Four-probe resistivity tester

Abstract

The utility model relates to the technical field of semiconductor testing, and discloses a four-probe resistivity tester, which comprises a base and a support frame arranged on one side of the top of the base, a first driving piece is arranged on the top of one side of the support frame, and the first driving piece is connected with a detection module through a lifting connecting piece. The first driving part can drive the detection module to move in the Z-axis direction, a detection probe is arranged at the bottom of the detection module, a second driving part is arranged at the top of the base, a third driving part is arranged at the top of the second driving part, and a carrying table is arranged at the top of the third driving part. The second driving piece can drive the third driving piece and the carrying table to move in the Y-axis direction, and the third driving piece can drive the carrying table to rotate. Automatic alignment of the detection probe and the wafer is achieved, manual operation errors are avoided, the measurement accuracy is improved, meanwhile, an extrusion type fixing structure that the flexible clamping block is matched with the eccentric handle is adopted, rapid disassembly and assembly of the detection probe can be achieved, and later maintenance is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor test technical field, specifically a four-probe resistivity tester. BACKGROUND

[0002] Four-probe resistivity tester is the important equipment of measuring semiconductor material, wafer and film sample resistivity, and it calculates resistivity through four-probe contact sample and voltage measurement of applied current, and can effectively reduce the contact resistance influence compared with two-probe method. The tester on the market currently adopts manual or semi-automatic adjustment mode, and has the problems of low positioning accuracy, complicated operation, low test efficiency and the like, and manual adjustment can easily lead to poor probe contact and affect measurement accuracy, frequent adjustment of sample position or probe height is needed during batch testing, and the equipment with insufficient automation degree is difficult to meet the high-precision and high-throughput test demand. In addition, the existing detection probe fixing mode adopts screw locking, and is not easy to disassemble and maintain in the later period. UTILITY MODEL CONTENT

[0003] The utility model aims at overcoming the above-mentioned problems or at least partially solving the above-mentioned problems, and provides a four-probe resistivity tester.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a four-probe resistivity tester, including base and support frame arranged on one side of the top of the base, the top of one side of the support frame is provided with first driving part, the first driving part is connected with detection module through lifting connecting piece, the first driving part can drive detection module to move along Z axis direction, the bottom of the detection module is provided with detection probe, the top of the base is provided with second driving part, the top of the second driving part is provided with third driving part, the top of the third driving part is provided with stage, the second driving part can drive third driving part and stage to move along Y axis direction, the third driving part can drive stage to rotate.

[0005] In a preferred embodiment, the bottom of the detection module is further provided with a quick-release assembly capable of clamping and fixing the detection probe, the quick-release assembly includes two flexible clamping blocks fixed below the detection module, the two flexible clamping blocks are respectively located on both sides of the detection probe, the end portion of the flexible clamping block is provided with a pressing member, and the two flexible clamping blocks can be extruded and deformed through the pressing member, thereby clamping and fixing the detection probe.

[0006] In one preferred embodiment, the extruding piece comprises a connecting rod penetrating through the ends of the two flexible clamps, one end of the connecting rod is provided with a limiting head and is attached to one side of the flexible clamp, the other end of the connecting rod is rotatably connected with a handle through a damping rotating shaft, a pressing block is sleeved on the connecting rod between the handle and the other side of the flexible clamp, when the handle rotates to approach the detection probe, the end of the handle can push the pressing block to move on the connecting rod and extrude the flexible clamp at the corresponding position, when the handle rotates to move away from the detection probe, the pressing block can be gradually loosened.

[0007] In one preferred embodiment, the two ends of the handle connected with the connecting rod are provided in the shape of round ear plates, and the two ends are eccentrically arranged with the damping rotating shaft.

[0008] In one preferred embodiment, when the second driving piece drives the carrier to move along the Y-axis direction, the two end points of the diameter of the wafer placed on the carrier can pass through the detection probe in sequence.

[0009] In one preferred embodiment, the first driving piece is a telescopic air cylinder or an electric push rod, which is used to realize the vertical lifting movement of the detection module; the second driving piece is a linear motor or a ball screw sliding table, which is used to drive the carrier to linearly move along the Y-axis direction; and the third driving piece is a servo motor or a stepping motor, which is connected with the carrier through a reduction mechanism and is used to drive the carrier to rotate around the central axis.

[0010] Compared with the prior art, the utility model provides a kind of four-probe resistivity tester, through the collaborative control of the Z-axis lifting of detection module and detection probe driven by first driving piece, Y-axis translation of rotating carrier driven by second driving piece and rotating carrier of third driving piece, the automatic alignment of detection probe and wafer is realized, avoid human operation error, improve measurement accuracy, meanwhile, the extrusion type fixing structure of flexible clamp cooperation eccentric handle is used, the quick disassembly of detection probe can be realized, and it is convenient for later maintenance. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 It is the three-dimensional structure schematic diagram of the utility model;

[0012] Figure 2 It is the left view structure schematic diagram of the utility model;

[0013] Figure 3 It is the front view structure schematic diagram of the utility model;

[0014] Figure 4 It is the three-dimensional structure schematic diagram of quick release assembly in the utility model;

[0015] Figure 5 It is Figure 4 the front view structure schematic diagram of quick release assembly in the utility model.

[0016] In the figure: 1, base; 2, support frame; 3, first driving part; 4, detection module; 5, second driving part; 6, third driving part; 7, loading platform; 8, quick release assembly; 81, flexible clamp block; 82, connecting rod; 83, limiting head; 84, pressing block; 85, handle; 9, detection probe. DETAILED DESCRIPTION

[0017] The utility model will be explained further in detail below in combination with the drawings.

[0018] The embodiment is only an explanation of the utility model, and it is not a limitation of the utility model. Those skilled in the art can make creative contributions to the embodiment according to the needs after reading the description, but as long as it is within the scope of the claims of the utility model, it is protected by the patent law.

[0019] The utility model relates to a four-probe resistivity tester, which solves the technical problems in the prior art, and the overall idea is as follows:

[0020] Embodiment one:

[0021] Please refer to Figures 1-5 A four-probe resistivity tester includes a base 1 and a support frame 2 arranged on one side of the top of the base 1. A first driving part 3 is arranged on the top of one side of the support frame 2. The first driving part 3 is connected with a detection module 4 through a lifting connecting piece. The first driving part 3 can drive the detection module 4 to move along the Z-axis direction. The bottom of the detection module 4 is provided with a detection probe 9. The top of the base 1 is provided with a second driving part 5. The top of the second driving part 5 is provided with a third driving part 6. The top of the third driving part 6 is provided with a loading platform 7. The second driving part 5 can drive the third driving part 6 and the loading platform 7 to move along the Y-axis direction. The third driving part 6 can drive the loading platform 7 to rotate. Under the cooperation of the first driving part 3, the second driving part 5, and the third driving part 6, the three-dimensional motion control function of the tester is realized.

[0022] In the specific implementation, the bottom of the detection module 4 is further provided with a quick release assembly 8 capable of clamping and fixing the detection probe 9. The quick release assembly 8 includes two flexible clamp blocks 81 fixed below the detection module 4. The two flexible clamp blocks 81 are respectively arranged on the two sides of the detection probe 9. The end of the flexible clamp block 81 is provided with a pressing piece. The two flexible clamp blocks 81 can be extruded and deformed through the pressing piece, so as to clamp and fix the detection probe 9. The quick disassembly and assembly function of the detection probe 9 is realized.

[0023] In specific implementation, the extruding member includes a connecting rod 82 penetrating through the ends of the two flexible clamping blocks 81, one end of the connecting rod 82 is provided with a limiting head 83 and is attached to one side of the flexible clamping block 81, the other end of the connecting rod 82 is rotatably connected with a handle 85 through a damping rotating shaft, the connecting rod 82 between the handle 85 and the other side of the flexible clamping block 81 is sleeved with a pressing block 84, when the handle 85 rotates to approach the detection probe 9, the end of the handle 85 can push the pressing block 84 to move on the connecting rod 82 and extrude the flexible clamping block 81 at the corresponding position, when the handle 85 rotates to move away from the detection probe 9, the pressing block 84 can be gradually loosened, thereby achieving convenient fixing and releasing of the detection probe 9.

[0024] In specific implementation, the two ends of the handle 85 connected with the connecting rod 82 are circular lug-shaped and are eccentrically arranged with the damping rotating shaft, so as to ensure that the handle 85 can push the pressing block 84 to move on the connecting rod 82 when the handle 85 rotates.

[0025] In specific implementation, when the second driving member 5 drives the carrier 7 to move along the Y-axis direction, the two end points of the diameter of the wafer placed on the carrier 7 can pass through the detection probe 9 in turn.

[0026] In specific implementation, the first driving member 3 is a telescopic air cylinder or an electric push rod, which is used to realize vertical lifting movement of the detection module 4; the second driving member 5 is a linear motor or a ball screw sliding table, which is used to drive the carrier 7 to linearly move along the Y-axis direction; the third driving member 6 is a servo motor or a stepping motor, which is connected with the carrier 7 through a reduction mechanism and is used to drive the carrier 7 to rotate around the central axis thereof, more specifically, the reduction mechanism can be a reduction gear box.

[0027] The detailed connection means is a technology known in the art, and the working principle and process are mainly introduced below, and the specific work is as follows:

[0028] In use, the detection sample is placed on the carrier 7, the second driving member 5 drives the carrier 7 to move along the Y-axis direction to the detection position, the first driving member 3 drives the detection module 4 and the detection probe 9 to move along the Z-axis direction by the detection distance, and the third driving member 6 drives the carrier 7 to rotate around the central axis thereof to drive the detection sample to rotate and realize detection of the resistance of each part of the sample; when the detection probe 9 needs to be disassembled for later maintenance, the handle 85 is rotated to move away from the detection probe 9, the pressing block 84 and the flexible clamping block 81 are gradually loosened, the detection probe 9 between the two flexible clamping blocks 81 is loosened, and the detection probe 9 can be taken out for maintenance or replacement, and in the same way, when the handle 85 is reversely rotated, the pressing block 84 can push and extrude the flexible clamping block 81 and re-clamp and fix the detection probe 9.

[0029] The above description of the embodiments is for facilitating the ordinary skilled in the art to understand and use the present application, and the person skilled in the art can easily make various modifications to the embodiments, and apply the general principles described herein to other embodiments without creative labor, therefore, the present application is not limited to the above embodiments, the improvements and modifications made by the person skilled in the art according to the disclosure of the present application without departing from the scope of the present application should be within the protection scope of the present application.

Claims

1. A four-probe resistivity tester characterized by: The utility model provides a detection device, including base (1) and the support frame (2) of setting in its top side, one side top of support frame (2) is provided with first drive (3), first drive (3) is connected with detection module (4) through the lifting connecting piece, first drive (3) can drive detection module (4) moves along Z axle direction, the bottom of detection module (4) is provided with detection probe (9), the top of base (1) is provided with second drive (5), the top of second drive (5) is provided with third drive (6), the top of third drive (6) is provided with stage (7), second drive (5) can drive third drive (6) and stage (7) move along Y axle direction, third drive (6) can drive stage (7) rotate.

2. The four-probe resistivity tester of claim 1, wherein: The bottom of the detection module (4) is also provided with a quick release assembly (8) capable of clamping and fixing the detection probe (9), the quick release assembly (8) comprises two flexible clamping blocks (81) fixed below the detection module (4), the two flexible clamping blocks (81) are respectively located on both sides of the detection probe (9), the end of the flexible clamping block (81) is provided with a pressing member, and the two flexible clamping blocks (81) can be extruded and deformed through the pressing member, thereby clamping and fixing the detection probe (9).

3. The four-point resistivity probe of claim 2, wherein: The pressing member comprises a connecting rod (82) penetrating through the ends of the two flexible clamping blocks (81), one end of the connecting rod (82) is provided with a limiting head (83) and abuts against one side of the flexible clamping block (81), the other end of the connecting rod (82) is rotatably connected with a handle (85) through a damping shaft, the connecting rod (82) between the handle (85) and the other side of the flexible clamping block (81) is sleeved with a pressing block (84), when the handle (85) is rotated to approach the detection probe (9), the end of the handle (85) can push the pressing block (84) to move on the connecting rod (82) and extrude the flexible clamping block (81) at the corresponding position, when the handle (85) is rotated away from the detection probe (9), the pressing block (84) can be gradually loosened.

4. The four-point resistivity probe of claim 3, wherein: The two ends of the handle (85) connected with the connecting rod (82) are circular ear plate shaped, and the two ends are eccentrically arranged with the damping shaft.

5. The four-point resistivity probe of any one of claims 1-4, wherein: When the second drive (5) drives the stage (7) to move along the Y-axis direction, the two end points of the diameter of the wafer placed on the stage (7) can pass through the detection probe (9) in turn.

6. The four-point resistivity probe of claim 5, wherein: The first drive (3) is a telescopic air cylinder or an electric push rod, which is used for realizing the vertical lifting movement of the detection module (4); the second drive (5) is a linear motor or a ball screw sliding table, which is used for driving the stage (7) to linearly move along the Y-axis direction; the third drive (6) is a servo motor or a stepping motor, which is connected with the stage (7) through a speed reduction mechanism and is used for driving the stage (7) to rotate around the central axis.

Images