Positioning device for CVD (Chemical Vapor Deposition) silicon carbide processing

Abstract

The utility model relates to the technical field of silicon carbide processing positioning devices, and discloses a CVD silicon carbide processing positioning device which comprises a base, sliding grooves are formed in the periphery, close to the middle, of the top face of the outer wall of the base, sliding shafts are connected to the outer walls of the sliding grooves in a sliding mode, and connecting columns are connected to the tops of the inner walls of the sliding shafts in a sliding mode. The top of the outer wall of the connecting column is fixedly connected with a second fixing plate, the top of the inner wall of the connecting column is in threaded connection with a first threaded shaft, the left side and the right side of the outer wall of the second fixing plate are fixedly in threaded connection with second threaded shafts, the inner wall of the second fixing plate is slidably connected with a sliding plate, and the front side of the outer wall of the sliding plate is fixedly connected with a connecting plate. According to the machining device, the sliding shafts slide on the outer walls of the sliding grooves, meanwhile, the connecting columns sliding on the inner walls of the sliding shafts can move up and down through the first threaded shafts connected with the tops in a threaded mode, and the machining requirement is met.

Description

Technical Field

[0001] This utility model relates to the technical field of silicon carbide processing positioning devices, and in particular to a positioning device for CVD silicon carbide processing. Background Technology

[0002] CVD silicon carbide, as a high-performance ceramic material, is widely used in many high-end fields such as aerospace, semiconductors, and optics due to its excellent hardness, wear resistance, high temperature resistance, and good thermal conductivity. In the manufacturing of hot-end components for aero engines, CVD silicon carbide can withstand the scouring of high-temperature combustion gases, ensuring the efficient and stable operation of the engine. In the semiconductor manufacturing field, as a wafer carrier, it can meet the stringent requirements of high-precision machining for material flatness and stability. At the same time, the machining of CVD silicon carbide is extremely difficult. Its hardness is second only to diamond, and it is difficult to cut with ordinary tools. Special processing techniques are required, such as laser processing, ion beam processing, and grinding and polishing. These processing techniques have extremely stringent requirements for workpiece positioning accuracy. Even a slight deviation may lead to out-of-tolerance machining, deterioration of surface quality, or even scrapping of the workpiece.

[0003] Currently, silicon carbide processing positioning devices on the market mainly consist of positioning elements and support structures. However, some existing positioning devices used for CVD silicon carbide processing have significant defects in adjusting the positioning height. Some traditional positioning devices use a fixed-height support structure, which is only suitable for processing workpieces of specific sizes. Once the workpiece height changes, the entire positioning device needs to be replaced, which is cumbersome and costly. Some positioning devices with height adjustment functions also have extremely inconvenient adjustment methods. For example, positioning devices using manual lead screw adjustment require operators to adjust the positioning height one step at a time by rotating the lead screw. This not only consumes a lot of time and manpower, but also makes it difficult to guarantee the adjustment accuracy. During the adjustment process, positioning deviations are easily caused by human error. Some positioning devices use motor-driven height adjustment, but lack precise position feedback and control mechanisms, making it impossible to achieve automated and precise adjustment. When processing CVD silicon carbide workpieces of different batches and different height requirements, it is difficult to quickly and accurately adjust to the appropriate positioning height. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a positioning device for CVD silicon carbide processing, which aims to improve the problem that traditional silicon carbide processing positioning devices in the prior art are not convenient for adjusting the positioning height.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a positioning device for CVD silicon carbide processing, comprising a base, wherein sliding grooves are provided around the top surface of the outer wall of the base near the center, and sliding shafts are slidably connected to the outer walls of the multiple sliding grooves. A connecting column is slidably connected to the top of the inner wall of the sliding shaft, and a fixing plate is fixedly connected to the top of the outer wall of the connecting column. A threaded shaft is threadedly connected to the top of the inner wall of the connecting column. Threaded shafts are fixedly threaded to the left and right sides of the outer wall of the fixing plate, and a sliding plate is slidably connected to the inner wall of the fixing plate. A connecting plate is fixedly connected to the front side of the outer wall of the sliding plate. The connecting plate slides on the left and right sides of the outer wall of the fixing plate. Threaded sleeves are fixedly connected to the outer walls of the two connecting plates on opposite sides. Multiple threaded shafts are threadedly connected to corresponding threaded sleeves. A positioning mechanism is provided on the top of the base for positioning and fixing parts.

[0006] As a further description of the above technical solution:

[0007] The positioning mechanism includes cylinders. The bottom of the outer walls of multiple cylinders are fixed to the top surface of the base near the center perimeter. Each output end of the multiple cylinders is fixedly connected to a sliding rod. The other end of the sliding rod is fixedly connected to a fixing plate. Each of the two fixing plates is fixedly connected to a fixing claw on an adjacent side of its outer wall. A part base plate is installed in the center of the top surface of the base. A part cover is provided on the top of the part base plate. The outer walls of the multiple fixing claws are in contact with the corresponding positions of the outer walls of the part base plate.

[0008] As a further description of the above technical solution:

[0009] Square pads are fixedly connected to the four corners of the top of the cylinder, and protective pads are fixedly connected to the front and rear sides of the outer wall of the base near the edge.

[0010] As a further description of the above technical solution:

[0011] Flexible strips are fixedly connected to the front and rear sides of the outer wall of the base, and protective plates are fixedly connected to the left and right sides of the outer wall of the base.

[0012] As a further description of the above technical solution:

[0013] Circular pads are fixedly connected to the outer walls of the base on both the left and right sides near the edges, and protective pads are fixedly connected to the four corners of the top of the base.

[0014] As a further description of the above technical solution:

[0015] The base is fixedly connected to handles on the front and back sides of the top, and anti-slip sleeves are fixedly connected to the outer walls of the handles.

[0016] As a further description of the above technical solution:

[0017] A controller is fixedly connected to the rear right side of the top of the base, and the controller is electrically connected to the cylinder.

[0018] As a further description of the above technical solution:

[0019] Protective strips are fixedly connected to the top left and right sides of the base near the edge, and protective plates are fixedly connected to the four corners of the top of the outer wall of the base.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, sliding shafts slide on the outer walls of multiple sliding grooves. At the same time, connecting columns sliding on the inner walls of the sliding shafts can control the up-and-down movement of a fixed plate fixed at the top of the outer wall of the connecting column through a threaded shaft connected to the top threaded shaft. Meanwhile, the threaded shaft connected to the outer wall of the fixed plate can control the sliding plate fixed in the middle of the connecting plate to slide on the inner wall of the fixed plate while rotating. This allows the parts set on the sliding plate to move up and down while being positioned and supported, thus meeting processing requirements.

[0022] 2. In this utility model, cylinders are fixed around the center of the top surface of the base. The cylinders drive the sliding rod fixed at its output end to slide. At the same time, the fixing plate fixed at the other end of the cylinder can drive the fixing soft claw to clamp onto the outer wall of the part's base plate, thereby positioning and processing the part to meet the usage requirements. Attached Figure Description

[0023] Figure 1 This is a perspective view of the front side of the base of a positioning device for CVD silicon carbide processing proposed in this utility model;

[0024] Figure 2 This is a structural diagram of a controller for a positioning device in CVD silicon carbide processing proposed in this utility model;

[0025] Figure 3 This is a partial structural diagram of a sliding shaft for a positioning device in CVD silicon carbide processing proposed in this utility model;

[0026] Figure 4 This is a schematic diagram of the cylinder structure for a positioning device in CVD silicon carbide processing proposed in this utility model.

[0027] Figure 5 This is a structural diagram of a part cover for a positioning device used in CVD silicon carbide processing, as proposed in this utility model.

[0028] Legend:

[0029] 1. Base; 2. Positioning mechanism; 201. Cylinder; 202. Sliding rod; 203. Fixing plate one; 204. Fixing soft claw; 205. Part cover; 206. Part base plate; 3. Sliding groove; 4. Sliding shaft; 5. Connecting column; 6. Threaded shaft one; 7. Fixing plate two; 8. Threaded shaft two; 9. Connecting plate; 10. Threaded sleeve; 11. Sliding plate; 12. Square pad; 13. Round pad; 14. Controller; 15. Protective plate; 16. Protective strip; 17. Protective pad; 18. Handle; 19. Anti-slip sleeve; 20. Protective plate; 21. Soft strip; 22. Protective pad. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Please see the appendix Figure 1 - Appendix Figure 3 This utility model provides an embodiment of a positioning device for CVD silicon carbide processing, comprising a base 1. Sliding grooves 3 are formed around the top surface of the outer wall of the base 1 near the center. Sliding shafts 4 are slidably connected to the outer walls of the sliding grooves 3. Connecting posts 5 are slidably connected to the top of the inner walls of the sliding shafts 4. A second fixing plate 7 is fixedly connected to the top of the outer wall of the connecting post 5. A first threaded shaft 6 is threadedly connected to the top of the inner wall of the connecting post 5. Threaded shafts 8 are fixedly threaded to the left and right sides of the outer walls of the second fixing plate 7. A sliding plate 11 is slidably connected to the inner wall of the second fixing plate 7. A connecting plate 9 is fixedly connected to the front side of the outer wall of the fixed plate 7. The connecting plate 9 slides on the left and right sides of the outer wall of the two connecting plates 9. Threaded sleeves 10 are fixedly connected to the outer walls of the two connecting plates 9 on opposite sides. A sliding plate 11 is slidably connected to the inner wall of the fixed plate 7. A connecting plate 9 is fixedly connected to the front side of the outer wall of the sliding plate 11. The connecting plate 9 can slide on the left and right sides of the outer wall of the fixed plate 7 to facilitate position adjustment. Multiple threaded shafts 8 are threadedly connected to the corresponding threaded sleeves 10. A positioning mechanism 2 is provided on the top of the base 1. The positioning mechanism 2 is used to position and fix the parts.

[0032] Specifically, several sliding grooves 3 are provided around the top surface of the outer wall of the base 1 near the center. The outer walls of these sliding grooves 3 are slidably connected to multiple sliding shafts 4, allowing the sliding shafts 4 to move freely within the sliding grooves 3. A connecting post 5 is slidably connected to the top of the inner wall of each sliding shaft 4. A fixing plate 7 is fixedly connected to the top of the outer wall of the connecting post 5. A threaded shaft 6 is threadedly connected to the top of the inner wall of the connecting post 5, ensuring a tight fit between the connecting post 5 and the threaded shaft 6. Threaded shafts 8 are fixedly threadedly connected to the left and right sides of the outer wall of the fixing plate 7. These threaded shafts 8 are tightly fitted with the fixing plate 7, ensuring the stability of the structure. Threaded sleeves 10 are fixedly connected to the outer walls of the two connecting plates 9 on opposite sides. These threaded sleeves 10 are threadedly connected to the corresponding threaded shafts 8, enabling precise adjustment. In addition, a positioning mechanism 2 is provided on the top of the base 1. This positioning mechanism 2 is used to position and fix the parts, ensuring the stability of the entire device and the accuracy of operation.

[0033] Please see the appendix Figure 4 - Appendix Figure 5 The positioning mechanism 2 includes cylinders 201. The bottom of the outer wall of multiple cylinders 201 is fixed to the top surface of the base 1 near the center perimeter. The output ends of multiple cylinders 201 are all fixedly connected to sliding rods 202. The other end of the sliding rods 202 is fixedly connected to a fixing plate 203. The outer walls of the two fixing plates 203 are fixedly connected to adjacent sides. A part base plate 206 is installed in the center of the top surface of the base 1. A part cover 205 is provided on the top of the part base plate 206. The outer walls of multiple fixing claws 204 are in contact with the corresponding positions of the outer walls of the part base plate 206.

[0034] Specifically, the output ends of multiple cylinders 201 are fixedly connected to sliding rods 202, and the other ends of these sliding rods 202 are fixedly connected to fixed plates 203. Each pair of adjacent fixed plates 203 have a corresponding fixing claw 204 fixedly installed on one side of their outer walls. In addition, a part base plate 206 is provided at the center of the top surface of the base 1, and a part cover 205 is provided on the top of the part base plate 206. The outer walls of these fixing claws 204 and the outer walls of the part base plate 206 are connected to ensure the stability and functionality of the entire mechanical structure.

[0035] Please see the appendix Figure 1 - Appendix Figure 3Square pads 12 are fixedly connected to the four corners of the top of cylinder 201. Protective pads 22 are fixedly connected to the front and rear edges of the outer wall of base 1. Soft strips 21 are fixedly connected to the front and rear edges of the outer wall of base 1. Protective plates 15 are fixedly connected to the left and right edges of the outer wall of base 1. Circular pads 13 are fixedly connected to the left and right edges of the outer wall of base 1. Protective pads 17 are fixedly connected to the four corners of the top of base 1. Protective plates 15 are fixedly connected to the left and right edges of the outer wall of base 1. These protective plates 15 can effectively prevent base 1 from being impacted or scratched from the side. To enhance the protective effect, circular pads 13 are fixedly connected to the left and right edges of the outer wall of base 1. The rounded shape of the circular pads 13 helps to disperse pressure and reduce damage caused by excessive local force.

[0036] Specifically, square pads 12 are fixedly connected to the four corners of the top of the cylinder 201. These square pads 12 provide additional support and stability to ensure the stability of the cylinder 201 during operation. At the same time, protective pads 22 are fixedly connected to the front and rear sides of the outer wall of the base 1 near the edge. The main function of these protective pads 22 is to protect the base 1 from damage when subjected to external impacts. In addition, soft strips 21 are fixedly connected to the front and rear sides of the outer wall of the base 1. The soft strips 21 not only provide a cushioning effect to reduce the damage that the base 1 may suffer during movement or transportation, but also, protective pads 17 are fixedly connected to the four corners of the top of the base 1. These protective pads 17, together with the square pads 12, provide all-round protection for the base 1, ensuring its durability and safety in various working environments.

[0037] Please see the appendix Figure 1 - Appendix Figure 3 Handles 18 are fixedly connected to the front and rear sides of the top of the base 1. Anti-slip sleeves 19 are fixedly connected to the outer walls of the multiple handles 18. A controller 14 is fixedly connected to the rear right side of the top of the base 1. The controller 14 and the cylinder 201 are electrically connected. Protective strips 16 are fixedly connected to the left and right sides of the top of the base 1 near the edge. Protective plates 20 are fixedly connected to the four corners of the top outer wall of the base 1. An electrical connection is achieved between the controller 14 and the cylinder 201, ensuring accurate signal transmission and execution. To protect the edges of the base 1 from damage, protective strips 16 are fixedly connected to the left and right sides of the top of the base 1 near the edge.

[0038] Specifically, handles 18 are fixedly connected to the front and rear sides of the top of the base 1. These handles 18 make it convenient for users to grip and move the base 1. In order to increase the comfort and safety of gripping, anti-slip sleeves 19 are fixedly connected to the outer walls of multiple handles 18. In addition, to improve the convenience of user operation, a controller 14 is fixedly connected to the rear right side of the top of the base 1. Users can control the relevant functions of the base 1 through the controller 14. In order to fully protect the four corners of the top of the outer wall of the base 1, protective plates 20 are fixedly connected. These protective plates 20 can not only prevent damage caused by collision.

[0039] Working principle: Sliding shafts 4 slide on the outer walls of multiple sliding grooves 3. At the same time, connecting columns 5 sliding on the inner walls of sliding shafts 4 can control the up and down movement of the fixed plate 7 fixed at the top of the outer wall of connecting column 5 through threaded shaft 6 connected to the top thread. While the threaded shaft 8 connected to the outer wall of the fixed plate 7 rotates, it drives the connecting plate 9 fixed on the outer wall of the threaded sleeve 10 to slide through the threaded connection with the threaded sleeve 10. This controls the sliding plate 11 fixed in the middle of the connecting plate 9 to slide on the inner wall of the fixed plate 7, so that the parts set on the sliding plate 11 can move up and down while being positioned and supported, thus meeting the processing requirements.

[0040] Cylinders 201 are fixed around the center of the top surface of the base 1. The cylinders 201 drive the sliding rod 202 fixed at its output end to slide. At the same time, the fixing plate 203 fixed at the other end of the cylinder 201 drives the fixing soft claw 204 to clamp onto the outer wall of the part base plate 206, thereby positioning and processing the part to meet the usage requirements.

[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A positioning device for CVD silicon carbide processing, comprising a base (1), characterized in that: The outer wall top surface of the base (1) is provided with sliding grooves (3) around the center. Sliding shafts (4) are slidably connected to the outer walls of the multiple sliding grooves (3). A connecting column (5) is slidably connected to the top of the inner wall of the sliding shaft (4). A fixing plate (7) is fixedly connected to the top of the outer wall of the connecting column (5). A threaded shaft (6) is threadedly connected to the top of the inner wall of the connecting column (5). Threaded shafts (8) are fixedly threaded to the left and right sides of the outer wall of the fixing plate (7). The inner wall of the base (1) is slidably connected to a sliding plate (11), and a connecting plate (9) is fixedly connected to the front side of the outer wall of the sliding plate (11). The connecting plate (9) slides on the left and right sides of the outer wall of the fixed plate (7). Threaded sleeves (10) are fixedly connected to the outer walls of the two connecting plates (9) on opposite sides. Multiple threaded shafts (8) are threadedly connected to the corresponding threaded sleeves (10). A positioning mechanism (2) is provided on the top of the base (1). The positioning mechanism (2) is used to position and fix the parts.

2. A positioning device for CVD silicon carbide processing according to claim 1, wherein: The positioning mechanism (2) includes cylinders (201). The bottom of the outer walls of multiple cylinders (201) are fixed to the top surface of the base (1) near the center perimeter. The output ends of multiple cylinders (201) are all fixedly connected to sliding rods (202). The other end of the sliding rods (202) is fixedly connected to a fixing plate (203). The outer walls of two fixing plates (203) are fixedly connected to adjacent sides of each other. A part base plate (206) is installed in the center of the top surface of the base (1). A part cover (205) is provided on the top of the part base plate (206). The outer walls of multiple fixing claws (204) are in contact with the corresponding positions of the outer walls of the part base plate (206).

3. A positioning device for CVD silicon carbide processing according to claim 2, wherein: Square pads (12) are fixedly connected to the four corners of the top of the cylinder (201), and protective pads (22) are fixedly connected to the front and rear sides of the outer wall of the base (1) near the edge.

4. A positioning device for CVD silicon carbide processing as defined in claim 1, wherein: The base (1) has flexible strips (21) fixedly connected to the front and rear sides of its outer wall, and protective plates (15) fixedly connected to the left and right sides of its outer wall.

5. A positioning device for CVD silicon carbide processing as defined in claim 1, wherein: Circular pads (13) are fixedly connected to the left and right sides of the outer wall of the base (1) near the edge, and protective pads (17) are fixedly connected to the four corners of the top of the base (1).

6. A positioning device for CVD silicon carbide processing as defined in claim 1, wherein: The base (1) has handles (18) fixedly connected to the front and rear sides of the top, and anti-slip sleeves (19) are fixedly connected to the outer walls of the multiple handles (18).

7. The positioning device for CVD silicon carbide processing according to claim 1, characterized in that: A controller (14) is fixedly connected to the rear right side of the top of the base (1), and the controller (14) is electrically connected to the cylinder (201).

8. A positioning device for CVD silicon carbide processing as defined in claim 1, wherein: Protective strips (16) are fixedly connected to the top left and right sides of the base (1) near the edge, and protective plates (20) are fixedly connected to the four corners of the top of the outer wall of the base (1).

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