Air floatation cushion and air floatation guide rail

Abstract

The embodiment of the utility model provides an air floating cushion and an air floating guide rail, the air floating cushion comprises an air floating plate, a throttler and a cover plate, the air floating plate is provided with a mounting hole, and the mounting hole is used for mounting the throttler; a plurality of microgrooves and air supply grooves are formed in the periphery of the throttler, one ends of the microgrooves communicate with the air supply grooves, and the other ends of the microgrooves extend to the bottom face of the throttler; the microgroove and the wall of the mounting hole form a throttling hole; and the cover plate is a mounting base body of the air floating plate and the throttler. According to the air floating cushion, the mounting hole is formed in the air floating plate to mount the throttler, the microgroove is formed in the throttler, and the throttling hole is defined by the microgroove and the wall of the mounting hole, so that the problem that the throttling hole with relatively long length and relatively small diameter is difficult to machine can be solved, a long micropore can be realized, and the bearing capacity and rigidity of the air floating cushion can be improved.

Description

Technical Field

[0001] This application belongs to the field of air-bearing mats, specifically relating to an air-bearing mat and an air-bearing guide rail. Background Technology

[0002] Gas lubrication technology is an advanced technology suitable for ultra-high-speed or ultra-high-precision equipment, and hydrostatic air bearing pads and air bearing guides are important components for achieving high precision. Hydrostatic air bearing pads and air bearing guides use externally introduced high-pressure gas, which is introduced into the air bearing working surface through a throttling structure to achieve the purpose of load bearing. The throttling structure mainly includes orifice throttling, toroidal throttling, slit throttling, and porous throttling. With the increasingly widespread application and continuous development of hydrostatic air bearing technology, increasingly higher requirements are being placed on its performance.

[0003] In recent years, a micro-orifice throttling bearing structure has emerged. While the diameter of the throttling orifice in a typical small-orifice throttling bearing is 0.1 mm or larger, the diameter in a micro-orifice throttling bearing is 0.1 mm or smaller. Compared to small-orifice throttling, micro-orifice bearings have an increased number of throttling orifices, resulting in higher load-bearing capacity and stiffness. They also significantly reduce the air hammer effect present in traditional hydrostatic air bearings and air-bearing guides, enhancing stability. However, the continuous reduction in orifice diameter poses a significant challenge to the micro-orifice machining process. Drilling processes are typically limited by drill bit diameter and effective length; slender drill bits have poor performance and are prone to breakage, making it difficult to machine such micro-orifices. Utility Model Content

[0004] This application provides an air-floating pad and an air-floating guide rail. The air-floating pad has mounting holes on the air-floating plate to install a throttle. The throttle has microgrooves, and the microgrooves and the wall of the mounting holes form a throttle hole. This solves the problem of difficult processing of long and small diameter throttle holes, making long micro-holes possible, which is beneficial to improving the load-bearing capacity and rigidity of the air-floating pad.

[0005] In a first aspect, embodiments of this application provide an air-floating pad, the air-floating pad comprising:

[0006] An air flotation plate, wherein the air flotation plate is provided with mounting holes for mounting a throttle;

[0007] The throttle has multiple micro-grooves and an air supply groove on its outer periphery. One end of each micro-groove is connected to the air supply groove, and the other end of each micro-groove extends to the bottom surface of the throttle. The micro-groove and the wall of the mounting hole form a throttle hole.

[0008] The cover plate serves as the mounting base for the air flotation plate and the throttle.

[0009] In one possible example, there is one air supply slot, which is an annular slot along the circumferential direction, and the air supply slot is connected to each of the micro-slots; or...

[0010] There are multiple air supply slots, each of which is a straight slot along the busbar direction, and each air supply slot is connected to a micro slot.

[0011] In one possible example, the throttle has a central blind hole and a radial hole in the middle;

[0012] The central blind hole and the annular groove are connected through the radial hole.

[0013] In one possible example, the throttle is cylindrical and is interference-fitted with the mounting hole; or...

[0014] The throttle is a conical truncated plate type, which mates with the conical surface of the mounting hole and is pressed together by the cover plate.

[0015] In one possible example, there is one mounting hole, which is located at the center of the air flotation plate;

[0016] The mounting holes are multiple, and the multiple mounting holes are evenly distributed circumferentially or in a linear array on the air flotation plate.

[0017] In one possible example, the microgroove is a straight groove extending along the generatrix direction or a spiral groove extending along the spiral direction, and the cross-sectional shape of the microgroove is rectangular, triangular or semi-circular.

[0018] In one possible example, the cross-sectional dimensions of the air supply trough are larger than those of the micro-groove.

[0019] In one possible example, the cover plate is provided with an air supply channel, which is a shallow groove. The shallow groove has an axial blind hole and a radial hole communicating with the axial blind hole. The radial hole is connected to an external air supply device.

[0020] In one possible example, there are multiple throttles, and the air float plate has an annular groove for installing a sealing ring. The annular groove surrounds the air supply groove of each throttle to form a sealed air passage.

[0021] Secondly, this application provides an air-bearing guide rail, which includes the aforementioned air-bearing plate and throttle, and the air-bearing guide rail is T-shaped, dovetail-shaped, or closed.

[0022] As can be seen, in this embodiment of the application, the air float is equipped with a throttle device by setting an installation hole on the air float plate. The throttle device has a micro groove, and the micro groove and the wall of the installation hole form a throttle hole. This can solve the problem of difficult processing of throttle holes with long length and small diameter, and make long micro holes possible, which is beneficial to improving the load-bearing capacity and rigidity of the air float. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is an exploded view of an air-bearing cushion provided in an embodiment of this application;

[0025] Figure 2 This is a schematic diagram of an air-bearing cushion provided in an embodiment of this application;

[0026] Figure 3 This is a cross-sectional schematic diagram of an air-bearing cushion provided in an embodiment of this application;

[0027] Figure 4 This is a cross-sectional schematic diagram of another air-floating cushion provided in an embodiment of this application;

[0028] Figure 5 This is a schematic diagram of a throttle provided in an embodiment of this application;

[0029] Figure 6 This is a schematic diagram of another throttle provided in an embodiment of this application;

[0030] Figure 7 This is a cross-sectional schematic diagram of a microgroove provided in an embodiment of this application;

[0031] Figure 8 This is a cross-sectional schematic diagram of another microgroove provided in an embodiment of this application;

[0032] Figure 9 This is a cross-sectional schematic diagram of another microgroove provided in an embodiment of this application;

[0033] Figure 10 This is a schematic diagram of the central blind hole and radial holes of a throttle provided in an embodiment of this application;

[0034] Figure 11 This is a schematic diagram of the central blind hole and radial hole of another throttle provided in an embodiment of this application;

[0035] Figure 12This is a cross-sectional schematic diagram of the air float of a cylindrical throttle provided in an embodiment of this application;

[0036] Figure 13 This is a schematic diagram of a cylindrical throttle provided in an embodiment of this application;

[0037] Figure 14 This is a cross-sectional schematic diagram of the air float of a conical throttle provided in an embodiment of this application;

[0038] Figure 15 This is a schematic diagram of a conical throttle provided in an embodiment of this application;

[0039] Figure 16 This is a schematic diagram of a T-shaped air-bearing guide rail provided in an embodiment of this application;

[0040] Figure 17 This is a schematic diagram of another T-shaped air-bearing guide rail provided in an embodiment of this application;

[0041] Figure 18 This is a schematic diagram of a dovetail-shaped air-bearing guide rail provided in an embodiment of this application;

[0042] Figure 19 This is a schematic diagram of a closed air-bearing guide rail provided in an embodiment of this application.

[0043] The following explains the reference numerals on the accompanying drawings:

[0044] Air flotation pad 1, cover plate 10, air flotation plate 20, throttle 30, air supply channel 40, air supply groove 31, micro groove 32, central blind hole 33, radial hole 34, mounting hole 21, air flotation guide rail 2. Detailed Implementation

[0045] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.

[0046] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0047] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0048] In the embodiments of this application, "and / or" describes the relationship between associated objects, indicating that three relationships can exist. For example, A and / or B can represent the following three situations: A exists alone; A and B exist simultaneously; B exists alone. Among them, A and B can be singular or plural.

[0049] In this embodiment, the symbol " / " can indicate that the preceding and following objects are in an "or" relationship. Alternatively, the symbol " / " can also represent a division sign, i.e., performing a division operation. For example, A / B can mean A divided by B.

[0050] In the embodiments of this application, "at least one item" or its similar expression refers to any combination of these items, including any combination of a single item or a plurality of items. "One or more" means one or more, while "multiple" means two or more. For example, "at least one item" of a, b, or c can represent the following seven cases: a, b, c; a and b; a and c; b and c; a, b, and c. Each of a, b, and c can be an element or a set containing one or more elements.

[0051] In the embodiments of this application, "equal to" can be used with "greater than" and is applicable to technical solutions used when "greater than" is used; it can also be used with "less than" and is applicable to technical solutions used when "less than" is used. When "equal to" is used with "greater than", it is not used with "less than"; when "equal to" is used with "less than", it is not used with "greater than".

[0052] To better understand the solutions of the embodiments of this application, the background that may be involved in the embodiments of this application will be introduced below.

[0053] The decreasing diameter of the throttling orifice in the bearing structure with micro-orifice throttling poses a significant challenge to the micro-orifice machining process. Drilling processes are typically limited by the drill bit diameter and effective length. Long and slender drill bits have poor performance and are prone to breakage, making it difficult to machine such micro-orifices. To solve the micro-orifice machining problem, this application provides an air-floating pad that enables the realization of long micro-orifices, which is beneficial to improving the load-bearing capacity and rigidity of the air-floating pad.

[0054] This application provides an air-floating pad 1, please refer to... Figures 1-15 , Figure 1 This is an exploded view of an air-bearing cushion provided in an embodiment of this application; Figure 2 This is a schematic diagram of an air-bearing cushion provided in an embodiment of this application; Figure 3 This is a cross-sectional schematic diagram of an air-bearing cushion provided in an embodiment of this application; Figure 4 This is a cross-sectional schematic diagram of another air-floating cushion provided in an embodiment of this application; Figure 5 This is a schematic diagram of a throttle provided in an embodiment of this application; Figure 6 This is a schematic diagram of another throttle provided in an embodiment of this application; Figure 7 This is a cross-sectional schematic diagram of a microgroove provided in an embodiment of this application; Figure 8 This is a cross-sectional schematic diagram of another microgroove provided in an embodiment of this application; Figure 9 This is a cross-sectional schematic diagram of another microgroove provided in an embodiment of this application; Figure 10 This is a schematic diagram of the central blind hole and radial holes of a throttle provided in an embodiment of this application; Figure 11 This is a schematic diagram of the central blind hole and radial hole of another throttle provided in an embodiment of this application; Figure 12 This is a cross-sectional schematic diagram of the air float of a cylindrical throttle provided in an embodiment of this application; Figure 13 This is a schematic diagram of a cylindrical throttle provided in an embodiment of this application; Figure 14 This is a cross-sectional schematic diagram of the air float of a conical throttle provided in an embodiment of this application; Figure 15 This is a schematic diagram of a conical throttle provided in an embodiment of this application.

[0055] The air flotation pad 1 provided in this application includes: a cover plate 10, an air flotation plate 20, and a throttle 30. The air flotation plate 20 has a mounting hole 21 for mounting the throttle 30. The throttle 30 has a plurality of micro grooves 32 and an air supply groove 31 on its outer periphery. One end of the micro groove 32 is connected to the air supply groove 31, and the other end of the micro groove 32 extends to the bottom surface of the throttle 30. The micro groove 32 and the wall of the mounting hole 21 form a throttle hole 1004. The cover plate 10 is the mounting base for the air flotation plate 20 and the throttle 30.

[0056] In this case, a single mounting hole 21 on the air flotation plate 20 can be used to install a throttle 30, and one or more mounting holes 21 can be opened on the air flotation plate 20 for installing one or more throttles 30.

[0057] The individual throttle 30 includes multiple micro-slots 32 and air supply slots 31, and the number of micro-slots 32 and the number of air supply slots 31 may be the same or different.

[0058] Among them, the cross-sectional dimensions of the air supply groove 31 are different from those of the micro groove 32. The cross-sectional dimensions of the air supply groove 31 are much larger than those of the micro groove 32. The micro groove 32 has a throttling effect because of its relatively small size.

[0059] The shape of the air flotation plate 20 can be cylindrical, rectangular, trapezoidal or other suitable shape, and is not limited here.

[0060] In one possible example, there is one air supply groove 31, which is an annular groove along the circumferential direction and is connected to each of the micro-grooves 32; or, there are multiple air supply grooves 31, which are straight grooves along the generatrix direction and are connected to one micro-grooves 32.

[0061] Among them, the micro-channel 32 and the air supply channel 31 can be combined in the following four ways:

[0062] The first type has a straight groove for the air supply groove 31 and a straight groove for the micro groove 32;

[0063] The second type has a straight groove for the air supply groove 31 and a spiral groove for the micro-groove 32.

[0064] The third type is an annular groove for the air supply groove 31 and a straight groove for the micro groove 32;

[0065] The fourth type is an annular groove for the air supply groove 31 and a spiral groove for the micro-groove 32.

[0066] When there are multiple air supply slots 31, the number of air supply slots 31 is the same as the number of micro slots 32, and the air supply slots 31 and micro slots 32 correspond one-to-one.

[0067] For example, such as Figure 5 As shown, Figure 5 The throttle 30 shown includes micro-slots 32 and air supply slots 31. The micro-slots 32 are straight slots extending along the busbar direction, and the air supply slots 31 are straight slots. The number of micro-slots 32 and air supply slots 31 are equal, and the micro-slots 32 and air supply slots 31 are connected one by one.

[0068] For example, such as Figure 6 As shown, Figure 6The throttle 30 shown includes micro-grooves 32 and air supply grooves 31. The micro-grooves 32 are spiral grooves extending in a spiral direction, and the air supply grooves 31 are straight grooves. The number of micro-grooves 32 and air supply grooves 31 are equal, and the micro-grooves 32 and air supply grooves 31 are connected one by one.

[0069] When there is only one air supply groove 31, the air supply groove 31 is an annular groove along the circumference. The number of air supply grooves 31 is different from the number of micro grooves 32. One air supply groove 31 connects all the micro grooves 32.

[0070] For example, such as Figure 10 As shown, Figure 10 The throttle 30 shown includes micro-slots 32 and air supply slots 31. The micro-slots 32 are straight slots extending along the generatrix direction, and the air supply slots 31 are annular slots along the circumferential direction. There are multiple micro-slots 32 and one air supply slot 31. One air supply slot 31 connects all the micro-slots 32.

[0071] For example, such as Figure 11 As shown, Figure 11 The throttle 30 shown includes micro-grooves 32 and air supply grooves 31. The micro-grooves 32 are spiral grooves extending in a spiral direction, and the air supply grooves 31 are annular grooves in a circumferential direction. There are multiple micro-grooves 32 and one air supply groove 31. One air supply groove 31 connects all the micro-grooves 32.

[0072] in, Figure 3 The upper bearing block 1001, the lower bearing block 1002, and the air flotation surface 1003 are also shown, as well as an enlarged view of part B.

[0073] In one possible example, the throttle 30 has a central blind hole 33 and a radial hole 34 in the middle; the central blind hole 33 is connected to the annular groove through the radial hole 34.

[0074] Among them, such as Figure 10 As shown, Figure 10 A throttle 30 configuration is shown. In addition to micro-grooves 32 and air supply grooves 31, the throttle 30 also includes a central blind hole 33 and a radial hole 34. The central blind hole 33 is located at the center of the throttle 30, and the radial hole 34 is located on the side of the throttle 30. One end of the central blind hole 33 extends to the top of the throttle 30, and the other end of the central blind hole 33 connects to the radial hole 34. In this configuration, the air supply groove 31 is an annular groove, the micro-grooves 32 are straight grooves, and both ends of the radial hole 34 are connected to the air supply groove 31.

[0075] Among them, such as Figure 11 As shown, Figure 11Another form of throttle 30 is shown. In addition to the micro-groove 32 and the air supply groove 31, the throttle 30 also includes a central blind hole 33 and a radial hole 34. The central blind hole 33 is opened in the center of the throttle 30, and the radial hole 34 is opened on the side of the throttle 30. One end of the central blind hole 33 extends to the top of the throttle 30, and the other end of the central blind hole 33 is connected to the radial hole 34. In this case, the air supply groove 31 is an annular groove, the micro-groove 32 is a spiral groove, and both ends of the radial hole 34 are connected to the air supply groove 31.

[0076] In one possible example, the cross-sectional shape of the microgroove 32 is rectangular, triangular, or semi-circular, and the microgroove 32 is a straight groove extending along the generatrix direction, or the microgroove 32 is a spiral groove extending along the spiral direction.

[0077] When the micro-groove 32 is a spiral groove, the air outlet direction of the throttling orifice is not perpendicular to the working surface, so the airflow distribution on the working surface can be flexibly changed.

[0078] For an example, please refer to Figure 7 , Figure 7 The throttle 30 shown includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31, and the cross-sectional shape of the micro-groove 32 is rectangular.

[0079] For an example, please refer to Figure 8 , Figure 8 The throttle 30 shown includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31, and the cross-sectional shape of the micro-groove 32 is triangular.

[0080] For an example, please refer to Figure 9 , Figure 9 The throttle 30 shown includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31, and the cross-sectional shape of the micro-groove 32 is semi-circular.

[0081] For example, such as Figure 5 As shown, Figure 5 The throttle 30 shown includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31. The micro-groove 32 is a straight groove extending along the generatrix direction, and the air supply groove 31 is a straight groove.

[0082] For example, such as Figure 6 As shown, Figure 6 The throttle 30 shown includes a micro-groove 32 and an air supply groove 31. One end of the micro-groove 32 is connected to the air supply groove 31. The micro-groove 32 is a spiral groove extending in a spiral direction, and the air supply groove 31 is a straight groove.

[0083] In one possible example, the throttle 30 is cylindrical and is interference-fitted with the mounting hole 21; or...

[0084] The throttle 30 is a conical truncated plate type, which engages with the conical surface of the mounting hole 21 and passes through the cover plate 10.

[0085] Please see Figure 12 , Figure 12 A schematic diagram of the cross-section AA of the cylindrical throttle is shown, and please refer to [link / reference]. Figure 13 , Figure 13 The cover plate 10, the throttle 30, the air supply groove 31 and the micro groove 32 are shown, wherein the throttle 30 is cylindrical.

[0086] Please see Figure 14 , Figure 14 A schematic diagram of the cross-section AA of the conical throttle is shown, and please refer to [link / reference]. Figure 15 , Figure 15 The cover plate 10, the throttle 30, the air supply groove 31 and the micro groove 32 are shown, wherein the throttle 30 is conical.

[0087] In one possible example, there is one mounting hole 21, which is located at the center of the air flotation plate 20;

[0088] There are multiple mounting holes 21, which are evenly distributed circumferentially or in a linear array on the air flotation plate 20.

[0089] In one possible example, the cover plate 10 is provided with an air supply channel 40, which is a shallow groove. The shallow groove has an axial blind hole and a radial hole 34 communicating with the axial blind hole. The radial hole 34 is connected to an external air supply device.

[0090] In one possible example, there are multiple throttles 30, and the air flotation plate 20 has an annular groove for installing a sealing ring. The annular groove surrounds the air supply groove 31 of each throttle 30 to form a sealed air passage.

[0091] As can be seen, the air float 1 is equipped with mounting holes 21 on the air float plate 20 to install the throttle 30. The throttle 30 has microgrooves 32. The microgrooves 32 and the wall of the mounting holes 21 form a throttle hole. This can solve the problem of difficult processing of throttle holes with long length and small diameter, and make long micro-holes possible. This is beneficial to improving the load-bearing capacity and rigidity of the air float.

[0092] This application provides an air-bearing guide rail 2; please refer to [link / reference]. Figures 16-19 , Figure 16 This is a schematic diagram of a T-shaped air-bearing guide rail provided in an embodiment of this application; Figure 17 This is a schematic diagram of another T-shaped air-bearing guide rail provided in an embodiment of this application; Figure 18 This is a schematic diagram of a dovetail-shaped air-bearing guide rail provided in an embodiment of this application; Figure 19 This is a schematic diagram of a closed air-bearing guide rail provided in an embodiment of this application.

[0093] The air flotation guide rail 2 provided in this application includes multiple aforementioned air flotation plates and throttles 30, and the air flotation guide rail 2 is T-shaped, dovetail-shaped, or closed.

[0094] Each air-bearing guide rail 2 includes multiple air-bearing plates 20, and each air-bearing plate includes one or more mounting holes 21 for mounting a throttle 30.

[0095] The shapes of the multiple air-floating plates 20 on a single air-floating guide rail 2 may be the same or different, which is not limited here.

[0096] For an example, please refer to Figure 16 and Figure 17 , Figure 16 and Figure 17 The air flotation guide rail 2 shown is T-shaped. The T-shaped air flotation guide rail includes five air flotation plates, all of which are rectangular. Specifically, one air flotation plate 20 is set at the top, one air flotation plate 20 is set on each of the left and right sides and connected to the top air flotation plate, and one air flotation plate 20 is set on each of the left and right sides and connected to the side air flotation plates. Each air flotation plate 20 has a mounting hole 21, and the mounting hole 21 can be used to install the throttle 30.

[0097] For an example, please refer to Figure 18 , Figure 18 The air flotation guide 2 shown is dovetail-shaped. The dovetail-shaped air flotation guide 2 includes three air flotation plates 20. Specifically, a rectangular air flotation plate is set at the top, and a trapezoidal air flotation plate is set on each of the left and right sides, which is connected to the upper air flotation plate.

[0098] For an example, please refer to Figure 19 , Figure 19 The air flotation guide 2 shown is a closed type. The closed air flotation guide 2 includes four air flotation plates 20. Specifically, a rectangular air flotation plate is set at the top, and a rectangular air flotation plate is set on each of the left and right sides to be connected to the upper air flotation plate. A rectangular air flotation plate is set at the bottom, and the lower air flotation plate is connected to the side air flotation plates respectively.

[0099] In one possible example, the throttle 30 has a plurality of micro-grooves 32 and an air supply groove 31 on its outer periphery. One end of the micro-groove 32 is connected to the air supply groove 31, and the other end of the micro-groove 32 extends to the bottom surface of the throttle 30. The micro-groove 32 forms a throttle hole with the wall of the mounting hole 21.

[0100] In one possible example, there is one air supply groove 31, which is an annular groove along the circumferential direction, and the air supply groove 31 is connected to each of the micro-grooves 32; or,

[0101] There are multiple air supply slots 31, each of which is a straight slot along the generatrix direction, and each air supply slot 31 is connected to a micro slot 32.

[0102] In one possible example, the throttle 30 has a central blind hole 33 and a radial hole 34 in the middle;

[0103] The central blind hole 33 is connected to the annular groove through the radial hole 34.

[0104] In one possible example, the throttle 30 is cylindrical and is interference-fitted with the mounting hole 21; or...

[0105] The throttle 30 is a conical truncated plate, and the throttle 30 mates with the conical surface of the mounting hole 21.

[0106] In one possible example, there is one mounting hole 21, which is located at the center of the air flotation plate 20;

[0107] There are multiple mounting holes 21, which are evenly distributed circumferentially or in a linear array on the air flotation plate 20.

[0108] In one possible example, the microgroove 32 is a straight groove extending along the generatrix direction or a spiral groove extending along the spiral direction, and the cross-sectional shape of the microgroove 32 is rectangular, triangular or semi-circular.

[0109] In one possible example, the cross-sectional dimension of the air supply groove 31 is larger than the cross-sectional dimension of the microgroove 32.

[0110] In one possible example, there are multiple throttles 30, and the air flotation plate 20 has an annular groove for installing a sealing ring. The annular groove surrounds the air supply groove 31 of each throttle 30 to form a sealed air passage.

[0111] As can be seen, in this embodiment, the air-bearing guide rail 2 is equipped with a mounting hole 21 on the air-bearing plate 20 to install the throttle 30. The throttle 30 has a micro-groove 32, which is formed by the micro-groove 32 and the wall of the mounting hole 21. This can solve the problem of difficult processing of throttle holes with long length and small diameter, and make long micro-holes possible, which is beneficial to improving the load-bearing capacity and rigidity of the air-bearing guide rail 2.

[0112] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0113] In this application, the terms "embodiment" and "implementation" mean that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this application. The appearance of these phrases in various locations throughout the specification does not necessarily refer to the same embodiment, nor are they independent or alternative embodiments mutually exclusive with other embodiments. Those skilled in the art will understand, explicitly and implicitly, that the embodiments described in this application can be combined with other embodiments. Furthermore, it should be understood that the features, structures, or characteristics described in the various embodiments of this application can be arbitrarily combined to form another embodiment that does not depart from the spirit and scope of the technical solution of this application, provided there is no contradiction between them.

[0114] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. An air cushion characterized by, The air-supported cushion includes: An air flotation plate, wherein the air flotation plate is provided with mounting holes for mounting a throttle; The throttle has multiple micro-grooves and an air supply groove on its outer periphery. One end of each micro-groove is connected to the air supply groove, and the other end of each micro-groove extends to the bottom surface of the throttle. The micro-groove and the wall of the mounting hole form a throttle hole. The cover plate serves as the mounting base for the air flotation plate and the throttle.

2. The air cushion according to claim 1, wherein There is one air supply slot, which is an annular slot along the circumference, and the air supply slot is connected to each of the micro-slots; or... There are multiple air supply slots, each of which is a straight slot along the busbar direction, and each air supply slot is connected to a micro slot.

3. The air cushion according to claim 2, wherein The throttle has a central blind hole and a radial hole in the middle; The central blind hole and the annular groove are connected through the radial hole.

4. The air cushion according to claim 1, wherein The throttle is cylindrical, and it is interference-fitted with the mounting hole; or... The throttle is a conical truncated plate type, which mates with the conical surface of the mounting hole and is pressed together by the cover plate.

5. The air cushion according to claim 4, wherein There is one mounting hole, which is located at the center of the air flotation plate; The mounting holes are multiple, and the multiple mounting holes are evenly distributed circumferentially or in a linear array on the air flotation plate.

6. The air cushion according to claim 1, wherein The microgroove is a straight groove extending along the generatrix direction or a spiral groove extending along the spiral direction, and the cross-sectional shape of the microgroove is rectangular, triangular or semi-circular.

7. The air cushion according to claim 6, wherein The cross-sectional dimensions of the air supply trough are much larger than those of the micro-trough.

8. The air cushion according to claim 1, wherein The cover plate is provided with an air supply channel, which is a shallow groove. The shallow groove has an axial blind hole and a radial hole communicating with the axial blind hole. The radial hole is connected to an external air supply device.

9. The air cushion according to claim 8, wherein The number of throttles is multiple, and an annular groove is formed on the air float plate. The annular groove is used to install a sealing ring. The annular groove surrounds the air supply groove of each throttle to form a sealed air passage.

10. An air floating guide rail characterized by, The air flotation guide rail includes a plurality of air flotation plates and throttles as described in any one of claims 1-9, and the air flotation guide rail is T-shaped, dovetail-shaped, or closed.

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