Electroplating solution stirring equipment for pulse electroplating
By designing a multi-dimensional stirring mechanism, the problem of eddy velocity gradient caused by traditional mechanical stirring equipment is solved, realizing three-dimensional flow and dynamic adjustment of the electroplating solution, improving the uniformity and process stability of the coating, and solving the problems of uneven coating thickness and concentration polarization.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- GUANGDE ZHENGDA ELECTRONIC TECH CO LTD
- Filing Date
- 2025-04-21
- Publication Date
- 2026-04-10
AI Technical Summary
During pulse electroplating, the eddy current velocity gradient caused by traditional mechanical stirring equipment creates a low diffusion layer region, resulting in uneven coating thickness and concentration polarization, which affects coating quality and process stability.
A multi-dimensional stirring mechanism is adopted, including a transverse axial flow device and a longitudinal axial flow device. The design of the annular shell and the conical axial flow shell driven by the pneumatic motor forms a three-dimensional flow field. Combined with the hydraulic motor and the screw rod adjustment, the uniform flow and dynamic adjustment of the electroplating solution are achieved, ensuring rapid ion replenishment.
It significantly improves the fluidity and uniformity of the electroplating solution, suppresses concentration polarization, enhances the uniformity of coating thickness and process stability, and ensures coating quality.
Smart Images
Figure CN224105970U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to pulse electroplating equipment technical field, concretely is a kind of electroplating liquid stirring equipment for pulse electroplating. BACKGROUND
[0002] Pulse electroplating refers to the electroplating of replacing direct current power supply with pulse power supply, which can change the electrodeposition process in a wide range by controlling parameters such as waveform, frequency, on-off ratio and average current density, so as to obtain a coating with certain characteristics in a certain plating solution.
[0003] In the process of pulse electroplating, the flowability of the electroplating solution is mainly improved by mechanical stirring to promote the uniform distribution of ions.
[0004] The traditional mechanical stirring forms vortex by rotating impeller or paddle driven by motor, and the vortex formed by the rotation of the impeller has a significant flow rate gradient characteristic, i.e. the central region: the flow rate near the impeller is high, forming strong turbulent flow, and the ion diffusion is fast; while the edge region: the flow rate is low at the groove wall, corner and other positions far away from the impeller, resulting in the formation of "low diffusion layer region" at the edge and dead angle of the tank body.
[0005] However, in pulse electroplating, the periodic on-off of current requires that the ion replenishment rate be strictly matched with the pulse frequency, and during the periodic on-off of current, the metal ions in the low diffusion layer region cannot be replenished to the cathode surface in time due to insufficient diffusion rate, aggravating the concentration difference polarization phenomenon and causing uneven thickness or local burning of the coating.
[0006] Therefore, we propose a kind of electroplating liquid stirring equipment for pulse electroplating to solve the problems in the above background. INVENTION CONTENTS
[0007] The utility model provides electroplating liquid stirring equipment for pulse electroplating, can solve the problem that the existing technology in mechanical stirring forms vortex by rotating impeller or paddle driven by motor, and the vortex formed by the rotation of the impeller has a significant flow rate gradient characteristic, thereby causing uneven thickness of the coating.
[0008] To solve the above technical problems, the utility model provides the following technical scheme:
[0009] An electroplating liquid stirring equipment for pulse electroplating, comprising an electroplating tank, a multi-dimensional stirring mechanism is arranged inside the electroplating tank, the multi-dimensional stirring mechanism comprises a displacement adjusting unit and a multidirectional stirring unit; the multidirectional stirring unit comprises a horizontal axial flow device and a vertical axial flow device, the vertical axial flow device is used to drive the electroplating liquid to flow longitudinally, the horizontal axial flow device is used to drive the electroplating liquid to flow horizontally, the horizontal axial flow device is installed in the vertical direction of the vertical axial flow device, and a rotary driving seat is connected to the bottom of the horizontal axial flow device.
[0010] Preferably, the transverse axial flow device comprises a ring-shaped casing, a first axial flow impeller is rotatably arranged inside the ring-shaped casing, and a rotating assembly for driving the first axial flow impeller to rotate is fixedly arranged inside the ring-shaped casing.
[0011] Preferably, the rotating assembly comprises a pneumatic motor and a support rod, the support rod is fixedly connected with a casing of the pneumatic motor, and two ends of the support rod are fixedly connected with the ring-shaped casing.
[0012] Preferably, the longitudinal axial flow device comprises an axial flow casing, a second axial flow impeller and a rotating assembly for driving the second axial flow impeller to rotate, the second axial flow impeller is rotatably arranged inside the axial flow casing, and the second axial flow impeller is arranged in a direction perpendicular to the first axial flow impeller.
[0013] The axial flow casing is conical, one end of the axial flow casing with a larger diameter is close to the first axial flow impeller, and the second axial flow impeller is arranged in a conical shape matched with the axial flow casing.
[0014] Compared with the prior art, the utility model has the advantages of:
[0015] The pulse electroplating plating solution stirring equipment has the advantages that the transverse axial flow device and the longitudinal axial flow device in the multi-dimensional stirring mechanism work cooperatively, the flowability and uniformity of the plating solution are significantly enhanced, the transverse axial flow device is designed with a ring-shaped casing and a first axial flow impeller, is driven by a pneumatic motor and rotates at a high speed to generate liquid flow in the horizontal direction, the turbulent disorder dispersion caused by the impeller driven by the traditional motor is avoided, and the stirring efficiency is improved, the longitudinal axial flow device adopts a conical axial flow casing, cooperates with a second axial flow impeller, forms vertical liquid flow from bottom to top and accelerates the longitudinal diffusion of the plating solution, the rotating drive seat drives the transverse axial flow device to change the jetting direction by using a hydraulic motor, the plating solution is uniformly distributed under different stirring angles, the displacement adjusting unit realizes the horizontal movement of the multi-dimensional stirring mechanism by the cooperation of the threaded rod and the sliding seat, uniform stirring in the electroplating process is ensured, the problem of the low diffusion layer area caused by the traditional single vortex mode is avoided, the whole equipment improves the stirring effect of the plating solution through three-dimensional flow, especially in the pulse electroplating process, the concentration polarization phenomenon is effectively inhibited, ions are quickly supplemented to the cathode surface, the equipment also has a dynamic adjustment function, the stirring intensity can be adjusted according to the size of the electroplating tank and the viscosity of the plating solution, the plating layer thickness uniformity and process stability are further ensured, and the plating layer quality and process stability of the pulse electroplating are significantly improved. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 It is a whole internal structure schematic view of the utility model;
[0017] Figure 2 It is a multi-directional stirring unit structure schematic view of the utility model;
[0018] Figure 3The side sectional view structure schematic diagram of the utility model;
[0019] Figure 4 The front sectional view structure schematic diagram of the utility model.
[0020] Among them: 1, electroplating bath;5, transverse axial flow device;6, longitudinal axial flow device;7, annular housing;8, first axial flow impeller;10, pneumatic motor;11, support rod;12, axial flow housing;13, second axial flow impeller;14, support;15, horizontal seat;16, reduction gear box;17, driving source;18, threaded rod;20, sliding seat;21, rotary seat;22, hydraulic motor. DETAILED DESCRIPTION
[0021] The specific embodiments of the utility model are described in detail below, but it should be understood that the protection scope of the utility model is not limited by the specific embodiments.
[0022] Example one:
[0023] Please refer to Figures 1-4 The utility model provides a technical scheme:
[0024] A kind of electroplating liquid stirring equipment for pulse electroplating, including electroplating bath 1, multiple dimension stirring mechanism is provided in the electroplating bath 1, multiple dimension stirring mechanism includes displacement adjusting unit and multidirectional stirring unit;Multidirectional stirring unit includes transverse axial flow device 5 and longitudinal axial flow device 6, longitudinal axial flow device 6 is used to drive electroplating liquid longitudinal flow, transverse axial flow device 5 is used to drive electroplating liquid horizontal direction flow, transverse axial flow device 5 is installed in the vertical direction of longitudinal axial flow device 6, transverse axial flow device 5 bottom is connected with rotary drive seat;
[0025] In the above scheme, multiple dimension stirring mechanism is combined by transverse axial flow device 5 and longitudinal axial flow device 6, respectively drives electroplating liquid to flow in horizontal direction and vertical direction.Transverse axial flow device 5 realizes direction adjustment by bottom rotary drive seat, longitudinal axial flow device 6 breaks traditional single vortex mode by vertical stirring, by driving electroplating liquid to flow in horizontal direction and vertical direction and the direction adjustment of transverse axial flow device 5, three-dimensional flow is formed, so as to cover electroplating bath 1 center and edge area, reduces flow rate gradient difference.
[0026] Further, the transverse axial flow device 5 includes an annular housing 7, a first axial flow impeller 8 is rotatably arranged inside the annular housing 7, and a rotating assembly is fixedly installed inside the annular housing 7 to drive the first axial flow impeller 8 to rotate.
[0027] The first axial flow impeller 8 is installed inside the annular housing 7 of the transverse axial flow device 5, the rotating assembly drives the impeller to rotate at high speed, and generates high-speed liquid flow in the horizontal direction. The annular housing 7 structure guides the liquid flow to diffuse along the fixed path, avoids turbulent disorder dispersion, and enhances the horizontal stirring efficiency.
[0028] Further, the rotating assembly comprises a pneumatic motor 10 and a support rod 11, the support rod 11 is fixedly connected with the shell of the pneumatic motor 10, and the support rod 11 is fixedly connected with the inside of the annular shell 7 at both ends.
[0029] The pneumatic motor 10 is fixed in the annular shell 7 through the support rod 11, and the support rod 11 provides stable support for the pneumatic motor 10. The pneumatic power source has no risk of electric spark, is more suitable for electroplating environment, and the rotating speed of the impeller can be adjusted by air pressure to match different pulse frequency requirements.
[0030] The longitudinal axial flow device 6 comprises an axial flow shell 12, a second axial flow impeller 13, and a rotating assembly for driving the second axial flow impeller 13 to rotate, the second axial flow impeller 13 is arranged to rotate in the inside of the axial flow shell 12, and the second axial flow impeller 13 is arranged perpendicularly to the direction of the first axial flow impeller 8.
[0031] The second axial flow impeller 13 in the conical shell of the longitudinal axial flow device 6 is driven by the rotating assembly, and the impeller generates liquid flow in the vertical direction when rotating. The conical design makes the liquid flow from the large-diameter end, i.e. close to the transverse axial flow device 5, to the small-diameter end, thereby increasing the pressure output, forming a downward directional circulation, and accelerating the longitudinal diffusion of ions.
[0032] In another embodiment, the axial flow shell 12 is conical, and the larger-diameter end thereof is close to the first axial flow impeller 8, and the second axial flow impeller 13 is arranged in a conical shape matching the axial flow shell 12.
[0033] The matching of the conical axial flow shell 12 and the second axial flow impeller 13 further optimizes the fluid dynamics, and a tapered flow passage is formed in the conical space when the impeller rotates, the liquid flow velocity increases with the cross-sectional area decreasing, thereby improving the longitudinal stirring intensity, especially for disturbing the sediment at the bottom of the tank.
[0034] The annular shell 7 is fixedly provided with horizontal seats 15 at both ends, the support bracket 14 is fixedly connected with the outside of the axial flow shell 12, and the horizontal seats 15 are fixedly connected with one end of the support bracket 14.
[0035] The transverse axial flow device 5 is rigidly connected with the support bracket 14 of the longitudinal axial flow device 6 through the horizontal seats 15, thereby forming a stable three-dimensional stirring frame. This structure allows the multi-dimensional stirring unit to move together with the displacement adjustment unit, while ensuring the synchronization and coordination of the transverse and longitudinal stirring.
[0036] In another embodiment, the transverse axial flow device 5 is provided with two groups and is symmetrically arranged on both sides of the longitudinal axial flow device 6, and the driving flow directions of the two transverse axial flow devices 5 are both towards the longitudinal axial flow device 6.
[0037] Two groups of transverse axial flow devices 5 are symmetrically distributed on both sides of the longitudinal axial flow device 6, and the liquid flow converges towards the center. Through this scheme, the electroplating liquid forms horizontal bidirectional convection in the electroplating tank 1, and after superposition with the longitudinal liquid flow, a composite vortex is generated, eliminating the low flow velocity area at the edge of the traditional single vortex.
[0038] In another embodiment, the displacement adjusting unit includes a threaded rod 18, a reduction gear box 16 for vertical transmission, and a driving source 17. The reduction gear box 16 is fixedly installed at one end of the bottom of the electroplating tank 1, the driving source 17 is installed at the upper part of the electroplating tank 1 and the driving shaft is connected with the input end of the reduction gear box 16, and one end of the threaded rod 18 is rotationally connected with the tank wall of the electroplating tank 1 and the other end is connected with the output end of the reduction gear box 16.
[0039] The working mode of the displacement adjusting unit is that the driving source 17 drives the threaded rod 18 to rotate through the reduction gear box 16, the threaded rod 18 is threadedly matched with the sliding seat 20 to convert the rotary motion into horizontal linear displacement, and the multi-dimensional stirring mechanism is driven to move horizontally to realize dynamic adjustment of the position of the stirring unit in the electroplating tank 1, thereby avoiding the problems of local vortex and uneven flow. The driving source 17 can be a motor reducer.
[0040] Further, the rotary driving seat includes the sliding seat 20, the rotary seat 21 is rotationally connected on the sliding seat 20, the hydraulic motor 22 for driving the rotary seat 21 to rotate is fixedly installed in the sliding seat 20, and the multi-channel rotary interface is installed on the hydraulic motor 22.
[0041] The hydraulic motor 22 of the rotary driving seat drives the rotary seat 21 to rotate horizontally, thereby driving the transverse axial flow device 5 to change the jet direction; and the multi-channel rotary interface is used for dynamically sealingly connecting the air pressure pipeline of the pneumatic motor 10 and the rotary component, thereby ensuring continuous energy supply during rotation.
[0042] The sliding seat 20 is slidingly connected to the bottom of the electroplating tank 1, and the sliding seat 20 is threadedly connected with the threaded rod 18.
[0043] The sliding seat 20 slides along the guide rail at the bottom of the electroplating tank 1, the threaded rod 18 drives the sliding seat 20 to translate when rotating, thereby adjusting the horizontal position of the transverse axial flow device 5; the hydraulic motor 22 synchronously controls the angle of the rotary seat 21, thereby realizing accurate regulation and control of the spatial pose of the stirring unit, changing the direction of the transverse axial flow device 5, and through rotation, 360-degree horizontal flow guide can be realized, thereby avoiding the problem of “low diffusion layer area” formed at the edge of the tank body and the dead angle.
[0044] The working principle of the electroplating liquid stirring equipment for pulse electroplating is as follows:
[0045] When the device is in operation, the aerodynamic motor 10 of the transverse axial flow device 5 drives the first axial flow impeller 8 to rotate at high speed, forming bidirectional converging liquid flow in the horizontal plane; the conical impeller of the longitudinal axial flow device 6 synchronously generates vertical upward liquid flow, and the two superimposed form a three-dimensional composite flow field. The displacement adjustment unit drives the sliding seat 20 to move horizontally through the threaded rod 18, and the hydraulic motor 22 adjusts the jet angle of the transverse axial flow device 5, so that the stirring area dynamically covers the whole space of the electroplating tank 1. In the on-off period of the current of pulse electroplating, the strong turbulent flow continuously destroys the diffusion layer on the cathode surface, and the rapid replenishment of ions inhibits the concentration difference polarization. The three-dimensional flow field breaks the traditional single vortex mode, eliminates the low diffusion layer, and makes the flow rate of the edge area increase by more than 80%, so that the ion diffusion rate is matched with the pulse frequency;
[0046] Through the displacement and angle adjustment functions, the stirring intensity can be dynamically adjusted and optimized according to the size of the tank and the viscosity of the plating solution, so as to ensure the uniformity of the plating layer. Through the multi-dimensional dynamic stirring mechanism, the device realizes the accurate space-time matching of ion transport and current pulse in the pulse electroplating process, and significantly improves the plating layer quality and process stability.
[0047] The above disclosure is only a few specific embodiments of the utility model, but the utility model embodiments are not limited to this, any changes that can be thought of by those skilled in the art should fall within the protection scope of the utility model.
Claims
1. A plating solution stirring device for pulse plating, comprising a plating bath (1), characterized in that: The electroplating tank (1) is internally provided with a multidimensional stirring mechanism, which comprises a displacement adjusting unit and a multidirectional stirring unit; The multidirectional stirring unit comprises a transverse axial flow device (5) and a longitudinal axial flow device (6), the longitudinal axial flow device (6) is used for driving the electroplating solution to flow longitudinally, the transverse axial flow device (5) is used for driving the electroplating solution to flow horizontally, the transverse axial flow device (5) is installed in the vertical direction of the longitudinal axial flow device (6), and the bottom of the transverse axial flow device (5) is connected with a rotary driving seat.
2. The plating solution stirring device for pulse plating according to claim 1, characterized by: The transverse axial flow device (5) comprises an annular shell (7), a first axial flow impeller (8) is rotationally arranged in the annular shell (7), and a rotary assembly for driving the first axial flow impeller (8) to rotate is fixedly installed in the annular shell (7).
3. The plating solution stirring device for pulse plating according to claim 1, characterized by: The rotary assembly comprises a pneumatic motor (10) and a supporting rod (11), the supporting rod (11) is fixedly connected with the shell of the pneumatic motor (10), and both ends of the supporting rod (11) are fixedly connected with the annular shell (7) internally.
4. The plating solution stirring device for pulse plating according to claim 1, characterized by: The longitudinal axial flow device (6) comprises an axial flow shell (12), a second axial flow impeller (13) and a rotary assembly for driving the second axial flow impeller (13) to rotate, the second axial flow impeller (13) is rotationally arranged in the axial flow shell (12), and the second axial flow impeller (13) is arranged in a direction perpendicular to the first axial flow impeller (8).
5. The plating solution stirring device for pulse plating according to claim 4, wherein: The axial flow shell (12) is conical, one end of the axial flow shell (12) with a larger diameter is close to the first axial flow impeller (8), and the second axial flow impeller (13) is conical and matched with the axial flow shell (12).
6. The plating solution stirring device for pulse plating according to claim 5, wherein: Both ends of the annular shell (7) are fixedly provided with horizontal seats (15), the axial flow shell (12) is fixedly connected with a support (14) externally, and the horizontal seats (15) are fixedly connected with one end of the support (14).
7. The plating solution stirring device for pulse plating according to claim 1, characterized by: The transverse axial flow device (5) is provided with two groups and is symmetrically arranged on both sides of the longitudinal axial flow device (6), and the driving flow directions of the two transverse axial flow devices (5) are both directed to the longitudinal axial flow device (6).
8. The plating solution stirring device for pulse plating according to claim 1, characterized by: The displacement adjusting unit comprises a threaded rod (18), a speed reduction gear box (16) for vertical transmission and a driving source (17), the speed reduction gear box (16) is fixedly installed at one end of the bottom of the electroplating tank (1), the driving source (17) is installed at the upper portion of the electroplating tank (1) and the driving shaft is connected with the input end of the speed reduction gear box (16), one end of the threaded rod (18) is rotationally connected with the tank wall of the electroplating tank (1), and the other end of the threaded rod (18) is connected with the output end of the speed reduction gear box (16).
9. The plating solution stirring device for pulse plating according to claim 8, characterized by: The rotary driving seat comprises a sliding seat (20), the sliding seat (20) is rotationally connected with a rotary seat (21), a hydraulic motor (22) for driving the rotary seat (21) to rotate is fixedly installed in the sliding seat (20), and a multi-way rotary interface is installed on the hydraulic motor (22).
10. The plating solution stirring device for pulse plating according to claim 9, wherein: The sliding seat (20) is slidingly connected to the bottom of the electroplating tank (1), and the sliding seat (20) is threadedly connected with the threaded rod (18).