High-purity gas bottle inner wall grinding device

Abstract

The utility model relates to the technical field of high-purity gas production, in particular to a gas cylinder inner wall grinding device for high-purity gas. Comprising a bottom plate, a base installed on the bottom plate, a working platform installed on the base, a rotating structure installed on the working platform and a power motor installed on the working platform and used for providing power for the rotating structure, and an oil cylinder is arranged between the bottom plate and the working platform. And two ends of the oil cylinder are respectively hinged between the working platform and the bottom plate. Therefore, the gas cylinder inner wall grinding device for the high-purity gas can solve the technical problems that the rolling amplitude of grinding materials is small, the grinding efficiency is low, and the inner wall is easily damaged due to the addition of the stirring deflector rod.

Description

Technical Field

[0001] This application relates to the field of gas cylinder grinding technology, and more specifically, to a grinding device for the inner wall of a high-purity gas cylinder. Background Technology

[0002] With the continuous development of semiconductor technology, electronic specialty gases are increasingly widely used and crucial in semiconductor manufacturing processes. The purity, quality, and stability of electronic specialty gases play a key role in the stability and reliability of semiconductor manufacturing, thus affecting product performance and quality. High-purity electronic specialty gases can ensure the smooth progress of the semiconductor manufacturing process, reduce the adverse effects of impurities on semiconductor device performance, and improve product yield.

[0003] However, the storage and transportation of high-purity gases place extremely high demands on the cleanliness and inner wall quality of gas cylinders. The smoothness of the cylinder's inner wall directly affects the purity of the filled gas. If impurities or defects exist on the inner wall, the gas is easily contaminated, failing to meet the high-purity gas requirements of semiconductor manufacturing. Therefore, high-purity gas cylinders are generally made of high-quality carbon steel or stainless steel, undergoing grinding and a series of post-processing steps to obtain cylinders with inner walls that meet the requirements.

[0004] Currently, before grinding gas cylinders, abrasive materials are usually added inside the cylinder. The friction between the abrasive materials and the inner wall of the cylinder creates a cutting effect, resulting in a smooth inner wall. There are two main methods for grinding gas cylinders: the first is the rotation of the cylinder around its own axis, but this method results in a small rolling amplitude of the abrasive materials and low grinding efficiency; the second method adds a stirring rod to the first method, which improves grinding efficiency to some extent, but the vibration of the stirring rod can easily damage the inner wall of the cylinder, affecting the quality and service life of the cylinder. Utility Model Content

[0005] Based on the above problems, this application proposes a grinding device for the inner wall of a high-purity gas cylinder to solve the technical problems of small rolling amplitude of grinding materials, low grinding efficiency, and easy damage to the inner wall by adding a stirring rod.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0007] A grinding device for the inner wall of a high-purity gas cylinder includes a base plate, a base mounted on the base plate, a working platform mounted on the base, a rotating structure mounted on the working platform, and a power motor mounted on the working platform for providing power to the rotating structure. A hydraulic cylinder is provided between the base plate and the working platform, and the two ends of the hydraulic cylinder are respectively hinged between the working platform and the base plate.

[0008] In one specific implementation, one side of the work platform is hinged to the base, and the other side of the work platform is disconnected from the base.

[0009] In one specific implementation, the rotating structure includes a mounting base fixedly mounted on the working platform, a main shaft mounted on the mounting base, a mounting plate and a guide plate mounted on the main shaft, and a gas cylinder holder mounted between the mounting plates.

[0010] In one specific implementation scheme, the inner side of the guide disk is provided with teeth, and the guide disk is provided with driven gears that mesh with the teeth. There are four driven gears, and a power gear is installed in the middle position of the four driven gears. The power gear meshes with the four driven gears.

[0011] In one specific implementation, the power gear is fixedly mounted on the main shaft, and the power output end of the power motor is connected to the main shaft via a transmission belt.

[0012] In one specific implementation, each of the driven gears is fixedly connected to a rotating rod, the rotating rod is installed between the mounting plates, and the rotating rod is rotatably connected to the mounting plate.

[0013] In one specific implementation, the gas cylinder holder includes a gas cylinder compartment mounted on the rotating rod, and at least one clamping mechanism is mounted on the gas cylinder compartment. The clamping mechanism includes a clamping base mounted on the gas cylinder compartment, and a set screw is threaded through the clamping base. One end of the set screw is rotatably connected to a pressure block, and the side of the pressure block facing the gas cylinder compartment is an arc-shaped curved surface adapted to the gas cylinder to be fixed.

[0014] The positive effects of this utility model are:

[0015] To increase the rolling amplitude of the grinding material, a structure is designed with a driving gear meshing with four driven gears. The driving gear is fixedly mounted on the main shaft, and the power output of the motor is connected to the main shaft via a transmission belt, thereby driving the main shaft to rotate. As the main shaft rotates, the driven gears rotate accordingly, and the rotating rods fixedly connected to the driven gears rotate between the mounting plates, causing the gas cylinder compartment and the gas cylinders inside it to rotate. This multi-gear transmission method, compared to the gas cylinders simply rotating around their own axes, allows the grinding of the inner wall of the gas cylinders to be subjected to greater centrifugal and tangential forces, thus increasing the rolling amplitude and improving grinding efficiency.

[0016] To avoid damaging the inner wall of the gas cylinder, this structure does not use a stirring lever. Instead, it utilizes gear transmission to rotate the gas cylinder and grinding material, thus avoiding the problem of vibration from a stirring lever damaging the inner wall of the gas cylinder. Simultaneously, the clamping mechanism in the gas cylinder holder firmly secures the gas cylinder within the cylinder compartment, ensuring stable rotation during grinding without shaking or displacement. This further protects the quality of the inner wall of the gas cylinder and extends its service life. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the gas cylinder compartment structure of this utility model;

[0020] Figure 3 This is a structural schematic diagram of the present invention from another angle, with some parts of the structure hidden.

[0021] Explanation of reference numerals in the attached figures

[0022] 1. Base plate; 2. Base; 3. Working platform; 4. Power motor; 5. Hydraulic cylinder; 6. Mounting seat; 7. Main shaft; 8. Mounting plate; 9. Guide plate; 10. Driven gear; 11. Power gear; 12. Transmission belt; 13. Rotating rod; 14. Gas cylinder compartment; 15. Clamping base; 16. Set screw; 17. Pressure block. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] Example 1

[0025] A grinding device for the inner wall of a high-purity gas cylinder includes a base plate 1, a base 2 mounted on the base plate 1, and a working platform 3 mounted on the base 2. One side of the working platform 3 is hinged to the base 2, and the other side of the working platform 3 is disconnected from the base 2. The hinged connection and disconnection of the working platform 3 allows for flexible adjustment of its angle.

[0026] The working platform 3 is equipped with a rotating structure, which includes a mounting base 6 fixedly mounted on the working platform 3, a main shaft 7 mounted on the mounting base 6, a mounting plate 8 and a guide plate 9 mounted on the main shaft 7, and a gas cylinder holder mounted between the mounting plates 8. The guide plate 9 has teeth on its inner side, and driven gears 10 meshing with the teeth are provided on the guide plate 9. Each driven gear 10 is fixedly connected to a rotating rod 13, which is mounted between the mounting plates 8 and rotatably connected to the mounting plates 8.

[0027] Four driven gears 10 are provided, and a power gear 11 is installed at the middle position of the four driven gears 10. The power gear 11 meshes with the four driven gears 10. The power gear 11 is fixedly mounted on the main shaft 7, and the power output end of the power motor 4 is connected to the main shaft 7 via a transmission belt 12. The guide disk 9 is provided with gears and fixed on the working platform 3. Through meshing with the driven gears 10, the four driven gears 10 perform planetary motion around the axis of the guide disk 9, thereby driving the gas cylinder to rotate. The meshing of the power gear 11 with the four driven gears 10, and the connection of the power motor 4 to the main shaft 7 via the transmission belt 12, ensures effective power transmission, enabling the rotating structure to operate efficiently.

[0028] A power motor 4 is installed on the working platform 3 to provide power to the rotating structure. A hydraulic cylinder 5 is provided between the base plate 1 and the working platform 3, with both ends of the hydraulic cylinder 5 hinged between the working platform 3 and the base plate 1, respectively. By extending and retracting the hydraulic cylinder 5, the tilt angle of the working platform 3 can be easily adjusted, thereby adjusting the grinding position of the gas cylinder. A structure is provided where a power gear 11 meshes with four driven gears 10. The power gear 11 is fixedly mounted on the main shaft 7, and the power output end of the power motor 4 is connected to the main shaft 7 via a transmission belt 12, thereby driving the main shaft 7 to rotate. When the main shaft 7 rotates, the driven gears 10 rotate accordingly, and the rotating rod 13 fixedly connected to the driven gear 10 rotates between the mounting plates 8, causing the gas cylinder compartment 14 and the gas cylinder inside it mounted on the rotating rod 13 to rotate. This multi-gear transmission method, compared to the gas cylinder simply rotating around its own axis, allows the grinding of the inner wall of the gas cylinder to be subjected to greater centrifugal and tangential forces, thereby increasing the rolling amplitude of the grinding and improving the grinding efficiency.

[0029] Example 2

[0030] The difference between this embodiment and the previous embodiment lies in the more detailed description of the gas cylinder holder. The gas cylinder holder includes a gas cylinder compartment 14 mounted on the rotating rod 13, which stably fixes the gas cylinder and prevents it from moving or falling off during the grinding process. At least one clamping mechanism is installed on the gas cylinder compartment 14. The clamping mechanism includes a clamping base 15 mounted on the gas cylinder compartment 14. A set screw 16 is threaded through the clamping base 15. One end of the set screw 16 is rotatably connected to a pressure block 17. The side of the pressure block 17 facing the gas cylinder compartment 14 is an arc-shaped curved surface adapted to the gas cylinder to be fixed.

[0031] The gas cylinder holder securely clamps the gas cylinder using a clamping mechanism, ensuring that the cylinder will not loosen during the grinding process. The clamping block 17 of the clamping mechanism adopts an arc-shaped curved surface design that adapts to the inner wall of the gas cylinder, increasing the stability and reliability of the clamping.

[0032] Working principle

[0033] Cylinder fixing: The gas cylinder is fixed in the gas cylinder holder by a clamping mechanism. The set screw 16 and the clamping block 17 of the clamping mechanism firmly hold the gas cylinder.

[0034] Power transmission: The power motor 4 transmits power to the main shaft 7 via the transmission belt 12, and the main shaft 7 drives the power gear 11 to rotate. The power gear 11 meshes with the driven gear 10, and the driven gear 10 drives the mounting plate 8 and the gas cylinder holder to rotate via the rotating rod 13.

[0035] Grinding process: As the gas cylinder rotates, the abrasive material (such as abrasive particles) grinds against the inner wall of the gas cylinder. The working platform 3 can be tilted by adjusting the hydraulic cylinder 5, so that the abrasive material in the gas cylinder can better contact the inner wall under the action of gravity, thereby improving the grinding effect.

[0036] Angle adjustment: By extending and retracting the hydraulic cylinder 5, the working platform 3 can tilt at different angles, thereby fully grinding the shoulder, bottom and other parts of the gas cylinder.

[0037] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0038] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high purity gas bottle inner wall grinding device, characterized by, The utility model provides a kind of gas cylinder fixing device, including bottom plate (1), pedestal (2) installed on the bottom plate (1), work platform (3) installed on the pedestal (2), rotating structure installed on the work platform (3) and power motor (4) for providing power for the rotating structure installed on the work platform (3), oil cylinder (5) is provided between the bottom plate (1) and the work platform (3), and the oil cylinder (5) is hinged between the work platform (3) and the bottom plate (1) respectively at both ends; The rotating structure includes a mounting seat (6) fixedly installed on the work platform (3), a main shaft (7) installed on the mounting seat (6), an installation disc (8) and a guide disc (9) installed on the main shaft (7), and a gas cylinder holder installed between the installation disc (8). The inner side of the guide disc (9) is provided with a gear, and the guide disc (9) is provided with a driven gear (10) engaged with the gear, the driven gear (10) is provided with four, and a power gear (11) is installed at the middle position of the four driven gears (10), and the power gear (11) is engaged with the four driven gears (10). The power gear (11) is fixedly installed on the main shaft (7), and the power output end of the power motor (4) is connected with the main shaft (7) through a transmission belt (12). Each driven gear (10) is fixedly connected with a rotating rod (13), the rotating rod (13) is installed between the installation disc (8), and the rotating rod (13) is rotatably connected with the installation disc (8). The gas cylinder holder includes a gas cylinder bin (14) installed on the rotating rod (13), at least one clamping mechanism is installed on the gas cylinder bin (14), the clamping mechanism includes a clamping base (15) installed on the gas cylinder bin (14), a jackscrew (16) is threadedly connected through the clamping base (15), one end of the jackscrew (16) is rotatably connected with a pressing block (17), and the side of the pressing block (17) facing the gas cylinder bin (14) is an arc surface matched with the gas cylinder to be fixed.

2. The in-bottle wall grinding device for high-purity gas according to claim 1, characterized by, One side of the work platform (3) is hinged with the pedestal (2), and the other side of the work platform (3) is disconnected with the pedestal (2).

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