Wafer cleaning inner roller and assembled cleaning roller

Abstract

The wafer cleaning inner roller comprises a roller body, a liquid inlet hole is formed in the middle of the roller body, a plurality of liquid outlet grooves are formed in the outer side of the roller body, the liquid inlet hole is provided with liquid outlet holes communicated with the liquid outlet grooves, the cross section of each liquid outlet groove is integrally rectangular, and therefore the liquid outlet grooves have certain volume. After the sponge brush is arranged outside, liquid entering the liquid inlet hole enters the liquid outlet groove close to the end of the liquid inlet hole through the liquid outlet hole, the liquid outlet groove has a certain volume, the liquid entering the liquid outlet groove needs to slowly flow in the liquid outlet groove firstly, and meanwhile more liquid can flow to the liquid outlet groove at the bottom of the liquid inlet hole; in this way, the contact time difference of liquid at the positions of the liquid outlet grooves and the sponge brush can be reduced, the uniformity of water flow in the liquid outlet grooves is increased, meanwhile, due to the fact that the contact area of the liquid outlet grooves and the sponge brush is large, the water permeability of the sponge brush can be improved, and the efficiency of the cleaning roller in the cleaning process is improved.

Description

Technical Field

[0001] This utility model relates to the field of cleaning rollers, and in particular to a wafer cleaning inner roller and an assembled cleaning roller. Background Technology

[0002] Wafer cleaning involves liquid flowing to the outside of a sponge brush, which then contacts the wafer to complete the cleaning process. In existing technologies, the sponge brush is typically fitted onto the outside of the inner cleaning roller. The inlet hole inside the inner roller is connected to the outlet hole on the outside, which directly contacts the inside of the sponge brush. Due to the length of the inner cleaning roller, when liquid enters through the inlet hole, it first flows into the outlet hole near the end of the inlet hole and seeps out directly onto the outer sponge brush. The outlet hole at the bottom of the inlet hole, being farther from the end, requires a longer time for the liquid to reach it. This results in inconsistent liquid flow rates at the outlet holes of the inner cleaning roller, affecting the cleaning effect. Utility Model Content

[0003] Therefore, it is necessary to provide a wafer cleaning inner roller and an assembled cleaning roller to address the problems in the existing technology.

[0004] A wafer cleaning inner roller, characterized in that it includes a roller body, a liquid inlet hole in the middle, and a plurality of liquid outlet grooves on the outer side of the roller body. The liquid inlet hole has a liquid outlet hole communicating with the liquid outlet grooves, and the liquid outlet grooves have a rectangular cross-section.

[0005] In one embodiment, the outer side of the roller body is provided with a plurality of elongated protrusions distributed along the axial direction and a plurality of annular protrusions arranged around the outer side of the roller body, and the elongated protrusions and annular protrusions are alternately distributed to form a plurality of liquid outlet grooves.

[0006] In one embodiment, the elongated protrusion and the annular protrusion have the same top height, and the tops of the elongated protrusion and the annular protrusion are curved surfaces.

[0007] In one embodiment, the elongated protrusion is arranged perpendicularly to the annular protrusion.

[0008] In one embodiment, the cross-section of the elongated protrusion is generally triangular, and the elongated protrusion extends into the roller body at the apex of the triangular structure.

[0009] In one embodiment, the bottom of the liquid outlet tank is flat, and the liquid outlet tank is generally elongated.

[0010] In one embodiment, the end of the roller body is provided with a limiting portion, which is higher than the top arc surface of the elongated protrusion and the annular protrusion.

[0011] An assembled cleaning roller, employing the aforementioned wafer cleaning inner roller.

[0012] In one embodiment, a sponge brush is included, which is sleeved on the outside of the inner roller of the wafer cleaning, and the sponge brush is located between the limiting portions at both ends of the roller body, with the side of the sponge brush abutting against the side of the limiting portion.

[0013] The aforementioned wafer cleaning inner roller and assembled cleaning roller have a rectangular cross-section for the liquid outlet tank, giving it a certain volume. After the sponge brush is installed externally, the liquid entering through the inlet hole first enters the liquid outlet tank near the end of the inlet hole. Since the liquid outlet tank has a certain volume, the liquid entering the tank needs to flow slowly within it first. This also allows more liquid to flow to the bottom of the inlet hole, reducing the time difference between the liquid and the sponge brush at each outlet tank position, thus increasing the uniformity of water flow in each outlet tank. Furthermore, the large contact area between the outlet tank and the sponge brush improves the water permeability of the sponge brush, increasing the efficiency of the cleaning roller during the cleaning process. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the wafer cleaning inner roller of this utility model;

[0015] Figure 2 This is a schematic cross-sectional view of the inner roller for wafer cleaning according to this utility model.

[0016] Among them, 1. Roller body; 2. Liquid inlet hole; 3. Liquid outlet groove; 4. Liquid outlet hole; 5. Long strip protrusion; 6. Annular protrusion; 7. Limiting part. Detailed Implementation

[0017] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0018] It should be noted that when an element is said to be "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is said to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. Conversely, when an element is said to be "directly on" another element, there is no intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0019] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0020] like Figure 1 and Figure 2 As shown, a wafer cleaning inner roller is characterized in that it includes a roller body 1, an inlet hole 2 in the middle, and a plurality of outlet grooves 3 on the outer side of the roller body 1. The inlet hole 2 is provided with an outlet hole 4 that communicates with the outlet grooves 3. The outlet grooves 3 have a rectangular cross-section.

[0021] At this time, a hollow channel is provided in the middle of the roller body 1, which is closed to form the liquid inlet 2. The cross-section of the liquid outlet trough 3 is set as a rectangle, so that the liquid outlet trough 3 has a certain volume. After the sponge brush is set on the outside, the liquid entering the liquid inlet 2 will first enter the liquid outlet trough 3 near the end of the liquid inlet 2 through the liquid outlet 4. Since the liquid outlet trough 3 has a certain volume, the liquid entering the liquid outlet trough 3 needs to flow slowly in the liquid outlet trough 3 first. At the same time, more liquid will flow to the liquid outlet trough 3 at the bottom of the liquid inlet 2. This can reduce the time difference between the liquid and the sponge brush at each liquid outlet trough 3 position, so as to increase the uniformity of water flow in each liquid outlet trough 3. At the same time, since the contact area between the liquid outlet trough 3 and the sponge brush is large, the water permeability of the sponge brush can be improved, and the efficiency of the cleaning roller in the cleaning process can be increased.

[0022] In order to form the liquid outlet groove 3, in this embodiment, the outer side of the roller body 1 is provided with several elongated protrusions 5 distributed along the axial direction, and several annular protrusions 6 surrounding the outer side of the roller body 1. The elongated protrusions 5 and the annular protrusions 6 are alternately distributed to form several liquid outlet grooves 3. In this way,

[0023] The sponge brush is fitted onto the outside of the roller body 1. To ensure better contact between the inside of the sponge brush and the roller body 1, the tops of the elongated protrusion 5 and the annular protrusion 6 are at the same height, and the tops of the elongated protrusion 5 and the annular protrusion 6 are curved surfaces. In this way, the tops of the elongated protrusion 5 and the annular protrusion 6 form a complete arc surface (except for the liquid outlet groove 3). The inside of the sponge brush is also curved. Therefore, after the sponge brush is fitted onto the outside of the roller body 1, the inside of the sponge brush can fit snugly against the roller body 1, thereby preventing the sponge brush from deforming.

[0024] Furthermore, the elongated protrusions 5 and the annular protrusions 6 are arranged perpendicularly. The elongated protrusions 5 and the annular protrusions 6 are distributed at equal intervals, resulting in liquid outlet grooves 3 of the same size. Simultaneously, the perpendicular arrangement of the elongated protrusions 5 and the annular protrusions 6 creates a liquid outlet groove 3 with an overall cubic shape (a cube at the bottom and an arc surface at the top). Specifically, the bottom of the liquid outlet groove 3 is flat, and the entire liquid outlet groove 3 is elongated. Furthermore, after the sponge brush contacts the elongated protrusions 5 and the annular protrusions 6, the adhesion between the sponge brush and the roller body 1 is improved, making it less likely to detach during use.

[0025] In this embodiment, to ensure that the liquid outlet trough 3 has a rectangular cross-section, the elongated protrusion 5 has a triangular cross-section, extending into the roller body 1 at the apex of the triangle. The elongated protrusion 5 is narrower at the bottom and wider at the top. The annular protrusion 6 is staggered with the elongated protrusion 5 to improve its stability. The lower part of the liquid outlet trough 3 is cubic, preventing the liquid from directly contacting the entire sponge brush (though some contact may occur) when flowing into it. The trough 3 must be completely filled first to ensure full contact between the liquid and the corresponding sponge brush, thus improving the uniformity of water flow across different sections of the roller body 1.

[0026] Since the sponge brush is sleeved on the outside of the roller body 1, in order to position the sponge brush, in one embodiment, the end of the roller body 1 is provided with a limiting part 7, which is higher than the top arc surface of the elongated protrusion 5 and the annular protrusion 6. After providing the protruding limiting parts 7 at both ends of the roller body 1, the limiting parts 7 protrude 1-3mm from the top arc surface, specifically 2mm higher in this embodiment. The limiting parts 7 and the roller body 1 are integrally formed, which is more convenient for processing. At the same time, after the sponge brush is sleeved on the outside of the roller body 1, it can form a certain limiting effect, thereby realizing the positioning of the sponge brush and ensuring that the sponge brush is in the middle position on the outside of the roller body 1.

[0027] In another embodiment of this utility model, an assembled cleaning roller is provided, which adopts the above-mentioned wafer cleaning inner roller. In this case, the assembled cleaning roller includes a sponge brush, which is sleeved on the outside of the wafer cleaning inner roller. The sponge brush is located between the limiting portions 7 at both ends of the roller body 1, and the side of the sponge brush abuts against the side of the limiting portion 7.

[0028] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0029] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A wafer cleaning inner roller characterized by, It includes a roller body, with a liquid inlet hole in the middle and several liquid outlet grooves on the outer side of the roller body. The liquid inlet hole has a liquid outlet hole that communicates with the liquid outlet grooves. The cross-section of the liquid outlet grooves is rectangular.

2. The wafer cleaning inner roller of claim 1, wherein, The outer side of the roller body is provided with several elongated protrusions distributed along the axial direction, and several annular protrusions arranged around the outer side of the roller body. The elongated protrusions and annular protrusions are distributed alternately to form several liquid outlet grooves.

3. The wafer cleaning inner roller of claim 2, wherein, The elongated protrusion and the annular protrusion have the same top height, and the top of the elongated protrusion and the annular protrusion are curved surfaces.

4. The wafer cleaning inner roller of claim 2, wherein, The elongated protrusions and the annular protrusions are arranged perpendicularly.

5. The wafer cleaning inner roller of claim 2, wherein, The cross-section of the elongated protrusion is generally triangular, and the elongated protrusion extends into the roller body at the apex of the triangular structure.

6. The wafer cleaning inner roller of claim 1, wherein, The bottom of the liquid outlet tank is flat, and the liquid outlet tank is generally elongated.

7. The wafer cleaning inner roller of claim 1, wherein, The end of the roller body is provided with a limiting part, which is higher than the top arc surface of the elongated protrusion and the annular protrusion.

8. An assembled cleaning roller characterized by, The wafer cleaning inner roller of any one of claims 1-7 is used.

9. The modular cleaning roller of claim 8, wherein, Includes a sponge brush, which is sleeved on the outside of the inner roller of the wafer cleaning system. The sponge brush is located between the limiting parts at both ends of the roller body, and the side of the sponge brush abuts against the side of the limiting part.

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