Quartz cover plate feeding device

Abstract

The utility model relates to the technical field of monocrystalline silicon production equipment, and particularly discloses a quartz cover plate feeding device, which comprises a quartz feeding cylinder and a cover plate arranged at the top opening of the quartz feeding cylinder, a molybdenum rod avoiding hole is formed in the center of the outer wall of the cover plate in a penetrating manner, and an outer clamping mechanism comprises an outer cylinder fixedly connected to the lower end face of the cover plate. The opposite ends of the two square rods are fixedly connected with outer clamping plates, through bidirectional elastic clamping of the outer clamping plates of the outer clamping mechanisms and the inner clamping plates of the inner clamping mechanisms, and in combination with the pre-tightening force of springs, the cover plate can still be stably fixed and prevented from falling off when the molybdenum rods vibrate or the feeding cylinder inclines; threaded adjusting structures of the sliding rod and the screw rod can be matched with feeding cylinders with different inner diameters, flexible sealing is achieved through cooperation of the arc-shaped outer clamping plate and the arc-shaped inner clamping plate, pollutant permeation is reduced, a limiting piece coaxially restrains radial movement of the molybdenum rod through a limiting hole and a molybdenum rod avoiding hole, and offset friction is avoided. And the reliability of the feeding process and the equipment universality are effectively improved.

Description

Technical Field

[0001] This utility model relates to the technical field of monocrystalline silicon production equipment, and specifically discloses a quartz cover plate feeding device. Background Technology

[0002] A monocrystalline silicon growth furnace is a crystal pulling device used to produce monocrystalline silicon. However, it is difficult to achieve a silicon content in the quartz crucible close to its capacity through a single feeding. Therefore, when producing silicon rods using a monocrystalline furnace, multiple feedings are typically performed using a quartz feeder to increase the single-machine capacity and reduce production costs. A quartz feeder generally consists of the following components: a quartz feeding cylinder, a quartz flange, a stainless steel flange plate positioned above the quartz feeding cylinder, a molybdenum rod inside the quartz feeding cylinder, a quartz cone connected to the molybdenum rod, and a stainless steel connecting rod connecting the flange plate and the quartz cone.

[0003] Chinese Patent (Patent No.: CN215757724U, disclosing a cover plate and a quartz feeding device) provides a cover plate for covering the feeding port of a quartz feeding cylinder. This prevents airborne contaminants from contaminating the silicon material inside the feeder, thereby improving the electrical performance of silicon wafers made from this silicon material. The cover plate includes multiple cover plate units, facilitating the opening and closing of the feeding port and enabling mass production. Additionally, each cover plate unit has a first clearance groove for avoiding the molybdenum rod, without affecting the design of the molybdenum rod within the quartz feeding cylinder. The groove also restricts the radial movement of the molybdenum rod. Furthermore, a limiting part is located on the side wall of the quartz feeding cylinder to prevent the cover plate from slipping.

[0004] However, in the above solution, directly covering the quartz feeding cylinder with the cover plate can easily cause the cover plate to fall off during the molybdenum rod feeding process or when the quartz feeding cylinder is tilted. This can cause contaminants to fall into the quartz feeding cylinder and contaminate the raw materials. In addition, the bottom of the cover plate has a fixed limiting part, which makes it unsuitable for quartz feeding cylinders of different diameters, resulting in poor versatility. Utility Model Content

[0005] This utility model proposes a quartz cover plate feeding device. Through bidirectional elastic clamping of the outer clamping plate of the outer clamping mechanism and the inner clamping plate of the inner clamping mechanism, the cover plate can still be firmly fixed when the molybdenum rod vibrates or the feeding cylinder tilts, preventing it from falling off and reducing the infiltration of contaminants. The threaded adjustment structure of the slide rod and the screw rod can be adapted to feeding cylinders with different inner diameters, effectively improving the reliability of the feeding process and the versatility of the equipment.

[0006] This utility model is implemented as follows: a quartz cover plate feeding device, comprising:

[0007] A quartz feeding cylinder and a cover plate disposed at the top opening of the quartz feeding cylinder, wherein a molybdenum rod clearance hole is provided through the center of the outer wall of the cover plate;

[0008] An external clamping mechanism includes an outer cylinder fixedly connected to the lower end face of a cover plate. Two symmetrically arranged square rods are slidably connected through the outer wall of the outer cylinder, and an outer clamping plate is fixedly connected to one end of each of the two square rods.

[0009] The inner clamping mechanism includes two sliding grooves that extend through the upper surface of the cover plate on the left and right sides. Each of the two sliding grooves is slidably connected to a sliding rod. Each of the two sliding rods is fixedly connected to an L-shaped plate at its bottom end. Each of the two L-shaped plates is fixedly connected to an inner clamping plate at its bottom end.

[0010] A molybdenum rod limiting assembly includes a limiting member located directly above the cover plate. The limiting member has a "door" shaped structure with both ends extending outwards, and a limiting hole is formed through the center of the upper end face of the limiting member.

[0011] As a preferred embodiment of the quartz cover plate feeding device of this utility model, the inner clamping mechanism further includes upright plates fixedly connected to the left and right sides of the upper surface of the cover plate, and threaded screws are threaded through the outer walls of the two upright plates. End blocks are fixedly connected to the top ends of the two sliding rods, and the opposite ends of the two screws are rotatably connected to the two end blocks respectively.

[0012] As a preferred embodiment of the quartz cover plate feeding device of this utility model, the molybdenum rod limiting assembly further includes two studs that are respectively fixedly connected to the top of the two upright plates. Positioning holes are provided on both sides of the limiting member. The limiting member is sleeved on the outer wall of the two studs through the two positioning holes. Locking nuts are threadedly connected to the upper part of the outer wall of the two studs.

[0013] In a preferred embodiment of the quartz cover plate feeding device of this utility model, a pull ring is fixedly connected to the end of the square rod away from the outer clamping plate, and a spring located between the pull ring and the outer cylinder is sleeved on the outer wall of the square rod.

[0014] As a preferred embodiment of the quartz cover plate feeding device of this utility model, both the outer clamping plate and the inner clamping plate are arc-shaped structures.

[0015] In a preferred embodiment of the quartz cover plate feeding device of this utility model, the central axes of the molybdenum rod clearance hole and the limiting hole coincide.

[0016] The beneficial effects of this utility model are:

[0017] This device uses a bidirectional elastic clamping mechanism with an outer clamping plate and an inner clamping plate, combined with the preload of a spring, to firmly fix the cover plate even when the molybdenum rod vibrates or the feeding cylinder tilts, preventing it from falling off. The threaded adjustment structure of the slide rod and screw rod can be adapted to feeding cylinders with different inner diameters. The arc-shaped outer and inner clamping plates achieve flexible sealing, reducing the infiltration of contaminants. The limiting component, through the limiting hole and the molybdenum rod clearance hole, constrains the radial movement of the molybdenum rod, avoiding offset friction. This effectively improves the reliability of the feeding process and the versatility of the equipment. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0019] Figure 1 This is a front sectional view of the overall structure of this utility model;

[0020] Figure 2 This is a partial top view of the structure of this utility model;

[0021] Figure 3 This is a three-dimensional structural diagram of the limiting component of this utility model;

[0022] Figure 4 This is a three-dimensional structural diagram of the outer clamping plate of this utility model;

[0023] Figure 5 This is a front view of the overall external structure of this utility model.

[0024] The markings in the diagram are: 1. Cover plate; 2. Outer cylinder; 3. Square rod; 4. Outer clamping plate; 5. Slide groove; 6. Slide rod; 7. L-shaped plate; 8. Inner clamping plate; 9. Vertical plate; 10. Screw; 11. End block; 12. Limiting component; 13. Limiting hole; 14. Molybdenum rod clearance hole; 15. Stud; 16. Positioning hole; 17. Locking nut; 18. Pull ring; 19. Spring. Detailed Implementation

[0025] The present invention will be further described below with reference to the accompanying drawings and specific embodiments to aid in understanding its content. Unless otherwise specified, the methods used in this invention are conventional methods; the raw materials and apparatus used, unless otherwise specified, are conventional commercially available products.

[0026] Please see Figure 1-5 A quartz cover plate feeding device, comprising:

[0027] A quartz feeding cylinder and a cover plate 1 located at the top opening of the quartz feeding cylinder, wherein a molybdenum rod clearance hole 14 is provided through the center of the outer wall of the cover plate 1;

[0028] The outer clamping mechanism includes an outer cylinder 2 fixedly connected to the lower end face of the cover plate 1. Two symmetrically arranged square rods 3 are slidably connected through the outer wall of the outer cylinder 2. An outer clamping plate 4 is fixedly connected to one end of each of the two square rods 3.

[0029] The inner clamping mechanism includes two sliding grooves 5 that pass through the left and right sides of the upper end face of the cover plate 1. Sliding rods 6 are slidably connected inside the two sliding grooves 5. L-shaped plates 7 are fixedly connected to the bottom ends of the two sliding rods 6. Inner clamping plates 8 are fixedly connected to the bottom ends of the two L-shaped plates 7.

[0030] The molybdenum rod limiting assembly includes a limiting member 12 located directly above the cover plate 1. The limiting member 12 has a "door" shaped structure with both ends extending outwards. A limiting hole 13 is provided through the center of the upper end face of the limiting member 12.

[0031] In this embodiment: the coaxial design of the molybdenum rod clearance hole 14 and the limiting hole 13 of the cover plate 1 ensures that the molybdenum rod is constrained by the radial constraint of the limiting member 12 when it passes vertically, reducing vibration and deviation; when the cover plate 1 is closed at the top opening of the quartz feeding cylinder, the two square rods 3 are pulled outward simultaneously. At this time, the two springs 19 are in a stretched state. After releasing the hand, the spring force of the springs 19 pushes the square rods 3 to drive the outer clamping plate 4 to clamp the outer wall of the quartz feeding cylinder. The inner clamping mechanism drives the slide rod 6 to move along the slide groove 5 through the rotating screw 10, thereby driving the L-shaped plate 7 and the inner clamping plate. The inner wall of the feeding cylinder is clamped inward, forming a two-way elastic clamping mechanism. This ensures that the cover plate 1 remains firmly fixed even when the molybdenum rod vibrates or the feeding cylinder tilts, preventing it from falling off. Both the outer clamping plate 4 and the inner clamping plate 8 are position-adjustable, thus accommodating quartz feeding cylinders of different diameters and offering strong versatility. The limiting component 12 is fixed to the top of the vertical plate 9 by the stud 15 and the locking nut 17. The lateral displacement of the molybdenum rod is limited by the cooperation of the limiting hole 13 and the molybdenum rod clearance hole 14. The pull ring 18, in conjunction with the spring 19, enables the outer clamping plate 4 to self-adaptively clamp, further enhancing versatility.

[0032] As a technical optimization of this utility model, the inner clamping mechanism also includes upright plates 9 fixedly connected to the left and right sides of the upper end face of the cover plate 1. The outer walls of the two upright plates 9 are threaded with screws 10, and the top ends of the two slide rods 6 are fixedly connected with end blocks 11. The opposite ends of the two screws 10 are rotatably connected to the two end blocks 11 respectively.

[0033] In this embodiment: the upright plate 9 is fixed to both sides of the cover plate 1, the screw 10 is threaded to the upright plate 9 and pushes the end block 11 to drive the slide rod 6 to slide in the slide groove 5, thereby adjusting the clamping position of the L-shaped plate 7 and the inner clamping plate 8, which can be adapted to quartz feeding cylinders with different inner diameters.

[0034] As a technical optimization of this utility model, the molybdenum rod limiting assembly also includes two studs 15 that are respectively fixedly connected to the top of the two upright plates 9. Positioning holes 16 are provided on both sides of the limiting member 12. The limiting member 12 is sleeved on the outer wall of the two studs 15 through the two positioning holes 16. Locking nuts 17 are threadedly connected to the upper part of the outer wall of the two studs 15.

[0035] In this embodiment, the limiting member 12 is sleeved on the stud 15 at the top of the upright plate 9 through the positioning holes 16 at both sides, and is fixed by the locking nut 17, forming a detachable molybdenum rod limiting structure, which is more flexible and convenient to use.

[0036] As a technical optimization of this utility model, a pull ring 18 is fixedly connected to the end of the square rod 3 away from the outer clamping plate 4, and a spring 19 located between the pull ring 18 and the outer cylinder 2 is sleeved on the outer wall of the square rod 3.

[0037] In this embodiment: when the cover plate 1 is placed over the top opening of the quartz feeding cylinder, the two square rods 3 are pulled outwards simultaneously. At this time, the two springs 19 are in a stretched state. After releasing the hand, the springs 19 push the square rods 3 to drive the outer clamping plate 4 to clamp the outer wall of the quartz feeding cylinder.

[0038] As a technical optimization of this utility model, both the outer clamping plate 4 and the inner clamping plate 8 are arc-shaped structures.

[0039] In this embodiment, both the outer clamping plate 4 and the inner clamping plate 8 are arc-shaped structures, which better match the inner and outer walls of the quartz feeding cylinder and improve the clamping effect.

[0040] As a technical optimization of this utility model, the central axes of the molybdenum rod clearance hole 14 and the limiting hole 13 coincide.

[0041] In this embodiment: the central axis of the molybdenum rod clearance hole 14 and the limiting hole 13 are strictly coincident, ensuring that the molybdenum rod moves only axially when it penetrates the cover plate 1 and the limiting member 12 perpendicularly; the coaxial design of the two holes forms a double guiding structure, which restricts the radial displacement of the molybdenum rod during the feeding process.

[0042] The working principle and usage process of this utility model are as follows: When using the cover plate 1, when it is placed on the top opening of the quartz feeding cylinder, the two square rods 3 are pulled outwards simultaneously. At this time, the two springs 19 are in a stretched state. After releasing the hand, the springs 19 push the square rods 3 to drive the outer clamping plate 4 to clamp the outer wall of the quartz feeding cylinder. The inner clamping mechanism drives the slide rod 6 to move along the slide groove 5 through the rotating screw 10, which drives the L-shaped plate 7 and the inner clamping plate 8 to clamp the inner wall of the feeding cylinder inwards, forming a two-way elastic clamping between the inside and outside. When the molybdenum rod vibrates or the feeding cylinder tilts, the cover plate 1 can still be firmly fixed to prevent it from falling off. The limiting member 12 is fixed to the top of the upright plate 9 through the stud 15 and the locking nut 17. The lateral displacement of the molybdenum rod is limited by the cooperation of the limiting hole 13 and the molybdenum rod clearance hole 14.

[0043] In the description of this utility model, it should be understood that the terms "left", "right", "up", "down", "top", "bottom", "front", "back", "inner", "outer", "back", "middle", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] However, the above description is only a specific embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any substitution of equivalent components or equivalent changes and modifications made in accordance with the scope of protection of this utility model should still fall within the scope of the claims of this utility model.

Claims

1. A quartz cover plate charging device characterized by: include: A quartz feeding cylinder and a cover plate (1) provided at the top opening of the quartz feeding cylinder, wherein a molybdenum rod clearance hole (14) is provided through the center of the outer wall of the cover plate (1). The outer clamping mechanism includes an outer cylinder (2) fixedly connected to the lower end face of the cover plate (1). The outer wall of the outer cylinder (2) is slidably connected to two symmetrically arranged square rods (3). An outer clamping plate (4) is fixedly connected to one end of each of the two square rods (3). The inner clamping mechanism includes two sliding grooves (5) that pass through the left and right sides of the upper end face of the cover plate (1). The two sliding grooves (5) are slidably connected to the inside of each sliding rod (6). The bottom ends of the two sliding rods (6) are fixedly connected to L-shaped plates (7). The bottom ends of the two L-shaped plates (7) are fixedly connected to inner clamping plates (8). The molybdenum rod limiting assembly includes a limiting member (12) located directly above the cover plate (1). The limiting member (12) has a "door" shaped structure and extends outward at both ends. A limiting hole (13) is opened through the center of the upper end face of the limiting member (12).

2. A quartz cover plate loading apparatus according to claim 1, characterized by: The inner clamping mechanism also includes upright plates (9) fixedly connected to the left and right sides of the upper end face of the cover plate (1). The outer walls of the two upright plates (9) are threaded with screws (10). The top ends of the two slide rods (6) are fixedly connected with end blocks (11). The opposite ends of the two screws (10) are rotatably connected to the two end blocks (11) respectively.

3. A quartz cover plate loading apparatus according to claim 1, wherein: The molybdenum rod limiting assembly also includes two studs (15) that are respectively fixedly connected to the top of the two upright plates (9). The limiting member (12) has positioning holes (16) on both sides of the expansion. The limiting member (12) is sleeved on the outer wall of the two studs (15) through the two positioning holes (16). Locking nuts (17) are threaded on the upper part of the outer wall of the two studs (15).

4. A quartz cover plate loading apparatus according to claim 1, wherein: A pull ring (18) is fixedly connected to one end of the square rod (3) away from the outer clamping plate (4), and a spring (19) is sleeved on the outer wall of the square rod (3) between the pull ring (18) and the outer cylinder (2).

5. A quartz cover plate loading apparatus according to claim 1, wherein: Both the outer clamping plate (4) and the inner clamping plate (8) are arc-shaped structures.

6. A quartz cover plate loading apparatus according to claim 1, wherein: The central axes of the molybdenum rod clearance hole (14) and the limiting hole (13) coincide.

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