Gallium arsenide crystal grinding equipment

Abstract

The utility model belongs to the technical field of grinding equipment, and particularly relates to gallium arsenide crystal grinding equipment which comprises a workbench. A support is arranged above the workbench, an electric sliding rail is embedded in the support, an electric sliding block is connected to the electric sliding rail in a sliding mode, a support is arranged on the electric sliding block, a motor is fixedly arranged on the support, a connecting piece is arranged at the output end of the motor, a pressure sensor is arranged on the connecting piece, and a grinding rod is arranged below the pressure sensor. A grinding piece is arranged below the grinding rod, a liquid discharging groove is formed in the workbench, a dust falling mechanism is arranged on the grinding rod, a plurality of supporting arms are evenly arranged on the workbench, a containing disc is connected to the supporting arms, a waste liquid box is arranged in the workbench, an adsorption positioning mechanism is arranged on the containing disc, and a sealing bearing is arranged on the grinding rod. And a dust cover is arranged on the outer side wall of the sealing bearing, the dust falling mechanism comprises a liquid spraying dust falling assembly and a dust suction assembly, and dust generated in the grinding process can be effectively treated.

Description

Technical Field

[0001] This utility model belongs to the field of grinding equipment technology, specifically a gallium arsenide crystal grinding equipment. Background Technology

[0002] Gallium arsenide (GaAs) is an inorganic compound, a blackish-gray solid with a melting point of 1238°C. It is stable in air below 600°C and is not corroded by non-oxidizing acids. GaAs entered the practical application stage in 1964. GaAs crystals can be made into semi-insulating high-resistivity materials with resistivity more than three orders of magnitude higher than that of silicon and germanium, and are used to make integrated circuit substrates, infrared detectors, gamma photon detectors, etc.

[0003] When gallium arsenide crystals are made into semi-insulating high-resistivity materials, they need to be polished, that is, polishing is performed by applying polishing slurry to the surface of the gallium arsenide crystal and polishing it with a polishing pad.

[0004] Dust is generated during the grinding of gallium arsenide crystals. This dust mainly consists of tiny particles formed after the gallium arsenide crystals are ground and broken. Since gallium arsenide is a compound containing arsenic, and arsenic and its compounds are generally toxic, if the dust is not treated during grinding, it will affect the health of operators and environmental safety. Therefore, a gallium arsenide crystal grinding device is proposed to address the above problems. Utility Model Content

[0005] In order to overcome the shortcomings of the prior art and solve at least one of the technical problems mentioned in the background art, this utility model proposes a gallium arsenide crystal grinding device.

[0006] The technical solution adopted by this utility model to solve its technical problem is as follows: A gallium arsenide crystal grinding device of this utility model includes a worktable; a support is provided above the worktable, an electric slide rail is embedded in the support, an electric slider is slidably connected to the electric slide rail, a support is provided on the electric slider, a motor is fixedly provided on the support, a connecting piece is provided on the output end of the motor, a pressure sensor is provided on the connecting piece, a grinding rod is provided below the pressure sensor, a grinding disc is provided below the grinding rod, a drain trough is provided on the worktable, a dust removal mechanism is provided on the grinding rod, multiple support arms are evenly arranged on the worktable, the multiple support arms are located outside the drain trough, a placement plate is connected to the multiple support arms, the placement plate corresponds to the position of the drain trough, and the diameter of the placement plate is smaller than the diameter of the drain trough, a waste liquid box is provided inside the worktable, and an adsorption positioning mechanism is provided on the placement plate.

[0007] Preferably, the grinding rod is provided with a sealed bearing, and the outer wall of the sealed bearing is provided with a dust cover. The dust reduction mechanism includes a liquid spray dust reduction component and a dust suction component.

[0008] Preferably, the workbench is provided with an annular groove, which is adapted to the dust cover, and a padding layer is provided at the bottom of the dust cover.

[0009] Preferably, the liquid spray dust suppression assembly includes a plurality of liquid nozzles uniformly fixedly arranged at the lower part of the dust cover, the inner ends of the plurality of liquid nozzles being located inside the dust cover and facing the grinding disc, the outer ends of the liquid nozzles being provided with connecting ring pipes, the connecting ring pipes being provided with a pump through connecting pipes, and the inlet end of the pump being connected to a liquid tank.

[0010] Preferably, the dust collection assembly includes an air duct disposed on the upper part of the dust cover, a processing box disposed on the workbench, the other end of the air duct extending into the lower part of the processing box, and a perforated plate disposed at the end of the air duct, a negative pressure pipe disposed above the processing box, and the other end of the negative pressure pipe being connected to a negative air pump.

[0011] Preferably, the adsorption positioning mechanism includes a negative pressure groove opened on the placement tray, a pipe is provided below the negative pressure groove, a negative pressure pump is provided on the waste liquid box, and the end of the pipe passes through the waste liquid box and is connected to the negative pressure pump.

[0012] The beneficial effects of this utility model are:

[0013] This utility model provides a gallium arsenide crystal grinding device. Through the structural setting of the adsorption positioning mechanism, the gallium arsenide crystal to be ground is adsorbed and positioned on the placement plate, thereby performing the grinding process on the gallium arsenide crystal.

[0014] This utility model provides a gallium arsenide crystal grinding device. Through the structural design of the liquid spray dust suppression component, liquid spray dust suppression treatment can be performed during the grinding of gallium arsenide crystals.

[0015] This utility model provides a gallium arsenide crystal grinding device, which uses the structure of the dust collection component to collect and purify gallium arsenide dust. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and are used to explain the present invention, but do not constitute an undue limitation of the present invention.

[0017] In the attached diagram:

[0018] Figure 1 This is a perspective view of the present invention;

[0019] Figure 2 yes Figure 1 Enlarged view of point A in the middle;

[0020] Figure 3 This is a partial sectional view of the present invention;

[0021] Figure 4 yes Figure 3 Enlarged view of point B in the middle;

[0022] Figure 5 This is a schematic diagram of the structure of the dust cover and grinding disc.

[0023] Legend:

[0024] 1. Workbench; 2. Support; 3. Electric slide rail; 4. Electric slider; 5. Support; 6. Motor; 7. Connecting plate; 8. Pressure sensor; 9. Grinding rod; 10. Grinding disc; 11. Drainage tank; 12. Support arm; 13. Placement tray; 14. Waste liquid box; 15. Sealed bearing; 16. Dust cover; 17. Ring groove; 18. Pad layer; 19. Liquid nozzle; 20. Connecting ring pipe; 21. Pump; 22. Liquid tank; 23. Air guide pipe; 24. Treatment box; 25. Negative pressure pipe; 26. Negative air pump; 27. Negative pressure tank; 28. Pipe fittings; 29. ​​Negative pressure pump. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0026] Specific implementation examples are given below.

[0027] Please see Figures 1-5This utility model provides a gallium arsenide crystal grinding device, including a workbench 1; a control panel is provided on the workbench 1, which is electrically connected to the electrical components in the device; a support 2 is provided above the workbench 1, an electric slide rail 3 is embedded in the support 2, an electric slider 4 is slidably connected to the electric slide rail 3, a support 5 is provided on the electric slider 4, and a motor 6 is fixedly provided on the support 5 to control the rotation speed of the grinding disc 10 to be 2μm / min~6μm / min, preferably 3μm / min; a connecting piece 7 is provided on the output end of the motor 6, and a pressure sensor 8 is provided on the connecting piece 7. The pressure sensor 8 is used to control the grinding disc 10 to apply pressure to the gallium arsenide crystal, and the grinding pressure is 160N~180N; a grinding rod 9 is provided below the pressure sensor 8, and the grinding disc 10 is provided below the grinding rod 9; a drain trough 11 is provided on the workbench 1 to discharge the liquid sprayed during the grinding of the gallium arsenide crystal; a dust suppression mechanism is provided on the grinding rod 9. The dust suppression mechanism effectively treats the dust generated during gallium arsenide (GaAs) crystal grinding, preventing it from scattering in the work environment and affecting the health of workers. Multiple support arms 12 are evenly arranged on the workbench 1, located outside the drain tank 11. Placement trays 13 are connected to the support arms 12, used to hold the GaAs crystals to be ground. The placement trays 13 correspond to the drain tank 11, and their diameter is smaller than that of the drain tank 11. A waste liquid box 14 is installed inside the workbench 1, allowing waste liquid from grinding the GaAs crystals to flow into it through the drain tank 11 for centralized processing later. An adsorption and positioning mechanism is installed on the placement tray 13 to adsorb and position the GaAs crystals to be ground, thus performing the grinding process.

[0028] Furthermore, such as Figure 1 and Figure 3 As shown, a sealed bearing 15 is provided on the grinding rod 9, and a dust cover 16 is provided on the outer side of the sealed bearing 15. The dust reduction mechanism includes a liquid spraying dust reduction component and a dust collection component. Through the structural setting of the liquid spraying dust reduction component, liquid spraying dust reduction treatment can be performed when grinding gallium arsenide crystals. Through the structural setting of the dust collection component, gallium arsenide dust can be collected and purified.

[0029] Furthermore, such as Figure 3 As shown, a ring groove 17 is provided on the workbench 1. The ring groove 17 is adapted to the dust cover 16. A pad 18 is provided at the bottom of the dust cover 16 to seal and insert the dust cover 16 into the ring groove.

[0030] Furthermore, such as Figure 3 and Figure 5As shown, the liquid spray dust suppression assembly includes multiple liquid nozzles 19 uniformly fixedly arranged at the lower part of the dust cover 16. The inner ends of the multiple liquid nozzles 19 are located inside the dust cover 16 and face the grinding disc 10. The outer ends of the liquid nozzles 19 are provided with connecting ring pipes 20. A pump 21 is provided through the connecting ring pipes 20 and a liquid tank 22 is provided near the pump 21. Through the structural arrangement of the liquid spray dust suppression assembly, liquid spray dust suppression treatment can be performed when grinding gallium arsenide crystals.

[0031] Furthermore, such as Figure 3 As shown, the dust collection assembly includes an air duct 23 installed on the upper part of the dust cover 16, a processing box 24 installed on the workbench 1, the other end of the air duct 23 extending into the lower part of the processing box 24, and a perforated plate installed at the end of the air duct 23. A negative pressure pipe 25 is installed above the processing box 24, and the other end of the negative pressure pipe 25 is connected to a negative air pump 26. Through the structural arrangement of the dust collection assembly, gallium arsenide dust is collected and purified.

[0032] Furthermore, such as Figure 1 and Figure 3 As shown, the adsorption positioning mechanism includes a negative pressure groove 27 opened on the placement plate 13, a pipe 28 is arranged below the negative pressure groove 27, and a negative pressure pump 29 is arranged on the waste liquid box 14. The end of the pipe 28 passes through the waste liquid box 14 and is connected to the negative pressure pump 29. Through the structural arrangement of the adsorption positioning mechanism, the gallium arsenide crystal to be ground is adsorbed and positioned on the placement plate 13, thereby grinding the gallium arsenide crystal.

[0033] Working principle: When grinding gallium arsenide crystal, place the gallium arsenide crystal on the placement plate 13, adjust the position of the gallium arsenide crystal, and apply polishing fluid to the gallium arsenide crystal;

[0034] By using the structure of the adsorption positioning mechanism, the polished gallium arsenide crystal is adsorbed and positioned on the placement plate 13, thereby polishing the gallium arsenide crystal. By operating the negative pressure pump 29, a negative pressure is generated in the tube 28, which in turn generates a negative pressure in the negative pressure groove 27 on the placement plate 13, so that the polished gallium arsenide crystal is stably adsorbed on the placement plate 13.

[0035] Then, by controlling the electric slider 4 to slide on the electric slide rail 3, the dust cover 16 is sealed and inserted into the annular groove, and a pad 18 is provided at the bottom of the dust cover 16 to improve the sealing between the dust cover 16 and the annular groove. By controlling the operation of the motor 6, the rotation speed of the grinding disc 10 is controlled, and under the use of the pressure sensor 8, the grinding pressure is 160N~180N, thereby grinding the gallium arsenide crystal.

[0036] The dust generated during grinding in the dust cover 16 is treated by the structure of the dust suppression mechanism.

[0037] By using the structure of the liquid spray dust suppression component, a liquid spray dust suppression process can be performed when grinding gallium arsenide crystals. Grinding fluid is added to the liquid tank 22, and the pump 21 is run to deliver the grinding fluid to the connecting ring pipe 20. The liquid is sprayed onto the gallium arsenide crystal through multiple liquid nozzles 19. On the one hand, the grinding fluid covers the gallium arsenide crystal, improving the grinding effect of the gallium arsenide crystal. On the other hand, it can suppress the dust generated during the grinding of gallium arsenide crystals.

[0038] The gallium arsenide dust is purified by the structure of the dust collection component. A special liquid is added to the treatment box 24. The operation of the negative air pump 26 creates a negative pressure in the treatment box 24. The dust in the dust cover is drawn into the treatment box 24 through the air guide pipe 23. The end of the air guide pipe 23 is provided with a perforated plate, which makes the drawn-in gas generate dense bubbles. These bubbles are fully mixed with the special liquid in the treatment box 24, thereby purifying the gallium arsenide dust.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A gallium arsenide crystal grinding apparatus, comprising a worktable (1); characterized in that: A support (2) is provided above the workbench (1). An electric slide rail (3) is embedded in the support (2). An electric slider (4) is slidably connected to the electric slide rail (3). A support (5) is provided on the electric slider (4). A motor (6) is fixedly provided on the support (5). A connecting piece (7) is provided on the output end of the motor (6). A pressure sensor (8) is provided on the connecting piece (7). A grinding rod (9) is provided below the pressure sensor (8). A grinding disc (10) is provided below the grinding rod (9). The workbench (1) 1) A drain trough (11) is provided on the top, a dust removal mechanism is provided on the grinding rod (9), a plurality of support arms (12) are evenly arranged on the workbench (1), the plurality of support arms (12) are located on the outside of the drain trough (11), a placement plate (13) is connected to the plurality of support arms (12), the placement plate (13) corresponds to the position of the drain trough (11), and the diameter of the placement plate (13) is smaller than the diameter of the drain trough (11), a waste liquid box (14) is provided inside the workbench (1), and an adsorption positioning mechanism is provided on the placement plate (13).

2. The gallium arsenide crystal grinding equipment according to claim 1, characterized in that: The grinding rod (9) is provided with a sealed bearing (15), and a dust cover (16) is provided on the outside of the sealed bearing (15). The dust reduction mechanism includes a liquid spray dust reduction component and a dust suction component.

3. The gallium arsenide crystal grinding equipment according to claim 2, characterized in that: The workbench (1) is provided with an annular groove (17), which is adapted to the dust cover (16), and a pad (18) is provided at the bottom of the dust cover (16).

4. The gallium arsenide crystal grinding equipment according to claim 2, characterized in that: The liquid spray dust suppression assembly includes a plurality of liquid nozzles (19) uniformly fixedly arranged at the lower part of the dust cover (16). The inner ends of the plurality of liquid nozzles (19) are located inside the dust cover (16) and the liquid nozzles (19) face the grinding plate (10). The outer end of the liquid nozzles (19) is provided with a connecting ring pipe (20). The connecting ring pipe (20) is provided with a pump (21) through a connecting pipe. The inlet end of the pump (21) is connected to a liquid tank (22).

5. A gallium arsenide crystal grinding apparatus according to claim 2, characterized in that: The dust collection assembly includes an air duct (23) provided on the upper part of the dust cover (16), a processing box (24) provided on the workbench (1), the other end of the air duct (23) extending into the lower part of the processing box (24), and a perforated plate provided at the end of the air duct (23). A negative pressure pipe (25) is provided above the processing box (24), and the other end of the negative pressure pipe (25) is connected to a negative air pump (26).

6. The gallium arsenide crystal grinding apparatus according to claim 1, characterized in that: The adsorption positioning mechanism includes a negative pressure groove (27) opened on the placement plate (13), a pipe (28) is provided below the negative pressure groove (27), a negative pressure pump (29) is provided on the waste liquid box (14), and the end of the pipe (28) passes through the waste liquid box (14) and is connected to the negative pressure pump (29).

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