Transportation mechanism and transportation equipment

Abstract

The utility model provides a transportation mechanism and transportation equipment, the transportation mechanism comprises a rack, a driving part, a bearing part and an image recognition assembly, the rack is fixedly arranged, and the driving part is arranged on the rack; the bearing part is arranged on the rack and is in driving connection with the driving part, the bearing part can bear the graphite boat, and the driving part can drive the bearing part to bear the graphite boat to move in and out of the diffusion furnace; the image recognition assembly is arranged on the rack, the graphite boat is provided with an identification part, and the image recognition assembly can recognize the identification part to know whether the graphite boat deflects or not; the image recognition assembly is further in signal connection with the driving part, and the driving part receives a graphite boat deflection signal sent by the image recognition assembly and can drive the bearing part to correspondingly move and adjust. In the conveying mechanism, the driving part is used for driving the bearing part to bear the graphite boat to move, so that the graphite boat is conveyed into the diffusion furnace or conveyed out of the diffusion furnace, meanwhile, the driving part can directly or indirectly receive signal feedback of the image recognition assembly, and then the bearing part is correspondingly driven to move.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of transportation positioning, and more particularly relates to a transportation mechanism and a transportation device. BACKGROUND

[0002] The diffusion process performed by the diffusion furnace is a high-temperature process, and the general process temperature is above 1000 DEG C. In an automatic production line, if the graphite boat deviates in position after being taken out of the furnace, the graphite boat needs to be corrected first before being accurately discharged by the automatic discharge mechanism, otherwise it will cause a collision. However, the residual temperature of the graphite boat just taken out of the furnace is relatively high, and manual intervention for correction cannot be immediately made, and the temperature needs to be reduced to an operable range before correction can be made, which results in low correction efficiency.

[0003] Therefore, how to improve the correction efficiency needs to be solved urgently. CONTENT OF THE UTILITY MODEL

[0004] The application provides a transportation mechanism for transporting a graphite boat in and out of a diffusion furnace, which can improve the correction efficiency of the deviated graphite boat.

[0005] The technical scheme adopted by the application is as follows: a transportation mechanism is provided, which comprises a rack, a driving member, a bearing member, and an image recognition assembly. The rack is fixedly arranged, and the driving member is arranged on the rack. The bearing member is arranged on the rack and is drivingly connected with the driving member. The bearing member can bear the graphite boat, and the driving member can drive the bearing member to move in and out of the diffusion furnace while bearing the graphite boat. The image recognition assembly is arranged on the rack. The graphite boat is provided with an identification part, and the image recognition assembly can identify the identification part to know whether the graphite boat is deviated. The image recognition assembly is also signal-connected with the driving member. The driving member receives the graphite boat deviation signal sent by the image recognition assembly and can drive the bearing member to move correspondingly.

[0006] Further, the bearing member comprises a material bearing part and a connecting part. The connecting part is drivingly connected with the driving member along a first direction. The material bearing part is arranged to extend along the first direction. One end of the material bearing part along the first direction is connected with the material bearing part, and the other end of the material bearing part along the first direction is arranged to be suspended. The driving member drives the connecting part to move along the first direction, and can synchronously drive the material bearing part to move along the first direction while bearing the graphite boat, so as to move in and out of the diffusion furnace.

[0007] Further, the image recognition component is provided with a reference template, the shape of the reference template is correspondingly matched with the shape of the identification part along the first direction; after the image recognition component recognizes the identification part, the shape of the reference template is compared with the shape of the identification part along the first direction to obtain the deflection amount of the identification part deflected from the reference template along the first direction; the driving member receives the graphite boat deflection signal sent by the image recognition component, and drives the loading part to move a distance of the deflection amount along the first direction, so that the shape of the identification part is correspondingly matched with the shape of the reference template along the first direction.

[0008] Further, the loading part can carry a plurality of graphite boats along the first direction.

[0009] Further, the image recognition component is provided with a reference template, the shape of the reference template is correspondingly matched with the shape of the identification part along the first direction; after the image recognition component recognizes the identification part, the shape of the reference template is compared with the shape of the identification part along the first direction to obtain the deflection amount of the identification part deflected from the reference template along the first direction; the driving member receives the graphite boat deflection signal sent by the image recognition component, and drives the loading part to move a distance of the deflection amount along the first direction, so that the shape of the identification part is correspondingly matched with the shape of the reference template along the first direction.

[0010] Further, the image recognition component is provided with a reference template, the shape of the reference template is correspondingly matched with the shape of the identification part along the first direction; after the image recognition component recognizes the identification part, the shape of the reference template is compared with the shape of the identification part along the first direction to obtain the deflection amount of the identification part deflected from the reference template along the first direction; the driving member receives the graphite boat deflection signal sent by the image recognition component, and drives the loading part to move a distance of the deflection amount along the first direction, so that the shape of the identification part is correspondingly matched with the shape of the reference template along the first direction.

[0011] Further, the shape of the reference template is the same as the shape of the corresponding identification part, and the size is equal; the corresponding matching standard of the shape of the identification part and the shape of the reference template is that the image of the identification part recognized by the image recognition component is completely overlapped with the reference template.

[0012] Further, the shape of the reference template is the same as the shape of the corresponding identification part, and the size of the reference template is greater than the size of the corresponding identification part; the corresponding matching standard of the shape of the identification part and the shape of the reference template is that the image of the identification part recognized by the image recognition component is completely located in the reference template.

[0013] Further, the shape of the reference template is the same as the shape of the corresponding identification part along the first direction; the corresponding matching standard of the shape of the identification part and the shape of the reference template is that the first direction end edge of the image of the identification part recognized by the image recognition component is coincided with the shape of the reference template, or the distance size along the first direction is within a preset range.

[0014] The application also provides a conveying device, comprising a carrying mechanism and the conveying mechanism as any of the above, the image recognition assembly is in signal connection with the carrying mechanism, and the carrying mechanism can carry the graphite boat to a target position on the carrier or accurately carry the graphite boat away from the carrier according to the visual recognition of the image recognition assembly.

[0015] In the conveying mechanism provided by the application, the rack provides direct or indirect structural support for the driving member, the carrier and the image recognition assembly. The driving member is used to drive the carrier to move and carry the graphite boat to or from the diffusion furnace. Meanwhile, the driving member can directly or indirectly receive the signal feedback of the image recognition assembly, and then drive the carrier to move correspondingly.

[0016] The graphite boat is provided with an identification part, which is the recognition object of the image recognition assembly. When the image recognition assembly recognizes the identification part, it can recognize whether the graphite boat in the current state is in the right position.

[0017] Further, after the image recognition assembly recognizes the identification part of the graphite boat, it will send a signal to the driving member. The driving member will drive and adjust the carrier according to the recognition result, and then adjust the position of the graphite boat. If the graphite boat is in a skewed state, the driving member will drive the carrier to move and adjust the graphite boat correspondingly to adjust it to the right position. Of course, if the graphite boat is in the right position, the driving member and the carrier will remain in the current state.

[0018] Compared with the scheme disclosed in the related art, which uses a photoelectric sensor to sense the graphite boat and manually adjusts the deviation, the image recognition assembly of the application uses visual recognition of the identification part image and cooperates with the driving member to realize automatic deviation adjustment, which can timely recognize the deviation and timely adjust the deviation, and the deviation adjustment efficiency is higher. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0020] Figure 1 It is a perspective view of a conveying mechanism for carrying a graphite boat disclosed in the related art;

[0021] Figure 2 It is Figure 1 Front view of the perspective view;

[0022] Figure 3 It isFigure 2 A local enlarged schematic view at A;

[0023] Figure 4 A perspective view of a bearing graphite boat transport mechanism disclosed by the embodiment of the present application;

[0024] Figure 5 For Figure 4 Front view of the perspective view;

[0025] Figure 6 For Figure 5 A local enlarged schematic view at B.

[0026] In the drawings, various reference numbers refer to components having the same function or structure.

[0027] 10, transport mechanism; 11, rack; 12, driving member; 13, bearing member; 131, load carrying part; 132, connecting part; 14, image recognition assembly; 141, reference template; 142, recognition range; 20, graphite boat; 21, identification part; 40, photoelectric sensor; 41, sensing member; 42, sensing point. DETAILED DESCRIPTION

[0028] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not intended to limit the present application.

[0029] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0030] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0031] In addition, the terms "first", "second", etc. are used only for descriptive purposes and should not be construed as implying or suggesting relative importance or an indicated number of the technical features indicated. Thus, the features defined as "first", "second", etc. can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly and specifically limited.

[0032] Please refer to Figures 1 to 3 Before the diffusion furnace (not shown in the figure) performs the process, the transport mechanism 10 generally moves the graphite boat 20 carried by the bearing member 13 through the driving member 12 to carry the graphite boat 20 into the diffusion furnace (not shown in the figure) for heating process, and after the heating process is completed, the graphite boat 20 is carried out of the diffusion furnace (not shown in the figure) through the driving member 12 driving the bearing member 13.

[0033] The graphite boat 20 is generally carried by a mechanical hand (not shown in the figure), that is, the mechanical hand (not shown in the figure) places the graphite boat 20 on the bearing member 13, which is called loading, and the mechanical hand (not shown in the figure) takes the graphite boat 20 away from the bearing member 13, which is called unloading. The loading station and the unloading station of the mechanical hand (not shown in the figure) are generally fixed, and it can be understood that the spatial position of the mechanical hand (not shown in the figure) for placing and taking the graphite boat 20 is fixed, that is, the driving member 12 must drive the bearing member 13 to move to the position corresponding to the loading position of the mechanical hand (not shown in the figure) to accurately receive the graphite boat 20. Taking the case where the spatial position corresponding to the loading position of the mechanical hand (not shown in the figure) to the bearing member 13 is the same as the spatial position corresponding to the unloading position of the mechanical hand (not shown in the figure) from the bearing member 13 as an example.

[0034] Similarly, the driving member 12 must drive the bearing member 13 to move to the position corresponding to the unloading position of the mechanical hand (not shown in the figure) to enable the mechanical hand (not shown in the figure) to accurately take away the graphite boat 20.

[0035] Generally speaking, it is relatively easy for the bearing member 13 to receive the graphite boat 20 placed by the mechanical hand (not shown in the figure), that is, the bearing member 13 only needs to move to a position where it can receive the graphite boat 20. The unloading position of the bearing member 13 is generally fixed, and it can be understood that the driving member 12 drives the bearing member 13 to move to this fixed position every time the graphite boat 20 is unloaded, so as to be actually convenient and effective.

[0036] And the graphite boat 20 is carried by the carrier 13 into and out of the diffusion furnace (not shown in the figure) during the process, often in contact with the inner wall of the diffusion furnace (not shown in the figure) and other situations, resulting in the rubbing and other situations caused by the factors, such as the high temperature in the furnace caused the carrier 13 deformation, and the contact friction with the furnace wall caused the graphite boat 20 to slip on the carrier 13, so when the heating process is completed and the graphite boat 20 is transported out of the diffusion furnace (not shown in the figure), the position of the graphite boat 20 has changed, that is, when the driving member 12 drives the carrier 13 back to the original position, the graphite boat 20 has deviated from the position before entering the diffusion furnace (not shown in the figure), at this time, if the robot (not shown in the figure) takes away the graphite boat 20, it may collide with the boat, therefore, the graphite boat 20 needs to be adjusted to the original position state before being accurately taken away by the robot (not shown in the figure).

[0037] The related art discloses a structure setting scheme for sensing the graphite boat 20 with a photoelectric sensor 40 and adjusting manually, which is that the graphite boat 20 is provided with a sensing member 41, which is generally a sheet structure, and the photoelectric sensor 40 is arranged on the rack 11, generally using a point laser sensor, such as Figure 3 When the driving member 12 drives the carrier 13 to carry the graphite boat 20 to move to the point laser sensor to sense the sensing member 41, it is determined that the graphite boat 20 is in the right position, and in actual setting, the sensing member 41 receives a light spot with a size much larger than the size of the light spot, therefore, multiple point laser sensors are often used in the related art to improve the accuracy of sensing the position of the graphite boat 20, which results in higher cost.

[0038] At the same time, when the graphite boat 20 is inclined, the point laser sensor only reminds the inclination state, but cannot feedback the inclination amount, that is, cannot provide accurate size reference for correcting the graphite boat 20. Moreover, manual correction also needs to wait for the temperature to decrease to an operable range, which makes the correction scheme of the related art less efficient.

[0039] Please refer to Figures 4 to 6The transport mechanism 10 provided in the embodiments of the present application will be described. The transport mechanism 10 provided in the embodiments of the present application comprises a rack 11, a driving member 12, a bearing member 13 and an image recognition assembly 14. The rack 11 is fixedly arranged, and the driving member 12 is arranged on the rack 11. The bearing member 13 is arranged on the rack 11 and is drivingly connected with the driving member 12. The bearing member 13 can bear a graphite boat 20. The driving member 12 can drive the bearing member 13 to move the graphite boat 20 in and out of a diffusion furnace (not shown in the figure). The image recognition assembly 14 is arranged on the rack 11. The graphite boat 20 is provided with an identification part 21. The image recognition assembly 14 is provided with a reference template 141. The shape of the reference template 141 can correspondingly match the shape of the identification part 21. The image recognition assembly 14 can recognize the identification part 21 and compare the shape of the reference template 141 with the shape of the identification part 21 to obtain the deflection amount of the identification part 21 from the reference template 141. The image recognition assembly 14 is also signal-connected with the driving member 12. The driving member 12 receives the deflection signal of the graphite boat 20 sent by the image recognition assembly 14 and can drive the bearing member 13 to move a distance corresponding to the deflection amount, so that the shape of the identification part 21 correspondingly matches the shape of the reference template 141.

[0040] In the transport mechanism 10 provided in the embodiments of the present application, the rack 11 provides direct or indirect structural support for the driving member 12, the bearing member 13 and the image recognition assembly 14. The driving member 12 is used to drive the bearing member 13 to move the graphite boat 20, so as to realize the transportation of the graphite boat 20 into or out of the diffusion furnace (not shown in the figure). Meanwhile, the driving member 12 can directly or indirectly receive the signal feedback of the image recognition assembly 14, and then drive the bearing member 13 to move correspondingly.

[0041] The image recognition assembly 14 is provided with the reference template 141, and the graphite boat 20 is provided with the identification part 21. The identification part 21 is the recognition object of the image recognition assembly 14. When the image recognition assembly 14 recognizes the identification part 21, the image of the recognized identification part 21 is compared with the shape of the reference template 141. If the shape of the reference template 141 and the image shape of the identification part 21 satisfy the corresponding matching state, it can be understood that the graphite boat 20 in this state is in the right position. If the shape of the reference template 141 and the image shape of the identification part 21 do not satisfy the corresponding matching state, it can be understood that the graphite boat 20 in this state is in the deflection state. The image recognition assembly 14 obtains the size of the deflection of the identification part 21 from the reference template 141, which is recorded as the deflection amount.

[0042] Further, the image recognition component 14 identifies the identification part 21 of the graphite boat 20 and completes the comparison with the reference template, and then sends a signal to the driving member 12. The driving member 12 drives the carrier 13 according to the comparison result, and then adjusts the position of the graphite boat 20. If the graphite boat 20 is in a skewed state, the driving member 12 drives the carrier 13 to carry the graphite boat 20 to move a distance corresponding to the skewing amount, so as to adjust the graphite boat 20 to a right state. Of course, if the graphite boat 20 is in a right state, the driving member 12 and the carrier 13 remain in the current state.

[0043] Compared with the scheme disclosed in the prior art, that is, using a photoelectric sensor to sense the graphite boat 20 and manually adjusting the skewing, the image recognition component 14 of the embodiment of the present application uses visual recognition of the image of the identification part 21 and image matching comparison with the reference template 141. The comparison can achieve higher skewing correction accuracy, and can realize automatic skewing correction by cooperating with the driving member 12. The image recognition component 14 can timely identify skewing and timely correct skewing, and the skewing correction efficiency is higher. At the same time, due to the high recognition accuracy, one image recognition component 14 can realize accurate recognition of one or more graphite boats 20, so as to save sensing cost.

[0044] Please refer to Figure 4 Further, the carrier 13 in the above embodiment can include a carrying part 131 and a connecting part 132. The connecting part 132 is drivingly connected with the driving member 12 along a first direction, and the first direction is denoted as X. The carrying part 131 is arranged to extend along the first direction. One end of the carrying part 131 along the first direction is connected with the carrying part 131, and the other end of the carrying part 131 along the first direction is arranged to be suspended. The driving member 12 drives the connecting part 132 to move along the first direction, so as to synchronously drive the carrying part 131 to carry the graphite boat 20 to move in and out of the diffusion furnace (not shown in the figure) along the first direction.

[0045] In the embodiment of the present application, the diffusion furnace (not shown in the figure) cooperating with the transport mechanism 10 is arranged to extend along the first direction, and the first direction is taken as the horizontal direction. The furnace opening of the diffusion furnace (not shown in the figure) is arranged at one end of the first direction, and the carrier 13 carrying the graphite boat 20 can move in and out of the diffusion furnace (not shown in the figure) from the furnace opening. The carrying part 131 for carrying the graphite boat 20 in the carrier 13 is drivingly connected with the driving member 12 through the connecting part 132. The carrying part 131 can be understood as a strip-shaped or plate-shaped structure extending along the first direction, so that the carrying part 131 is in a suspended state, thereby facilitating cooperation of the carrying part 131 with the diffusion furnace (not shown in the figure).

[0046] The carrying part 131 and the connecting part 132 can be an integral structure or a split structure arranged through mounting connection. The embodiment of the present application takes the carrying part 131 and the connecting part 132 arranged through detachable connection as an example, so as to improve the structural mounting flexibility and adjustability.

[0047] The connecting portion 132 can be drivingly connected with the driving member 12, or can be arranged on the driving member 12. For example, when the driving member 12 is a linear driving module, the connecting portion 132 is connected with a driving end of the linear driving module, so that the linear driving module can provide driving effect for the connecting portion 132 and can also provide structural mounting stability. Of course, the connecting portion 132 can be drivingly connected with the driving member 12 and slidably connected with the rack 11 along the first direction. In this way, the rack 11 provides structural stability, and the driving member 12 provides driving effect, so that stable movement driven by the driving member 12 is realized.

[0048] It should be noted that the driving member 12 can drive the bearing member 13 to move in multiple directions. For example, multiple driving members 12 are used to be drivingly connected with the bearing member 13 respectively, so as to drive the bearing member 13 to move along a spatial direction. The above description that the driving member 12 drives the bearing member 13 to move along the first direction is only a preferred embodiment of the present application, and does not limit the present application. Any modification, equivalent replacement and improvement within the spirit and principle of the present application should be included in the protection scope of the present application.

[0049] Please refer to Figures 5 to 6 In addition, in the above embodiment, the shape of the reference template 141 of the image recognition assembly 14 can correspond to the shape of the identification portion 21 of the graphite boat 20 along the first direction. After the image recognition assembly 14 recognizes the identification portion 21, the shape of the reference template 141 is compared with the shape of the identification portion 21 along the first direction, so as to obtain the inclination of the identification portion 21 along the first direction from the reference template 141. The driving member 12 receives the inclination signal of the graphite boat 20 sent by the image recognition assembly 14, and drives the loading portion 131 to move along the first direction by a distance corresponding to the inclination parameter, so that the shape of the identification portion 21 corresponds to the shape of the reference template 141 along the first direction.

[0050] It can be understood that the shape of the reference template 141 of the image recognition assembly 14 in the embodiment of the present application is established by referring to the shape of the identification portion 21 of the graphite boat 20. For example, a part of the graphite boat 20 is selected as the identification portion 21. For example, a vertical surface parallel to the first direction is selected as the identification portion 21. The shape of the reference template 141 of the image recognition assembly 14 is a rectangle with the same shape and size as the rectangle. The reference template 141 is parallel to the identification portion 21 along the first direction. The corresponding matching standard between the shape of the identification portion 21 and the shape of the reference template 141 is that the image of the identification portion 21 recognized by the image recognition assembly 14 completely coincides with the reference template 141.

[0051] Therefore, in an embodiment, when the image recognition assembly 14 identifies that the identification part 21 of the graphite boat 20 is completely coincident with the reference template 141, the driving member 12 stops driving during the driving of the bearing member 13 to carry the graphite boat 20 to move along the first direction, at which time the graphite boat 20 is in a right position; otherwise, the graphite boat 20 is in a skew state, and the skew amount is the length of the rectangular identification part 21 and the rectangular reference template 141 along the first direction to reach the coincident state, and the image recognition assembly 14 sends a signal to the driving member 12 to drive the bearing member 13 to carry the graphite boat 20 to move along the first direction by a distance corresponding to the skew amount, so as to adjust and correct the graphite boat 20.

[0052] Further, the shape of the reference template 141 of the image recognition assembly 14 can also be partially matched with the identification part 21 of the graphite boat 20. For example, the identification part 21 of the graphite boat 20 is also taken as an example of a rectangular vertical surface parallel to the first direction, and the shape of the reference template 141 of the image recognition assembly 14 is taken as an example of an edge of the rectangular identification part 21 along the first direction, i.e., a vertical line segment. The corresponding matching standard of the shape of the identification part 21 and the shape of the reference template 141 is that the first direction end edge of the image of the identification part 21 recognized by the image recognition assembly 14 is coincident with the shape of the reference template 141, or the distance along the first direction is within a preset range, which can be determined according to requirements, for example, when the first direction end edge of the image of the identification part 21 recognized by the image recognition assembly 14 is within a preset distance from the reference template 141, it is determined as corresponding matching.

[0053] In an embodiment, the first direction end edge of the image of the identification part 21 recognized by the image recognition assembly 14 is coincident with the shape of the reference template 141 as the corresponding matching standard. Therefore, when the image recognition assembly 14 identifies that the corresponding edge of the identification part 21 of the graphite boat 20 is completely coincident with the vertical line segment-shaped reference template 141, the driving member 12 stops driving, at which time the graphite boat 20 is in a right position; otherwise, the graphite boat 20 is in a skew state, and the skew amount is the distance of the vertical line segment-shaped reference template 141 and the corresponding edge of the identification part 21 of the graphite boat 20 along the first direction. The image recognition assembly 14 sends a signal to the driving member 12 to drive the bearing member 13 to carry the graphite boat 20 to move along the first direction by a distance corresponding to the skew amount, so as to adjust and correct the graphite boat 20.

[0054] Further, the shape of the reference template 141 of the image recognition component 14 can also match the shape of the identification part 21 of the graphite boat 20. For example, the identification part 21 of the graphite boat 20 is a rectangular vertical surface parallel to the first direction, and the shape of the reference template 141 of the image recognition component 14 is proportional to the shape of the rectangular identification part 21, but the size of the reference template 141 is greater than or smaller than the size of the rectangular identification part 21. The matching standard between the shape of the identification part 21 and the shape of the reference template 141 is that the image of the identification part 21 recognized by the image recognition component 14 is completely located in the reference template 141, or the reference template 141 is completely located in the image of the identification part 21 recognized by the image recognition component 14.

[0055] Therefore, in an embodiment, when the image recognition component 14 recognizes that the rectangular identification part 21 of the graphite boat 20 is completely covered by the rectangular reference template 141, the complete coverage can be understood as follows: if the size of the rectangular reference template 141 is greater than the size of the rectangular identification part 21, the image recognition component 14 recognizes that the image of the rectangular identification part 21 of the graphite boat 20 is completely in the range of the rectangular reference template 141; if the size of the rectangular reference template 141 is smaller than the size of the rectangular identification part 21, the image recognition component 14 recognizes that the image of the rectangular identification part 21 of the graphite boat 20 completely covers the range of the rectangular reference template 141, that is, the rectangular reference template 141 is completely in the range of the image of the rectangular identification part 21. When the above-mentioned complete coverage state is reached, the driving member 12 stops driving, and at this time, the graphite boat 20 is in a right position; otherwise, the graphite boat 20 is in a skew state, and the skew amount is the length of the distance between the rectangular reference template 141 and the rectangular identification part 21 of the graphite boat 20 along the first direction to reach the complete coverage state. The image recognition component 14 sends a signal to the driving member 12 to drive the bearing member 13 to move the graphite boat 20 along the first direction by a distance corresponding to the skew amount, so as to adjust and correct the graphite boat 20.

[0056] It should be noted that when the robot (not shown in the figure) takes the graphite boat 20, it generally grasps the graphite boat 20 at a certain range. Therefore, the size of the rectangular identification part 21 of the graphite boat 20 and the size of the rectangular reference template 141 can be inconsistent, that is, one is larger and the other is smaller, and different positions of the graphite boat 20 that meet the complete coverage state can be normally grasped by the robot (not shown in the figure).

[0057] Further, in the above-mentioned embodiment, the bearing member 13 can be provided with one graphite boat 20 along the first direction, or can be provided with a plurality of graphite boats 20 along the first direction, that is, the length of the bearing member 13 along the first direction and the structural strength meet the requirements.

[0058] In an embodiment, when the carrier carries multiple graphite boats 20, taking two as an example, two image recognition assemblies 14 can be provided, each image recognition assembly 14 corresponding to identifying the identification part 21 of one graphite boat 20, that is, each image recognition assembly 14 is provided with a reference template 141, and the shape of the reference template 141 of each image recognition assembly 14 can correspondingly match the shape of the identification part 21 of the corresponding graphite boat 20 along the first direction.

[0059] It can be understood that the two image recognition assemblies 14 can respectively identify the corresponding graphite boats 20, that is, the feeding and discharging of the two graphite boats 20 are respectively performed, so that the driving member 12 first drives the carrier 13 to move according to the feedback of one image recognition assembly 14, when the image recognition assembly 14 identifies the corresponding graphite boat 20 and the identification part 21 of the graphite boat 20 correspondingly matches the corresponding reference template 141, then the robot (not shown in the figure) first takes away the graphite boat 20. Then the driving member 12 drives the carrier 13 to move according to the feedback of the other image recognition assembly 14, when the image recognition assembly 14 identifies the corresponding graphite boat 20 and the identification part 21 of the graphite boat 20 correspondingly matches the corresponding reference template 141, then the robot (not shown in the figure) takes away the graphite boat 20 again.

[0060] Please refer to Figure 6 The image recognition assembly 14 in the above embodiment can also be provided with one, which identifies the identification parts 21 of two graphite boats 20, the image recognition assembly 14 is provided with two reference templates 141, each reference template 141 corresponds to the shape of the identification part 21 of one graphite boat 20 along the first direction, and the shapes of the two reference templates 141 correspond to the shapes of the identification parts 21 of the two graphite boats 20 along the first direction and can simultaneously correspond to the matching. In this way, the driving member 12 drives the carrier 13 to move according to the feedback of the image recognition assembly 14, when the image recognition assembly 14 identifies the corresponding two graphite boats 20 and the identification parts 21 of the two graphite boats 20 correspondingly match the corresponding reference templates 141, then the robot (not shown in the figure) takes away the two graphite boats 20 at the same time or in sequence.

[0061] The embodiment of the present application also provides a transportation device (not shown in the figure), which comprises a carrying mechanism (not shown in the figure) and the transportation mechanism 10 in any of the above embodiments, the carrying mechanism (not shown in the figure) can carry the graphite boat 20 to the carrier 13 to realize feeding, or carry the graphite boat 20 away from the carrier 13 to realize discharging; the feeding station and the discharging station are both arranged in the identification range 142 of the image recognition assembly 14, and when the graphite boat 20 is located at the feeding station or the discharging station, the image recognition assembly 14 identifies that the image of the identification part 21 of the graphite boat 20 matches the reference template 141 of the image recognition assembly 14.

[0062] The transport device (not shown in the figure) of the embodiments of the present application has the beneficial effects brought by the transport mechanism 10 in any of the above embodiments due to comprising the transport mechanism 10 in any of the above embodiments, which will not be repeated here.

[0063] The above only describes the preferred embodiments of the present application and is not used to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A transport mechanism for transporting a graphite boat in and out of a diffusion furnace, characterized in that, include: Rack, fixed installation; The drive unit is mounted on the frame; A carrier is disposed on the frame and drivenly connected to the drive component. The carrier can carry the graphite boat, and the drive component can drive the carrier to move the graphite boat in and out of the diffusion furnace. as well as An image recognition component is disposed on the frame, and the graphite boat is provided with an identification part. The image recognition component can identify the identification part to determine whether the graphite boat is tilted. The image recognition component is also connected to the driving component via a signal. The driving component receives the graphite boat tilt signal emitted by the image recognition component, which can drive the carrier to move and adjust accordingly.

2. The transportation mechanism according to claim 1, characterized in that, The carrier includes a material-carrying part and a connecting part, and the connecting part is driven to the driving part along a first direction; The material-carrying part extends along the first direction, one end of the material-carrying part along the first direction is connected to the material-carrying part, and the other end of the material-carrying part along the first direction is suspended. The driving member drives the connecting part to move along the first direction, and can synchronously drive the material-carrying part to carry the graphite boat to move in and out of the diffusion furnace along the first direction.

3. The transportation mechanism according to claim 2, characterized in that, The image recognition component is provided with a reference template, the shape of which can be matched with the shape of the identification part along the first direction; After the image recognition component recognizes the identifier, it compares the shape of the reference template with the shape of the identifier along the first direction to obtain the amount by which the identifier is skewed from the reference template along the first direction. The driving component receives the graphite boat deflection signal emitted by the image recognition component, and can drive the material loading part to move the deflection amount parameter by a distance along the first direction, so that the shape of the marking part corresponds and matches the shape of the reference template along the first direction.

4. The transportation mechanism according to claim 2 or 3, characterized in that, The material-carrying section can carry multiple graphite boats along the first direction.

5. The transportation mechanism according to claim 4, characterized in that, The image recognition components are multiple, and each image recognition component can recognize a corresponding mark of the graphite boat. The reference template shape of each image recognition component and the mark shape of the corresponding graphite boat can be matched along the first direction.

6. The transportation mechanism according to claim 4, characterized in that, The image recognition component is one, and the image recognition component can recognize multiple marking parts of the graphite boat. The image recognition component is provided with multiple reference templates, and the shape of each reference template corresponds to the shape of a marking part of the graphite boat along the first direction.

7. The transportation mechanism according to claim 3, characterized in that, The shape of the reference template is the same as the shape of the corresponding identification part, and the size is equal; The matching standard between the shape of the identifier and the shape of the reference template is that the image of the identifier recognized by the image recognition component completely overlaps with the reference template.

8. The transportation mechanism according to claim 3, characterized in that, The shape of the reference template is the same as the shape of the corresponding identification part, and the size of the reference template is larger than the size of the corresponding identification part; The matching standard between the shape of the identifier and the shape of the reference template is that the image of the identifier recognized by the image recognition component is completely located within the reference template.

9. The transportation mechanism according to claim 3, characterized in that, The shape of the reference template is the same as the shape of the end edge of the corresponding mark part along the first direction; The matching standard between the shape of the identifier and the shape of the reference template is: the first direction end edge of the identifier image recognized by the image recognition component coincides with the shape of the reference template, or the distance dimension along the first direction is within a preset range.

10. A transportation device, characterized in that, The transport equipment includes a handling mechanism and a transport mechanism as described in any one of claims 1-9. The image recognition component is signal-connected to the handling mechanism. The handling mechanism can, based on the visual recognition of the image recognition component, move the graphite boat to a target position on the carrier or precisely remove the graphite boat from the carrier.

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