still abut against one or both ends of the blocking member 50, and the disassembly and assembly member 40 cannot drive the connector 30 to rotate.

[0034] In one specific embodiment, a controller (not shown) is connected to the blocking member 50, and the protection mechanism also includes a pressure sensor (not shown) connected to the chemical outlet. In the prior art, the pressure sensor is used to monitor the pressure value of the outflowing chemical in real time and feed it back to the controller. The controller can determine the status of the filter element assembly based on the pressure value of the chemical and generate control commands based on the status of the filter element assembly. If the pressure value of the outflowing chemical meets the preset standard value, the controller determines that the pressure of the chemical is normal, indicating that the filter element assembly is normal and not blocked, and does not need to be replaced in the current state. At this time, the controller issues a protection command to the blocking member 50, controlling the blocking member 50 to remain in a fixed position, surrounding at least part of the outer periphery of the connecting member 30, so that the operator cannot use the disassembly and assembly member 40 to rotate the connecting member 30 to remove the filter element assembly, thereby avoiding the problem of premature replacement of the filter element assembly due to human error. If the pressure value of the outflowing chemicals does not meet the preset standard value, the controller determines that the chemical pressure is abnormal and triggers a filter element replacement reminder, indicating that the filter element is clogged and needs to be replaced immediately. At this time, the controller issues an unlocking command to the blocking member 50, controlling the blocking member 50 to change its position away from the connecting member 30. The direction of moving away can be upward or downward along the axial direction of the cylinder 20, or it can be moved away radially along the cylinder 20, so that the disassembly and assembly member 40 can be inserted into the connecting member 30 without contacting the blocking member 50. This allows the operator to use the disassembly and assembly member 40 to rotate the connecting member 30 to remove the cylinder 20 and take out the filter element.

[0035] In summary, when the blocking component 50 is located at the connecting component 30, it indicates that the filter element assembly is in normal condition and can continue to be used. Operators cannot separate the cylinder 20 from the base 10 by rotating the connecting component 30 using the disassembly component 40 to remove the filter element assembly. This solves the problem of premature filter element replacement caused by human error, avoiding unnecessary replacements when the filter element assembly is in normal condition and reducing its consumption costs. Simultaneously, it avoids downtime caused by misjudgment, significantly shortening equipment downtime and improving the overall operating efficiency of the production line.

[0036] Preferably, the shape of the body of the blocking member 50 matches the shape of the outer periphery of the connecting member 30.

[0037] The outer periphery of the connector 30 can be a regular polygon or a circle, and the body of the blocking member 50 can also be a regular polygon or a circle.

[0038] In one specific embodiment, reference Figure 1 and Figure 2 The connector 30 is annular, and the blocking member 50 is arc-shaped. The blocking member 50 is concentric with the connector 30, and the radius of the blocking member 50 is greater than the radius of the connector 30.

[0039] It should be noted that Figure 1 The perspective view of the disassembly / assembly component 40 and the blocking component 50 is intended to show that when the blocking component 50 surrounds the outer periphery of part of the connecting component 30, both ends of the blocking component 50 abut against the disassembly / assembly component 40, and the disassembly / assembly component 40 cannot be inserted into the connecting component 30 in actual working conditions. Figure 1 and Figure 2 As shown, the outer periphery of the connector 30 is circular, and the blocking member 50 is a non-closed body with an arc shape in its axial direction. In the top view of the protective mechanism, the blocking member 50 is concentric with the connector 30, and the radius of the blocking member 50 is larger than that of the connector 30. This allows the blocking member 50 to surround the outer periphery of the connector 30, thereby blocking the disassembly / assembly of the component 40. Furthermore, in most operating conditions, the blocking member 50 and the connector 30 are not fitted together. However, in certain special conditions, such as when the installation space is narrow, the blocking member 50 can be fitted together with the connector 30 to reduce the space occupied.

[0040] In one specific embodiment, the disassembly component 40 includes an arc-shaped disassembly portion 400, and a blocking component 50 is concentrically disposed with the disassembly portion 400. The sum of the arc of the blocking component 50 and the arc of the disassembly portion 400 is greater than or equal to 360°.

[0041] The connector 30 has evenly distributed raised structures on its outer periphery, and the disassembly / assembly part 400 has evenly distributed recessed structures on its inner wall. When the recessed structures and raised structures mate and abut, the disassembly / assembly part 400 engages with the connector 30. The disassembly / assembly part 40 also includes a gripping part 410 connected to the disassembly / assembly part 400. The operator can grip the gripping part 410 and rotate it, causing the disassembly / assembly part 400 to rotate the connector 30, thereby tightening or loosening the connector 30.

[0042] In one specific embodiment, the curvature of the blocking member 50 can be set to any value between 35° and 65°. For example... Figure 1 As shown in the perspective view of the disassembly / assembly part 40 and the blocking part 50, the curvature of the blocking part 50 plus the curvature of the disassembly / assembly part 400 is greater than 360°. That is, only one of the blocking part 50 and the disassembly / assembly part 400 can exist in actual working conditions. When the blocking part 50 exists, the disassembly / assembly part 400 cannot be inserted into the connector 30. When the blocking part 50 does not exist, the disassembly / assembly part 400 can be inserted into the connector 30.

[0043] exist Figure 1In the shown working condition, the blocking member 50 surrounds the outer peripheral surface of the connector 30 and maintains a preset distance from the connector 30. At this time, the disassembly / assembly part 400 cannot be engaged with the connector 30. In the perspective view of the blocking member 50 and the disassembly / assembly part 400, the sum of the curvature of the blocking member 50 and the curvature of the disassembly / assembly part 400 is greater than or equal to 360°. If the disassembly / assembly part 400 is engaged with the connector 30, the two ends of the blocking member abut against the disassembly / assembly part 400, preventing the disassembly / assembly part 40 from rotating, and thus preventing the connector 30 from rotating. This achieves the blocking effect of the blocking member 50 on the disassembly / assembly part 40.

[0044] exist Figure 2 Under the operating conditions shown, the blocking member 50 is positioned away from the connector 30 and does not surround the connector 30. At this time, the disassembly and assembly part 400 is inserted into the connector 30, which can drive the connector 30 to rotate, thereby loosening the connector 30, disconnecting the connection between the cylinder 20 and the base 10, and removing the filter element assembly.

[0045] In an optional embodiment, both the connector 30 and the blocking member 50 are annular, concentrically arranged, with the radius of the blocking member 50 being larger than that of the connector 30. When the controller issues a protection command to the blocking member 50, the blocking member 50 completely surrounds the outer periphery of the connector 30, preventing the disassembly / assembly member 40 from engaging with the connector 30. It should be noted that the radius difference between the blocking member 50 and the connector 30 needs to be determined based on the actual working conditions and the overall installation space of the mechanism to avoid the risk of the filter device being opened during operation due to an excessively large radius difference that could allow the disassembly / assembly member 40 to contact the connector 30.

[0046] In one specific embodiment, the connector 30 is a nut, and the disassembly / assembly part 40 is a wrench that matches the shape of the nut.

[0047] Preferably, the protection mechanism further includes a drive member 60, which includes an output part 600 connected to the blocking member 50. The drive member 60 drives the output part 600 to move the blocking member 50 along the axial direction of the cylinder 20 according to the control command.

[0048] In one specific embodiment, the driving component 60 is a cylinder controlled by a controller, and the output part 600 is the output rod of the cylinder. For example... Figure 1 and Figure 2 As shown, the cylinder is placed vertically, and the output rod can drive the blocking member 50 to move up and down along the axial direction of the cylinder 20. After the new filter element assembly is replaced, the controller controls the cylinder to start, and the output rod, under the instruction of the protection command, drives the blocking member 50 to the connector 30, so that the blocking member 50 is set around the connector 30; when the controller determines that the chemical pressure is abnormal, the controller wakes up the cylinder, and the output rod, under the instruction of the unlock command, drives the blocking member 50 away from the connector 30, so that the operator can use the disassembly part 40 to rotate the connector 30 to separate the cylinder 20 from the base 10.

[0049] Preferably, refer to Figure 1 and Figure 2 The range of movement of the blocking member 50 is between the top surface of the connector 30 and the base 10.

[0050] Considering that the length of the cylinder 20 is much greater than the length of the base 10, and the actual output range of the cylinder when the driving component 60 is a cylinder, if the cylinder moves the blocking component 50 upward to a designated position away from the connecting component 30, it may exceed the output range of the cylinder. Furthermore, the blocking component 50 is located on the side wall of the cylinder 20, and workers will inevitably touch and bump into it when disassembling the cylinder 20. Therefore, the movement range of the blocking component 50 is limited to between the connecting component 30 and the top surface of the base 10. The cylinder moves the blocking component from the base 10 upward to the connecting component 30, or from the connecting component 30 downward to the base 10.

[0051] Preferably, refer to Figure 1 and Figure 2 The protection mechanism also includes an adapter 70 connecting the blocking member 50 and the output section 600. The adapter 70 can be welded between the blocking member 50 and the output section 600 to ensure the stability of the connection.

[0052] Example 2

[0053] Embodiment 2 of this application provides a filtering system based on Embodiment 1, referencing... Figure 3 The system includes: at least one row of connected filter device groups 100, each filter device group 100 including at least one filter device 1000, and each filter device 1000 being equipped with the protection mechanism applied to the filter device 1000 in Embodiment 1.

[0054] In a specific embodiment, such as Figures 1 to 3As shown, the filtration system has four filter unit groups 100 arranged in a row and connected in parallel. Each filter unit group 100 has four filter units 1000. All filter units 1000 are arranged in the same direction, so that all inlets are connected together to form chemical inlet A, and all outlets are connected together to form chemical outlet B. Each filter unit 1000 consists of a base 10, a cylinder 20, a connector 30, and a filter element assembly. When the filter element assembly needs to be replaced, the blocking part 50 in the protection mechanism moves away from the connector 30 under the drive of the drive part 60, so that the operator can use the disassembly part 40 to rotate the connector 30 to separate the cylinder 20 from the base 10 and replace the filter element assembly. It should be noted that when replacing the filter element assembly, all filter unit groups 100 and the equipment connected to chemical inlet A and chemical outlet B are suspended. When the filter element assembly does not need to be replaced, the blocking part 50 moves to the connecting part 30 under the drive of the driving part 60 and surrounds the outer periphery of the connecting part 30. At this time, the operator cannot use the disassembly and assembly part 40 to rotate the connecting part 30.

[0055] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0056] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0057] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A protective mechanism for a filtration device, the filtration device comprising a base (10), a cylindrical body (20), a filter element assembly disposed inside the cylindrical body (20), and a connector (30) disposed between the base (10) and the cylindrical body (20), the connector (30) being rotatable in a fastening or loosening direction under the action of a mating / removing component (40) cooperating with it, thereby fixing or separating the base (10) from the cylindrical body (20), characterized in that, The protection mechanism includes: The controller is configured to generate different control commands based on different states of the filter element assembly; The blocking element (50) can move axially along the cylinder (20) under the instruction of the control command; When the control command is a protection command, the blocking member (50) surrounds at least part of the outer periphery of the connector (30), and at least one end of the blocking member (50) abuts against the disassembly member (40) to prevent the disassembly member (40) from driving the connector (30) to rotate.

2. The protection mechanism applied to a filtration device according to claim 1, characterized in that, The shape of the body of the blocking member (50) matches the shape of the outer periphery of the connecting member (30).

3. The protection mechanism applied to a filtration device according to claim 2, characterized in that, The connector (30) is annular, the blocking member (50) is arc-shaped, the blocking member (50) and the connector (30) are concentrically arranged, and the radius of the blocking member (50) is greater than the radius of the connector (30).

4. The protection mechanism applied to a filtration device according to claim 3, characterized in that, The disassembly / assembly component (40) includes an arc-shaped disassembly / assembly section (400), and the blocking component (50) is concentrically arranged with the disassembly / assembly section (400). The sum of the arc of the blocking component (50) and the arc of the disassembly / assembly section (400) is greater than or equal to 360°.

5. The protection mechanism applied to a filtration device according to claim 2, characterized in that, Both the connector (30) and the blocking member (50) are annular, and the blocking member (50) and the connector (30) are concentrically arranged. The radius of the blocking member (50) is larger than the radius of the connector (30).

6. The protection mechanism applied to a filtration device according to claim 1, characterized in that, The protection mechanism further includes a drive member (60), which includes an output section (600) connected to the blocking member (50). The drive member (60) drives the output section (600) to move the blocking member (50) along the axial direction of the cylinder (20) according to the control command.

7. The protection mechanism applied to a filtration device according to claim 6, characterized in that, The protection mechanism also includes a connector (70) connecting the blocking member (50) and the output section (600).

8. The protection mechanism applied to a filtration device according to claim 6, characterized in that, The range of movement of the blocking member (50) is between the top surface of the connecting member (30) and the base (10).

9. A filtration system, characterized in that, The filtration system includes: At least one row of connected filter device groups (100), each filter device group (100) including at least one filter device (1000), each filter device (1000) being equipped with a protection mechanism applied to the filter device (1000) as described in any one of claims 1 to 8.

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