The invention discloses a vacuum insulator
surface charge three-dimensional measurement apparatus, belonging to the insulation measurement and charge measurement technical field under the vacuum environment. The measurement apparatus is composed of an insulator to be measured, a test
electrode, a static probe, a probe support, a probe
radial motion mechanism, a probe
rotation control mechanism, a probe rotary
motion control mechanism, a stepping motor and a probe
motion control panel, wherein a
high voltage electrode is fixed to the top panel of a vacuum test cavity, a ground
electrode is fixed to the central section of a probe rotary table, the insulator to be measured is placed between a
high voltage electrode and a ground electrode, and the probe rotary table is supported on the bottom panel of the vacuum test cavity. The invention provides the vacuum insulator
surface charge three-dimensional measurement apparatus, which can realize insulator
surface charge three-dimensional measurement in all radial directions and all angles through the radial control mechanism and the rotary control mechanism, meanwhile guarantee that a probe is far from the surface of the insulator to be measured in compression or not measuring charges, and possess higher charge resolution and spatial resolution.