Detection device for FOUP

Abstract

A detection device for FOUP comprises an adjusting and moving mechanism installed on a shell mechanism, a plurality of first distance measuring sensors installed on the adjusting and moving mechanism and a control device. The adjusting and moving mechanism can be controlled by the control device to drive the first distance measuring sensor to move into the box body of the FOUP. The first distance measuring sensor can measure the distance towards the left side wall and the right side wall of the box body so as to generate a first distance measuring signal. The control device can analyze the first distance measuring signal to obtain the deformation quantity of the box body. The first distance measuring sensor can be driven to move into the box body through the adjusting and moving mechanism, the structural design that distance measurement is conducted on the left side wall and the right side wall of the box body is achieved, the control device can analyze a first distance measuring signal of the first distance measuring sensor, and then the design of the deformation quantity of the box body is obtained. Therefore, the deformation quantity of the box body can be accurately measured.

Description

TECHNICAL FIELD

[0001] The utility model relates to a detection equipment for semiconductor process, in particular to a detection equipment for wafer transfer box. BACKGROUND

[0002] In the process of wafer processing, it is often necessary to transfer wafers between multiple processing stations. In order to ensure that the wafers are not damaged or contaminated during the transfer process, a front opening unified pod (FOUP) is usually used to store and transport the wafers. The commonly used FOUP currently includes a box body and a cover plate. The left and right inner walls of the box body are provided with a plurality of upper and lower spaced load ribs. The wafers are carried in the space between the left and right load ribs.

[0003] However, during the transfer of the FOUP, the FOUP may sometimes collide. In order to prevent the FOUP from being deformed due to the collision and being unable to stably carry the wafers, the box body structure of the FOUP should be detected regularly. The current structure detection of the FOUP is mainly to detect the front and back levels of the load ribs, and rarely to detect the deformation amount of the box body itself. SUMMARY

[0004] The utility model aims at providing a detection equipment for detecting the deformation amount of the box body of the FOUP.

[0005] The utility model relates to a detection equipment for FOUP, which is suitable for deformation amount detection of the box body of the FOUP. The detection equipment includes a shell mechanism, a displacement mechanism installed on the shell mechanism, a plurality of first distance measuring sensors installed on the displacement mechanism, and a control device.

[0006] The shell mechanism has a bearing table surface for placing the box body in an open forward manner. The displacement mechanism includes a displacement module installed on the shell mechanism and a mounting bracket provided on the displacement module. The displacement module can be controlled to drive the mounting bracket to displace backward and insert into the box body placed on the bearing table surface. The first distance measuring sensors are installed on the left and right sides of the mounting bracket and can be driven by the mounting bracket to move into the box body. The first distance measuring sensors measure the distances to a plurality of different parts of the left and right side walls of the box body, respectively, and generate first distance measuring signals.

[0007] The control device is signal connected with the adjusting and moving module and the first distance measuring sensor, and includes a measurement control module and a deformation amount analysis module. The measurement control module can control the distance of the adjusting and moving module driving the mounting frame to move into the box body, and can control the first distance measuring sensor to measure the distance of the box body. The deformation amount analysis module can analyze the first distance measuring signal to obtain the deformation amount of the box body.

[0008] The detection equipment for FOUP further includes a second distance measuring sensor installed on the mounting frame and signal connected with the control device. The second distance measuring sensor can be driven by the mounting frame to move towards the box body, and can measure the distance towards a rear side wall of the box body to obtain a second distance measuring signal. The measurement control module can analyze the second distance measuring signal to obtain the distance value of the mounting frame relative to the rear side wall, and can control the adjusting and moving module to drive the mounting frame to move according to the distance value.

[0009] The detection equipment for FOUP further includes a second distance measuring sensor installed on the mounting frame and signal connected with the control device. The second distance measuring sensor can be driven by the mounting frame to move towards the box body, and can measure the distance towards a rear side wall of the box body to obtain a second distance measuring signal. The measurement control module can analyze the second distance measuring signal to obtain the distance value of the mounting frame relative to the rear side wall, and can control the adjusting and moving module to drive the mounting frame to move according to the distance value.

[0010] The detection equipment for FOUP further includes a second distance measuring sensor installed on the mounting frame and signal connected with the control device. The second distance measuring sensor can be driven by the mounting frame to move towards the box body, and can measure the distance towards a rear side wall of the box body to obtain a second distance measuring signal. The measurement control module can analyze the second distance measuring signal to obtain the distance value of the mounting frame relative to the rear side wall, and can control the adjusting and moving module to drive the mounting frame to move according to the distance value.

[0011] The utility model discloses a detection equipment for FOUP, the bottom surface recessed with three positioning slots of the bottom wall of box body, the shell mechanism still has three and protrudes in the positioning column of bearing platform surface, the detection equipment still contains three and exposes in the touch sensor of bearing platform surface, every touch sensor has the touch piece that protrudes bearing platform surface and can be pressed down and touch, the positioning column can be used for down and right positioning in bearing platform surface with the box body of positioning slot respectively aligning sleeve, the touch piece of every touch sensor will be down and right pressed of the box body of having right positioned in bearing platform surface, and generate touch signal, the measurement control module will start measurement function when every touch sensor generates touch signal, and control the adjustment module and move the mounting frame to the box body direction, and control the first distance measuring sensor and sense and generate the first distance measuring signal, and control the bottom distance measuring sensor and sense and generate the bottom distance measuring signal.

[0012] The utility model discloses a detection equipment for FOUP, the adjustment module includes the slide rail that extends before and after setting in the shell mechanism, the slide seat that can be displaced before and after and installs on the slide rail, and the driver that installs in the shell mechanism and is connected to the slide seat, the mounting frame has the support part that sets up on the slide seat, and the installation part that protrudes from the support part to back, the first distance measuring sensor before and after upper and lower interval installation in the left and right two opposite sides of installation part, the driver can be controlled to drive the slide seat and displace along the slide rail, and make the mounting frame drive the first distance measuring sensor and displace into the box body.

[0013] The utility model discloses a detection equipment for FOUP, the shell mechanism still has a plurality of can be used for respectively accommodating the temporary storage space of box body.

[0014] The utility model discloses the beneficial effect lies in: through this adjustment mechanism can drive the first distance measuring sensor and displace deeply in the box body, and the structural design of the left and right two side walls of the box body is measured, and the control device will analyze the first distance measuring signal of the first distance measuring sensor, and get the design of the deformation of the box body, and it is indeed used for accurate measurement and obtains the deformation of the box body. BRIEF DESCRIPTION OF DRAWINGS

[0015] The other features and effects of the utility model will be clearly presented in the embodiment with reference to the drawings, wherein:

[0016] Figure 1 It is a perspective view, and the utility model discloses a detection equipment for FOUP one embodiment;

[0017] Figure 2Fig. 2 is a bottom sectional view illustrating the case body being detected by the embodiment;

[0018] Figure 3 Fig. 3 is a front sectional view illustrating the case body being detected by the embodiment;

[0019] Figure 4 Fig. 4 is an incomplete perspective view illustrating the structure of the embodiment;

[0020] Figure 5 Fig. 5 is a bottom sectional view illustrating the case body being carried and positioned by the embodiment;

[0021] Figure 6 Fig. 6 is an incomplete side sectional view illustrating the structure of the embodiment in which a touch sensor is exposed on a carrying platform surface;

[0022] Figure 7 Fig. 7 is a back sectional view illustrating the case body being aligned with the positioning column and placed on the carrying platform surface by the embodiment;

[0023] Figure 8 Fig. 8 is a functional block diagram illustrating the functional architecture of the embodiment. DETAILED DESCRIPTION

[0024] Referring to Figure 1 , Figure 2 , Figure 3 , Figure 5 , the utility model is used for an embodiment of FOUP's detection equipment 200, be applicable to carry out a FOUP (Front Opening Unified Pod, front opening wafer conveying box) a case body 9 deformation amount detection. The case body 9 has an opening 90 for taking and placing wafer, and has left and right interval and facing each other and upper and lower extension left side wall 91 and right side wall 92, a rear side wall 93 that interval faces the opening 90, a bottom wall 94 that is horizontally connected between the bottom edge of left side wall 91, right side wall 92 and rear side wall 93, and a top wall 95 that is horizontally connected between the top edge of left side wall 91, right side wall 92 and rear side wall 93. The lower surface of bottom wall 94 is concave with three positioning grooves 941.

[0025] The detection device 200 comprises a housing mechanism 3 for carrying the cartridge body 9 to be detected, a shifting mechanism 4 installed in the housing mechanism 3, a plurality of touch sensors 5 installed in the housing mechanism 3, a plurality of first distance sensors 61 and two second distance sensors 62 installed in the shifting mechanism 4, a plurality of bottom distance sensors 63 installed in the housing mechanism 3, and a control device 7. The control device 7 is signal connected with the shifting mechanism 4, the first distance sensors 61, the second distance sensors 62, and the bottom distance sensors 63.

[0026] Referring to Figure 1 , Figure 4 , Figure 5 The housing mechanism 3 has an operation space 301 with an opening facing backward, and a plurality of temporary storage spaces 302 with openings facing backward and arranged vertically below the operation space 301. The housing mechanism 3 also has a carrying table 31 located outside the opening of the operation space 301, and three positioning columns 32 protruding from the carrying table 31.

[0027] The carrying table 31 can be used for placing the cartridge body 9 with an opening facing forward to the operation space 301, and the carrying table 31 is recessed with four recesses 310 arranged in front and back and left and right. The positioning columns 32 can be used for the cartridge body 9 placed on the carrying table 31 to be aligned with the positioning slots 941 respectively, so that the bottom wall 94 of the cartridge body 9 is placed and positioned on the carrying table 31, and the recesses 310 are shielded. That is, when one of the positioning slots 941 of the cartridge body 9 is not aligned with the corresponding positioning column 32, and the bottom surface of the bottom wall 94 abuts against the positioning column 32, the bottom wall 94 of the cartridge body 9 will be lifted by the positioning column 32, and cannot be placed and positioned on the carrying table 31.

[0028] Referring to Figure 2 , Figure 4 , Figure 5 The shifting mechanism 4 is installed in the operation space 301, comprising a shifting module 41 installed in the housing mechanism 3, and a mounting bracket 42 arranged on the shifting module 41.

[0029] The shifting module 41 comprises a slide rail 411 fixed in the housing mechanism 3 extending forward and backward, a sliding seat 412 slidably mounted on the slide rail 411, and a driver 413 mounted on the housing mechanism 3 and connected to the sliding seat 412. The driver 413 can be controlled to drive the sliding seat 412 to move forward and backward along the slide rail 411.

[0030] In this embodiment, the actuator 413 adopts a screw drive structure design. The actuator 413 includes a screw (not shown) extending forward and backward in the slide rail 411 and connected to the slide block 412, and a motor drive assembly (not shown) for driving the screw. However, in practice, since there are many ways to transmit the displacement of the slide block 412 relative to the slide rail 411, such as, but not limited to, chain drive, belt drive, or telescopic cylinder drive, the type of actuator 413 is not limited to the above-mentioned forms.

[0031] The mounting bracket 42 is mounted on the slide 412 and includes a support portion 421 extending vertically from the slide 412, and a mounting portion 422 protruding rearward from the support portion 421 toward the opening of the working space 301. The mounting bracket 42 can be driven by the slide 412 to protrude rearward from the working space 301 and insert into the box body 9 placed on the support platform 31 (e.g., Figure 2 (As shown).

[0032] See Figure 4 , Figure 6 The touch sensor 5 is embedded in the support platform 31. Each touch sensor 5 has an actuating element 51 that protrudes upwards from the support platform 31. When the box body 9 is placed upright on the support platform 31 with the positioning grooves 941 aligned with the positioning posts 32, the actuating element 51 of each touch sensor 5 will be pressed down by the bottom wall 94, generating a touch signal. When the box body 9 is not aligned with one of the positioning posts 32 and is not placed upright on the support platform 31, the actuating element 51 of at least one touch sensor 5 will not be pressed down, and no touch signal will be generated.

[0033] See Figure 2 , Figure 4 , Figure 7 The first ranging sensors 61 are symmetrically grouped on the left and right sides of the mounting portion 422 and can be moved into the housing body 9 by the mounting bracket 42. Each first ranging sensor 61 can be used to measure distance towards the inner side of the corresponding left side wall 91 or right side wall 92, thereby generating a first ranging signal.

[0034] In this embodiment, ten first ranging sensors 61 are provided, and each first ranging sensor 61 is an optical (laser) ranging device. The first ranging sensors 61 installed on each side of the mounting portion 422 are arranged in a front-back, vertical, and horizontally spaced manner, and can be used to perform distance detection at five points towards the corresponding left side wall 91 or right side wall 92. However, in practice, the number of first ranging sensors 61 provided on each side of the mounting portion 422 is not limited to this and can be increased or decreased as needed.

[0035] The second ranging sensors 62 are respectively disposed on the left and right sides of the mounting part 422 and can be moved into the box body 9 by the mounting bracket 42. Each second ranging sensor 62 is an optical (laser) ranging device that can measure the distance of the rear side wall 93 of the box body 9 in the direction of the opening of the working space 301, thereby generating a second ranging signal.

[0036] The bottom ranging sensors 63 are respectively installed below the support platform 31, and are located below the grooves 310 and exposed in the grooves 310. Each bottom ranging sensor 63 is an optical (laser) ranging device, which can measure distances upwards from the corresponding groove 310 toward the bottom wall 94 of the box body 9 provided on the support platform 31, thereby generating a bottom ranging signal.

[0037] See Figure 1 , Figure 8 The control device 7 includes a measurement control module 71 and a deformation analysis module 72. The measurement control module 71 has multiple sensing point parameters corresponding to different spacing values ​​and a built-in measurement function. In implementation, the control device 7 can be, for example, but not limited to, an electronic calculator device with a CPU (Central Processing Unit) or a microprocessor.

[0038] The measurement control module 71 will activate the measurement function when it determines that all of the touch sensors 5 have generated the touch signal. The measurement control module 71 will not activate the measurement function when it determines that one of the touch sensors 5 has not generated the touch signal.

[0039] When the measurement control module 71 activates the measurement function, it controls the bottom distance sensor 63 to measure the distance to the bottom wall 94 of the box body 9, thereby generating the bottom distance signal. The measurement control module 71 also controls the second distance sensor 62 to sense and generate the second distance signal, and further analyzes the second distance signal to obtain a distance value between the rear end of the mounting bracket 42 and the rear side wall 93, and controls the adjustment module 41 to drive the mounting bracket 42 to move a distance based on the distance value and the sensing point parameters.

[0040] The measurement control module 71 controls the displacement module 41 to sequentially displace the mounting frame 42 to the positions corresponding to the distance values of each sensing point parameter, so that the mounting frame 42 drives the first distance sensor 61 to gradually move backward and deep into the box body 9. The measurement control module 71 controls each first distance sensor 61 to sense and generate the first distance signal when the displacement module 41 drives the mounting frame 42 to displace to the position corresponding to each sensing point parameter. That is, five first distance signals can be obtained for the left side wall 91 and the right side wall 92 respectively at the position corresponding to each sensing point parameter.

[0041] The deformation amount analysis module 72 analyzes the distance values represented by each first distance signal and each bottom distance signal, and obtains a measurement rectangular amount of the box body 9 by analyzing all the distance values corresponding to the left side wall 91, all the distance values corresponding to the right side wall 92, and all the distance values corresponding to the bottom wall 94 by using the pre-built calculation programming. The deformation amount analysis module 72 analyzes the relationship between the measurement rectangular amount and a standard rectangular amount, and obtains a deformation amount of the box body 9.

[0042] Referring to Figure 4 , Figure 5 , Figure 8 When the deformation amount detection of the box body 9 is performed by the detection device 200, a mechanical arm device (not shown) can place the box body 9 on the loading table 31 with the opening facing forward, and align the positioning grooves 941 of the box body 9 with the positioning columns 32. When the box body 9 is properly positioned on the loading table 31, the touch sensors 5 are pressed by the box body 9 to generate the touch signal. The measurement control module 71 starts the measurement function when it is determined that all the touch sensors 5 generate the touch signal, and sends an alarm signal when it is determined that some of the touch sensors 5 do not generate the touch signal. The alarm signal can be used to, for example but not limited to, drive the mechanical arm device to adjust the placement angle of the box body 9, or alert the equipment manager, but the function of the alarm signal is not limited to the above.

[0043] Referring to Figure 2 , Figure 5 , Figure 7 , Figure 8When the measurement control module 71 starts the measurement function, the distance value obtained by analyzing the second ranging signal is used to control the displacement module 41 to sequentially move the mounting frame 42 to the position corresponding to each sensing point parameter, gradually moving the first ranging sensor 61 into the box body 9. At the same time, the measurement control module 71 controls the first ranging sensor 61 to measure the left side wall 91 and the right side wall 92 of the box body 9 to obtain the first ranging signal. In addition, the measurement control module 71 also controls the bottom ranging sensor 63 to measure the bottom wall 94 of the box body 9 to obtain the bottom ranging signal.

[0044] The deformation amount analysis module 72 analyzes the first ranging signal and the bottom ranging signal to obtain the deformation amount of the box body 9.

[0045] When the detection of the box body 9 is completed, the robotic arm device can move the box body 9 away from the loading table 31 and place it in one of the temporary storage spaces 302.

[0046] In this embodiment, the measurement control module 71 controls the first ranging sensor 61 to measure multiple positions of the left side wall 91 and the right side wall 92 of the box body 9, and controls the bottom ranging sensor 63 to measure multiple positions of the bottom wall 94 of the box body 9. Then, the deformation amount analysis module 72 analyzes the first ranging signal and the bottom ranging signal to obtain the deformation amount of the box body 9. However, in another embodiment of the present application, the bottom ranging sensor 63 can not be provided, and the deformation amount analysis module 72 only analyzes the first ranging signal to obtain the deformation amount of the box body 9.

[0047] In addition, in this embodiment, two second ranging sensors 62 are used to measure the back side wall 93 of the box body 9, but in implementation, only one second ranging sensor 62 can be used to measure the back side wall 93, and the distance value between the mounting frame 42 and the back side wall 93 can also be obtained.

[0048] In summary, by positioning the box body 9 on the loading table 31, and gradually moving the first ranging sensor 61 into the box body 9 by controlling the displacement mechanism 4, the first ranging sensor 61 can be used to measure the left and right side walls of the box body 9, and the control device 7 controls the displacement mechanism 4 to move the first ranging sensor 61, and analyzes the first ranging signal measured by the first ranging sensor 61 to obtain the deformation amount of the box body 9. The design can indeed be used to accurately measure the deformation amount of the box body 9.

[0049] Further, the control device 7 can more accurately analyze the deformation of the box body 9 by integrating and analyzing the first distance signal and the bottom distance signal when analyzing the deformation amount of the box body 9.

[0050] Therefore, the detection device for FOUP is quite innovative and convenient to use, and can achieve the purpose of the present application.

[0051] The above is only an embodiment of the present application, and cannot limit the scope of the present application. Any simple equivalent changes and modifications made according to the claims and content of the specification are still within the scope of the present application.

Claims

1. A testing device for FOUP (Follicular Unit Extraction) boxes, suitable for deformability testing of the FOUP box body, the testing device comprising a housing mechanism having a support platform for placing the box body downwards with its opening facing forward, characterized in that: The detection device further includes an adjustment mechanism installed on the housing structure, multiple first distance measuring sensors installed on the adjustment mechanism, and a control device. The adjustment mechanism includes an adjustment module installed on the housing structure and a mounting bracket disposed on the adjustment module. The adjustment module can be controlled to drive the mounting bracket to move backward and insert into the box body placed on the support platform. The first distance measuring sensors are installed on the left and right sides of the mounting bracket and can be moved into the box body by the mounting bracket. The first distance measuring sensors measure distances to multiple different parts of the left and right side walls of the box body and generate first distance measuring signals respectively. The control device signals connect the adjustment module and the first distance measuring sensors. The control device includes a measurement control module and a deformation analysis module. The measurement control module can control the distance by which the adjustment module moves the mounting bracket into the box body and can control the first distance measuring sensors to measure the distance of the box body. The deformation analysis module can analyze the first distance measuring signals to obtain the deformation of the corresponding box body.

2. The detection device for FOUP according to claim 1, characterized in that: The detection device further includes a second ranging sensor mounted on the mounting bracket and signal-connected to the control device. The second ranging sensor can be moved towards the box body by the mounting bracket and can measure distance towards a rear side wall of the box body to obtain a second ranging signal. The measurement control module can analyze the second ranging signal to obtain the distance value of the mounting bracket relative to the rear side wall, and will control the adjustment module to drive the mounting bracket to move a distance according to the distance value.

3. The detection device for FOUP according to claim 2, characterized in that: The measurement control module has multiple sensing point parameters that correspond to different spacing values. The measurement control module controls the adjustment module to move the mounting frame to the position corresponding to the spacing value of each sensing point parameter. When the measurement control module controls the adjustment module to move the mounting frame to the position corresponding to each sensing point parameter, it controls each first ranging sensor to sense and generate the first ranging signal. The deformation analysis module analyzes all the first ranging signals obtained for the sensing point parameters to obtain the deformation.

4. The detection device for FOUP according to claim 1, 2 or 3, characterized in that: The support platform is recessed with a plurality of grooves located below the box body. The detection device also includes a plurality of bottom ranging sensors installed on the housing mechanism and exposed in the grooves. Each bottom ranging sensor can measure distance upward toward the bottom wall of the box body to obtain a bottom ranging signal. The deformation analysis module analyzes all the first ranging signals and all the bottom ranging signals to obtain the deformation.

5. The detection device for FOUP according to claim 4, characterized in that: The bottom surface of the bottom wall of the box body is recessed with three positioning grooves. The housing mechanism also has three positioning posts protruding from the support platform. The detection device also includes three touch sensors embedded and exposed on the support platform. Each touch sensor has a touch element protruding from the support platform and can be pressed down to touch. The positioning posts can be used to align the box body, which is positioned downward on the support platform, with the positioning grooves respectively. The touch element of each touch sensor will be pressed down by the bottom wall of the box body, which is positioned downward on the support platform, to generate a touch signal. The measurement control module will start the measurement function when each touch sensor generates the touch signal, and control the adjustment module to move the mounting bracket towards the box body, control the first ranging sensor to sense and generate the first ranging signal, and control the bottom ranging sensor to sense and generate the bottom ranging signal.

6. The detection device for FOUP according to claim 1, characterized in that: The adjustment module includes a slide rail extending forward and backward on the housing mechanism, a slide block that can be displaced forward and backward on the slide rail, and a driver mounted on the housing mechanism and connected to the slide block. The mounting frame has a support portion erected on the slide block and a mounting portion protruding backward from the support portion. The first ranging sensor is mounted on two opposite sides of the mounting portion at intervals. The driver can be controlled to drive the slide block to move along the slide rail, thereby causing the mounting frame to move the first ranging sensor into the housing body.

7. The detection device for FOUP according to claim 1, characterized in that: The housing mechanism also has multiple temporary storage spaces that can be used to accommodate the box body respectively.

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