Special two-dimensional force square sensor for force-controlled polishing
By designing a two-dimensional force square sensor with a four-beam structure, the problem of weak overload resistance of the sensor during the grinding process was solved, and high-precision digital output and sensor networking were achieved, which is suitable for force-controlled grinding scenarios.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-23
- Publication Date
- 2026-04-10
AI Technical Summary
Existing two-dimensional force sensors have poor overload resistance and weak stiffness during the grinding process, making them easy to damage. Furthermore, their output is analog, which makes it impossible to network the sensors.
Design a two-dimensional square force sensor specifically for force-controlled grinding. It adopts a four-beam structure elastic body, sets stress isolation grooves and irregular holes, and attaches multiple strain gauges to form a Wheatstone bridge. It provides digital output and EtherCat communication and supports sensor networking.
It improves the overload capacity and rigidity of the sensor, solves the zero-return problem, and realizes high-precision digital output and sensor networking, making it suitable for force-controlled grinding scenarios.
Smart Images
Figure CN224108956U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the field of sensor measurement, is based on resistance type strain principle, concretely is a kind of two-dimensional force square sensor specially used for force control polishing, for humanoid robot industry. BACKGROUND
[0002] With the rapid development of science and technology, sensors have penetrated into various fields of industrial production, and force control polishing has developed rapidly.Currently, in the industry, square two-dimensional sensors or one-dimensional sensors are often installed on polishing special machines.According to relevant reports, the range of polishing products is also relatively wide, mainly including 3C housings, glass and others, especially glass polishing is leading in the industry.Adapting two-dimensional force sensors on polishing equipment can effectively improve the accuracy and efficiency of polishing.This two-dimensional force sensor currently has the following shortcomings:①poor bending moment resistance, the strain beam of the sensor often breaks when subjected to impact force, ②the current two-dimensional force sensor is an analog output connected to a transmitter, the two-dimensional force sensor of the utility model directly outputs digital quantity, directly outputs force value, provides two communication modes of 485 and EtherCat, and can realize sensor networking, therefore, it has profound significance to invent a two-dimensional force square sensor specially used for force control polishing. SUMMARY
[0003] The technical problem to be solved by the utility model is that the known polishing industry uses this two-dimensional force sensor, which has poor overload resistance and weak rigidity, and the sensor is often damaged when subjected to impact force during polishing.
[0004] The utility model provides a two-dimensional force square sensor specially used for force control polishing, and the technical method adopted is as follows:
[0005] A two-dimensional force square sensor specially used for force control polishing, comprising an elastic body 1 in the shape of a square as a whole, an upper cover plate 2, a lower cover plate 3 and a main plate 4, the elastic body 1 comprises an elastic body hub, a force receiving table and four strain beams, the elastic body hub is in the shape of a square, a circular hole is arranged at the center, the force receiving table is arranged in the circular hole, and the four strain beams are evenly arranged between the force receiving table and the elastic body hub; the upper cover plate 2 and the lower cover plate 3 are arranged at the upper and lower ends of the elastic body 1, and the force receiving table protrudes from the upper cover plate 2; the main plate 4 is arranged below the upper cover plate 2 and is detachably connected with the elastic body hub; a plurality of strain gauges are attached to the four strain beams to form two Wheatstone bridges for measuring the forces in the tangential direction Fy and the normal direction Fz respectively; the two Wheatstone bridges are connected to the main plate 4, the main plate 4 supplies power to the bridge circuit and collects data, and the main plate 4 is connected to an EtherCat communication line and a power cable containing a power line and a 485 communication line.
[0006] The two-dimensional force square sensor of the utility model is digital output, is equipped with two communication modes of 485 and EtherCat, supports networking use of multiple sensors, and meets the demand of polishing equipment networking. At present, two-dimensional force sensors are generally analog output, are connected with transmitters, are digital output, directly output force values, provide two communication modes of 485 and EtherCat, and can realize sensor networking.
[0007] Further optimization of the utility model technical scheme, a stress isolation groove 9 is formed in the lower end face of the elastic body 1, which has two purposes: one is to reduce the hysteresis of the sensor, and the other is to solve the zero return capability of the sensor.
[0008] Further optimization of the utility model technical scheme, the depth of the stress isolation groove 9 is 1mm, the stress isolation groove reduces the contact area, reduces the hysteresis of the sensor, and improves the zero return capability of the sensor.
[0009] Further optimization of the utility model technical scheme, in the actual polishing process, the tangential force Fy cannot be loaded too much, generally 200-300mm away from the surface of the sensor, so that additional bending moments will occur during polishing, therefore, the bending moment is reduced during design to reduce the coupling of the tangential force Fy, the four strain beams of the utility model are located at the middle positions of the four edges of the square elastic body hub, and the four strain beams are symmetrically arranged to reduce the measurement error during eccentric loading, and the coupling of the bending moment on the tangential force Fy and the normal force Fz is reduced.
[0010] Further optimization of the utility model technical scheme, a special-shaped hole is formed in the four strain beams. According to the stress concentration principle in material mechanics, a special-shaped hole of a certain shape is arranged on the strain beam, which has three purposes: one is to ensure that the patch area has as large a strain as possible, to improve the sensitivity of the sensor, the second is to ensure that the strain change of the strain gage grid coverage area is as small as possible, and the third is to improve the overload capacity.
[0011] Further optimization of the utility model technical scheme, 16 strain gages are attached to the four strain beams, and the strain gages are attached to the surfaces of the four strain beams and the inner walls of the special-shaped holes; the 16 strain gages are R1-R16, wherein R1-R8 form a full-bridge to measure Fy, R9-R16 form a full-bridge to measure Fz, and Fz uses 8 strain gages, which is to reduce the force measurement error of the bending moment on Fz, and if 4 strain gages are used, it will inevitably lead to a larger measurement error of Tx or Ty on Fz.
[0012] Further optimization of the technical scheme of the utility model, the elliptical center hole is arranged on the stress platform, because a soft air pipe needs to be passed in the actual polishing process, the soft air pipe can displace a certain distance when polishing, in order to prevent the soft air pipe from colliding with the sensor and affecting the measurement error, in order to reduce the possible measurement error, therefore, the elliptical center hole is arranged, and a certain displacement space is provided for the soft air pipe.
[0013] Further optimization of the technical scheme of the utility model, the recess for loading the main plate 4 is arranged on the elastic body 1, the upper cover plate 2 and the lower cover plate 3 are respectively embedded in the grooves on the upper and lower end faces of the elastic body 1, and are glued.
[0014] Further optimization of the technical scheme of the utility model, the material of the elastic body 1 is stainless steel material, which effectively prevents the corrosion of the sensor by the corrosion liquid in the force control polishing process.
[0015] Further optimization of the technical scheme of the utility model, the EtherCat communication line and the power cable are all passed through the waterproof joint, are connected out of the two threaded holes of the elastic body 1, the waterproof joint is arranged in the threaded hole, the waterproof joint is provided with threads, corresponding threaded holes are arranged on the elastic body, and the waterproof joint is directly screwed on the elastic body.
[0016] The utility model has the beneficial effects compared with the prior art:
[0017] 1、 the utility model discloses a two-dimensional force square sensor specially used for force control polishing, and the appearance of the sensor is 130mm*130mm*22mm (height), and the sensor is specially used for the force control polishing industry.
[0018] 2、 the two-dimensional force square sensor specially used for force control polishing is a two-dimensional sensor, measures tangential force and normal force, and the range is all 1000N.
[0019] 3、 the two-dimensional force square sensor specially used for force control polishing, the elastic body is used as the sensitive component of the sensor, adopts four beam structures, according to the stress concentration principle in material mechanics, a certain special-shaped hole is arranged on the strain beam, so that the sensitivity of the sensor can be effectively improved, the overload capacity of the sensor is also improved, and the strain gauge pasting process is also considered when designing the elastic body, so as to ensure enough space when pasting.
[0020] 4、 the two-dimensional force square sensor specially used for force control polishing, considering the special needs of the force control polishing industry, the two-dimensional force sensor related to the utility model has higher rigidity and higher self-vibration frequency.
[0021] 5. The utility model discloses a two-dimensional force square sensor specially used for force control polishing, which is a digital output and is provided with two communication modes of 485 and EtherCat, and supports networking use of multiple sensors.
[0022] 6. The utility model discloses a two-dimensional force square sensor specially used for force control polishing, which is provided with stress isolation grooves, reduces hysteresis of the sensor, and solves the zero return problem of the sensor.
[0023] 7. The utility model discloses a two-dimensional force square sensor specially used for force control polishing, which has an overload capacity of more than 200%.
[0024] 8. The utility model discloses a two-dimensional force square sensor specially used for force control polishing, which is made of stainless steel, effectively preventing corrosion of the sensor by corrosive liquid in the force control polishing process.
[0025] 9. The utility model discloses a two-dimensional force square sensor specially used for force control polishing, which has high rigidity, good dynamic performance and high measurement accuracy. DRAWINGS
[0026] Figure 1 It is a front three-dimensional schematic view of a two-dimensional force square sensor specially used for force control polishing of the embodiment.
[0027] Figure 2 It is a back three-dimensional schematic view of a two-dimensional force square sensor specially used for force control polishing of the embodiment.
[0028] Figure 3 It is Figure 1 a three-dimensional schematic view without the upper cover plate.
[0029] Figure 4 It is a front three-dimensional schematic view of the elastic body.
[0030] Figure 5 It is a back three-dimensional schematic view of the elastic body.
[0031] Figure 6 It is a bridge connection principle diagram of the two-dimensional force square sensor specially used for force control polishing of the embodiment.
[0032] Figure 7 It is a top view of the elastic body after the front patch.
[0033] Figure 8 It is Figure 7 the A-A cutaway view.
[0034] Figure 9 It is Figure 7 the B-B cutaway view.
[0035] Figure 10is the top view of the elastomer back patch of the embodiment;
[0036] Figure 11 is a structural schematic diagram of the strain gauge;
[0037] Wherein, 1 - elastomer, 2 - upper cover plate, 3 - lower cover plate, 4 - main plate, 5 - first strain beam, 6 - second strain beam, 7 - third strain beam, 8 - fourth strain beam, 9 - stress isolation groove, R1~R16 - strain gauge. DETAILED DESCRIPTION
[0038] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the following will combine the drawings of the utility model with the specific embodiments of the utility model to further explain the utility model. Figure 1 - the drawings Figure 11 of the utility model are described in detail. It should be understood that the specific embodiments described herein are only used to explain the utility model, and are not used to limit the utility model. In addition, the technical features involved in each embodiment of the utility model described below can be combined with each other as long as they do not conflict with each other.
[0039] As Figure 1 and 2 shown, the embodiment is a two-dimensional force square sensor specially used for force control polishing, which is specially used for force control polishing industry. The two-dimensional force square sensor is based on the principle of resistance strain.
[0040] A two-dimensional force square sensor specially used for force control polishing, comprising an elastomer 1, an upper cover plate 2, a lower cover plate 3, a main plate 4, an EtherCat communication line, a power cable and two waterproof connectors.
[0041] As Figure 3 and 4 shown, the elastomer 1 comprises an elastomer hub, a force receiving table and four strain beams. The elastomer hub is square, a circular hole is arranged in the center, the force receiving table is arranged in the circular hole, and the four strain beams are evenly arranged between the force receiving table and the elastomer hub. The upper cover plate 2 and the lower cover plate 3 are arranged at the upper and lower ends of the elastomer 1, and the force receiving table protrudes from the upper cover plate 2. The main plate 4 is arranged below the upper cover plate 2 and is detachably connected with the elastomer hub. Specifically, a sink groove for loading the main plate 4 is formed on the elastomer 1, the upper cover plate 2 and the lower cover plate 3 are respectively embedded in the grooves on the upper and lower end surfaces of the elastomer 1; the upper cover plate 2 and the elastomer 1 are sealed with 704 sealant, the lower cover plate 3 and the elastomer 1 are sealed with 704 sealant, and the main plate 4 is fixed in the elastomer 1 by four M2 screws.
[0042] The EtherCat communication line and the power cable are welded to the mainboard 4 and fixed on the elastic body 1 through waterproof connectors; specifically, two threaded holes 11 are arranged on the elastic body 1, the EtherCat communication line and the power cable are respectively threaded through the waterproof connectors and then threaded through the two threaded holes 11 on the elastic body 1, the waterproof connectors are tightened, and finally the EtherCat communication line and the power cable are welded to the mainboard 4 according to the color definition of the lines.
[0043] In the embodiment, the power cable is a 4-core line with a shielding layer, one group of power supply, that is, power supply positive (the power supply is DC 24V) and power supply negative (GND), and one group of 485 communication lines, that is, RS485 A and RS485 B.
[0044] In the embodiment, the mainboard 4 is fixed in the elastic body 1, the main function of the mainboard 4 is data acquisition, contains two communication modes of EtherCat and 485, the mainboard 4 is powered by DC 24V, and the bridge is powered by DC 12V, and the signal amplification multiple is 500 times.
[0045] As shown in Figure 4 , four strain beams are symmetrically arranged between the stress receiving platform on the elastic body 1 and the elastic body hub, which are a first strain beam 5, a second strain beam 6, a third strain beam 7 and a fourth strain beam 8, wherein the first strain beam 5 and the second strain beam 6 are collinear, and the third strain beam 7 and the fourth strain beam 8 are collinear.
[0046] As shown in Figure 5 , the material of the elastic body 1 is stainless steel, 17-4 PH. A stress isolation groove 9 is arranged on the lower end surface of the elastic body 1, which has two purposes: one is to reduce the hysteresis of the sensor, and the other is to solve the zero return ability of the sensor; the depth of the stress isolation groove 9 is 1mm.
[0047] As shown in Figure 4 and 5 , in the embodiment, according to the stress concentration principle in material mechanics, a special-shaped hole of a certain shape is arranged on the strain beam, which has three purposes: one is to ensure that the patch area has as large a strain as possible, to improve the sensitivity of the sensor, the second is to ensure that the strain change of the strain gage grid coverage area is as small as possible, and the third is to improve the overload capacity.
[0048] A plurality of strain gages are pasted on the four strain beams to form two Wheatstone bridges for measuring the forces in the Fy and Fz directions; the two Wheatstone bridges are connected to the mainboard 4, the mainboard 4 supplies power to the bridge and collects data, and the mainboard 4 is connected to the EtherCat communication line and the power cable containing the power line and the 485 communication line.
[0049] The two-dimensional force square sensor of the embodiment is specially used in the polishing industry to measure the tangential force Fy and the normal force Fz, and is specially used in the two-dimensional force square sensor for force control polishing.
[0050] As shown in Figure 6 In the embodiment, 16 strain gauges are pasted on the four strain beams, and the strain gauges are pasted on the surfaces of the four strain beams and the inner walls of the special-shaped holes; the 16 strain gauges are R1-R16, wherein R1-R8 constitute a full-bridge to measure Fy, and R9-R16 constitute a full-bridge to measure Fz.
[0051] As shown in Figure 7 , 8 , 9 and 10, 16 strain gauges are pasted on the elastic body 1, as shown in Figure 6 , to constitute two independent Wheatstone bridges to measure the tangential force Fy and the normal force Fz, respectively. Figure 7 , 8 , 9 and 10, and R1-R16 in Figure 6 indicate strain gauges, and R indicates a fixed resistor 350Ω.
[0052] When the elastic body 1 is subjected to the tangential force Fy, the third strain beam 7 is subjected to tensile stress, the fourth strain beam 8 is subjected to compressive stress, R1, R4, R5 and R8 are subjected to tensile strain, and R2, R3, R6 and R7 are subjected to compressive strain, to constitute the first Wheatstone bridge in Figure 6 to measure the lateral force Fy.
[0053] When the elastic body 1 is subjected to the normal force Fz, the four strain beams are all bent, R9, R12, R13 and R16 are subjected to tensile strain, and R10, R11, R13 and R15 are subjected to compressive strain, to constitute the second Wheatstone bridge in Figure 6 to measure the normal force Fz.
[0054] As shown in Figure 11 In the embodiment, the strain gauges are purchased parts, and two center line point positions a and b, two wire grid positioning marks c and d, and two welding points e and f have been marked on the strain gauges.
[0055] In the embodiment, the two-dimensional force square sensor for force control polishing is specially used, and the pasting positions of the 16 strain gauges are as follows:
[0056] The strain gauges R1 and R5 are pasted on the left inner wall (the side close to the first strain beam 5) of the special-shaped hole on the fourth strain beam 8, the strain gauges R4 and R8 are pasted on the right inner wall (the side close to the second strain beam 6) of the special-shaped hole, the strain gauges R2 and R6 are pasted on the left inner wall (the side close to the first strain beam 5) of the third strain beam 7, and the strain gauges R3 and R7 are pasted on the right inner wall (the side close to the second strain beam 6) of the third strain beam 7, wherein the strain gauges R1 and R4 are symmetrical about the Y axis, the strain gauges R5 and R8 are symmetrical about the Y axis, the strain gauges R2 and R3 are symmetrical about the Y axis, the strain gauges R6 and R7 are symmetrical about the Y axis, the strain gauges R1 and R2 are symmetrical about the X axis, the strain gauges R5 and R6 are symmetrical about the X axis, the strain gauges R4 and R3 are symmetrical about the X axis, the strain gauges R8 and R7 are symmetrical about the X axis, the welding points of the strain gauges R1, R5, R4 and R8 are in the -Y direction, the welding points of the strain gauges R2, R6, R3 and R7 are in the +Y direction, the distance L1 between the center line positioning mark of the strain gauge R5 and the force receiving table is 14.35 mm, the distance L2 between the center line positioning mark of the strain gauge R5 and the center line positioning mark of the strain gauge R1 is 1.9 mm, the distance between the center line positioning mark of the strain gauge R8 and the force receiving table is also 14.35 mm, and the distance between the center line positioning mark of the strain gauge R8 and the center line positioning mark of the strain gauge R4 is 1.9 mm; the distance between the center line positioning mark of the strain gauge R6 and the force receiving table is 14.35 mm, the distance between the center line positioning mark of the strain gauge R6 and the center line positioning mark of the strain gauge R2 is 1.9 mm; the distance between the center line positioning mark of the strain gauge R7 and the force receiving table is 14.35 mm, and the distance between the center line positioning mark of the strain gauge R7 and the center line positioning mark of the strain gauge R3 is 1.9 mm. The distance L3 between the wire gauze positioning mark of the strain gauge R5 and the wire gauze positioning mark of the strain gauge R6 is 102.8 mm, the distance between the wire gauze positioning mark of the strain gauge R1 and the wire gauze positioning mark of the strain gauge R2 is also 102.8 mm, the distance between the wire gauze positioning mark of the strain gauge R4 and the wire gauze positioning mark of the strain gauge R3 is 102.8 mm, and the distance between the wire gauze positioning mark of the strain gauge R8 and the wire gauze positioning mark of the strain gauge R7 is 102.8 mm. As shown in Figs. Figure 7 、 8 and 9.
[0057] The strain gauge R13 is pasted on the back of the left beam of the fourth strain beam 8 (the beam on the side close to the first strain beam 5, which is divided by the special-shaped hole of the fourth strain beam 8), the strain gauge R14 is pasted on the front of the right beam of the fourth strain beam 8 (the beam on the side close to the second strain beam 6), the strain gauge R15 is pasted on the front of the left beam of the third strain beam 7 (the beam on the side close to the first strain beam 5), the strain gauge R16 is pasted on the back of the right beam of the third strain beam 7 (the beam on the side close to the second strain beam 6), the strain gauge R10 is pasted on the front of the upper beam of the first strain beam 5 (the beam on the side close to the fourth strain beam 8), the strain gauge R9 is pasted on the back of the lower beam of the first strain beam 5 (the beam on the side close to the third strain beam 7), the strain gauge R11 is pasted on the front of the lower beam of the second strain beam 6 (the beam on the side close to the third strain beam 7), and the strain gauge R12 is pasted on the back of the upper beam of the second strain beam 6 (the beam on the side close to the fourth strain beam 8), wherein the strain gauges R13 and R16 are anti-symmetric along the Y axis, the wire grid positioning mark distance L4 is 95.2 mm, the strain gauges R14 and R15 are anti-symmetric along the Y axis, the wire grid positioning mark distance is 95.2 mm, the strain gauges R10 and R11 are anti-symmetric along the X axis, the wire grid positioning mark distance is 95.2 mm, the strain gauges R12 and R9 are anti-symmetric along the X axis, the wire grid positioning mark distance is 95.2 mm, the welding points of the strain gauges R14 and R13 are towards the -Y direction, the welding points of the strain gauges R15 and R16 are towards the +Y direction, the welding points of the strain gauges R11 and R12 are towards the +X direction, the welding points of the strain gauges R10 and R9 are towards the -X direction, the center line of the strain gauge R13 is positioned along the Y axis at a distance of L5=5 mm, and the center lines of the strain gauges R14, R15, R16, R10, R9, R11 and R12 are positioned along the X axis at a distance of 5 mm. Figure 7 、 8 、9 and 10.
[0058] The two-dimensional force square sensor for force control polishing in the embodiment is specially used for the force control polishing industry, measures the tangential force and the normal force, and the ranges are both 1000N. The modal analysis of the elastic body is performed by ANSYS Workbench, and the natural frequency of the elastic body is 1759Hz, which has good dynamic performance.
[0059] The two-dimensional force square sensor for force control polishing in the embodiment is specially used for the force control polishing industry, measures the tangential force and the normal force, and the ranges are both 1000N. The modal analysis of the elastic body is performed by ANSYS Workbench, and the natural frequency of the elastic body is 1759Hz, which has good dynamic performance.
[0060] The modal analysis process of the elastic body by ANSYS Workbench is as follows:
[0061] As described above, Fy, Fz adopts the scheme of full bridge, and ANSYS Workbench is used for simulation calculation. Full scale loading is carried out in each direction, and the strength under full scale loading in each direction is calculated. Since the selected material is stainless steel 17-4PH, after a certain heat treatment process, the yield strength is not less than 1300MPa, so the equivalent stress value obtained by simulation calculation must be less than the yield strength 1300MPa. The output sensitivity of each bridge is calculated, and the main plate 4 supplies voltage of 12V to the bridge when calculating the sensitivity of each bridge.
[0062] When Fy=1000N is loaded,
[0063] When the elastomer 1 is subjected to lateral force Fy, the fourth strain beam 8 is subjected to tensile stress, the third strain beam 7 is subjected to compressive stress, R1, R4, R5 and R8 are subjected to tensile strain, and R2, R3, R6 and R7 are subjected to compressive strain, forming the first Wheatstone bridge in Figure 6 After ANSYS Workbench calculation, the equivalent stress is 88.653Mpa, the deformation amount is 0.0055393mm, the strain amount measured by R1 is , the strain amount measured by R2 is , the strain amount measured by R3 is , the strain amount measured by R4 is , the strain amount measured by R5 is , the strain amount measured by R6 is , the strain amount measured by R7 is , and the strain amount measured by R8 is , then:
[0064]
[0065] —represents the output voltage value in Fy direction when Fy is full scale loaded;
[0066] —represents the sensitivity coefficient of the strain gauge, which is usually taken as an average value, and k=2 is taken;
[0067] —represents the strain amount measured by the strain gauge R1 in the patch area;
[0068] —represents the strain amount measured by the strain gauge R2 in the patch area;
[0069] —represents the strain amount measured by the strain gauge R3 in the patch area;
[0070] — represents the strain measured by the strain gauge R4 patch area;
[0071] — represents the strain measured by the strain gauge R5 patch area;
[0072] — represents the strain measured by the strain gauge R6 patch area;
[0073] — represents the strain measured by the strain gauge R7 patch area;
[0074] — represents the strain measured by the strain gauge R8 patch area;
[0075] — represents the excitation voltage of the bridge, here ;
[0076] The Fy direction output sensitivity is:
[0077] When Fz = 1000N is loaded,
[0078] The four strain beams are all bent, R9, R12, R13 and R16 are in tensile strain, and R10, R11, R13 and R15 are in compressive strain, forming the second Wheatstone bridge in Figure 6 , through ANSYS Workbench calculation, the equivalent stress is 105.48Mpa, the deformation is 0.010273mm, the strain measured by R9 is , the strain measured by R10 is , the strain measured by R11 is , the strain measured by R12 is , the strain measured by R13 is , the strain measured by R14 is , the strain measured by R15 is , and the strain measured by R16 is , then:
[0079]
[0080] — represents the Fz full-scale loading Fz direction output voltage value;
[0081] — represents the sensitivity coefficient of the strain gauge, usually take the average value when calculating, take k = 2;
[0082] — represents the strain measured by the strain gauge R9 patch area;
[0083] represents the strain amount measured by the strain gauge R10 patch area;
[0084] represents the strain amount measured by the strain gauge R11 patch area;
[0085] represents the strain amount measured by the strain gauge R12 patch area;
[0086] represents the strain amount measured by the strain gauge R13 patch area;
[0087] represents the strain amount measured by the strain gauge R14 patch area;
[0088] represents the strain amount measured by the strain gauge R15 patch area;
[0089] represents the strain amount measured by the strain gauge R16 patch area;
[0090] represents the excitation voltage of the bridge, here taking ;
[0091] The Fz direction output sensitivity is:
[0092] The two-dimensional force square sensor for force control polishing in the embodiment is specially used, 485 communication is adopted in calibration, the sensor is calibrated according to 'Multi-component force sensor calibration specification' (standard number: JJF 1560-2016), and the calibration calculation result is shown in the following table 1.
[0093] Table 1
[0094]
[0095] According to the calibration data in table 1, it is shown that the two-dimensional force square sensor for force control polishing in the embodiment is high in precision, excellent in performance and suitable for use in the force control polishing industry.
[0096] Those skilled in the art can easily understand that the above description is only a preferred embodiment of the utility model, and is not used to limit the utility model, and any modification, equivalent replacement and improvement made within the spirit and principle of the utility model should be included in the protection scope of the utility model.
Claims
1. A two-dimensional force square sensor exclusively used for force-controlled sanding, characterized in that The elastic body (1) is in a square shape, the upper cover plate (2), the lower cover plate (3) and the main plate (4) are included, The elastic body (1) comprises an elastic body hub, a stress platform and four strain beams, the elastic body hub is in a square shape, a circular hole is arranged in the center, the stress platform is arranged in the circular hole, and the four strain beams are evenly arranged between the stress platform and the elastic body hub; the upper cover plate (2) and the lower cover plate (3) are arranged at the upper and lower ends of the elastic body (1), and the stress platform protrudes from the upper cover plate (2); the main plate (4) is arranged below the upper cover plate (2) and is detachably connected with the elastic body hub; A plurality of strain gauges are attached to the four strain beams to form two Wheatstone bridges for measuring the tangential force Fy and the normal force Fz in two directions; the two Wheatstone bridges are connected to the main plate (4), the main plate (4) supplies power to the bridge and collects data, and the main plate (4) is connected to an EtherCat communication line and a power cable comprising a power line and a 485 communication line.
2. The two-dimensional force square sensor for force-controlled sanding exclusively according to claim 1, characterized in that A stress isolation groove (9) is arranged on the lower end surface of the elastic body (1).
3. The two-dimensional force square sensor for force-controlled sanding exclusively according to claim 2, characterized in that The depth of the stress isolation groove (9) is 1mm.
4. The two-dimensional force square sensor specialized for force-controlled polishing according to claim 1, wherein, The four strain beams are respectively arranged at the middle positions of the four edges of the square elastic body hub.
5. The two-dimensional force quad-sensor specifically used for force-controlled sanding according to claim 1, characterized in that The four strain beams are provided with special-shaped holes.
6. The two-dimensional force square sensor for force-controlled sanding exclusively according to claim 5, characterized in that Sixteen strain gauges are attached to the four strain beams, and the strain gauges are attached to the surfaces of the four strain beams and the inner walls of the special-shaped holes; the sixteen strain gauges are respectively R1-R16, wherein R1-R8 form a full bridge to measure Fy, and R9-R16 form a full bridge to measure Fz.
7. The two-dimensional force quad-sensor specifically used for force-controlled sanding according to claim 1, characterized in that An elliptical center hole is arranged on the stress platform.
8. The two-dimensional force quad-sensor specifically used for force-controlled sanding according to claim 1, characterized in that A recess for accommodating the main plate (4) is arranged on the elastic body (1), the upper cover plate (2) and the lower cover plate (3) are respectively embedded into the grooves on the upper and lower end surfaces of the elastic body (1), and are glued.
9. The two-dimensional force quad-sensor specifically used for force-controlled sanding according to claim 1, characterized in that The material of the elastic body (1) is stainless steel.
10. The two-dimensional force quad-sensor specifically for force-controlled sanding according to claim 1, characterized in that The EtherCat communication line and the power cable are both passed through waterproof joints and are connected from two threaded holes of the elastic body (1), and the waterproof joints are arranged in the threaded holes.