Film removing equipment for copper film anti-adhesion plate

Abstract

The utility model discloses film removing equipment for a copper film anti-adhesion plate, which comprises a placing support, an anti-adhesion plate body is placed on the placing support, a copper film body is arranged on the anti-adhesion plate body, a movable conveying component is arranged on one side of the placing support, a movable rod is connected onto the movable conveying component, a film shoveling component is arranged on the movable rod, and a film removing component is arranged on the film shoveling component. According to the film removing equipment for the copper film anti-adhesion plate, the arranged movable conveying assembly can drive a scraper on the film shoveling assembly to move, a copper film can be effectively shoveled through slow movement of the scraper, the effect of removing the copper film is achieved, in the moving process of the arranged film removing vibration assembly and a moving rod, the film shoveling assembly is located above the anti-adhesion plate body, and therefore the copper film can be effectively removed. And the rotating shaft is driven to continuously rotate while being driven to move, so that the knocking head is driven to rotate to knock the bottom of the anti-adhesion plate body, the copper film body is separated from the anti-adhesion plate body more quickly through vibration knocking, and the copper film body is more conveniently and quickly shoveled away by the scraper.

Description

Technical Field

[0001] This utility model relates to the field of anti-sticking plate removal technology, and in particular to a copper film anti-sticking plate removal device. Background Technology

[0002] The electricity generated by the action of light is called optoelectronics. Based on optoelectronics, it is a technical discipline that integrates optics, precision mechanics, electronics and computer technology to solve various engineering application problems. The optoelectronics industry has developed rapidly in modern times, and its scope has gradually expanded. It has made significant progress in fields such as optical communication, lasers, optoelectronic displays, optics, solar photovoltaics, electronic engineering, and the Internet of Things, and is gradually integrating into a wider space.

[0003] In coating processes such as vacuum sputtering, target atoms are sputtered out under the action of an electric field. In addition to being deposited on the target substrate to form the required thin film, some sputtered atoms will also fly onto the inner wall of the sputtering equipment. As part of the inner wall of the equipment, the surface of the anti-attachment plate will be attached with these sputtered copper atoms, gradually forming a copper film. In order to increase the service life of optoelectronic equipment, it is necessary to remove the copper film on the surface of the plate. Therefore, a copper film anti-attachment plate removal device is proposed. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a copper film anti-sticking plate removal device to solve the above-mentioned problems.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A copper film anti-sticking plate removal device includes a placement bracket on which an anti-sticking plate body is placed. A copper film body is disposed on the anti-sticking plate body. A movable conveying component is disposed on one side of the placement bracket. A movable rod is connected to the movable conveying component. A film scraping component is disposed on the movable rod and is located above the anti-sticking plate body. A film removal vibration component is disposed on one side of the movable rod and is located below the anti-sticking plate body.

[0007] Preferably, the film scraping assembly includes a mounting rod fixedly mounted on a movable rod, and a scraper is fixedly mounted on one side of the mounting rod, with the bottom of the scraper contacting the top of the anti-stick plate body.

[0008] Preferably, the membrane removal vibration assembly includes a rotating shaft rotatably mounted on one side of the moving rod, and a plurality of striking heads are provided on the rotating shaft, the plurality of striking heads being adapted to the bottom of the anti-collision plate body.

[0009] Preferably, a sleeve block is fixedly sleeved on the rotating shaft, a compression groove is provided on one side of the sleeve block, one end of the striking head extends into the compression groove, and a compression spring is fixedly installed between the end of the striking head and the inner wall of the compression groove.

[0010] Preferably, a rotating gear is fixedly sleeved on the rotating shaft, and a rack is fixedly installed on one side of the support, with the rack meshing with the rotating gear.

[0011] Preferably, the mobile conveying assembly includes a conveying bracket disposed on one side of the placement bracket, a drive motor fixedly installed on one side of the conveying bracket, a rotating lead screw connected to the output end of the drive motor, the rotating lead screw being located inside the conveying bracket, and a lead screw sleeve fixedly installed at the top end of the moving rod, the lead screw sleeve being threaded onto the rotating lead screw.

[0012] Preferably, the top of the placement bracket is provided with multiple sets of positioning blocks, which are located at both ends of the anti-collision plate body.

[0013] Compared with the prior art, the beneficial effects of this utility model are: the copper film anti-adhesion plate removal equipment places the anti-adhesion plate body on the placement bracket, and the set moving conveying component can drive the scraper on the scraping component to move. Through the slow movement of the scraper, the copper film can be effectively removed, and the copper film removal effect can be achieved.

[0014] The set-up film removal vibration component, during the movement of the moving rod, drives the rotating shaft to move and also rotates continuously, thereby driving the striking head to rotate and strike the bottom of the anti-stick plate body. Through vibration and striking, the copper film body is separated from the anti-stick plate body more quickly, and the scraper can more easily and quickly remove the copper film body. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a partial three-dimensional structural diagram of the present invention;

[0017] Figure 3 This is a cross-sectional structural diagram of the present invention;

[0018] Figure 4 This utility model Figure 2 A schematic diagram of the structure of part A.

[0019] In the diagram: 1. Placement bracket; 2. Anti-collision plate body; 3. Copper film body; 4. Conveying bracket; 5. Drive motor; 6. Rotating lead screw; 7. Lead screw sleeve; 8. Moving rod; 9. Mounting rod; 10. Scraper; 11. Rotating shaft; 12. Rotating gear; 13. Rack; 14. Connecting block; 15. Compression groove; 16. Striking head; 17. Compression spring. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Example: Refer to Figure 1 and Figure 2 As shown, a copper film anti-sticking board removal device includes a placement bracket 1, an anti-sticking board body 2 placed on the placement bracket 1, a copper film body 3 disposed on the anti-sticking board body 2, and multiple sets of positioning blocks disposed on the top of the placement bracket 1. The multiple sets of positioning blocks are located at both ends of the anti-sticking board body 2. The anti-sticking board body 2 is placed on the placement bracket 1, and the positioning blocks on both sides are used to fix the position of the anti-sticking board body 2 to prevent displacement during the copper film removal process.

[0022] Reference Figure 1 , Figure 2 and Figure 3 As shown, a movable conveying assembly is provided on one side of the placement bracket 1. A movable rod 8 is connected to the movable conveying assembly, and a film scraping assembly is provided on the movable rod 8. The film scraping assembly is located above the anti-stick plate body 2. The movable conveying assembly includes a conveying bracket 4 provided on one side of the placement bracket 1. A drive motor 5 is fixedly installed on one side of the conveying bracket 4. The output end of the drive motor 5 is connected to a rotating lead screw 6, which is located inside the conveying bracket 4. A lead screw sleeve 7 is fixedly installed at the top of the movable rod 8, and the lead screw sleeve 7 is threaded onto the rotating lead screw 6. The component includes a mounting rod 9 fixedly installed on a movable rod 8. A scraper 10 is fixedly installed on one side of the mounting rod 9. The bottom of the scraper 10 contacts the top of the anti-stick plate body 2. When the drive motor 5 on the movable conveying component is started, the drive motor 5 drives the rotating screw 6 to rotate, thereby driving the screw sliding sleeve 7 to move. After the screw sliding sleeve 7 moves, it drives the movable rod 8 to move, thereby driving the scraper 10 on the film scraping component to move. After the scraper 10 moves, it can scrape off the copper film on the upper part of the anti-stick plate body 2. Through slow movement, the copper film can be effectively removed.

[0023] Reference Figure 2 , Figure 3 and Figure 4As shown, a film-removing vibration assembly is provided on one side of the moving rod 8. The film-removing vibration assembly is located below the anti-collision plate body 2. The film-removing vibration assembly includes a rotating shaft 11 rotatably mounted on one side of the moving rod 8. Multiple striking heads 16 are provided on the rotating shaft 11. The multiple striking heads 16 are adapted to the bottom of the anti-collision plate body 2. A sleeve block 14 is fixedly sleeved on the rotating shaft 11. A compression groove 15 is opened on one side of the sleeve block 14. One end of the striking head 16 extends into the compression groove 15. A compression spring 17 is fixedly installed between the end of the striking head 16 and the inner wall of the compression groove 15. A rotating gear 12 is fixedly sleeved on the rotating shaft 11. A rack 13 is fixedly installed on one side of the support 1. The rack 13 meshes with the rotating gear 12. During the movement of the moving rod 8, the rotating shaft 11 on the film removal vibration assembly will move. The rotating gear 12 meshes with the rack 13. After the rotating shaft 11 moves, it will rotate continuously, thereby driving the sleeve block 14 to rotate. After the sleeve block 14 rotates, it will drive the striking head 16 to rotate. The striking head 16 can move in the compression groove 15, but will not disengage from the compression groove 15. When the striking head 16 rotates to the top, it will contact and squeeze the bottom of the anti-stick plate body 2. A certain amount of knocking vibration will be generated at the moment of contact. After squeezing, the striking head 16 will be compressed into the compression groove 15, with a certain amount of compression movement. Through vibration knocking, the copper film body 3 separates from the anti-stick plate body 2 more quickly, and the scraper 10 can remove the copper film body 3 more conveniently and quickly.

[0024] In use: After the copper film accumulates on the surface of the anti-collision plate body 2, it needs to be removed. Place the anti-collision plate body 2 on the placement bracket 1 and fix its position. Start the drive motor 5 to run, which drives the scraper 10 on the film scraping assembly to move. After the scraper 10 moves, it can scrape off the copper film on the upper part of the anti-collision plate body 2. During the movement of the moving rod 8, it will drive the rotating shaft 11 on the film removal vibration assembly to move. After the rotating shaft 11 moves, it will rotate continuously, thereby driving the striking head 16 to rotate. When the striking head 16 rotates to the top, it will contact and squeeze the bottom of the anti-collision plate body 2. A certain amount of knocking vibration will be generated at the moment of contact. Through vibration and knocking, the copper film body 3 is separated from the anti-collision plate body 2 more quickly, and the scraper 10 can more easily and quickly remove the copper film body 3. It is convenient to use.

[0025] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A film removing apparatus for a copper film anti-sticking board comprising a placement support (1), characterized in that, The placement bracket (1) is on which the anti-stick plate body (2) is placed. The anti-stick plate body (2) is on which the copper film body (3) is provided. A moving conveying component is provided on one side of the placement bracket (1). A moving rod (8) is connected to the moving conveying component. A film scraping component is provided on the moving rod (8). The film scraping component is located above the anti-stick plate body (2). A film removal vibration component is provided on one side of the moving rod (8). The film removal vibration component is located below the anti-stick plate body (2).

2. The film removing apparatus for a copper film anti-attachment board according to claim 1, wherein The film scraping assembly includes a mounting rod (9) fixedly mounted on a movable rod (8), and a scraper (10) is fixedly mounted on one side of the mounting rod (9). The bottom of the scraper (10) is in contact with the top of the anti-stick plate body (2).

3. The film removing apparatus for a copper film anti-attachment board according to claim 1, wherein The membrane removal vibration assembly includes a rotating shaft (11) rotatably mounted on one side of the moving rod (8), and a plurality of striking heads (16) are provided on the rotating shaft (11), which are adapted to the bottom of the anti-stick plate body (2).

4. The film removing apparatus for a copper film protection board according to claim 3, wherein A sleeve block (14) is fixedly sleeved on the rotating shaft (11). A compression groove (15) is provided on one side of the sleeve block (14). One end of the striking head (16) extends into the compression groove (15). A compression spring (17) is fixedly installed between the end of the striking head (16) and the inner wall of the compression groove (15).

5. The film removing apparatus for a copper film protection board according to claim 3, wherein A rotating gear (12) is fixedly sleeved on the rotating shaft (11), and a rack (13) is fixedly installed on one side of the support (1), with the rack (13) meshing with the rotating gear (12).

6. The film removing apparatus for a copper film protection board according to claim 1, wherein The mobile conveying assembly includes a conveying bracket (4) disposed on one side of the placement bracket (1), a drive motor (5) is fixedly installed on one side of the conveying bracket (4), the output end of the drive motor (5) is connected to a rotating lead screw (6), the rotating lead screw (6) is located inside the conveying bracket (4), and a lead screw sleeve (7) is fixedly installed at the top of the moving rod (8), the lead screw sleeve (7) is threaded onto the rotating lead screw (6).

7. The film removing apparatus for a copper film protection board according to claim 1, wherein The top of the placement bracket (1) is provided with multiple sets of positioning blocks, which are located at both ends of the anti-collision plate body (2).

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