Component coupling device

Abstract

The utility model provides element coupling equipment, which is suitable for coupling an optical fiber array element on an integrated circuit element, and is provided with an element coupling device which is provided with a holding unit capable of holding the optical fiber array element and a driving unit capable of driving the holding unit to move; the inspection device is provided with a first inspection unit capable of inspecting the posture of the integrated circuit element and a second inspection unit capable of inspecting the posture of the optical fiber array element; the control unit can control the driving unit to drive the holding unit to drive the optical fiber array element to move according to the inspection results of the first inspection unit and the second inspection unit so as to adjust the posture of the optical fiber array element to correspond to the posture of the integrated circuit element; compared with the prior art that the posture of the optical fiber array element is adjusted only according to the intensity value of the optical signal, the method is more time-saving.

Description

Technical Field

[0001] This utility model relates to a component coupling device, and more particularly to a component coupling device for coupling fiber array components to integrated circuit components. Background Technology

[0002] In semiconductor manufacturing, silicon photonics (SiPh) technology has become a key focus of industry development in order to produce chips with higher transmission efficiency and lower power consumption. In silicon photonics, whether it's pluggable transceiver optics (PTO), on-board optics (OBO), co-packaged optics (CPO), or optical I / O, fiber optic array units (FAUs) must be coupled onto integrated circuit (IC) devices. Currently, semiconductor processes have evolved to 2.5D or 3D packaging, and the structures of integrated circuit devices and fiber optic array units have also changed accordingly. For example, integrated circuit devices may incorporate photonic integrated circuits (PICs). The fiber optic array element includes an optical coupler, a socket, and an optical fiber connecting the optical coupler and the socket. The photonic integrated circuit of the integrated circuit element is coupled to the optical coupler of the fiber optic array element and communicates with the outside world through the optical fiber and the socket of the fiber optic array element.

[0003] When coupling the fiber optic array element to the integrated circuit element, the integrated circuit element is typically placed on the stage of a component coupling device. The component coupling device holds and moves the fiber optic array element using a component coupling mechanism. This mechanism uses a holding unit to hold the fiber optic array element and a driving unit to drive the holding unit to perform linear movements (e.g., X, Y, Z axes) and / or rotational movements (θx, θy, θz axes). The fiber optic array element is moved closer to the photonic integrated circuit so that the optical signal can be transmitted. Transmission occurs between the fiber optic array element and the photonic integrated circuit. The intensity of the optical signal is measured by the measurement unit, and the driving unit drives the holding unit to adjust the orientation of the fiber optic array element (e.g., linear movement along the X, Y, and Z axes and / or rotational movement along the θx, θy, and θz axes) according to the intensity of the optical signal until the intensity of the optical signal falls within a preset range. Then, the fiber optic array element is attached to the photonic integrated circuit. However, simply adjusting the orientation of the fiber optic array element according to the intensity of the optical signal will take a lot of time and still needs further improvement. Utility Model Content

[0004] Therefore, the purpose of this invention is to provide a component coupling device that can improve upon at least one of the shortcomings of the prior art.

[0005] The component coupling device according to the present invention is suitable for coupling a fiber optic array component to an integrated circuit component. It comprises: a component coupling device with a holding unit for holding the fiber optic array component and a driving unit for moving the holding unit; an inspection device with a first inspection unit for inspecting the orientation of the integrated circuit component and a second inspection unit for inspecting the orientation of the fiber optic array component; and a control unit that, based on the inspection results of the first and second inspection units, controls the driving unit to drive the holding unit to move the fiber optic array component, thereby adjusting the orientation of the fiber optic array component to correspond to the orientation of the integrated circuit component.

[0006] The component coupling device of this utility model embodiment can directly check the orientation of the integrated circuit component and the fiber optic array component, and adjust the orientation of the fiber optic array component to match the orientation of the integrated circuit component. This is more time-saving than the prior art which simply adjusts the orientation of the fiber optic array component based on the intensity value of the optical signal. Attached Figure Description

[0007] Figure 1 This is an incomplete exploded three-dimensional diagram illustrating the fiber optic array elements and some integrated circuit elements in the embodiments of this utility model.

[0008] Figure 2 It is a partial cross-sectional view illustrating that the fiber optic array element will be coupled to the integrated circuit element.

[0009] Figure 3 It is a 3D diagram illustrating the fiber optic array element.

[0010] Figure 4 It is a 3D image, different from Figure 3 This section describes the fiber optic array element from a specific perspective.

[0011] Figure 5 It is a partial cross-sectional view illustrating the optical signal transmitted between the fiber optic array element and the integrated circuit element.

[0012] Figure 6 This is a schematic diagram illustrating that the component coupling device in this embodiment of the present invention is provided on the machine base with a measurement unit, a component coupling device, a control unit, a first platform device, a second platform device, an inspection device, a first track device, a second track device, a component transfer device, and an adhesive application device.

[0013] Figure 7 It is a schematic diagram illustrating the configuration of the component coupling device, the first stage device, the second stage device, the second inspection unit of the inspection device, the first track device, the second track device, the component transfer device, and the adhesive application device on the machine platform.

[0014] Figure 8 This is a perspective view illustrating the component coupling device and the first inspection unit of the inspection device in an embodiment of the present invention.

[0015] Figure 9 It is an exploded 3D view illustrating the third direct-acting component, the second drive mechanism, the holding unit, and the first inspection unit of the element coupling device.

[0016] Figure 10 This is a schematic diagram illustrating how the holding unit moves the fiber optic array element to the second inspection unit.

[0017] Figure 11 It is an exploded 3D view illustrating the first rotating component, the second rotating component, and the third rotating component of the second drive mechanism.

[0018] Figure 12 It is a three-dimensional diagram illustrating that the first moving seat of the first rotating component swings along the first base in a left and right arc-shaped path with the first axis as the axis.

[0019] Figure 13 It is a three-dimensional diagram illustrating that the second moving seat of the second rotating component swings along the second base in an upward and downward arc-shaped path with the second axis as the axis.

[0020] Figure 14 It is a three-dimensional diagram illustrating that the third moving seat of the third rotating component swings along the third base in a forward and backward arc-shaped path with the third axis as the axis.

[0021] Figure 15 It is a partial side view illustrating the various connecting surfaces of the second drive mechanism.

[0022] Figure 16 It is an incomplete 3D diagram illustrating that the first axis, the second axis, and the third axis intersect each other.

[0023] Figure 17 It is an exploded 3D diagram illustrating the retaining unit and its curing components.

[0024] Figure 18 It is a partial side view illustrating the retaining unit and its airway.

[0025] Figure 19 This is a partial side view illustrating the retainer of the retaining unit.

[0026] Figure 20 It is a 3D diagram illustrating the driving components of the retaining unit.

[0027] Figure 21 It is a 3D diagram illustrating the mating parts of the retaining unit.

[0028] Figure 22 This is a schematic diagram illustrating that the docking component can be driven to selectively dock with the fiber optic array element.

[0029] Figure 23 It is a schematic diagram illustrating how ultraviolet light shines on this fiber optic array element.

[0030] Figure 24 It is a schematic diagram illustrating that the holding unit drives the fiber array element to the adhesive application device.

[0031] [Symbol Explanation]

[0032] 11: Component Coupling Device

[0033] 1: Measurement Unit

[0034] 2: Component coupling device

[0035] 3: Control Unit

[0036] 4: First platform device

[0037] 41: First Platform

[0038] 42: First Rotary Seat

[0039] 43: First platform rail

[0040] 5: Second platform device

[0041] 51: Second Platform

[0042] 52: Second platform rail

[0043] 6: Inspection device

[0044] 7: First Track Device

[0045] 71: First Track

[0046] 8: Second orbital device

[0047] 81: Second Track

[0048] 9: Component transfer device

[0049] 91: Gantry Frame

[0050] 92: First pick-up and drop-off mechanism

[0051] 93: Second pick-up and drop-off mechanism

[0052] 10: Glue application device

[0053] 101: First Glue Valve

[0054] 1011: First Nozzle

[0055] 102: Second glue valve

[0056] 1021: Second nozzle

[0057] A: Holding unit

[0058] A1: Bracket

[0059] A11: Air valve

[0060] A12: Airway

[0061] A2: Retaining element

[0062] A21: First Holding Section

[0063] A211: First retaining surface

[0064] A212: First negative pressure hole

[0065] A22: Second Holding Section

[0066] A221: Second retaining surface

[0067] A222: Second negative pressure hole

[0068] A3: Connecting parts

[0069] A31: Optical Communication Department

[0070] A32: Optical Transmission Section

[0071] A33: Guiding Unit

[0072] A331: Salesperson

[0073] A34: Dating Surface

[0074] A4: Driver Components

[0075] A41: Drive unit

[0076] A42: Moving parts

[0077] A43: Mounting bracket

[0078] A5: Curing Components

[0079] A51: First Curing Source

[0080] A511: Ultraviolet light

[0081] B: Drive unit

[0082] C: First drive mechanism

[0083] C1: First direct-acting component

[0084] C11: First Track

[0085] C12: First slide

[0086] C2: Second direct-acting component

[0087] C21: Second Track

[0088] C22: Second slide

[0089] C3: Third Direct-Motion Component

[0090] C31: Third Track

[0091] C32: Third slide

[0092] D: Second drive mechanism

[0093] D1: First Rotating Component

[0094] D11: First Plinth

[0095] D12: First Moving Seat

[0096] D13: First Driver

[0097] D14: First connector

[0098] D141: First connecting surface

[0099] D142: Second connecting surface

[0100] D2: Second Rotation Component

[0101] D21: Second Base

[0102] D22: Second movable seat

[0103] D23: Second Driver

[0104] D24: Second connector

[0105] D241: Third connecting surface

[0106] D242: Fourth connecting surface

[0107] D3: Third Rotation Component

[0108] D31: Third Pedestal

[0109] D32: Third Moving Seat

[0110] D33: Third Driver

[0111] D34: Third connector

[0112] D341: Fifth Connecting Surface

[0113] D342: Sixth Connecting Surface

[0114] E: First Inspection Unit

[0115] E1: First imaging component

[0116] E11: Image Capturer

[0117] E12: Lens

[0118] E13: Light source

[0119] E2: First Distance Measuring Device

[0120] F: Second Inspection Unit

[0121] F1: Second imaging component

[0122] F2: Second distance measuring device

[0123] F3: Optical Integrator

[0124] K1: First Adhesive Material

[0125] K2: Second adhesive material

[0126] T: Machine

[0127] L1: First axis

[0128] L2: Second axis

[0129] L3: Third axis

[0130] Lp: pivot point

[0131] R1: First Trajectory

[0132] R2: Second Trajectory

[0133] R3: Third Track

[0134] S1: First tray

[0135] S2: Second tray

[0136] W1: Fiber optic array element

[0137] W11: Optical Coupler Section

[0138] W111: Prism

[0139] W112: First side view

[0140] W12: Socket section

[0141] W121: Second side

[0142] W122: Guide hole

[0143] W13: Fiber Optics Department

[0144] W131: Fiber Optic

[0145] W2: Integrated circuit components

[0146] W21: Carrier Board

[0147] W22: Cover

[0148] W221: First cover

[0149] W222: Second cover

[0150] W223: Hollowed-out section

[0151] W23: Photonic Integrated Circuit

[0152] W231: Lens Array

[0153] W2311: Lens

[0154] W3: Optical signal

[0155] d1: First direction

[0156] d2: Second direction

[0157] d3: third direction

[0158] r1: radius

[0159] r2: radius

[0160] r3: radius Detailed Implementation

[0161] Please see Figure 1 The present invention is applicable to the process of coupling a fiber array element W1 to an integrated circuit element W2.

[0162] Please see Figure 2 , 3 4. The fiber array element W1 is provided with an optical coupler W11, a socket W12, and an optical fiber W13 connected to the optical coupler W11 and the socket W12.

[0163] The optical coupler W11 is made of a light-transmitting material and has a prism W111 on a first side W112 of the optical coupler W11 away from the socket W12.

[0164] The socket portion W12 allows the optical fiber portion W13 to pass through and be exposed on a second side W121 of the socket portion W12 away from the optical coupler portion W11. The socket portion W12 is provided with two guide holes W122. The second side W121 is inclined outward from top to bottom.

[0165] The optical fiber section W13 is composed of multiple optical fibers W131 and is flexible.

[0166] Please see Figure 1 , 2 The integrated circuit element W2 is provided with a carrier board W21, a cover W22 provided on the carrier board W21, and a photonic integrated circuit W23 provided on the carrier board W21 (in this embodiment of the utility model, the carrier board W21 is provided with a plurality of photonic integrated circuits W23).

[0167] The carrier board W21 is roughly rectangular, and the photonic integrated circuit W23 can be arranged on one side of the carrier board W21;

[0168] The cover W22 has a first cover portion W221, a second cover portion W222 with a height slightly lower than the first cover portion W221, and a cutout area W223 located between the first cover portion W221 and the second cover portion W222 and capable of exposing the photonic integrated circuit W23; the cutout area W223 can be provided according to the design requirements of the photonic integrated circuit W23, for example, at each of the four near sides of the corresponding rectangular carrier board W21;

[0169] Each of the photonic integrated circuits W23 is provided with a lens array W231; the lens array W231 is composed of a matrix arrangement of multiple lenses W2311.

[0170] Please see Figure 2 , 5 When the fiber optic array element W1 is coupled to the integrated circuit element W2, the optical coupling portion W11 of the fiber optic array element W1 is attached to the photonic integrated circuit W23, and the socket portion W12 is attached to the second cover portion W222 of the cover member W22; the fiber optic array element W1 uses the prism W111 to align with the lens array W231, so that an optical signal W3 can be transmitted between the prism W111 of the fiber optic array element W1 and the lens array W231 of the photonic integrated circuit W23, and the optical signal W3 is generated by a measurement unit 1 ( Figure 6 The measurement unit 1 supplies the fiber array element W1 to the fiber array element W1. Figure 6The intensity value of the optical signal W3 transmitted from the fiber array element W1 to the integrated circuit element W2 and then back to the fiber array element W1 can be measured. Specifically, when the optical signal W3 is transmitted from the fiber array element W1 to the integrated circuit element W2, it can be reflected by the prism W111 and then enter the lens W2311 of the lens array W231 forward and downward. The optical coupler W11 and the photonic integrated circuit W23 can be bonded and fixed by a first adhesive material K1, and the socket W12 and the cover W22 can be bonded and fixed by a second adhesive material K2. In this embodiment of the present invention, the first adhesive material K1 is a UV-curable adhesive, and the second adhesive material K2 is a thermosetting adhesive.

[0171] Please see Figure 6 , 7 The present invention can be illustrated by taking the component coupling device 11, which is used to couple the fiber array element W1 to the integrated circuit element W2, as shown in the figure. The component coupling device 11 is provided on a machine T with the following components: a measurement unit 1, a component coupling device 2, a control unit 3, a first stage device 4, a second stage device 5, an inspection device 6, a first track device 7, a second track device 8, a component transfer device 9, and an adhesive application device 10.

[0172] In order to increase work efficiency, the component coupling device 11 is provided with two component coupling devices 2 facing each other, but this is not a limitation. The component coupling device 11 may also be provided with only one component coupling device 2.

[0173] Please see Figure 7 , 8 The component coupling device 2 is suitable for holding and moving the fiber array element W1 and coupling the fiber array element W1 to the integrated circuit element W2. The component coupling device 2 is provided with a holding unit A that can hold the fiber array element W1 and a driving unit B that can drive the holding unit A to move.

[0174] The drive unit B is provided with a first drive mechanism C and a second drive mechanism D; the first drive mechanism C is provided on the machine base T, the second drive mechanism D is provided on the first drive mechanism C, and can be driven by the first drive mechanism C to make multi-axis linear movements.

[0175] The holding unit A is disposed on the second drive mechanism D and can be driven by the second drive mechanism D to perform multi-axial rotational movement; the holding unit A can hold the fiber array element W1 and drive the fiber array element W1 to perform multi-axial linear or rotational movement under the drive of the first drive mechanism C and the second drive mechanism D.

[0176] Please see Figure 6The inspection device 6 is equipped with a first inspection unit E for inspecting the orientation of the integrated circuit element W2. Figure 8 ) and a second inspection unit F (which can inspect the attitude of the fiber array element W1) Figure 7 ).

[0177] Please see Figure 8 , 9 The first inspection unit E is mounted on the first drive mechanism C and can be driven by the first drive mechanism C to perform multi-axial linear movement; the first inspection unit E includes a first image-capturing component E1 and a first distance measuring device E2; the first image-capturing component E1 includes an image sensor E11, a lens E12, and a light source E13; please refer to the following reference. Figure 1 The first imaging component E1 can capture an image of the photonic integrated circuit W23 and / or the lens array W231 above the integrated circuit element W2 to obtain the position of the photonic integrated circuit W23 and / or the lens array W231; the first distance measuring device E2 can be, for example, an optical reflective measuring device, which can measure the distance at at least three non-collinear points on the upper surface of the photonic integrated circuit W23 to obtain the height of the points, and obtain the flatness of the upper surface of the photonic integrated circuit W23 from the height of the points; the first inspection unit E checks the orientation of the integrated circuit element W2 by obtaining the position of the photonic integrated circuit W23 and / or the lens array W231 through the first imaging component E1 and obtaining the flatness of the upper surface of the photonic integrated circuit W23 through the first distance measuring device E2.

[0178] Please see Figure 7 , 10 The second inspection unit F is located between the first stage device 4 and the second stage device 5 and within the range of the component coupling device 2 that can perform operations; the second inspection unit F includes a second image acquisition component F1, a second distance measuring device F2, and an optical integrator F3;

[0179] The second imaging component F1 can capture an image of the optical coupler W11 and / or the prism W111 below the fiber array element W1 held in the holding unit A to obtain the position of the optical coupler W11 and / or the prism W111; the second distance measuring device F2 can measure the distance at least three non-collinear points on the lower surface of the optical coupler W11 to obtain the height of the points, and obtain the flatness of the lower surface of the optical coupler W11 from the height of the points; the construction of the second imaging component F1 and the second distance measuring device F2 can be, for example, the first imaging component E1 ( Figure 9 ) and the first distance measuring device E2 ( Figure 9The second inspection unit F inspects the orientation of the fiber array element W1 by obtaining the position of the optical coupler W11 and / or the prism W111 through the second imaging component F1 and obtaining the flatness of the lower surface of the optical coupler W11 through the second distance measuring device F2.

[0180] The optical integrator F3 can measure the intensity value of the optical signal W3 below the fiber array element W1 held in the holding unit A; the optical integrator F3 can be, for example, an optical integrating sphere.

[0181] Please see Figure 8 The following description of the embodiments of this utility model defines a first direction d1 as the horizontal direction, a second direction d2 as the horizontal direction and orthogonal to the first direction d1, and a third direction d3 as the vertical direction and orthogonal to both the first direction d1 and the second direction d2.

[0182] Please see Figure 8 , 9 The first drive mechanism C includes: a first direct drive component C1 disposed on the machine base T, a second direct drive component C2 disposed on the first direct drive component C1, and a third direct drive component C3 disposed on the second direct drive component C2;

[0183] The first direct motion component C1 is provided with two first rail seats C11 spaced apart on the machine base T and two first slides C12 respectively provided on the two first rail seats C11; the first rail seat C11 extends along the first direction d1 and the first slide C12 can move along the first direction d1 on the first rail seat C11.

[0184] The second linear motion component C2 is provided with a second rail C21 spanning the two first slides C12 and a second slide C22 provided on the second rail C21; the second rail C21 extends along the second direction d2 and the second slide C22 can move along the second direction d2 on the second rail C21.

[0185] The third linear motion component C3 is provided with a third rail C31 disposed on the second slide C22 and a third slide C32 disposed on the third rail C31; the third rail C31 extends along the third direction d3, and the third slide C32 can move along the third direction d3 on the third rail C31.

[0186] The first drive mechanism C can drive the second drive mechanism D to link with the holding unit A, thereby causing the fiber array element W1 to move linearly in three degrees of freedom: the first direction d1, the second direction d2, and the third direction d3.

[0187] In this embodiment of the invention, the first rail seat C11 and the second rail seat C21 are driven by a linear motor, but this is not a limitation; a combination of a rotary motor and a screw can also be used. In this embodiment of the invention, the third rail seat C31 is driven by a combination of a rotary motor and a screw, but this is not a limitation; a linear motor can also be used.

[0188] Please see Figure 9 , 11 The second drive mechanism D includes: a first rotating component D1 disposed on the third slide C32, a second rotating component D2 disposed on the first rotating component D1, and a third rotating component D3 disposed on the second rotating component D2.

[0189] Please see Figure 11 , 12 The first rotating component D1 is provided on the third slide C32 ( Figure 9 The system comprises a first base D11, a first movable seat D12 disposed on the first base D11, a first driver D13 capable of driving the first movable seat D12 to move, and a first connecting member D14 disposed on the first movable seat D12. The first base D11 has an arcuate concave surface facing the first movable seat D12, and the first movable seat D12 has an arcuate convex surface facing the first base D11. The first movable seat D12 can be driven by the first driver D13 to move in an arc along the first base D11 and, in conjunction with the first connecting member D14, swing left and right in an arcuate path. The first trajectory R1 formed by the swing of the arcuate path of the first movable seat D12 is centered on a first axis L1 parallel to the third direction d3. Figure 12 The radius from the first trajectory R1 to the first axis L1 is r1); in this embodiment of the utility model, the first base D11 and the first moving base D12 are relative to each other by cross bearings.

[0190] Please see Figure 11 , 13 The second rotating component D2 is provided on the first connecting member D14 ( Figure 12The system comprises a second base D21, a second movable seat D22 disposed on the second base D21, a second driver D23 capable of driving the second movable seat D22 to move, and a second connecting member D24 disposed on the second movable seat D22. The second base D21 has an arcuate concave surface facing the second movable seat D22, and the second movable seat D22 has an arcuate convex surface facing the second base D21. The second movable seat D22 can be driven by the second driver D23 to move in an arcuate shape along the second base D21 and, in conjunction with the second connecting member D24, swings along an upper and lower arcuate path. The second trajectory R2 formed by the swing of the arcuate path of the second movable seat D22 is centered on a second axis L2 parallel to the first direction d1. Figure 13 The radius from the second trajectory R2 to the second axis L2 is r2); in this embodiment of the utility model, the second base D21 and the second movable seat D22 are relative to each other by cross bearings.

[0191] Please see Figure 11 , 14 The third rotating component D3 is provided on the second connector D24 ( Figure 13 The system comprises a third base D31, a third movable seat D32 disposed on the third base D31, a third driver D33 capable of driving the third movable seat D32 to move, and a third connector D34 disposed on the third movable seat D32. The third base D31 has an arcuate concave surface facing the third movable seat D32, and the third movable seat D32 has an arcuate convex surface facing the third base D31. The third movable seat D32 can be driven by the third driver D33 to move in an arc along the third base D31 and, in conjunction with the third connector D34, swings along a forward and backward arcuate path. The third trajectory R3 formed by the swing of the arcuate path of the third movable seat D32 is centered on a third axis L3 parallel to the second direction d2. Figure 14 The radius from the third trajectory R3 to the third axis L3 is r3); in this embodiment of the utility model, the third base D31 and the third moving base D32 are relative to each other by cross bearings.

[0192] Please see Figure 11 , 15 The first connector D14 has a vertical first connecting surface D141 and a horizontal second connecting surface D142; the second connector D24 has a horizontal third connecting surface D241 and an inclined fourth connecting surface D242; the third connector D34 has an inclined fifth connecting surface D341 and a vertical sixth connecting surface D342; the first connecting surface D141 is approximately parallel to the sixth connecting surface D342; the fourth connecting surface D242 is approximately parallel to the fifth connecting surface D341.

[0193] The first connector D14 is disposed on the first movable seat D12 of the first rotating component D1 with the first connecting surface D141;

[0194] The second rotating component D2 is located below the first connector D14, and the second base D21 is located on the second connecting surface D142 of the first connector D14; the second connector D24 is located on the second movable seat D22 with the third connecting surface D241.

[0195] The third rotating component D3 is disposed on the fourth connecting surface D242 of the second connector D24 with the third base D31; the third connector D34 is disposed on the third movable seat D32 with the fifth connecting surface D341 of the third connector.

[0196] The holding unit A ( Figure 9 It is located at the sixth connecting surface D342.

[0197] Please see Figure 16 The first axis L1, the second axis L2, and the third axis L3 intersect (orthogonalize) each other at a pivot point Lp. The second drive mechanism D can drive the holding unit A to rotate the fiber array element W1 around the pivot point Lp, performing rotational movements with three degrees of freedom centered on the first axis L1, the second axis L2, and the third axis L3. The preset position of the pivot point Lp is, when the fiber array element W1 is held by the holding unit A, it is preset to correspond to the area below the optical coupler W11 and in front of the prism W111. Please refer to the reference section. Figure 5 When the fiber array element W1 is coupled to the integrated circuit element W2, the position below the optical coupler W11 and in front of the prism W111 is also roughly located on the upper surface of the photonic integrated circuit W23 and corresponds to the lens array W231.

[0198] Please see Figure 17 , 18 The holding unit A includes: a bracket A1, a holding member A2 disposed on the bracket A1 and capable of holding the fiber array element W1, a docking member A3 disposed on the bracket A1 and connected to the measurement unit 1, a driving component A4 disposed on the bracket A1 and capable of driving the docking member A3 to move along the first direction d1, and a curing component A5 disposed on the bracket A1 and capable of curing adhesive; the bracket A1 has an air passage A12 communicating with an air nozzle A11, the air nozzle A11 being connected to a negative pressure source (not shown); the holding member A2 and the docking member A3 are disposed on the bracket A1 and can move synchronously, and the docking member A3 can move relative to the holding member A2 to selectively dock with or not dock with the fiber array element W1.

[0199] Please see Figure 18 , 19The retainer A2 is provided with a first retaining part A21 and a second retaining part A22 that is spaced apart from the first retaining part A21 in the first direction d1. The first retaining part A21 can retain the optical coupler part W11 of the fiber array element W1, and the second retaining part A22 can retain the socket part W12 of the fiber array element W1.

[0200] The first holding portion A21 is provided with a first holding surface A211 and a first negative pressure hole A212 communicating with the first holding surface A211. The optical coupler portion W11 of the fiber array element W1 can be adsorbed and held on the first holding surface A211 through the first negative pressure hole A212. The second holding portion A22 is provided with a second holding surface A221 and a second negative pressure hole A222 communicating with the second holding surface A221. The socket portion W12 of the fiber array element W1 can be adsorbed and held on the second holding surface A221 through the second negative pressure hole A222. The first negative pressure hole A212 and the second negative pressure hole A222 communicate with the air passage A12.

[0201] Please see Figure 18 , 20 21, 22, The docking member A3 is indirectly mounted on the bracket A1 via the driving assembly A4. The driving assembly A4 includes a driving member A41, a movable member A42 that can be driven by the driving member A41, and a mounting base A43 mounted on the movable member A42. The docking member A3 is mounted on the mounting base A43 and can be driven by the driving member A41 to reciprocate relative to the retaining member A2 along the first direction d1, selectively docking with or not docking with the fiber array element W1.

[0202] The docking component A3 includes a light transmission section A31, a light transmission section A32 connecting the light transmission section A31 and the measurement unit 1, and a guide section A33 that can be selectively inserted into the fiber array element W1. The light transmission section A31 and the guide section A33 are disposed on a mating surface A34 of the docking component A3 facing the retainer A2. The mating surface A34 is inclined from bottom to top towards the retainer A2, and the inclination of the mating surface A34 corresponds to the second side surface W121 of the fiber array element W1. Specifically, the mating surface A34 is parallel to the second side surface W121; the guide portion A33 is provided with two guide pins A331 spaced apart on both sides of the optical transmission portion A31; when the mating member A3 is mated with the fiber array element W1, the guide pins A331 are inserted into the guide hole W122, and the mating surface A34 is against the second side surface W121, so that the optical transmission portion A31 is exposed in the fiber portion W13 of the socket portion W12, allowing the measurement unit 1 to supply the optical signal W3 ( Figure 5 ) to the fiber array element W1.

[0203] Please see Figure 17 ,19 23. The curing component A5 is provided with two first curing sources A51. The two first curing sources A51 are respectively disposed on both sides of the retainer A2 in the second direction d2 with a distance between them. The first curing sources A51 can be tilted towards the first retaining part A21 of the retainer A2 to irradiate ultraviolet light A511.

[0204] In other embodiments of this utility model, the curing component A5 is further provided with a second curing source (not shown in the figure), which can be tilted to irradiate the second holding portion A22 of the holding member A2 with laser or blow hot air.

[0205] Please see Figure 7 The first platform device 4 and the second platform device 5 are arranged side by side at a distance in the second direction d2 and are located within the range where the element coupling device 2 can perform operations;

[0206] The first platform device 4 is provided with a first platform 41 that can carry the integrated circuit component W2, a first rotating seat 42 that can drive the first platform 41 to rotate horizontally, and a first platform rail seat 43 that can drive the first rotating seat 42 and the first platform 41 to move along the first direction d1.

[0207] The second platform device 5 is provided with a second platform 51 that can carry the fiber array element W1, and a second platform rail 52 that can drive the second platform 51 to move along the first direction d1.

[0208] Please see Figure 7 The first track device 7 and the second track device 8 are arranged side by side at a distance from each other in the second direction d2;

[0209] The first track device 7 is provided with a first track 71, which can transport a first tray S1 along the first direction d1. The first tray S1 carries the integrated circuit component W2. The first track 71 can be, for example, a combination of a track frame and a conveyor belt.

[0210] The second track device 8 is provided with a second track 81, which can transport a second tray S2 along the first direction d1. The second tray S2 carries the fiber optic array element W1. The second track 81 can be, for example, a combination of a track frame and a conveyor belt.

[0211] The component transfer device 9 is provided with a gantry frame 91 spanning above the first track device 7 and the second track device 8, a first pick-and-place mechanism 92 provided on the gantry frame 91, and a second pick-and-place mechanism 93 provided on the gantry frame 91; the first pick-and-place mechanism 92 and the second pick-and-place mechanism 93 can move along the second direction d2 on the gantry frame 91; the first pick-and-place mechanism 92 can move between the first material tray S1 and the first platform 41, and the second pick-and-place mechanism 93 can move between the second material tray S2 and the second platform 51; the first pick-and-place mechanism 92 and the second pick-and-place mechanism 93 can be, for example, a combination of suction cups or suction nozzles.

[0212] Please see Figure 7 , 24 The adhesive applicator 10 is located on the side of the second platform device 5 away from the second inspection unit F and within the range of the component coupling device 2 that can perform the operation.

[0213] The adhesive applicator 10 is provided with a first adhesive valve 101 for applying the first adhesive material K1 and a second adhesive valve 102 for applying the second adhesive material K2; the first adhesive valve 101 is provided with a first adhesive nozzle 1011 for dispensing adhesive upwards, and the second adhesive valve 102 is provided with a second adhesive nozzle 1021 for dispensing adhesive upwards.

[0214] In the implementation of the component coupling device of this utility model embodiment, the first tray S1 carries at least one integrated circuit component W2 (one component in this utility model embodiment) and is fed into the first track 71 from one end of the first track device 7, and the second tray S2 carries at least one fiber array component W1 (multiple components in this utility model embodiment) and is fed into the second track 81 from one end of the second track device 8;

[0215] The first track 71 and the second track 81 respectively transport the first tray S1 and the second tray S2 to the bottom of the gantry 91, and the first platform 41 and the second platform 51 are respectively driven to the bottom of the gantry 91 by the first platform rail seat 43 and the second platform rail seat 52.

[0216] The first pick-and-place mechanism 92 of the component transfer device 9 picks up the integrated circuit component W2 from the first tray S1 and places it onto the first platform 41, and the second pick-and-place mechanism 93 picks up the fiber array component W1 from the second tray S2 and places it onto the second platform 51.

[0217] After the first platform 41 and the second platform 51 respectively carry the integrated circuit element W2 and the fiber array element W1, the first platform 41 and the second platform 51 are driven by the first platform rail 43 and the second platform rail 52 respectively to the area below the second direct motion component C2 of the first drive mechanism C.

[0218] The first driving mechanism C drives the first inspection unit E to move laterally above the first stage 41. After the first inspection unit E obtains the position of the photonic integrated circuit W23 and / or the lens array W231 and the flatness of the upper surface of the photonic integrated circuit W23, the control unit 3 records it.

[0219] After obtaining the position of the photonic integrated circuit W23 and / or the lens array W231 and the flatness of the upper surface of the photonic integrated circuit W23, the first driving mechanism C drives the second driving mechanism D to move the holding unit A laterally to above the second stage 51, and the first driving mechanism C drives the second driving mechanism D to move the holding unit A downward so that the holding member A2 contacts the fiber array element W1 on the second stage 51. At the same time, the negative pressure source turns on the negative pressure so that the first holding part A21 and the second holding part A22 of the holding member A2 respectively adsorb the optical coupler part W11 and the socket part W12 of the fiber array element W1. Then, the driving assembly A4 drives the docking member A3 to approach the fiber array element W1 and dock with the fiber array element W1 so that the measurement unit 1 can supply the optical signal W3 to the fiber array element W1.

[0220] After the docking member A3 docks with the fiber array element W1, the first driving mechanism C drives the second driving mechanism D to move the holding unit A upward, causing the holding member A2 to hold the fiber array element W1 away from the second stage 51. The first driving mechanism C then drives the second driving mechanism D to move the holding unit A laterally to the second inspection unit F for inspection and measurement of the intensity value of the optical signal W3. The second inspection unit F obtains the position of the optical coupler W11 and / or the prism W111, the flatness of the lower surface of the optical coupler W11, and the measured intensity value of the optical signal W3, which is then recorded by the control unit 3. The control unit 3 can compare the deviation between the position of the optical coupler W11 and / or the prism W111 and the position of the photonic integrated circuit W23 and / or the lens array W231, and control the second stage 51 accordingly. The first rotating component D1 of the drive mechanism D swings left and right in an arc-shaped path around the first axis L1 to adjust the posture of the fiber array element W1 held by the holding unit A so that the position of the optical coupler W11 and / or the prism W111 can correspond to the position of the photonic integrated circuit W23 and / or the lens array W231; the control unit 3 can compare the deviation between the flatness of the lower surface of the optical coupler W11 and the flatness of the upper surface of the photonic integrated circuit W23, and control the second rotating component D2 of the second drive mechanism D to swing up and down in an arc-shaped path around the second axis L2, and control the third rotating component D3 to swing forward and backward in an arc-shaped path around the third axis L3 to adjust the posture of the fiber array element W1 held by the holding unit A so that the lower surface of the optical coupler W11 can correspond to the upper surface of the photonic integrated circuit W23.

[0221] After the second drive mechanism D drives the holding unit A to adjust the posture of the fiber array element W1, the first drive mechanism C drives the second drive mechanism D to move the holding unit A laterally to the adhesive applicator 10 for adhesive application. The holding unit A can hold the fiber array element W1 to move relative to the first adhesive valve 101 and the second adhesive valve 102 along the second direction d2, so that the first adhesive valve 101 and the second adhesive valve 102 respectively apply a first adhesive K1 and a second adhesive K2 to the lower surface of the optical coupler part W11 and the lower surface of the socket part W12.

[0222] After the fiber array element W1 is coated with adhesive, the first driving mechanism C drives the second driving mechanism D to move the holding unit A laterally above the first stage 41. Since the second driving mechanism D has previously driven the holding unit A to adjust the position of the optical coupler W11 and / or the prism W111 to align with the position of the photonic integrated circuit W23 and / or the lens array W231, and the lower surface of the optical coupler W11 has been adjusted to be parallel to the upper surface of the photonic integrated circuit W23, after the holding unit A reaches above the first stage 41, the first driving mechanism C can directly drive the second driving mechanism. The retaining unit A moves downward in conjunction with structure D, placing the fiber array element W1 on the integrated circuit element W2. The lower surfaces of the optical coupler W11 and the socket W12 are respectively adhered to the upper surfaces of the photonic integrated circuit W23 and the upper surface of the second cover W222 of the cover W22 via the first adhesive material K1 and the second adhesive material K2, so that the optical signal W3 can be transmitted between the fiber array element W1 and the integrated circuit element W2 via the prism W111 and the lens array W231. At this time, the retaining unit A continues to hold the fiber array element W1 with the retaining member A2.

[0223] After the fiber optic array element W1 is attached to the integrated circuit element W2, because the first adhesive material K1 and the second adhesive material K2 have not yet cured and have a certain thickness, the fiber optic array element W1 can float on the first adhesive material K1 and the second adhesive material K2 and can still be adjusted in attitude by the holding unit A. At this time, the measuring unit 1 can measure whether the intensity value of the optical signal W3 falls within a preset range. When the intensity value of the optical signal W3 has not fallen within the preset range, the control unit 3 controls the second drive as needed. The driving mechanism D drives the holding unit A to rotate the fiber array element W1 around the pivot point Lp, moving it in three degrees of freedom around the first axis L1, the second axis L2, and the third axis L3. While the fiber array element W1 is attached to the integrated circuit element W2, the orientation of the fiber array element W1 is adjusted slightly until the intensity value of the optical signal W3 measured by the measuring unit 1 falls within the preset range. At this point, the second driving mechanism D is controlled to stop operating, and the intensity value of the optical signal W3 falls within the preset range. The internal time indicates that the optical signal W3 transmitted between the fiber array element W1 and the integrated circuit element W2 has better transmission efficiency; after the second driving mechanism D drives the holding unit A to slightly adjust the attitude of the fiber array element W1, if the intensity value of the optical signal W3 still cannot fall within the preset range, the control unit 3 can control the first driving mechanism C to drive the second driving mechanism D to drive the holding unit A to move the fiber array element W1 along the first direction d1, the second direction d2, and the third direction d3 as needed. The linear movement of the fiber array element W1 is controlled by the second drive mechanism D, which drives the holding unit A to rotate the fiber array element W1 around the first axis L1, the second axis L2, and the third axis L3. The orientation of the fiber array element W1 is adjusted significantly while it is attached to the integrated circuit element W2, until the intensity value of the optical signal W3 measured by the measurement unit 1 falls within the preset range. At this point, the first drive mechanism C and the second drive mechanism D are controlled to stop operating.

[0224] After the intensity value of the light signal W3 falls within the preset range, the curing component A5 uses the ultraviolet light A511 and laser or hot air to cure the first adhesive material K1 and the second adhesive material K2 respectively. Because the optical coupler W11 is made of a light-transmitting material, the ultraviolet light A511 can penetrate the optical coupler W11 and cure the first adhesive material K1 between the optical coupler W11 and the photonic integrated circuit W23. Also, because the laser can generate heat energy, the second adhesive material K2 between the socket W12 and the second cover W222 of the cover W22 can be heated and cured.

[0225] After the first adhesive material K1 and the second adhesive material K2 are cured, the driving component A4 drives the docking part A3 away from the fiber array element W1 and disconnects it from the fiber array element W1.

[0226] After the docking member A3 is disconnected from the fiber array element W1, the negative pressure source is turned off and the retaining member A2 is moved away from the fiber array element W1, thus completing the process of coupling the fiber array element W1 to the integrated circuit element W2.

[0227] The first driving mechanism C and the second driving mechanism D of the component coupling device 2 can drive the holding unit A to sequentially repeat the above-mentioned actions to couple a preset number of fiber array elements W1 onto the integrated circuit element W2. When the photonic integrated circuit W23 is arranged on all four proximal sides of the carrier plate W21 of the integrated circuit element W2, the two component coupling devices 2 can respectively perform the operation of coupling the fiber array elements W1 onto the integrated circuit element W2 on two opposite proximal sides of the four proximal sides of the integrated circuit element W2. After the coupling operation is completed on the two opposite proximal sides, the first rotating seat 42 drives the first stage 41 to rotate 90 degrees. Then, the two component coupling devices 2 continue to perform coupling operations on the other two near sides opposite to the integrated circuit component W2; after the integrated circuit component W2 has been coupled with a preset number of fiber array components W1, the first platform 41 is driven back to the gantry 91 by the first platform rail 43, and the first pick-and-place mechanism 92 picks up the integrated circuit component W2 that has completed the coupling operation and returns it to the first tray S1, and then sends it out of the first track 71 from the other end of the first track device 7; after there are no more fiber array components W1 on the second tray S2, the second tray S2 will be sent out of the second track 81 from the other end of the second track device 8.

[0228] The component coupling device of this utility model embodiment can directly check the orientation of the integrated circuit component W2 and the fiber array component W1, and adjust the orientation of the fiber array component W1 to correspond to the orientation of the integrated circuit component W2. Compared with the prior art, which simply adjusts the orientation of the fiber array component W1 based on the intensity value of the optical signal W3, it is more time-saving.

[0229] The above description is only a preferred embodiment of the present utility model and should not be construed as limiting the scope of the present utility model. Any simple equivalent changes and modifications made in accordance with the scope of the present utility model patent application and the description of the utility model shall still fall within the scope of the present utility model patent.

Claims

1. An element coupling apparatus adapted to couple an optical fiber array element to an integrated circuit element, comprising: an element coupling device having a holding unit adapted to hold the optical fiber array element, and a driving unit adapted to drive the holding unit to move; an inspection device having a first inspection unit adapted to inspect a posture of the integrated circuit element, and a second inspection unit adapted to inspect a posture of the optical fiber array element; and a control unit adapted to control the driving unit to drive the holding unit to move the optical fiber array element to adjust the posture of the optical fiber array element to correspond to the posture of the integrated circuit element, based on inspection results of the first inspection unit and the second inspection unit. The first inspection unit has a first image capturing assembly and a first distance measurer; the first image capturing assembly is adapted to capture an image of a photonic integrated circuit or a lens array above the integrated circuit element to obtain a position of the photonic integrated circuit or the lens array; and the first distance measurer is adapted to measure an upper surface of the photonic integrated circuit to obtain flatness of the upper surface of the photonic integrated circuit. The first inspection unit is disposed on the element coupling device and is adapted to move under the driving of the driving unit. The driving unit has a first driving mechanism adapted to move in multiple axial linear directions, and a second driving mechanism adapted to move in multiple axial rotational directions; the first inspection unit is disposed on the first driving mechanism and is adapted to move in multiple axial linear directions under the driving of the first driving mechanism; the holding unit is disposed on the second driving mechanism and is adapted to move in multiple axial rotational directions under the driving of the second driving mechanism; and the second driving mechanism is disposed on the first driving mechanism and is adapted to move in multiple axial linear directions under the driving of the first driving mechanism. The first driving mechanism has a first linear motion assembly, a second linear motion assembly disposed on the first linear motion assembly, and a third linear motion assembly disposed on the second linear motion assembly; the first driving mechanism is adapted to drive the second driving mechanism to move the holding unit and the optical fiber array element in a first direction, a second direction, and a third direction; the first direction, the second direction, and the third direction are orthogonal to each other, the first direction and the second direction are transverse directions, and the third direction is a longitudinal direction.

2. The element coupling apparatus according to claim 1, wherein The second driving mechanism has a first rotational motion assembly disposed on the first driving mechanism, a second rotational motion assembly disposed on the first rotational motion assembly, and a third rotational motion assembly disposed on the second rotational motion assembly; the second driving mechanism is adapted to drive the holding unit to move the optical fiber array element in rotation about a first axis, a second axis, and a third axis; the first axis is parallel to the third direction, the second axis is parallel to the first direction, the third axis is parallel to the second direction, the first direction, the second direction, and the third direction are orthogonal to each other, the first direction and the second direction are transverse directions, and the third direction is a longitudinal direction.

3. The element coupling apparatus according to claim 1, wherein The first axis, the second axis, and the third axis intersect at an axis point; and the second driving mechanism is adapted to drive the holding unit to move the optical fiber array element in rotation about the axis point as a center.

4. The element coupling apparatus according to claim 3, wherein ​ 5. The element coupling apparatus according to claim 4, wherein ​ 6. The element coupling apparatus according to claim 4, wherein ​ 7. The element coupling apparatus according to claim 6, wherein ​ 8. The element coupling apparatus according to claim 1, wherein The second inspection unit is provided with a second image capturing assembly and a second distance measuring device; the second image capturing assembly can capture an image of an optical coupling portion or a prism below the fiber array element held by the holding unit to obtain the position of the optical coupling portion or the prism; the second distance measuring device can measure the lower surface of the optical coupling portion to obtain the flatness of the lower surface of the optical coupling portion.

9. The element coupling apparatus according to claim 8, wherein The second inspection unit is also provided with an optical integrator which can measure the intensity value of an optical signal below the fiber array element held by the holding unit.

10. The element coupling apparatus according to Claim 1, wherein, The holding unit is provided with a holding member which can hold the fiber array element, and a docking member which is connected with a measuring unit; the docking member can relatively move with the holding member to selectively dock or not dock with the fiber array element.

11. The element coupling apparatus according to Claim 1, wherein The holding unit is provided with a holding member which can hold the fiber array element, and the holding member is provided with a first holding portion and a second holding portion which is spaced apart from the first holding portion; the first holding portion can hold an optical coupling portion of the fiber array element, and the second holding portion can hold a socket portion of the fiber array element.

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