Quartz crucible rapid cleaning equipment

Abstract

The utility model relates to the technical field of quartz crucibles, in particular to rapid cleaning equipment for quartz crucibles, which comprises a horizontally arranged cleaning pool and a clamping jaw component arranged on the upper side of the cleaning pool, and an ultra-clean cleaning tank, an ultrasonic cleaning tank and a high-pressure spraying cleaning tank are sequentially and vertically arranged at the upper end of the cleaning pool from one side to the other side. A supporting plate is arranged at the position, on one side of the ultra-clean cleaning tank, one side of the ultrasonic cleaning tank and one side of the high-pressure spraying cleaning tank, of the side end of the cleaning pool in parallel, a translation sliding block is horizontally arranged at the side end of the supporting plate in a sliding mode, and the clamping jaw assembly is arranged at the side end of the translation sliding block. The clamping jaw assembly clamps the quartz griddle to be sequentially and vertically inserted into the ultra-clean cleaning tank, the ultrasonic cleaning tank and the high-pressure spraying cleaning tank. The quartz crucible cleaning device has the beneficial effects that triple cleaning is completed through one device, the frequency of manual transfer of quartz crucibles is reduced, and the cleaning efficiency of the quartz crucibles is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz crucible technical field especially relates to a quartz crucible rapid cleaning equipment. BACKGROUND

[0002] Quartz crucible is the essential basic material for drawing large diameter single crystal silicon and developing large scale integrated circuit, and is used for containing raw materials during single crystal silicon drawing. The conventional electric arc quartz crucible for drawing single crystal is composed of inner and outer layers, the inner layer is a transparent layer with low bubble content, and the outer layer is a bubble composite layer with high bubble content, which supports the deformation strength of the crucible and uniformly radiates heat source from the outer layer of the quartz crucible to the graphite crucible passing through the graphite heat field of the crystal pulling furnace (the heat source is in radiation state when passing through due to many small bubbles, so that the radiation efficiency is improved).

[0003] The manufacturing process of the quartz crucible includes high-purity quartz sand, high-purity graphite mold, vacuum loading molding, vacuum arc melting, natural cooling demolding, quartz crucible preliminary detection, cold processing sand blasting, cutting and chamfering, quartz crucible secondary detection, super-clean cleaning, ultrasonic, high-pressure spraying, automatic drying, heating and baking, spraying, quartz crucible third detection, vacuum packaging and finished product storage.

[0004] The quartz crucible needs to be cleaned by super-clean cleaning, ultrasonic and high-pressure spraying during production, and three devices are needed for the whole cleaning process. UTILITY MODEL CONTENT

[0005] (I) Technical problem to be solved

[0006] In view of the above-mentioned defects and deficiencies of the prior art, the utility model provides a quartz crucible rapid cleaning equipment, which solves the technical problem of low cleaning efficiency of the quartz crucible during production.

[0007] (II) Technical scheme

[0008] In order to achieve the above-mentioned purpose, the main technical scheme adopted by the utility model includes:

[0009] The utility model discloses a quartz crucible quick cleaning equipment, including the horizontal arrangement's cleaning pool and setting in the clamping jaw subassembly of cleaning pool upper side, the cleaning pool upper end is vertically provided with super clean cleaning tank, ultrasonic cleaning tank and high pressure spray cleaning tank from one side to the other side in proper order, the cleaning pool side end is horizontally provided with the support plate in one side of super clean cleaning tank ultrasonic cleaning tank and high pressure spray cleaning tank parallel, the support plate side end horizontal sliding has the translation slide, the clamping jaw subassembly sets up in translation slide side end, the clamping jaw subassembly clamps quartz dry pot and vertically inserts super clean cleaning tank ultrasonic cleaning tank and high pressure spray cleaning tank in proper order.

[0010] The utility model discloses a quartz crucible quick cleaning equipment, when through this cleaning equipment to quartz crucible is washed, fix quartz crucible on the clamping jaw subassembly, then through translation slide and move quartz crucible to super clean cleaning tank upper side, then clamping jaw subassembly vertical down inserts into super clean cleaning tank, after washing, then through translation slide and clamping jaw subassembly and move quartz crucible to ultrasonic cleaning tank and high pressure spray cleaning tank in proper order and complete washing, and this scheme makes three -fold washing through a equipment complete, reduces quartz crucible manual transfer's frequency, improves quartz crucible's washing efficiency.

[0011] Optionally, the cleaning tank is vertically rotatably provided with a cleaning brush in the super clean cleaning tank, and the super clean cleaning tank is filled with a cleaning liquid with a cleaning effect.

[0012] By filling the cleaning liquid in the super clean cleaning tank and rotatably arranging the cleaning brush, the cleaning effect of the quartz crucible in the super clean cleaning tank is improved.

[0013] Optionally, the cleaning brush comprises a brush shaft rotatably connected to the bottom of the super clean cleaning tank, a brush head arranged at the top of the brush shaft, and brush rods uniformly and evenly distributed at the circumferential side end of the brush head, and the circumferential side end of the brush shaft is uniformly and evenly distributed with elastic supporting members connected to the side end of the brush rods and supporting the brush rods against the inner wall of the quartz crucible.

[0014] By arranging the brush rods at the circumferential side end of the brush head, the brush rods can be tightly pressed against the inner wall of the quartz crucible under the support of the elastic supporting members, so that the brush head and the brush rods can more comprehensively clean the inner wall of the quartz crucible when the brush shaft rotates, improving the cleaning effect.

[0015] Optionally, the ultrasonic cleaning tank is filled with a cleaning solution, the cleaning tank is provided with a heat preservation bottom plate at the bottom of the ultrasonic cleaning tank to keep the temperature of the cleaning solution between 30 degrees Celsius and 40 degrees Celsius, and the cleaning tank is provided with an ultrasonic generator at the two side walls of the ultrasonic cleaning tank.

[0016] The heat preservation bottom plate is arranged at the bottom of the ultrasonic cleaning tank to maintain the cleaning solution in the ultrasonic cleaning tank at 30-40 DEG C, thereby ensuring the ultrasonic cleaning effect.

[0017] Optionally, the cleaning tank is vertically provided with a high-pressure spraying assembly at the bottom of the high-pressure spraying cleaning tank, the high-pressure spraying assembly comprises a water supply pipe vertically connected to the bottom of the high-pressure spraying cleaning tank, an umbrella-shaped model head rotatably connected to the top of the water supply pipe, and water spraying nozzles uniformly arranged in an annular array on the umbrella-shaped model head, the water spraying nozzles vertically spray water towards the inner wall of the quartz crucible.

[0018] The high-pressure spraying assembly can comprehensively high-pressure flush the inner wall of the quartz crucible, thereby improving the cleaning effect.

[0019] Optionally, the water spraying nozzles are in a strip shape along the extension direction of the ribs of the umbrella-shaped model head, and the water outlet holes of the water spraying nozzles are in a fan shape along the square cross section of the length of the water spraying nozzles.

[0020] The water spraying nozzles are in a strip shape, and the water outlet holes of the water spraying nozzles are in a fan shape, so that the water streams sprayed by adjacent water spraying nozzles can be connected together when contacting the inner wall of the quartz crucible, thereby realizing no-dead-angle spraying of the inner wall of the quartz crucible and improving the cleaning effect.

[0021] Optionally, the clamping jaw assembly comprises a vertical moving air cylinder fixedly arranged at the side end of the translation sliding block, an air pump vertically connected to the end of the piston rod of the vertical moving air cylinder, and a plurality of suction cups arranged at the lower end of the air pump.

[0022] When the quartz crucible is clamped and displaced by the clamping jaw assembly, the plurality of suction cups at the lower end of the air pump abut against the outer wall of the quartz crucible, and then the air pump is pumped, so that the quartz crucible is tightly adsorbed, and then the vertical moving air cylinder drives the air pump, the suction cups and the quartz crucible to move upward together, which makes the clamping and moving of the quartz crucible more convenient and safer.

[0023] Optionally, the pumping end of the air pump is vertically provided with a main connecting pipe, a plurality of secondary connecting pipes are uniformly and spacedly arranged at the top of the main connecting pipe in a circumferential direction, the main connecting pipe and the secondary connecting pipes are both connected to the pumping end of the air pump, the secondary connecting pipes are in an arc shape, and the plurality of suction cups are arranged at the lower ends of the main connecting pipe and the secondary connecting pipes.

[0024] The main connecting pipe and the plurality of secondary connecting pipes are arranged at the pumping end of the air pump, so that one of the plurality of suction cups is adsorbed at the top of the quartz crucible, and the remaining suction cups are adsorbed at the side end of the quartz crucible in an inclined manner, thereby realizing more stable clamping and adsorption.

[0025] Optionally, the upper end surface of the cleaning tank is horizontally provided with a discharging plate on the side end away from the super-clean cleaning tank and the high-pressure spraying cleaning tank, and the upper end surface of the discharging plate is provided with a placing slot for embedding the inverted quartz crucible.

[0026] By arranging the discharging plate on the upper end surface of the cleaning tank, when the quartz crucible is cleaned, the quartz crucible which has not been cleaned is placed on the discharging plate on the side of the super-clean cleaning tank, then the jaw assembly can clamp and carry the quartz crucible for cleaning, and when the cleaning is completed, the jaw assembly can place the cleaned quartz crucible on the discharging plate on the side of the high-pressure spraying cleaning tank, thereby facilitating the subsequent steps.

[0027] (Three) beneficial effects

[0028] The quartz crucible rapid cleaning equipment has the beneficial effects that when the quartz crucible is cleaned by the cleaning equipment, the quartz crucible is fixed on the jaw assembly, then the quartz crucible is moved to the upper side of the super-clean cleaning tank by the translation sliding block, then the jaw assembly is vertically lowered to be inserted into the super-clean cleaning tank, and after the cleaning is completed, the quartz crucible is sequentially moved into the ultrasonic cleaning tank and the high-pressure spraying cleaning tank by the translation sliding block and the jaw assembly to complete the cleaning, so that the three cleaning steps are completed by one equipment, the frequency of manual transfer of the quartz crucible is reduced, and the cleaning efficiency of the quartz crucible is improved. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is a perspective view of an embodiment of the utility model;

[0030] Figure 2 It is a sectional view of an embodiment of the utility model.

[0031]

Explanation of reference signs

[0032] 1, cleaning tank; 11, super-clean cleaning tank; 12, ultrasonic cleaning tank; 121, heat preservation bottom plate; 122, ultrasonic generator; 13, high-pressure spraying cleaning tank; 14, discharging plate; 141, placing slot; 15, cleaning brush; 151, brush shaft; 152, brush rod; 153, elastic support; 154, brush head; 16, high-pressure spraying assembly; 161, water delivery pipe; 162, umbrella-shaped model head; 163, water nozzle; 2, jaw assembly; 21, vertical moving air cylinder; 22, air pump; 23, suction cup; 24, main connecting pipe; 25, auxiliary connecting pipe; 3, support plate; 31, translation sliding block; 32, translation air cylinder. DETAILED DESCRIPTION

[0033] In order to better explain the utility model, so as to facilitate understanding, the utility model is described in detail by combining with the drawings and specific embodiments.

[0034] The quartz crucible rapid cleaning equipment provided in the embodiment of the utility model, when the quartz crucible is cleaned through the cleaning equipment, the quartz crucibble is fixed on the jaw assembly, then the quartz crucible is moved to the upper side of the super-clean cleaning tank through the translation slide block, then the jaw assembly is vertically lowered to be inserted into the super-clean cleaning tank, after cleaning, the quartz crucible is moved to the ultrasonic cleaning tank and the high-pressure spray cleaning tank through the translation slide block and the jaw assembly, and the cleaning is completed, so that the three cleaning processes are completed through one equipment, the frequency of manual transfer of the quartz crucible is reduced, and the cleaning efficiency of the quartz crucible is improved.

[0035] In order to better understand the above technical solutions, the exemplary embodiments of the utility model will be described in more detail below with reference to the drawings. Although the exemplary embodiments of the utility model are shown in the drawings, it should be understood that the utility model can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a clearer and more thorough understanding of the utility model and to enable the scope of the utility model to be fully conveyed to those skilled in the art.

[0036] Referring to Figure 1 and Figure 2 A quartz crucible rapid cleaning equipment, comprising a cleaning pool 1 arranged horizontally and a jaw assembly 2 arranged on the upper side of the cleaning pool 1, a super-clean cleaning tank 11, an ultrasonic cleaning tank 12 and a high-pressure spray cleaning tank 13 are vertically arranged from one side to the other side on the upper end of the cleaning pool 1, a support plate 3 is arranged in parallel on one side of the super-clean cleaning tank 11, the ultrasonic cleaning tank 12 and the high-pressure spray cleaning tank 13 at the side end of the cleaning pool 1, a translation slide block 31 is horizontally slidably arranged at the side end of the support plate 3, and the jaw assembly 2 is arranged at the side end of the translation slide block 31, and the jaw assembly 2 clamps the quartz dry pot and vertically inserts it into the super-clean cleaning tank 11, the ultrasonic cleaning tank 12 and the high-pressure spray cleaning tank 13 in sequence.

[0037] The quartz crucible is fixed on the jaw assembly 2, then the quartz crucible is moved to the upper side of the super-clean cleaning tank 11 through the translation slide block 31, then the jaw assembly 2 is vertically lowered to be inserted into the super-clean cleaning tank 11, after cleaning, the quartz crucible is moved to the ultrasonic cleaning tank 12 and the high-pressure spray cleaning tank 13 in sequence through the translation slide block 31 and the jaw assembly 2, and the cleaning is completed.

[0038] A discharging plate 14 is horizontally fixed on the upper end face of the cleaning pool 1 away from the super-clean cleaning tank 11 and the high-pressure spray cleaning tank 13 at one side end through bolts, and a placing slot 141 for embedding the quartz crucible is arranged on the upper end face of the discharging plate 14. Quartz crucibles are placed before and after cleaning, which is more convenient.

[0039] The side end of the support plate 3 is fixed horizontally with a translation cylinder 32 through bolts, and a translation sliding block 31 is fixed to the piston rod end of the translation cylinder 32 through bolts, and the translation sliding block 31 is driven to move horizontally by the translation cylinder 32.

[0040] The clamping jaw assembly 2 includes a vertical translation cylinder 21 fixed vertically to the side end of the translation sliding block 31 through bolts, a gas pump 22 connected vertically to the piston rod end of the vertical translation cylinder 21 through bolts, and a plurality of suction cups 23 arranged at the lower end of the gas pump 22. The gas suction end of the gas pump 22 is vertically provided with a main connecting pipe 24, and a plurality of auxiliary connecting pipes 25 are uniformly and circumferentially distributed at the top of the main connecting pipe 24. The main connecting pipe 24 and the auxiliary connecting pipe 25 are both connected to the gas suction end of the gas pump 22. The auxiliary connecting pipe 25 is arc-shaped, and the plurality of suction cups 23 are arranged at the lower end of the main connecting pipe 24 and the auxiliary connecting pipe 25. Among the plurality of suction cups 23 at the lower end of the gas pump 22, the suction cup 23 connected to the main connecting pipe 24 abuts against the top of the quartz crucible, and the remaining suction cups 23 abut against the outer wall of the quartz crucible. Then the gas pump 22 pumps, thereby tightly adsorbing the quartz crucible.

[0041] The cleaning pool 1 is vertically rotatably provided with a cleaning brush 15 in the ultraclean cleaning tank 11, and the ultraclean cleaning tank 11 is filled with cleaning liquid with cleaning effect. The cleaning brush 15 includes a brush shaft 151 rotatably connected to the bottom of the ultraclean cleaning tank 11 driven by a motor, a brush head 154 arranged at the top of the brush shaft 151, and brush rods 152 uniformly and circumferentially distributed at the side end of the brush head 154. The brush rod 152 is arc-shaped, and the brush shaft 151 is circumferentially uniformly and circumferentially distributed with elastic supporting members 153 connected to the side end of the brush rod 152 and supporting the brush rod 152 against the inner wall of the quartz crucible. The rod can be tightly abutted to the inner wall of the quartz crucible under the support of the elastic supporting member 153, so that when the brush shaft 151 rotates, the brush head 154 and the brush rod 152 can more comprehensively clean the inner wall of the quartz crucible, improving the cleaning effect.

[0042] The ultrasonic cleaning tank 12 is filled with cleaning solution, and the cleaning pool 1 is provided with a heat preservation bottom plate 121 at the bottom of the ultrasonic cleaning tank 12 to keep the temperature of the cleaning solution between 30 and 40 degrees Celsius. The cleaning pool 1 is provided with an ultrasonic generator 122 on the two side walls of the ultrasonic cleaning tank 12.

[0043] The cleaning tank 1 is vertically provided with a high-pressure spraying assembly 16 at the bottom of the high-pressure spraying cleaning tank 13, the high-pressure spraying assembly 16 comprises a water delivery pipe 161 vertically connected to the bottom of the high-pressure spraying cleaning tank 13, an umbrella-shaped model head 162 rotatably communicated with the top of the water delivery pipe 161, and water spraying nozzles 163 evenly arranged in an annular shape on the umbrella-shaped model head 162, the water spraying nozzles 163 vertically spray water to the inner wall of the quartz crucible, the water spraying nozzles 163 are in a strip shape along the extension direction of the ribs of the umbrella-shaped model head 162, and the water outlet holes of the water spraying nozzles 163 are in a fan shape along the square cross section of the length of the water spraying nozzles 163. The water spraying nozzles 163 are arranged in a strip shape, and the cross section of the water outlet holes of the water spraying nozzles 163 is arranged in a fan shape, so that the water flows sprayed by adjacent water spraying nozzles 163 can be connected together when contacting the inner wall of the quartz crucible, and then the rotating umbrella-shaped model head 162 is combined, so that the inner wall of the quartz crucible is sprayed without dead angle, and the cleaning effect is improved.

[0044] In the description of the present application, it should be understood that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0045] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] In the present application, unless otherwise specifically defined and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature is "above", "above" and "above" the second feature, which can be directly above or obliquely above the first feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature is "below", "below" and "below" the second feature, which can be directly below or obliquely below the first feature, or only indicates that the horizontal height of the first feature is lower than that of the second feature.

[0047] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. Furthermore, the person skilled in the art can combine and combine the different embodiments or examples described in the present specification and the features of the different embodiments or examples without contradiction.

[0048] Although the embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and cannot be understood as limiting the present application, and the person skilled in the art can modify, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A rapid cleaning device for quartz crucibles, characterized in that: The utility model provides a quartz crucible cleaning device, including the horizontal arrangement of cleaning pool (1) and the clamp jaw subassembly (2) of setting in the upper side of cleaning pool (1), the upper end of cleaning pool (1) is vertically opened in sequence from one side to the other side with ultraclean cleaning tank (11), ultrasonic cleaning tank (12) and high pressure shower cleaning tank (13), the side end of cleaning pool (1) is parallelly arranged with support plate (3) in ultraclean cleaning tank (11), ultrasonic cleaning tank (12) and high pressure shower cleaning tank (13) one side, the side end of support plate (3) is horizontally slid and is provided with translation slide (31), the clamp jaw subassembly (2) is set up in the side end of translation slide (31), and the clamp jaw subassembly (2) holds quartz dry pot and is vertically inserted in ultraclean cleaning tank (11), ultrasonic cleaning tank (12) and high pressure shower cleaning tank (13) in sequence.

2. The quartz crucible rapid cleaning apparatus according to claim 1, wherein: The cleaning pool (1) is vertically rotatably provided with a cleaning brush (15) in the ultraclean cleaning tank (11), and the ultraclean cleaning tank (11) is filled with cleaning liquid with cleaning effect.

3. The quartz crucible rapid cleaning apparatus as claimed in claim 2, wherein: The cleaning brush (15) comprises a brush shaft (151) rotatably connected to the bottom of the ultraclean cleaning tank (11), a brush head (154) arranged on the top of the brush shaft (151), and brush rods (152) circumferentially and uniformly spaced apart from the side end of the brush head (154), and the side end of the brush shaft (151) is circumferentially and uniformly spaced apart from the side end of the brush rod (152) and supports the brush rod (152) against the inner wall of the quartz crucible.

4. The quartz crucible rapid cleaning apparatus as claimed in claim 1, wherein: The ultrasonic cleaning tank (12) is filled with cleaning solution, and the cleaning pool (1) is provided with a heat preservation bottom plate (121) at the bottom of the ultrasonic cleaning tank (12) to keep the temperature of the cleaning solution between 30 and 40 degrees Celsius, and the ultrasonic cleaning tank (12) is provided with an ultrasonic generator (122) on the two side walls.

5. The quartz crucible rapid cleaning apparatus as claimed in claim 1, wherein: The cleaning pool (1) is vertically provided with a high-pressure spray assembly (16) at the bottom of the high-pressure spray cleaning tank (13), the high-pressure spray assembly (16) comprises a water delivery pipe (161) vertically connected to the bottom of the high-pressure spray cleaning tank (13), an umbrella-shaped model head (162) rotatably connected to the top of the water delivery pipe (161), and a plurality of water spray nozzles (163) arranged in a ring shape on the umbrella-shaped model head (162), and the water spray nozzles (163) vertically spray water towards the inner wall of the quartz crucible.

6. The quartz crucible rapid cleaning apparatus as claimed in claim 5, wherein: The water spray nozzles (163) are long strips along the direction of the ribs of the umbrella-shaped model head (162), and the water outlet holes of the water spray nozzles (163) are fan-shaped along the square cross section of their length.

7. The quartz crucible rapid cleaning apparatus as claimed in claim 1, wherein: The clamp jaw subassembly (2) comprises a vertical moving air cylinder (21) vertically fixed to the side end of the translation slide (31), an air pump (22) vertically connected to the end of the piston rod of the vertical moving air cylinder (21), and a plurality of suction cups (23) arranged at the lower end of the air pump (22).

8. The quartz crucible rapid cleaning apparatus as claimed in claim 7, wherein: The suction end of the air pump (22) is vertically provided with a main connecting pipe (24), a plurality of auxiliary connecting pipes (25) are uniformly and spacedly distributed in the top of the main connecting pipe (24), the main connecting pipe (24) and the auxiliary connecting pipe (25) are communicated with the suction end of the air pump (22), the auxiliary connecting pipe (25) is arc-shaped, and a plurality of the suction cups (23) are arranged at the lower ends of the main connecting pipe (24) and the auxiliary connecting pipe (25).

9. The quartz crucible rapid cleaning apparatus as claimed in claim 1, wherein: The upper end face of the cleaning tank (1) is horizontally provided with a discharging plate (14) on the side end away from each other between the super-clean cleaning tank (11) and the high-pressure spraying cleaning tank (13), and the upper end face of the discharging plate (14) is provided with a placing slot (141) for embedding the inverted quartz crucible.

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