Micro deep hole machining tool

Abstract

The utility model discloses a tiny deep hole machining cutter which comprises a cutter head and an extension rod, the cutter head comprises a cutter edge, a cutter body and a positioning handle, the cutter body is columnar, the section of the positioning handle is a non-circular regular geometric figure, the section contour of the positioning handle is smaller than that of the cutter body, and the extension rod is arranged on the cutter edge. The extension rod comprises a rod body and a rod tail, the top end of the rod body is provided with a tool bit cavity, the rod tail is provided with a reinforcing sleeve, the inner diameter of the tool bit cavity is larger than the diameter of the tool body, the bottom of the tool bit cavity is provided with a positioning insertion hole which is in clearance fit with the section size of the positioning handle, and the tool bit is arranged in the tool bit cavity. And cured glue is filled between the tool bit and the tool bit cavity. By means of the mode, the requirement for machining the tiny deep hole in combination with the discharge machining procedure can be met, and the stability of the machining quality of the tiny deep hole is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment processing, and in particular to a tool for machining micro-deep holes. Background Technology

[0002] Multiple vent holes need to be set in the semiconductor processing cavity according to process requirements. These vent holes have small diameters and large depths. Moreover, the cutting tool needs to be inserted into the semiconductor cavity during processing. This requires both a small cutting tool diameter and an increased cutting tool length. In actual processing, as the cutting tool diameter decreases and the overall length increases, the cutting tool rigidity decreases significantly, making it impossible to meet the requirements of precision processing. Therefore, only a transfer tool discharge machining equipment can be used for discharge machining. However, using discharge machining to process deep holes results in long process times and high processing costs. Furthermore, due to the characteristics of discharge machining, the quality risk is significantly increased compared to direct tool machining. Utility Model Content

[0003] The main technical problem solved by this utility model is to provide a tool for machining micro-deep holes, which can be used in conjunction with electrical discharge machining to improve the machining efficiency and quality of micro-deep holes.

[0004] To solve the above-mentioned technical problems, the present invention provides a micro-deep hole machining tool, comprising: a cutting head and an extension rod. The cutting head includes a cutting edge, a cutting body, and a positioning shank. The cutting body is cylindrical, and the positioning shank has a non-circular regular geometric cross-section. The cross-sectional profile of the positioning shank is smaller than that of the cutting body. The extension rod includes a rod body and a rod tail. The top of the rod body has a cutting head cavity, and the rod tail has a reinforcing sleeve. The inner diameter of the cutting head cavity is larger than the diameter of the cutting body. The bottom of the cutting head cavity has a positioning insertion hole that matches the cross-sectional size gap of the positioning shank. The cutting head is inserted into the cutting head cavity, and the space between the cutting head and the cutting head cavity is filled with cured adhesive.

[0005] In a preferred embodiment of this utility model, the length of the cutting edge is 1 / 3 to 1 / 2 of the total length of the cutting head.

[0006] In a preferred embodiment of this utility model, the length of the positioning handle does not exceed 1 / 3 of the total length of the cutter head.

[0007] In a preferred embodiment of this utility model, the depth of the positioning hole is 0.5 to 1 times the length of the positioning handle.

[0008] In a preferred embodiment of the present invention, two overflow holes are symmetrically formed on the cavity wall of the cutter head cavity, and the overflow holes are located near the bottom of the cutter head cavity.

[0009] In a preferred embodiment of this utility model, the total length of the blade head cavity and the bottom positioning hole is equal to the total length of the blade body and the positioning handle, and a dividing line is provided between the blade body and the blade edge.

[0010] The beneficial effects of this utility model are as follows: This utility model is a special tool for machining micro-deep holes designed for the characteristics of current micro-deep hole machining. The tool head and tool holder are bonded together with glue, so the rigidity of the tool head is not affected during the machining process. After machining the micro-deep hole blank by electrical discharge machining, the tool can be driven by a horizontal machining center to continue the deep machining of the hole blank. This avoids the long cycle and high cost of traditional electrical discharge machining while improving the quality stability of micro-deep hole machining. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the installation structure of a preferred embodiment of the present invention;

[0012] Figure 2 This is an exploded view of the embodiment shown;

[0013] Figure 3 This is a schematic diagram illustrating the method of use of the illustrated embodiment within the cavity;

[0014] The components in the attached diagram are labeled as follows:

[0015] 1. Cutting head; 2. Extension rod;

[0016] 101. Blade edge; 102. Blade body; 103. Positioning shank; 104. Separating line;

[0017] 201. Shaft, 202. Shaft end, 203. Blade head cavity, 204. Glue overflow hole. Detailed Implementation

[0018] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0019] Please see Figure 1 and Figure 2 The embodiments of this utility model include:

[0020] A micro-deep hole machining tool includes a cutting head 1 and an extension rod 2, both made of tungsten steel. The cutting head 1 includes a cutting edge 101, a cutting body 102, and a positioning shank 103. The cutting body 102 is cylindrical, and the positioning shank 103 has a rounded rectangle with a diagonal length smaller than the diameter of the cutting body 102. The extension rod 2 includes a rod body 201 and a rod tail 202. The top of the rod body 201 has a cutting head cavity 203, and the rod tail 202 has a reinforcing sleeve. The inner diameter of the cutting head cavity 203 is larger than the diameter of the cutting body 102. The bottom of the cutting head cavity 203 has a positioning insertion hole that matches the cross-sectional size of the positioning shank 103. The cutting head 1 is inserted into the cutting head cavity 203, and the space between the cutting head 1 and the cutting head cavity 203 is filled with cured AB glue. Using AB glue for fixation serves two purposes: firstly, the glue layer adheres to the blade body 102, preventing the blade head 1 from falling off; secondly, the adhesive layer formed after the glue solidifies has a certain degree of elasticity, which can prevent direct friction between the blade head 1 and the inner wall of the blade head cavity 203, as well as vibration damage to the blade body 102 during operation, thereby improving the service life of the blade head 1.

[0021] The length of the cutting edge 101 is 1 / 3 to 1 / 2 of the total length of the blade head 1. The length of the positioning shank 103 does not exceed 1 / 3 of the total length of the blade head 1. The relative length of the cutting edge 101 cannot be too long, otherwise it is easy to break due to excessive force. The positioning shank 103 is relatively small in size compared to the blade body 102 and has a small torque bearing capacity, so the length of the positioning shank 103 is relatively short. In actual implementation, the total length of the blade head 1 is generally 10mm, of which the length of the cutting edge 101 is generally 3.5mm, and the length of the positioning shank 103 is 2mm. The depth of the corresponding positioning insertion hole is about 1.8mm, slightly less than the length of the positioning shank 103, so that the positioning shank 103 can be inserted to the bottom during assembly.

[0022] Two overflow holes 204 are symmetrically opened on the cavity wall of the cutter head cavity 203, and the overflow holes 204 are opened near the bottom of the cutter head cavity 203. The reason for providing the overflow hole 204 is that the assembly method of the micro-deep hole machining tool involves first injecting AB glue into the tool head cavity 203. Before the glue hardens, the positioning shank 103 and the tool body 102 of the tool head 1 are inserted into the tool head cavity 203. Although the inner diameter of the tool head cavity 203 is larger than the diameter of the tool body, the difference is small, and the glue is quite viscous. If the overflow hole 204 is not provided, it would be difficult for the tool body 102 to be completely installed into the tool head cavity 203. Moreover, the overflow hole 204 is located close to the bottom of the tool head cavity 203. In this way, when installing, the excess glue will automatically be squeezed out from the overflow hole 204. Thus, the remaining glue in the cavity will fully contact the tool body 102 under the pressure. After the glue hardens, the tool head 1 and the extension rod 2 can be bonded together and will not fall off.

[0023] The total length of the blade head cavity 203 and the bottom positioning hole is equal to the total length of the blade body 102 and the positioning handle 103. A dividing line 104 is provided between the blade body 102 and the cutting edge 101. In this way, the dividing line 104 can be used to quickly confirm whether the actual insertion depth of the positioning handle 103 meets the requirements during assembly, thereby improving assembly efficiency.

[0024] In practical use, the diameter of the insert cutter head 1 can be adjusted according to the process requirements of micro-deep holes to adapt to deep holes of different diameters. Furthermore, the length of the extension rod 2 can be matched and assembled according to the depth of the cavity to be processed. In actual operation, an electrical discharge machining (EDM) method is first used to quickly machine a hole blank on the inner wall of the cavity. Then, a horizontal machine tool is used to drive the assembled cutter to further refine the hole blank. Compared with simple EDM, this improves both the processing efficiency of micro-ventilated deep holes on the cavity wall and the stability of the hole diameter. Moreover, since the cutter head 1 and the extension rod 2 are not integral but bonded together with adhesive, the cutter head 1 has better local rigidity, and the torque mainly acts on the extension rod 2. The adhesive layer effectively buffers the torque force on the cutter head during processing, preventing damage to the cutter head structure and increasing its service life. The adhesive layer also absorbs vibrations during operation, further extending the service life of the cutter head 1.

[0025] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A micro deep hole machining tool, characterized by, The micro-deep hole machining tool includes a cutting head and an extension rod. The cutting head includes a cutting edge, a cutting body, and a positioning shank. The cutting body is cylindrical, and the positioning shank has a non-circular regular geometric cross-section. The cross-sectional profile of the positioning shank is smaller than that of the cutting body. The extension rod includes a rod body and a rod tail. The top of the rod body has a cutting head cavity, and the rod tail has a reinforcing sleeve. The inner diameter of the cutting head cavity is larger than the diameter of the cutting body. The bottom of the cutting head cavity has a positioning insertion hole that matches the cross-sectional size gap of the positioning shank. The cutting head is inserted into the cutting head cavity, and the space between the cutting head and the cutting head cavity is filled with cured adhesive.

2. The micro deep hole machining tool according to claim 1, characterized in that, The length of the cutting edge is 1 / 3 to 1 / 2 of the total length of the cutting head.

3. The micro-deep hole machining tool according to claim 1, characterized in that, The length of the positioning shank does not exceed 1 / 3 of the total length of the cutter head.

4. The micro deep hole machining tool according to claim 1, wherein The depth of the positioning hole is 0.5 to 1 times the length of the positioning handle.

5. The micro-boring tool according to claim 1, wherein Two overflow holes are symmetrically opened on the cavity wall of the cutter head cavity, and the overflow holes are located near the bottom of the cutter head cavity.

6. The micro-boring tool according to claim 1, wherein The total length of the blade head cavity and the bottom positioning hole is equal to the total length of the blade body and the positioning handle, and a dividing line is provided between the blade body and the blade edge.

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