ZR module

Abstract

The utility model relates to the field of semiconductor packaging equipment, and discloses a ZR module which comprises a base, a linear motion assembly and an R-axis motor connected with the linear motion assembly are arranged on the base, the R-axis motor comprises a motor base and a motor shaft arranged in the motor base, and the motor shaft is connected with the linear motion assembly. The motor base is provided with a first air hole connected with an external air exhaust device, the output end of the motor shaft is provided with a second air hole and a through hole communicated with the second air hole, an annular channel is arranged between the motor shaft and the motor base, and the through hole, the annular channel and the first air hole are sequentially communicated. On the basis that occupied space is saved, higher shaft end run-out precision and rotation precision can be achieved, space layout is more compact, cost is reduced, the structure is simplified, disassembly, assembly and maintenance are convenient and fast, use efficiency and precision are improved, and wide-range application is facilitated.

Description

Technical Field

[0001] This utility model relates to a ZR module and belongs to the field of semiconductor packaging equipment. Background Technology

[0002] The ZR module is the core actuator of semiconductor packaging equipment. It has the motion freedom of the Z-axis (linear motion) and R-axis (rotational motion) and has a vacuum circuit, making it suitable for high-precision picking and placing operations of semiconductor chips.

[0003] Currently, ZR modules employ a closed structure, meaning that internal components such as the Z-axis and R-axis motors are housed within a sealed casing. This leads to heat accumulation during motor operation, resulting in poor heat dissipation and significantly impacting motor performance. Furthermore, traditional ZR module designs are structurally complex. For instance, their linear motion typically utilizes a "rotary motor + ball screw" configuration, converting the rotational motion of the rotary motor into linear motion via a ball screw structure, or achieving linear motion through gear transmission or other transmission mechanisms (such as the connection and L-shaped arrangement between the first drive component and the first transmission mechanism disclosed in CN221274528U). This results in a large footprint, a less compact structure, high manufacturing, assembly, and maintenance costs, low efficiency, and low precision, hindering widespread application.

[0004] Meanwhile, existing ZR modules also have the following defects in terms of vacuum air circuits: One type of air circuit structure of existing ZR modules is "rotary joint + hollow shaft micro motor", that is, the R-axis motor shaft is a hollow shaft design, which leads to poor rotational accuracy of the R-axis motor and high production cost; another type of air circuit structure is that the R-axis motor shaft and the output shaft are separate mechanisms (such as the connection between the rotary motion component and the adsorption component disclosed in announcement number CN221274528U), with the air circuit designed on the output shaft and then connected to the motor shaft through a coupling, which leads to complex structure and difficulty in achieving high shaft end runout accuracy. Utility Model Content

[0005] The present invention aims to provide a ZR module that can achieve higher shaft end runout and rotation accuracy, reduce costs, simplify structure, and has good heat dissipation effect.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] A ZR module includes a base, on which a linear motion component and an R-axis motor connected to the linear motion component are mounted. The R-axis motor includes a motor base and a motor shaft disposed within the motor base. The motor base has a first air hole connected to an external air extraction / release device. The output end of the motor shaft has a second air hole and a through hole communicating with the second air hole. An annular channel is provided between the motor shaft and the motor base. The through hole, the annular channel, and the first air hole are sequentially connected.

[0008] Furthermore, the linear motion component adopts a linear motor, which includes a Z-axis stator fixed on the base and a Z-axis mover disposed within the Z-axis stator, and the motor base is connected to the Z-axis mover.

[0009] Furthermore, a module bracket is fixed on the Z-axis mover, the motor base is fixed on the module bracket, and the module bracket is slidably connected to the base.

[0010] Furthermore, the ZR module also includes a tension spring, one end of which is connected to the base or Z-axis stator, and the other end is connected to the module bracket.

[0011] Furthermore, a reading bracket is fixed on the module bracket, one end of the tension spring is connected to the base or Z-axis stator and the other end is connected to the reading bracket, the reading bracket is provided with a reading head, the base is provided with a magnetic scale, and the reading head is located on one side of the magnetic scale.

[0012] Furthermore, the annular channel is an annular groove provided on the motor shaft, the through hole penetrates the annular groove, and the first air hole is positioned opposite to and connected to the annular groove.

[0013] Furthermore, the motor housing is provided with a first spacer ring sleeved on the motor shaft. The first spacer ring is concentrically arranged with the annular groove. The first spacer ring is provided with a vent hole, and the two ends of the vent hole are respectively connected to the first vent hole and the annular groove.

[0014] Furthermore, the motor housing is also provided with a first sealing ring and a second sealing ring sleeved on the motor shaft, and the first spacer is disposed between the first sealing ring and the second sealing ring.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] By directly integrating the air passage into the motor shaft end, and employing a non-hollow shaft design, this ZR module achieves higher shaft end runout and rotational accuracy, while reducing cost and structural complexity. By mounting the entire structure on a base instead of in a closed housing—an open-frame design—this ZR module offers excellent heat dissipation and a simple structure. The use of a linear motor saves space, resulting in a more compact structure, reduced manufacturing, assembly, and maintenance costs, and improved efficiency and accuracy, facilitating wider application. With one end of the module bracket fixed to the Z-axis mover and the other end mounting the R-axis motor and slidingly connecting it to the base, the ZR module boasts a flatter, more compact layout, with a height of only 60mm and a thickness of only 15mm. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0018] Figure 2 This is a cross-sectional structural schematic diagram of the present invention;

[0019] Figure 3 This is a partially enlarged cross-sectional view of the present invention.

[0020] In the figure

[0021] 1. Base; 2. Linear motor; 21. Z-axis stator; 22. Z-axis mover; 3. R-axis motor; 4. Motor base; 41. First air hole; 5. Motor shaft; 51. Second air hole; 52. Through hole; 53. Annular groove; 6. Module bracket; 7. Reading head; 71. Reading bracket; 8. Magnetic scale; 9. Tension spring; 10. Miniature guide rail; 11. First spacer; 12. Vent hole; 13. First sealing ring; 14. Second sealing ring; 15. Second spacer; 16. Limiting mounting groove; 17. First bearing; 18. Second bearing; 19. Air connector; 20. Wiring harness. Detailed Implementation

[0022] The present invention will be described in detail below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in the embodiments of the present invention can be combined with each other. For ease of description, the terms "upper," "lower," "left," and "right" appearing below only indicate that they correspond to the upper, lower, left, and right directions in the accompanying drawings and do not limit the structure.

[0023] Example 1

[0024] like Figures 1 to 3As shown, an open-type ZR module is used for high-precision pick-and-place operations within semiconductor packaging equipment. This ZR module includes a base 1, a linear motion component, and an R-axis motor 3. The R-axis motor 3 is a micro servo motor with a rotational accuracy of ±0.05° and a rotational range of 0° to 360°. The R-axis motor 3 includes a motor mount 4 and a motor shaft 5 disposed within the motor mount 4. The base 1 is used to mount the linear motion component and the R-axis motor 3. The base 1 can be made of a sheet metal. Conventional ZR modules have their internal structures enclosed in a closed housing, which is not conducive to heat dissipation and uses more materials. This ZR module, however, is mounted on a single base 1, featuring an open body structure that is simple and provides good heat dissipation. The linear motion component is connected to the R-axis motor 3 and is used to drive the R-axis motor 3 to translate. The linear motion component can be any mechanism capable of driving linear translation of an object, such as a mechanism using a motor and a lead screw connection. The motor base 4 is provided with a first air hole 41 connected to an external air extraction / release device; the output end of the motor shaft 5 is provided with a second air hole 51 and a through hole 52 communicating with the second air hole 51; an annular channel is provided between the motor shaft 5 and the motor base 4; the through hole 52, the annular channel, and the first air hole 41 are connected in sequence; air is drawn in sequentially from the second air hole 51, the through hole 52, the annular channel, and the first air hole 41 by the external air extraction / release device, thereby adsorbing items; conversely, air is released in sequence to disconnect the adsorption and place items.

[0025] In this embodiment, the annular channel is an annular groove 53 formed on the motor shaft 5; the through hole 52 penetrates the annular groove 53, and the first air hole 41 is directly opposite to and connected to the annular groove 53; the annular groove 53 ensures that the first air hole 41 is always connected to the through hole 52. The through hole 52 is a radial hole inside the motor shaft 5, and the second air hole 51 is an axial hole inside the motor shaft 5, which can be concentrically arranged with the motor shaft 5.

[0026] In this embodiment, the motor housing 4 is provided with a first spacer 11 sleeved on the motor shaft 5; the first spacer 11 is concentrically arranged with the annular groove 53, and the first spacer 11 is provided with a radial vent hole 12; the two ends of the vent hole 12 are respectively connected to the first vent hole 41 and the annular groove 53. The first spacer 11 plays a sealing role, and the vent hole 12 ensures that the first vent hole 41 is connected to the annular groove 53, that is, ensures that it is always connected to the through hole 52.

[0027] In this embodiment, the motor base 4 is further provided with a first sealing ring 13, a second sealing ring 14, and a second spacer 15 sleeved on the motor shaft 5; the motor base 4 is provided with a limiting installation groove 16, and the first sealing ring 13, the first spacer 11, the second sealing ring 14, and the second spacer 15 are arranged axially in sequence and tightly in the limiting installation groove 16 along the output end direction of the motor shaft 5; the first sealing ring 13, the second sealing ring 14, and the second spacer 15 all serve a sealing function. The motor base 4 is also provided with a first bearing 17 and a second bearing 18, and the motor shaft 5 is sleeved in the first bearing 17 and the second bearing 18 in sequence along its output end direction, which facilitates the rotation output of the motor shaft 5; the second bearing 18 is tightly attached to one side of the second spacer 15, which facilitates the limiting installation of the second spacer 15.

[0028] In this embodiment, the motor base 4 is provided with an air connector 19. One end of the air connector 19 is connected to the first air hole 41 and the other end is connected to the external air extraction device. The air connector 19 facilitates the connection of the air path.

[0029] In this embodiment, the ZR module can be extended to a longer stroke. In conventional ZR modules, the longer the stroke, the longer the output shaft, resulting in lower structural rigidity at the shaft end; however, the output shaft length of this ZR module is fixed and does not increase with the increase of the stroke, thus achieving higher structural rigidity and a larger stroke.

[0030] The working principle of this embodiment is as follows:

[0031] The linear motion component drives the R-axis motor 3 to move linearly and rotate, thereby adjusting the entire module to a suitable position or angle. When picking up and placing items, the external air extraction device sequentially draws air from the second air hole 51, through hole 52, annular channel and first air hole 41 to adsorb the items. Conversely, releasing air sequentially disconnects the adsorption and allows the items to be placed.

[0032] The advantages of this embodiment are as follows: By directly designing the air passage at the motor shaft 5 end, and using a non-hollow shaft design, this ZR module can achieve higher shaft end runout and rotation accuracy, while reducing cost and structural complexity. By mounting the entire structure on a base 1 instead of in a closed housing—that is, an open-type chassis design—the motor is in direct contact with the outside air, improving the motor's heat dissipation efficiency and preventing performance degradation due to overheating during continuous operation. In other words, this ZR module has excellent heat dissipation and a simple structure.

[0033] Example 2

[0034] The difference between this embodiment and Embodiment 1 is that the linear motion component adopts a U-shaped linear motor 2, which includes a Z-axis stator 21 fixed on the base 1 and a Z-axis mover 22 disposed in the Z-axis stator 21; the motor base 4 is connected to the Z-axis mover 22.

[0035] In this embodiment, a module bracket 6 is fixed on the Z-axis mover 22, and the motor base 4 is fixed on the module bracket 6. The bottom of the module bracket 6 is slidably connected to the base 1. The module bracket 6 is Z-shaped. In practice, a miniature guide rail 10 is fixed on the base 1, and a slider is slidably connected to the miniature guide rail 10. The bottom of the module bracket 6 is fixed to the slider. This facilitates the linear sliding of the R-axis motor 3. Various wire harnesses 20 for connection can be arranged on the module bracket 6. By setting one end of the module bracket 6 to be fixed to the Z-axis mover 22 and the other end to be mounted on the R-axis motor 3 and slidably connected to the base 1, the spatial layout of this ZR module is more flat and compact, with a height of only 60mm and a thickness of only 15mm.

[0036] In this embodiment, a reading bracket 71 is fixed on the module bracket 6, and a reading head 7 is provided on the reading bracket 71. A 0.1μm resolution magnetic scale 8 is provided on the base 1, and the reading head 7 is located on one side of the magnetic scale 8. By setting the reading head 7 and the magnetic scale 8, it is convenient to read the position of the R-axis motor 3 in real time, making it more convenient to use and more precise in operation. This ZR module can achieve a movement accuracy of ±1μm and a stroke of 45mm.

[0037] In this embodiment, the ZR module also includes a tension spring 9, one end of which is connected to the base 1 or the Z-axis stator 21, and the other end is connected to the reading bracket 71 on the module support 6. The tension spring 9 can play a role in buffering and balancing; when the ZR module is used vertically, the tension spring 9 is used to balance the gravity of the moving parts of the module.

[0038] The working principle of this embodiment is as follows:

[0039] When the linear motor 2 is working, that is, when the Z-axis mover 22 moves linearly relative to the Z-axis stator 21, it drives the module bracket 6 and its components (i.e., the R-axis motor 3 and the reading head 7, etc.) to slide linearly on the base 1. At the same time, the R-axis motor 3 rotates, thereby adjusting the entire module to a suitable position or angle. When picking up and placing items, air is drawn in sequentially from the second air hole 51, the through hole 52, the annular channel, and the first air hole 41 through the external air extraction and release device, thereby adsorbing the items. Conversely, air is released sequentially to disconnect the adsorption and place the items.

[0040] The beneficial effects of this embodiment are as follows: By employing a linear motor 2, this ZR module can achieve higher shaft end runout and rotation accuracy while saving space. The spatial layout is more compact, reducing costs, simplifying the structure, facilitating disassembly and maintenance, and improving efficiency and accuracy, which is beneficial for wide-ranging applications. By setting one end of the module bracket 6 to be fixed to the Z-axis mover 22 and the other end to be mounted on the R-axis motor 3 and slidably connected to the base 1, the spatial layout of this ZR module is more flat and compact, with a height of only 60mm and a thickness of only 15mm, making it small in size.

[0041] The above embodiments should be understood as being used only to illustrate the present invention more clearly, and not to limit the scope of the present invention. After reading the present invention, any modifications of the embodiments by those skilled in the art in various equivalent forms fall within the scope defined by the appended claims.

Claims

1. A ZR module, comprising a base (1), wherein a linear motion component and an R-axis motor (3) connected to the linear motion component are provided on the base (1), the R-axis motor (3) comprising a motor mount (4) and a motor shaft (5) disposed within the motor mount (4), characterized in that, The motor base (4) is provided with a first air hole (41) connected to an external air extraction device. The output end of the motor shaft (5) is provided with a second air hole (51) and a through hole (52) communicating with the second air hole (51). An annular channel is provided between the motor shaft (5) and the motor base (4). The through hole (52), the annular channel, and the first air hole (41) are connected in sequence.

2. The ZR module of claim 1, wherein, The linear motion component adopts a linear motor (2), which includes a Z-axis stator (21) fixed on the base (1) and a Z-axis mover (22) disposed in the Z-axis stator (21). The motor base (4) is connected to the Z-axis mover (22).

3. The ZR module of claim 2, wherein, The Z-axis mover (22) is fixed with a module bracket (6), the motor base (4) is fixed on the module bracket (6), and the module bracket (6) is slidably connected to the base (1).

4. The ZR module of claim 3, wherein, The ZR module also includes a tension spring (9), one end of which is connected to the base (1) or the Z-axis stator (21), and the other end is connected to the module bracket (6).

5. The ZR module of claim 4, wherein, The module bracket (6) is fixed with a reading bracket (71). One end of the tension spring (9) is connected to the base (1) or the Z-axis stator (21), and the other end is connected to the reading bracket (71). The reading bracket (71) is provided with a reading head (7). The base (1) is provided with a magnetic grating ruler (8). The reading head (7) is located on one side of the magnetic grating ruler (8).

6. The ZR module according to any one of claims 1 to 5, wherein, The annular channel is an annular groove (53) provided on the motor shaft (5), the through hole (52) penetrates the annular groove (53), and the first air hole (41) is positioned opposite to and connected to the annular groove (53).

7. The ZR module of claim 6, wherein, The motor base (4) is provided with a first spacer (11) sleeved on the motor shaft (5). The first spacer (11) is concentrically arranged with the annular groove (53). The first spacer (11) is provided with a vent hole (12). The two ends of the vent hole (12) are respectively connected to the first air hole (41) and the annular groove (53).

8. The ZR module of claim 7, wherein, The motor housing (4) is also provided with a first sealing ring (13) and a second sealing ring (14) sleeved on the motor shaft (5), and the first spacer (11) is located between the first sealing ring (13) and the second sealing ring (14).

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