Micro-dust filtering device for chip production

Abstract

The utility model discloses a tiny dust filtering device for chip production, and relates to the technical field of dust removal and filtering for chip production. The dust collection assembly is used for treating micro dust on the surface of the chip body; the filtering assembly is used for blocking tiny dust and is arranged in the filtering box; the dust collection assembly is driven by the swing assembly to do horizontal reciprocating motion, so that the cleaning assembly is used for removing dust from the filtering assembly; the filter assembly comprises a fixed seat fixedly connected to the interior of the filter box, a through groove is formed in the inner wall of the bottom of the fixed seat, and filter cloth is fixedly connected to the interior of the through groove. Air carrying tiny dust can be effectively blocked through the filter cloth in the through groove of the fixed seat in the filter assembly, and the tiny dust is left in the filter box; clean air is exhausted, so that the filtering effect on tiny dust is ensured.

Description

Technical Field

[0001] This utility model relates to the field of dust removal and filtration technology in chip manufacturing, and in particular to a micro dust filtration device for chip manufacturing. Background Technology

[0002] In the chip manufacturing process, from wafer fabrication, photolithography, etching to packaging, tiny dust particles can easily adhere to the chip surface. These dust particles not only affect the flatness and smoothness of the chip surface, but may also cause circuit failures such as short circuits and open circuits in subsequent processes, severely reducing chip performance and yield.

[0003] Currently, common methods for handling micro-dust in chip manufacturing, such as overall workshop purification systems, can effectively filter micro-dust within the workshop, but they cannot precisely filter dust from the chip surface. Furthermore, traditional filtration equipment often suffers from uneven suction distribution, leading to poor adhesion between the suction head and the chip surface, creating numerous blind spots and hindering efficient cleaning and filtration of micro-dust from the chip surface. Therefore, there is an urgent need for a micro-dust filtration device for chip manufacturing to address these issues. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of existing technologies by proposing a micro-dust filtration device for chip manufacturing. Its advantages are: the filter cloth within the slot of the fixing seat in the filter assembly effectively blocks air carrying micro-dust, retaining the micro-dust within the filter box while releasing clean air, thus ensuring effective filtration of the micro-dust.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A micro-dust filtration device for chip manufacturing, comprising:

[0007] Filter box;

[0008] A dust-collecting component used to remove fine dust from the surface of a chip.

[0009] A filter assembly for blocking fine dust particles, the filter assembly is located inside the filter box;

[0010] The cleaning component and the oscillating component are used to drive the dust collection component to make horizontal reciprocating motion, so that the cleaning component can remove dust from the filter component.

[0011] The filter assembly includes a fixed base that is fixedly connected inside the filter box. The bottom inner wall of the fixed base has a through groove, and a filter cloth is fixedly connected inside the through groove.

[0012] The above technical solutions enable the initial collection of micro-dust on the surface of the chip, solving the problem that traditional filtration equipment cannot accurately remove dust from the chip surface.

[0013] The present invention is further configured such that the dust collection component includes a fan fixedly connected to the top outer wall of the filter box, a negative pressure pipe fixedly connected to one side of the fan, and an exhaust pipe with equal distances distributed at the bottom of the negative pressure pipe. The exhaust pipe is connected to the filter box, and a fixed pipe with equal distances distributed at the bottom outer wall of the filter box is fixedly connected to the bottom outer wall. A corrugated pipe is provided at one end of the fixed pipe, and a horizontal pipe is fixedly connected to the end of the corrugated pipe away from the fixed pipe. Dust collection heads with equal distances distributed at the bottom of the horizontal pipe are inserted into the bottom of the horizontal pipe, and the dust collection heads are located on the top of the chip body.

[0014] The above technical solution involves placing the dust collection head on the top of the chip body. After the air carrying dust enters the filter box, it passes through the filter cloth in the slot of the fixed seat. The filter cloth effectively blocks the dust, allowing clean air to be discharged from the fan, thus ensuring the filtration effect of the dust and preventing the dust from being discharged with the air and causing secondary pollution.

[0015] The present invention is further configured such that a flow guide shroud is fixedly connected inside the filter box, the top of the flow guide shroud has a sloping structure, and the sloping structure is located directly below the filter cloth.

[0016] Through the above technical solution: because the top of the guide hood has a sloping structure and is located directly below the filter cloth, under the action of gravity, the sloping structure can guide the dust to slide down the guide hood to the dust discharge slot port, which makes it easier for staff to clean the inside of the filter box and improves cleaning efficiency.

[0017] The present invention is further provided that a dust discharge groove is provided on one side of the outer wall of the filter box, and a sealing plate is bolted to one side of the dust discharge groove to ensure that the inside of the filter box is sealed.

[0018] With the above technical solution, when it is necessary to clean the fine dust, simply open the sealing plate to discharge the fine dust from the dust discharge trough. The operation is convenient and ensures the continuous and efficient operation of the filtration device.

[0019] The present invention is further configured such that the swing assembly includes a support plate fixedly connected to the outer wall of one side of the frame, a motor fixedly connected to the top outer wall of the support plate, a second rotating column fixedly connected to the output end of the motor, a crank fixedly connected to the outer circumference of the second rotating column, a connecting rod rotatably connected to one end of the crank, a fixed column fixedly connected to the other end of the connecting rod, a fixed column fixedly connected to one end of the fixed column, a support leg fixedly connected to the bottom of the filter box, a horizontal plate fixedly connected to one side of the support leg, a limit hole opened on one side outer wall of the horizontal plate, and one end of the fixed column passing through the inside of the limit hole.

[0020] The above technical solutions effectively expand the suction area of ​​the vacuum head on the chip body surface, achieving comprehensive micro-dust cleaning and avoiding cleaning dead zones.

[0021] The present invention is further configured such that a first helical gear is fixedly connected to the top of the second rotating column, a second helical gear meshes with the outer circumferential wall of the first helical gear, and a first rotating column is fixedly connected to one side of the second helical gear.

[0022] The above technical solutions can provide a power source for the cleaning components to operate.

[0023] The present invention is further configured such that a positioning frame is fixedly connected to one side of the outer wall of the filter box, and the positioning frame is rotatably connected to both the second rotating column and the first rotating column.

[0024] Through the above technical solution, the positioning frame is rotatably connected to the second rotating column and the first rotating column, which provides support and positioning for the second rotating column and the first rotating column.

[0025] The present invention is further configured such that the cleaning component includes a threaded screw fixedly connected to one end of the first rotating column, a threaded sleeve threadedly connected to the outer circumference of the threaded screw, and a brush plate for cleaning the filter cloth fixedly connected to the top outer wall of the threaded sleeve.

[0026] The above technical solutions enable the brush plate to clean the filter cloth, preventing the filter cloth from being clogged by dust and affecting the filtration effect.

[0027] The present invention is further configured such that guide columns are fixedly connected to the inner walls on both sides of the filter box, and guide cylinders are sleeved on the outer circumference of the guide columns, and the guide cylinders are fixedly connected to the threaded sleeves.

[0028] The above technical solution, through the cooperation of guide posts and guide cylinders, guides and limits the movement of the threaded sleeve, ensuring that the threaded sleeve remains stable during horizontal movement.

[0029] The beneficial effects of this utility model are as follows:

[0030] 1. In this utility model, the dust collection component can create a negative pressure environment in the filter box, which can accurately suck up the micro dust on the surface of the chip body, effectively avoiding the impact of micro dust on chip performance and yield. At the same time, the dust collection head moves horizontally back and forth on the surface of the chip body, expanding the dust collection area and realizing comprehensive micro dust cleaning of the chip, avoiding the formation of cleaning dead corners.

[0031] 2. In this utility model, the filter cloth in the groove of the fixed seat in the filter assembly can effectively block the air carrying dust, keep the dust in the filter box, and discharge clean air, thus ensuring the filtration effect of dust.

[0032] 3. This utility model, through the sloping structure at the top of the guide hood inside the filter box, can guide the micro dust to be better deposited at the port of the dust discharge trough, making it convenient for staff to clean the inside of the filter box. At the same time, the brush plate in the cleaning component can clean the filter cloth, ensuring the continuous filtration effect of the filter cloth on micro dust. After the entire filtration device has finished working, the micro dust can be discharged from the dust discharge trough by opening the sealing plate, ensuring the continuous and efficient operation of the filtration device and convenient maintenance. Attached Figure Description

[0033] Figure 1 This is a front view of a micro-dust filtration device for chip manufacturing proposed in this utility model;

[0034] Figure 2 This is a side view of a micro-dust filtration device for chip manufacturing proposed in this utility model;

[0035] Figure 3 This is a schematic diagram of the structure of a micro-dust filtration device for chip manufacturing proposed in this utility model;

[0036] Figure 4 This is a schematic diagram of the structure of a micro-dust filtration device for chip manufacturing proposed in this utility model;

[0037] Figure 5 This is a schematic diagram of the structure of a micro-dust filtration device for chip manufacturing proposed in this utility model.

[0038] In the diagram: 1. Filter box; 2. Fan; 3. Negative pressure pipe; 4. Exhaust pipe; 5. Frame; 6. Conveyor belt; 7. Chip body; 8. Support plate; 9. First helical gear; 10. Positioning frame; 11. First rotating column; 12. Second helical gear; 13. Second rotating column; 14. Crank; 15. Connecting rod; 16. Horizontal tube; 17. Corrugated pipe; 18. Dust suction head; 19. Fixed column; 20. Horizontal plate; 21. Support leg; 22. Motor; 23. Flow guide; 24. Fixed tube; 25. Filter cloth; 26. Fixed seat; 27. Guide column; 28. Guide cylinder; 29. ​​Threaded sleeve; 30. Brush plate; 31. Threaded screw; 32. Dust discharge trough; 33. Sealing plate. Detailed Implementation

[0039] The technical solution of this patent will be further described in detail below with reference to specific embodiments.

[0040] Reference Figures 1-5 A micro-dust filtration device for chip manufacturing, comprising:

[0041] Filter box 1;

[0042] A dust-collecting component used to remove fine dust from the surface of the chip body 7;

[0043] A filter assembly for blocking fine dust is disposed inside the filter box 1;

[0044] The cleaning component and the oscillating component are used to drive the dust collection component to make horizontal reciprocating motion, so that the cleaning component can remove dust from the filter component.

[0045] The filter assembly includes a fixed base 26 fixedly connected inside the filter box 1. The bottom inner wall of the fixed base 26 has a through groove, and a filter cloth 25 is fixedly connected inside the through groove. When the fan 2 is started, it creates a negative pressure environment inside the filter box 1 through the negative pressure pipe 3 and the exhaust pipe 4. When the chip body 7 moves to the bottom of the filter box 1 via the conveyor belt 6, the dust suction head 18 accurately adsorbs the micro dust on the surface of the chip body 7 under the action of negative pressure. The micro dust enters the filter box 1 in sequence through the dust suction head 18, the horizontal pipe 16, the corrugated pipe 17 and the fixed pipe 24, realizing the initial collection of micro dust on the surface of the chip body 7, and solving the problem that traditional filtration equipment cannot accurately remove dust from the chip surface.

[0046] In order to achieve the absorption and treatment of micro-dust on the surface of the chip body 7, refer to Figures 4-5 The dust collection assembly includes a fan 2 fixedly connected to the top outer wall of the filter box 1. A negative pressure pipe 3 is fixedly connected to one side of the fan 2. A suction pipe 4 is provided at equal intervals at the bottom of the negative pressure pipe 3. The suction pipe 4 is connected to the filter box 1. A fixed pipe 24 is fixedly connected at equal intervals at the bottom outer wall of the filter box 1. A corrugated pipe 17 is provided at one end of the fixed pipe 24. A horizontal pipe 16 is fixedly connected at the end of the corrugated pipe 17 away from the fixed pipe 24. A dust collection head 18 is inserted at equal intervals at the bottom of the horizontal pipe 16. The dust collection head 18 is located on the top of the chip body 7. After the air carrying dust enters the filter box 1, it passes through the filter cloth 25 in the groove of the fixed seat 26. The filter cloth 25 can effectively block the dust, so that the clean air is discharged from the fan 2, ensuring the filtration effect of the dust and avoiding the dust from being discharged with the air and causing secondary pollution.

[0047] To allow the dust collected inside the filter box 1 to slide down the guide shroud 23 to the dust discharge trough 32 port, refer to... Figures 4-5 The filter box 1 is fixedly connected to a flow guide hood 23. The top of the flow guide hood 23 has a sloping structure, which is located directly below the filter cloth 25. Under the action of gravity, the sloping structure can guide the dust to slide down the flow guide hood 23 to the dust discharge slot 32 port, which is convenient for the staff to clean the inside of the filter box 1 and improves the cleaning efficiency.

[0048] To facilitate subsequent cleaning of the interior of filter box 1 by staff and improve cleaning efficiency, refer to Figures 4-5A dust discharge trough 32 is provided on one side of the outer wall of the filter box 1. A sealing plate 33 is bolted to one side of the dust discharge trough 32 to ensure that the inside of the filter box 1 is sealed. When the filter device is running, the sealing plate 33 ensures that the inside of the filter box 1 is sealed and maintains a stable negative pressure environment. When it is necessary to clean the dust, the sealing plate 33 can be opened to discharge the dust from the dust discharge trough 32. The operation is convenient and ensures the continuous and efficient operation of the filter device.

[0049] In order to increase the suction area of ​​the suction head 18 on the surface of the chip body 7, refer to Figure 2 Figure 3 The swing assembly includes a support plate 8 fixedly connected to the outer wall of one side of the frame 5. A motor 22 is fixedly connected to the top outer wall of the support plate 8. A second rotating column 13 is fixedly connected to the output end of the motor 22. A crank 14 is fixedly connected to the outer circumference of the second rotating column 13. A connecting rod 15 is rotatably connected to one end of the crank 14. A fixed column 19 is fixedly connected to the other end of the connecting rod 15. One end of the fixed column 19 is fixedly connected to the horizontal tube 16. A support leg 21 is fixedly connected to the bottom of the filter box 1. A horizontal plate is fixedly connected to one side of the support leg 21. 20. A limiting hole is opened on one side of the outer wall of the horizontal plate 20. One end of the fixing post 19 passes through the inside of the limiting hole. The motor 22 starts and drives the second rotating post 13 to rotate, which drives the crank 14 and the connecting rod 15 to move. This causes the fixing post 19 to move horizontally back and forth in the limiting hole of the horizontal plate 20. The fixing post 19 is connected to the horizontal tube 16, which causes the horizontal tube 16 and the dust suction head 18 to move horizontally back and forth on the surface of the chip body 7. This expands the dust suction area of ​​the dust suction head 18 on the surface of the chip body 7, realizes comprehensive micro-dust cleaning, and avoids the generation of cleaning dead corners.

[0050] To provide a power source for the cleaning components, refer to Figures 2-3 A first helical gear 9 is fixedly connected to the top of the second rotating column 13. A second helical gear 12 meshes with the outer circumference of the first helical gear 9. A first rotating column 11 is fixedly connected to one side of the second helical gear 12. When the second rotating column 13 rotates, the first helical gear 9 at its top meshes with the second helical gear 12, driving the second helical gear 12 to rotate, thereby causing the first rotating column 11 to rotate, thus realizing the power transmission between the swing assembly and the cleaning assembly.

[0051] To ensure the proper functioning of the oscillating and cleaning components, refer to... Figures 2-5 A positioning frame 10 is fixedly connected to one side of the outer wall of the filter box 1. The positioning frame 10 is rotatably connected to the second rotating column 13 and the first rotating column 11. The positioning frame 10 is rotatably connected to the second rotating column 13 and the first rotating column 11, which provides support and positioning for the second rotating column 13 and the first rotating column 11, ensuring the stability of their rotation process and ensuring the normal operation of the swing assembly and the cleaning assembly.

[0052] To ensure continuous and efficient filtration of filter cloth 25, refer to... Figures 4-5 The cleaning assembly includes a threaded screw 31 fixedly connected to one end of the first rotating column 11. A threaded sleeve 29 is threadedly connected to the outer circumference of the threaded screw 31. A brush plate 30 for cleaning the filter cloth 25 is fixedly connected to the top outer wall of the threaded sleeve 29. The rotation of the first rotating column 11 drives the threaded screw 31 to rotate. Under the restriction of the guide column 27 and the guide cylinder 28, the threaded sleeve 29 moves horizontally along the threaded screw 31, thereby driving the brush plate 30 to clean the filter cloth 25 and prevent the filter cloth 25 from being blocked by dust, thus affecting the filtration effect.

[0053] To ensure that the brush plate 30 can accurately and smoothly clean the filter cloth 25, refer to... Figure 5 Guide columns 27 are fixedly connected to the inner walls on both sides of the filter box 1. Guide cylinders 28 are sleeved on the outer circumference of the guide columns 27. The guide cylinders 28 are fixedly connected to the threaded sleeves 29. Through the cooperation of the guide columns 27 and the guide cylinders 28, the movement of the threaded sleeves 29 is guided and limited, ensuring that the threaded sleeves 29 remain stable during horizontal movement.

[0054] Working Principle: When the device is working, the fan 2 is first started, which creates a negative pressure environment in the filter box 1 through the negative pressure pipe 3 and the exhaust pipe 4. When the chip body 7 moves to the bottom of the filter box 1 by the conveyor belt 6, the suction head 18 located above the chip body 7 accurately sucks in the micro dust on the surface of the chip body 7 under the action of negative pressure. The micro dust enters the filter box 1 through the suction head 18, the horizontal pipe 16, the corrugated pipe 17 and the fixed pipe 24 for initial collection. After the air carrying the micro dust enters the filter box 1, it passes through the filter cloth 25 in the through groove of the fixed seat 26. The filter cloth 25 can effectively block the sucked-in micro dust. Then the clean air is discharged from the fan 2. During this process, the sloping structure at the top of the guide hood 23 can also guide the micro dust to be better deposited at the port of the dust discharge trough 32, thereby facilitating the subsequent cleaning work inside the filter box 1 by the staff. When the motor 22 is started, it drives the second rotating column 13 to rotate. At this time, the crank 14 and connecting rod 15 drive the fixed column 19 to reciprocate horizontally within the limiting hole of the horizontal plate 20, thereby causing the horizontal tube 16 and the dust suction head 18 to reciprocate horizontally on the surface of the chip body 7. This effectively expands the dust suction area of ​​the dust suction head 18 on the surface of the chip body 7, achieving comprehensive cleaning of micro dust on the chip body 7 and avoiding cleaning dead corners. At the same time, when the second rotating column 13 rotates, the first helical gear 9 drives the second helical gear 12, which in turn causes the first rotating column 11 and the threaded screw 31 to rotate. Under the restriction of the guide column 27 and the guide cylinder 28, the threaded sleeve 29 drives the brush plate 30 to clean the filter cloth 25, ensuring the filtration effect of the entire filter cloth 25 on micro dust. Finally, the micro dust cleaned off the filter cloth 25 slides down the guide cover 23 to the bottom of the filter box 1 under the action of gravity. By opening the sealing plate 33, the micro dust can be discharged from the dust discharge groove 32, ensuring the continuous and efficient operation of the filtration device.

[0055] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A micro-dust filtration device for chip manufacturing, characterized in that, Include: Filter box (1); Dust suction assembly for processing the surface dust of the chip body (7); Filter assembly for blocking dust, which is arranged inside the filter box (1); Cleaning assembly and swing assembly, which drives the dust suction assembly to make horizontal reciprocating motion to make the cleaning assembly dust the filter assembly; The filter assembly comprises a fixed seat (26) fixedly connected inside the filter box (1), and a through slot is formed in the inner wall of the bottom of the fixed seat (26), and a filter cloth (25) is fixedly connected inside the through slot.

2. The micro dust filtering device for chip production according to claim 1, wherein The dust suction assembly comprises a fan (2) fixedly connected to the top outer wall of the filter box (1), one side of the fan (2) is fixedly connected with a negative pressure pipe (3), the bottom of the negative pressure pipe (3) is provided with a plurality of suction pipes (4) distributed at equal distances, the suction pipes (4) are communicated with the filter box (1), and the bottom outer wall of the filter box (1) is fixedly connected with a plurality of fixed pipes (24) distributed at equal distances, one end of the fixed pipe (24) is provided with a bellows (17), the end of the bellows (17) away from the fixed pipe (24) is fixedly connected with a horizontal pipe (16), and the bottom of the horizontal pipe (16) is inserted with a plurality of dust suction heads (18) distributed at equal distances, the dust suction heads (18) are arranged on the top of the chip body (7).

3. The micro dust filtering device for chip production according to claim 2, wherein The inside of the filter box (1) is fixedly connected with a flow guide cover (23), the top of the flow guide cover (23) is in a slope structure, and the slope structure is located directly below the filter cloth (25).

4. The micro dust filtering device for chip production according to claim 3, wherein A dust discharge groove (32) is formed in one side outer wall of the filter box (1), and a sealing plate (33) for ensuring that the inside of the filter box (1) is in a sealed state is connected to one side of the dust discharge groove (32) through bolts.

5. The micro dust filtering device for chip production according to claim 2, wherein The swing assembly comprises a support plate (8) fixedly connected to one side outer wall of the rack (5), the top outer wall of the support plate (8) is fixedly connected with a motor (22), the output end of the motor (22) is fixedly connected with a second rotating column (13), the circumferential outer wall of the second rotating column (13) is fixedly connected with a crank (14), one end of the crank (14) is rotatably connected with a connecting rod (15), the other end of the connecting rod (15) is fixedly connected with a fixed column (19), one end of the fixed column (19) is fixedly connected with the horizontal pipe (16), the bottom of the filter box (1) is fixedly connected with a support leg (21), one side of the support leg (21) is fixedly connected with a horizontal plate (20), a limiting hole is formed in one side outer wall of the horizontal plate (20), and one end of the fixed column (19) passes through the inside of the limiting hole.

6. The micro dust filtering device for chip production according to claim 5, wherein The top of the second rotating column (13) is fixedly connected with a first helical gear (9), the circumferential outer wall of the first helical gear (9) is engaged with a second helical gear (12), and one side of the second helical gear (12) is fixedly connected with a first rotating column (11).

7. The micro dust filtering device for chip production according to claim 6, wherein One side outer wall of the filter box (1) is fixedly connected with a positioning frame (10), and the positioning frame (10) is rotatably connected with the second rotating column (13) and the first rotating column (11).

8. The micro dust filtering device for chip production according to claim 7, wherein The cleaning assembly comprises a threaded screw rod (31) fixedly connected to one end of the first rotating column (11), and the circumferential outer wall of the threaded screw rod (31) is threadedly connected with a threaded sleeve (29), and the top outer wall of the threaded sleeve (29) is fixedly connected with a brush plate (30) for cleaning the filter cloth (25).

9. The micro dust filtering device for chip production according to claim 8, wherein The two side inner walls of the filter box (1) are fixedly connected with guide columns (27), the circumferential outer wall of the guide column (27) is sleeved with a guide cylinder (28), and the guide cylinder (28) is fixedly connected with the threaded sleeve (29).

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