Fixture for fixing workpiece during ion beam processing

Abstract

The utility model relates to the technical field of clamps during ion beam processing, in particular to a clamp for fixing a workpiece during ion beam processing, which comprises a base and a workpiece body, a positioning pin is arranged in the base, and a first screw hole, a second screw hole, a third screw hole and a limit groove are arranged on the surface of the base. A limiting groove is formed in the base, a workpiece body is tightly attached to the surface of the limiting groove, a groove is formed in one side of the workpiece body, a gasket is tightly attached to the edge of the workpiece body, and a fixing screw penetrates through the middle of the gasket. The three screw holes are formed in the surface of the base with the same circle center in an equal array mode and used in cooperation with the positioning pins, the gasket can press and fasten the edge of the workpiece body, and flexible contact and elastic buffering of the workpiece body are achieved. And the situations that mechanical clamping easily causes deformation of a workpiece main body and vacuum adsorption easily causes displacement in the machining process are avoided.

Description

Technical Field

[0001] This utility model relates to the field of fixture technology for ion beam processing, specifically a fixture for fixing workpieces during ion beam processing. Background Technology

[0002] Ion beam processing is a precision machining technology performed under vacuum conditions. It achieves machining by accelerating and focusing an ion beam generated by an ion source and then projecting it onto the surface of a workpiece. During ion beam processing, fixing the disc-shaped workpiece is a key step to ensure machining accuracy. The fixture used to fix the workpiece during ion beam processing is a fixture used to fix the disc-shaped workpiece during the process, ensuring the stability of the workpiece and preventing damage to the workpiece due to excessive pressure.

[0003] Traditional workpiece fixing methods typically employ mechanical clamping or vacuum adsorption. For thin, disc-shaped workpieces, the concentrated stress from mechanical clamping can easily lead to workpiece deformation or even breakage. Furthermore, uneven clamping force can cause micron-level warping, severely affecting the machining surface accuracy. For thin, disc-shaped workpieces, excessive adsorption force may cause workpiece deformation, while for thicker workpieces, insufficient adsorption force may cause workpiece displacement during processing. Therefore, to address these issues, a workpiece fixing fixture for ion beam processing is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a fixture for fixing workpieces during ion beam processing, so as to solve the problems that mechanical clamping used for workpiece fixing is prone to damage and vacuum adsorption may cause displacement during the process.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A fixture for fixing a workpiece during ion beam processing includes a base and a workpiece body. The base is provided with a positioning pin. The surface of the base is provided with a first screw hole, a second screw hole, a third screw hole, and a limiting groove. The surface of the limiting groove is tightly fitted with the workpiece body. A groove is provided on one side of the workpiece body. A gasket is tightly fitted to the edge of the workpiece body. A fixing screw passes through the middle of the gasket.

[0007] Preferably, the first screw hole, the second screw hole, and the third screw hole are arranged in an equidistant array with the same center on the surface of the base, and the angle between the first screw hole, the second screw hole, and the third screw hole is 120 degrees.

[0008] Preferably, one side of the groove is arc-shaped, and a positioning pin is provided below the groove.

[0009] Preferably, a fixing screw is threaded into the first screw hole, the second screw hole, and the third screw hole, and the washer and the bottom of the screw head of the fixing screw are in close contact.

[0010] Preferably, the locating pin is cylindrical, and the gasket is made of a metal sheet.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] In this invention, a base, a positioning pin, a fixing screw, a washer, a first screw hole, a second screw hole, a third screw hole, a limiting groove, and a workpiece body are provided. The three screw holes are arranged in an equal array with the same center on the surface of the base. They work together with the positioning pin to establish a stable three-point positioning reference. The washer can press and fasten the edge of the workpiece body, achieving flexible contact and elastic buffering of the workpiece body, controlling the contact pressure within the allowable range, and avoiding the situation where mechanical clamping can easily cause deformation of the workpiece body and vacuum adsorption can easily cause displacement during processing. The groove provided on the workpiece body facilitates the use of the positioning pin. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall assembly structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the base structure of this utility model;

[0015] Figure 3 This is a schematic diagram of the workpiece structure of this utility model.

[0016] In the diagram: 1. Base; 2. Locating pin; 3. Fixing screw; 4. Washer; 5. First screw hole; 6. Second screw hole; 7. Third screw hole; 8. Limiting groove; 9. Workpiece body; 10. Groove. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0019] Please see Figure 1-3 This utility model provides a technical solution:

[0020] A fixture for fixing a workpiece during ion beam processing includes a base 1 and a workpiece body 9. The base 1 is provided with a positioning pin 2. The surface of the base 1 is provided with a first screw hole 5, a second screw hole 6, a third screw hole 7, and a limiting groove 8. The surface of the limiting groove 8 is tightly fitted with the workpiece body 9. A groove 10 is provided on one side of the workpiece body 9. A gasket 4 is tightly fitted with the edge of the workpiece body 9. A fixing screw 3 passes through the middle of the gasket 4. The three screw holes are arranged in an equal array on the surface of the base 1 with the same center. They are used in conjunction with the positioning pin 2 to establish a stable three-point and one-pin positioning reference. The gasket 4 can press and fasten the edge of the workpiece body 9 to achieve flexible contact and elastic buffering of the workpiece body 9.

[0021] The first screw hole 5, the second screw hole 6, and the third screw hole 7 are arranged in an equidistant array with the same center on the surface of the base 1. The angle between the first screw hole 5, the second screw hole 6, and the third screw hole 7 is 120 degrees, establishing a stable three-point one-pin positioning reference. One side of the groove 10 is arc-shaped, and a positioning pin 2 is provided below the groove 10 to facilitate the installation of the positioning pin 2. The first screw hole 5, the second screw hole 6, and the third screw hole 7 are all threaded with fixing screws 3. The washer 4 and the bottom of the screw head of the fixing screw 3 are tightly fitted to facilitate the use of the fixing screw 3. The positioning pin 2 is cylindrical, and the washer 4 is made of a metal sheet to facilitate the use of the positioning pin 2 and the washer 4.

[0022] Workflow: When using the workpiece fixing fixture during ion beam processing, first align the workpiece body 9 with the limiting groove 8 on the surface of the base 1 and place it. Then, place the shims 4 sequentially on the surface of the workpiece body 9, ensuring that the holes of the three shims 4 are aligned with the first screw hole 5, the second screw hole 6, and the third screw hole 7. Next, hold the three fixing screws 3 and insert them sequentially through the shims 4, rotating them into the three screw holes. Manually pre-tighten the three fixing screws 3 to an initial torque of 0.3 N·m. Then, use a special press to press the tungsten carbide positioning pin 2 into the pin hole in the base 1, ensuring a fit clearance of less than 5 μm. Then, increase the torque of the three fixing screws 3 in two steps in a cross-shaped sequence to 1.0 N·m, releasing the stress after a 5-minute interval. At this point, the workpiece body 9 is fixed in the base 1 by the shims 4. The base 1 can then be installed on a three-jaw chuck. During ion beam processing, the workpiece body 9 remains stable to ensure processing accuracy. After processing, loosen the fixing screws 3 sequentially and remove them to release the workpiece body 9, completing one use of the workpiece fixing fixture during ion beam processing.

[0023] Contents not described in detail in this specification are existing technologies known to those skilled in the art. Standard parts used in this invention can all be purchased commercially, and irregularly shaped parts can be custom-made according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are already mature technologies. The machinery, parts, and equipment all use conventional models from the prior art, and the circuit connections also employ conventional connection methods from the prior art, which will not be detailed here.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fixture for fixing a workpiece during ion beam processing, comprising a base (1) and a workpiece body (9), characterized in that: The base (1) is provided with a positioning pin (2). The base (1) has a first screw hole (5), a second screw hole (6), a third screw hole (7) and a limiting groove (8) on its surface. The limiting groove (8) is tightly fitted with the workpiece body (9). The workpiece body (9) has a groove (10) on one side. The edge of the workpiece body (9) is tightly fitted with a gasket (4). A fixing screw (3) passes through the middle of the gasket (4).

2. The fixture for holding a workpiece during ion beam processing according to claim 1, wherein: The first screw hole (5), the second screw hole (6) and the third screw hole (7) are arranged in an equal angle array with the same center on the surface of the base (1), and the angle between the first screw hole (5), the second screw hole (6) and the third screw hole (7) is 120 degrees.

3. The fixture for holding a workpiece during ion beam processing according to claim 1, wherein: One side of the groove (10) is arc-shaped, and a positioning pin (2) is provided below the groove (10).

4. The fixture for holding a workpiece during ion beam processing according to claim 1, wherein: The first screw hole (5), the second screw hole (6) and the third screw hole (7) are all threaded with fixing screws (3), and the bottom of the screw head of the washer (4) and the fixing screw (3) are tightly fitted together.

5. The fixture for holding a workpiece during ion beam processing according to claim 1, wherein: The positioning pin (2) is cylindrical, and the gasket (4) is made of a metal sheet.

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