Ultrasonic automatic cleaning machine

Abstract

The utility model discloses an ultrasonic automatic cleaning machine, which relates to the technical field of semiconductor packaging and manufacturing, and comprises an automatic lifting and rotating clamp, and the automatic lifting and rotating clamp is provided with a rotatable structure and a vertical lifting structure; the ultrasonic container is provided with an opening and is connected with the external filter through a pipeline; the cleaning agent temporary storage container is communicated with the ultrasonic container through a liquid adding self-priming pump; the liquid adding self-priming pump is mounted on the pipeline between the buffer container and the ultrasonic container; the external filter is respectively connected with the ultrasonic container and the buffer container through pipelines; the automatic lifting and rotating clamp is located above the ultrasonic container, and when the automatic lifting and rotating clamp descends, the automatic lifting and rotating clamp can extend into the ultrasonic container. According to the utility model, the labor dependence is obviously reduced, the manual intervention frequency is reduced, the operation continuity is improved, the waste of consumables is reduced, and the operation environment is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging manufacturing technology, and is an ultrasonic automatic cleaning machine. Background Technology

[0002] In semiconductor manufacturing, the adhesive tray serves as a carrier for critical materials such as adhesives and phosphors, and its cleaning quality directly affects the stability of subsequent processes. Currently, the industry primarily uses manual cleaning methods, which have the following significant drawbacks:

[0003] Low cleaning efficiency

[0004] The existing process requires the rubber trays to be completely immersed in cleaning agents for an extended period (usually 15-30 minutes), followed by manual scrubbing by operators holding the trays and cleaning tools. Due to the complex structure of the rubber trays, with numerous grooves, holes, and corners, manual scrubbing cannot cover them completely, resulting in incomplete cleaning and a high risk of secondary contamination from residues.

[0005] Occupational health hazards

[0006] Cleaning agents often contain volatile organic solvents and corrosive components, which can easily lead to occupational diseases such as skin burns and respiratory irritation in operators with prolonged exposure. The frequent opening of containers during the cleaning process further exacerbates the spread of harmful gases, failing to meet modern industrial safety standards.

[0007] Serious resource consumption

[0008] Traditional cleaning methods use a "one tank, one agent" approach. The cleaning agent becomes ineffective after a single use due to the contamination of glue residue and fluorescent powder particles, making it unusable for recycling. Statistics show that this method consumes as much as 20L of cleaning agent per 100 plastic trays, and wastewater treatment costs account for over 30% of total operating costs.

[0009] Poor process consistency

[0010] Manual operation relies on individual experience, and key parameters such as cleaning intensity and soaking time are difficult to standardize, resulting in significant fluctuations in the cleaning quality of different batches of rubber trays, which affects the stability of subsequent processes. Utility Model Content

[0011] The purpose of this utility model is to provide an ultrasonic automatic cleaning machine, which aims to achieve automation, high efficiency and environmental protection in cleaning rubber trays.

[0012] To achieve the above objectives, this utility model provides the following technical solution:

[0013] An ultrasonic automatic cleaning machine, characterized in that it includes:

[0014] An automatic lifting and rotating clamp, wherein the automatic lifting and rotating clamp has a rotatable structure and a vertical lifting structure;

[0015] An ultrasonic container, wherein the ultrasonic container has an opening and is connected to an external filter via a pipe;

[0016] A cleaning agent buffer container, wherein the cleaning agent buffer container is connected to an ultrasonic container via a self-priming pump;

[0017] A self-priming liquid filling pump is installed on the pipeline between the buffer container and the ultrasonic container;

[0018] An external filter is connected to the ultrasonic container and the buffer container via pipes, respectively.

[0019] The automatic lifting and rotating clamp is located above the ultrasonic container, and when the automatic lifting and rotating clamp descends, it extends into the ultrasonic container.

[0020] In a preferred embodiment, the automatic lifting and rotating clamp is equipped with a sealing cover, which is sealed on the upper side of the ultrasonic container when the automatic lifting and rotating clamp descends.

[0021] In a preferred embodiment, a control valve is provided on the pipe between the external filter and the ultrasonic container to regulate the circulation flow rate of the cleaning agent.

[0022] In a preferred embodiment, the inner wall of the ultrasonic container is provided with ultrasonic transducer mounting positions, and the transducers are distributed in an array.

[0023] In a preferred embodiment, the buffer container is provided with a drain port at the bottom, which is connected to the inlet of a self-priming pump via a pipe.

[0024] A preferred technical solution includes an external chassis, wherein the automatic lifting and rotating clamp is disposed on the top inner side of the external chassis, the ultrasonic container is fixedly disposed in the middle inner side of the external chassis and located below the automatic lifting and rotating clamp, the buffer container and the liquid adding self-priming pump are fixedly disposed on the bottom inner side of the external chassis, and the external filter is disposed on the outside of the external chassis.

[0025] Compared with the prior art, the beneficial effects of this utility model are:

[0026] Increased efficiency is achieved through automated lifting and rotating clamps that automatically load and unload rubber trays, eliminating manual handling and significantly reducing reliance on manpower. The automatic opening and closing mechanism for the sealing cap reduces the frequency of manual intervention and improves operational continuity.

[0027] The cleaning quality is optimized by combining ultrasonic vibration with clamp rotation to form a composite cleaning mode, effectively removing residues from the surface and crevices of the rubber tray.

[0028] Resource recycling is achieved through a closed-loop system constructed with external filters and buffer containers, enabling the reuse of cleaning agents and reducing consumable waste. The sealed structure effectively inhibits cleaning agent evaporation, extending the lifespan of each batch of cleaning agent.

[0029] Improved operating environment and fully enclosed cleaning process prevent cleaning agents from directly contacting the human body, reducing occupational health risks.

[0030] The equipment boasts integrated advantages, with a modular design supporting rapid model changeover and adaptability to different sized tray cleaning needs. The entire unit is integrated into an external chassis, resulting in a compact structure and saving installation space. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of this utility model;

[0032] Figure 2 This is a schematic diagram of the structure of the automatic lifting and rotating clamp of this utility model when it is raised;

[0033] Figure 3 This is a schematic diagram of the structure of the automatic lifting and rotating clamp of this utility model when it is descending;

[0034] Figure 4 This is a schematic diagram of the external structure of this utility model;

[0035] In the diagram: 1 Automatic lifting and rotating clamp, 2 Ultrasonic container, 3 Cleaning agent buffer container, 4 Liquid filling self-priming pump, 5 External filter, 6 External chassis. Detailed Implementation

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0037] Please see Figures 1 to 4 ,

[0038] An ultrasonic automatic cleaning machine, comprising

[0039] An automatic lifting and rotating clamp 1, comprising a rotatable structure and a vertical lifting structure, is used for installing and cleaning rubber trays. The rotatable and vertical lifting structures can employ conventional designs, such as a motor-driven rotating structure or a hydraulic vertical lifting structure.

[0040] The ultrasonic container 2 has an opening and is connected to an external filter 5 via a pipe; it is used to hold cleaning agents and to clean the trays via ultrasonic waves.

[0041] The cleaning agent buffer container 3 is connected to the ultrasonic container 2 via a self-priming pump 4; it is used to buffer the filtered cleaning agent.

[0042] A self-priming pump 4 is installed on the pipe between the buffer container 3 and the ultrasonic container 2; it is used to pump the cleaning agent in the buffer container 3 into the ultrasonic container 2.

[0043] An external filter 5 is connected to the ultrasonic container 2 and the buffer container 3 via pipes; it is used to extract and filter the cleaning agent in the ultrasonic container 2 and then return it to the buffer container 3.

[0044] The automatic lifting and rotating clamp 1 is located above the ultrasonic container 2, and when the automatic lifting and rotating clamp 1 descends, it extends into the ultrasonic container 2. The lifting stroke of the automatic lifting and rotating clamp 1 covers the cleaning position of the rubber tray inside the ultrasonic container 2.

[0045] The automatic lifting and rotating clamp 1 is equipped with a sealing cover. When the automatic lifting and rotating clamp 1 descends, the sealing cover is set on the upper side of the ultrasonic container 2. The sealing cover is only briefly opened during loading and unloading, and remains sealed during the rest of the working time to reduce the evaporation of cleaning agent.

[0046] A control valve is installed on the pipe between the external filter 5 and the ultrasonic container 2 to regulate the circulation flow of the cleaning agent.

[0047] The inner wall of the ultrasonic container 2 is provided with ultrasonic transducer mounting positions, and the transducers are distributed in an array.

[0048] The bottom of the buffer container 3 is equipped with a drain port, which is connected to the inlet of the self-priming pump 4 via a pipe.

[0049] The device includes an external housing 6, an automatic lifting and rotating clamp 1 located on the top inner side of the external housing 6, an ultrasonic container 2 fixedly located in the middle inner side of the external housing 6 and below the automatic lifting and rotating clamp 1, a buffer container 3 and a liquid-filling self-priming pump 4 fixedly located on the bottom inner side of the external housing 6, and an external filter 5 located on the outside of the external housing 6.

[0050] This invention achieves automated cleaning through ultrasonic vibration, which saves labor, provides fast cleaning speed and good cleaning effect, avoids excessive contact between people and cleaning agents, reduces the amount of cleaning agent volatilization, and avoids the harm to human health caused by manual cleaning. This invention is compact, simple in structure, easy to operate, convenient to install, and easy to change, and can be applied to the automatic cleaning of different sizes of rubber trays in the semiconductor industry.

[0051] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An ultrasonic automatic cleaning machine characterized by comprising: include An automatic lifting and rotating clamp (1) has a rotatable structure and a vertical lifting structure; An ultrasonic container (2) is provided with an opening and is connected to an external filter (5) through a pipe; A cleaning agent buffer container (3) is connected to an ultrasonic container (2) via a self-priming pump (4); A self-priming pump (4) for adding liquid is installed on the pipeline between the buffer container (3) and the ultrasonic container (2); An external filter (5) is connected to the ultrasonic container (2) and the buffer container (3) respectively via pipes; The automatic lifting and rotating clamp (1) is located above the ultrasonic container (2), and when the automatic lifting and rotating clamp (1) descends, the automatic lifting and rotating clamp (1) extends into the ultrasonic container (2).

2. The ultrasonic automatic cleaning machine according to claim 1, characterized in that: The automatic lifting and rotating clamp (1) is equipped with a sealing cover. When the automatic lifting and rotating clamp (1) descends, the sealing cover is sealed on the upper side of the ultrasonic container (2).

3. The ultrasonic automatic cleaning machine according to claim 1, wherein: A control valve is provided on the pipe between the external filter (5) and the ultrasonic container (2) to adjust the circulation flow of the cleaning agent.

4. The ultrasonic automatic cleaning machine according to claim 1, wherein: The inner wall of the ultrasonic container (2) is provided with ultrasonic transducer mounting positions, and the transducers are distributed in an array.

5. The ultrasonic automatic cleaning machine according to claim 1, wherein: The buffer container (3) has a drain port at the bottom, which is connected to the inlet of the self-priming pump (4) via a pipe.

6. The ultrasonic automatic cleaning machine according to claim 1, wherein: The system includes an external housing (6), an automatic lifting and rotating clamp (1) located on the top inner side of the external housing (6), an ultrasonic container (2) fixedly located in the middle inner side of the external housing (6) and below the automatic lifting and rotating clamp (1), a buffer container (3) and a liquid-filling self-priming pump (4) fixedly located at the bottom inner side of the external housing (6), and an external filter (5) located outside the external housing (6).

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