Liquid supply equipment

Abstract

The utility model discloses liquid supply equipment, which belongs to the technical field of photoresist dilution and comprises a storage cabinet arranged on one side of main equipment, an infrared sensor arranged in the storage cabinet, a fire-fighting cabinet arranged on one side of the storage cabinet and a liquid storage tank arranged in the storage cabinet, the liquid storage tank is communicated with the main equipment through a liquid supply pump, and the liquid storage tank is communicated with a small diluent bucket through a liquid supplementing pump. An air supply mechanism is arranged on one side of the storage cabinet and comprises a first air supply part, a second air supply part and a third air supply part, the first air supply part is communicated with the liquid storage tank, the second air supply part is communicated with the liquid supply pump, and the third air supply part is communicated with the liquid supplementing pump. Redundant nitrogen, diluent steam and a small amount of mixed harmful gas of air in the liquid storage tank are discharged through the organic exhaust channel, the storage cabinet is independently communicated with factory exhaust, a small amount of leaked gas is directly discharged from the factory exhaust channel, diluent is supplemented into the liquid storage tank through the diluent small barrel, and the liquid storage tank is sealed. And the diluent in the liquid storage tank is supplemented into the main equipment through the liquid supply pump, so that raw material switching is completed.

Description

Technical Field

[0001] This utility model belongs to the field of photoresist dilution technology, and in particular relates to a liquid supply device. Background Technology

[0002] The diluents used in existing equipment are mostly supplied centrally by the plant management, and the equipment itself lacks large-capacity storage space. When developing new processes, different diluents are needed for the new photoresists, while ensuring the production of existing products. Therefore, there is an urgent need for a liquid supply system to solve the problem of small-batch trial production of new products. Utility Model Content

[0003] The purpose of this invention is to provide a liquid supply device to solve the problems existing in the prior art.

[0004] To achieve the above objectives, this utility model provides the following solution: This utility model provides a liquid supply device, including a storage cabinet placed on one side of a main device. An infrared sensor is installed inside the storage cabinet. A fire extinguishing cabinet is installed on one side of the storage cabinet. A liquid storage tank is installed inside the storage cabinet. The liquid storage tank is connected to the main device via a liquid supply pump. A diluent container is connected to the liquid storage tank via a replenishment pump. An air supply mechanism is installed on one side of the storage cabinet. The air supply mechanism includes a first air supply section, a second air supply section, and a third air supply section. The first air supply section is connected to the liquid storage tank, the second air supply section is connected to the liquid supply pump, and the third air supply section is connected to the replenishment pump. A waste gas treatment device and a waste liquid treatment device are connected to the liquid storage tank.

[0005] Preferably, a one-way valve and a liquid level sensor are provided between the diluent container and the replenishment pump, and a first manual valve is provided between the replenishment pump and the storage tank.

[0006] Preferably, the top surface of the liquid storage tank is provided with a first pressure sensor and a liquid level sensor.

[0007] Preferably, a second manual valve is provided between the liquid storage tank and the liquid supply pump, and a fifth pressure sensor, a second automatic valve and a fifth manual valve are sequentially provided between the liquid supply pump and the main equipment.

[0008] Preferably, the main equipment is connected to an old diluent supply device via a fourth manual valve.

[0009] Preferably, the liquid storage tank is connected to the waste gas treatment equipment via a third automatic valve.

[0010] Preferably, the first gas supply unit includes a third pressure regulating valve, a fourth pressure sensor, and a filter, which are sequentially connected to the liquid storage tank.

[0011] Preferably, the second air supply unit includes a second pressure regulating valve, a third pressure sensor, and a second pneumatic valve, which are sequentially connected to the liquid supply pump.

[0012] Preferably, the third air supply unit includes a first pressure regulating valve, a second pressure sensor, and a first pneumatic valve that are sequentially connected to the replenishment pump. The first pneumatic valve and the second pneumatic valve are controlled by a pneumatic reversing valve.

[0013] Preferably, a first automatic valve is provided between the liquid supply pump and the waste liquid treatment equipment, and a third manual valve is provided between the bottom of the liquid storage tank and the waste liquid treatment equipment.

[0014] This utility model discloses the following technical effects: The storage cabinet is placed next to the main equipment, and a fire pipe interface is opened on its adjacent side to the fire cabinet, and the two are connected by pipes. The fire cabinet is equipped with a carbon dioxide fire extinguisher, which can be activated immediately when the infrared sensor in the storage cabinet detects a fire. Excess nitrogen, diluent vapor, and a small amount of air mixed hazardous gases in the storage tank are discharged through an organic exhaust channel. The storage cabinet is separately connected to the plant exhaust, and a small amount of leaked gas is discharged directly from the plant exhaust pipe. The external interfaces on the storage tank are all connected to the corresponding external pipes through the through-plate connectors on the storage cabinet. Diluent is added to the storage tank through a small diluent container, and the diluent in the storage tank is added to the main equipment through a liquid supply pump to complete the raw material switching. While adding diluent to the storage tank, nitrogen is continuously charged into the storage tank to prevent air from dissolving into the diluent. Attached Figure Description

[0015] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings:

[0016] Figure 1 This is a schematic diagram illustrating the working principle of the liquid supply device of this utility model;

[0017] Figure 2 This is a schematic diagram of the connection structure between the storage cabinet and the fire cabinet of this utility model;

[0018] Figure 3 This is a schematic diagram of the internal structure of the storage cabinet of this utility model.

[0019] In the diagram: 1. Diluent container; 2. Liquid level sensor; 3. First manual valve; 4. First pressure sensor; 5. Storage tank; 6. Liquid level sensor; 7. Second manual valve; 8. Third manual valve; 9. Supply pump; 10. First automatic valve; 11. Waste liquid treatment equipment; 12. Check valve; 13. Replenishment pump; 14. Used diluent supply equipment; 15. Second pressure sensor; 16. First pressure regulating valve; 17. Third pressure sensor; 18. Second pressure regulating valve; 19. Fourth pressure sensor; 20. Third pressure regulating valve; 21. Pneumatic directional valve; 22. First pneumatic valve; 23. Second pneumatic valve; 24. Filter; 25. Fifth pressure sensor; 26. Second automatic valve; 27. Fourth manual valve; 28. Third automatic valve; 29. ​​Waste gas treatment equipment; 30. Fifth manual valve; 31. Main equipment; 32. Infrared sensor; 33. Storage cabinet; 34. Fire cabinet. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0022] Reference Figures 1-3 As shown, this embodiment provides a liquid supply device, including a storage cabinet 33 placed on one side of the main device 31. An infrared sensor 32 is installed inside the storage cabinet 33. A fire cabinet 34 is installed on one side of the storage cabinet 33. A liquid storage tank 5 is installed inside the storage cabinet 33. The liquid storage tank 5 is connected to the main device 31 through a liquid supply pump 9. The liquid storage tank 5 is connected to a diluent tank 1 through a replenishment pump 13. An air supply mechanism is installed on one side of the storage cabinet 33. The air supply mechanism includes a first air supply section, a second air supply section, and a third air supply section. The first air supply section is connected to the liquid storage tank 5. The second air supply section is connected to the liquid supply pump 9. The third air supply section is connected to the replenishment pump 13. The liquid storage tank 5 is connected to a waste gas treatment device 29 and a waste liquid treatment device 11.

[0023] Storage cabinet 33 is placed next to main equipment 31, and its adjacent side to fire cabinet 34 has a fire pipe interface, and the two are connected by pipes. Fire cabinet 34 is equipped with a carbon dioxide fire extinguisher, which can be activated immediately when the infrared sensor 32 in storage cabinet 33 detects a fire. Excess nitrogen, diluent vapor, and a small amount of air mixed hazardous gases in liquid storage tank 5 are discharged through an organic exhaust channel. Storage cabinet 33 is separately connected to the plant exhaust, and a small amount of leaked gas is discharged directly from the plant exhaust pipe. The external interfaces on liquid storage tank 5 are all connected to the corresponding external pipes through the through-plate connectors on storage cabinet 33. Diluent is added to liquid storage tank 5 through diluent bucket 1, and the diluent in liquid storage tank 5 is added to main equipment 31 through liquid supply pump 9 to complete the raw material switching. While adding diluent to liquid storage tank 5, nitrogen is continuously charged into liquid storage tank 5 to prevent air from dissolving into the diluent.

[0024] The scheme is further optimized by installing a one-way valve 12 and a liquid level sensor 2 between the diluent tank 1 and the replenishment pump 13, and a first manual valve 3 between the replenishment pump 13 and the storage tank 5.

[0025] The diluent container 1 is connected to the storage tank 5 via a pipe, passing through a one-way valve 12, a liquid level sensor 2, a replenishment pump 13, a first manual valve 3, and a storage tank 5. During operation, the operator first inserts the pipe into the diluent container 1, then manually opens the first manual valve 3. The replenishment pump 13 then operates to replenish the liquid into the storage tank 5. When all the diluent in the diluent container 1 has been pumped into the storage tank 5, the liquid level sensor 2 sends a signal, at which point the replenishment pump 13 stops operating. The operator can then choose to close the first manual valve 3 to end the replenishment or switch to the next diluent container 1 to continue replenishing.

[0026] To further optimize the design, a first pressure sensor 4 and a liquid level sensor 6 are respectively installed on the top surface of the liquid storage tank 5.

[0027] The liquid level sensor 6 is fixed on the top of the storage tank 5 and can display the real-time liquid level in the tank through the human-machine interface. Personnel can perform liquid replenishment, supply, or drainage operations based on four conditions: Empty, Low, Full, and Over Full. This can effectively prevent the storage tank 5 from overflowing due to excessive liquid replenishment.

[0028] The scheme is further optimized by installing a second manual valve 7 between the liquid storage tank 5 and the liquid supply pump 9, and a fifth pressure sensor 25, a second automatic valve 26 and a fifth manual valve 30 are installed sequentially between the liquid supply pump 9 and the main equipment 31.

[0029] The scheme was further optimized by connecting the main equipment 31 to the old diluent supply equipment 14 via the fourth manual valve 27.

[0030] When switching from the old diluent to the new diluent, the fourth manual valve 27 closes, the fifth manual valve 30 opens, the second manual valve 7 opens, the second automatic valve 26 opens, and the liquid supply pump 9 operates, continuously supplying liquid into the equipment. A digital pressure sensor monitors the pipeline pressure of the main equipment to indirectly determine the diluent usage and transmits the signal to the PLC. When the supply is full, the liquid supply pump 9 stops operating; when a low liquid level is detected, the PLC starts the liquid supply pump 9 to supply liquid. When switching back from the new diluent to the old diluent, the liquid supply pump 9 stops operating, the second manual valve 7 closes, the second automatic valve 26 closes, and the fourth manual valve 27 opens, thus resuming production of the old product.

[0031] The solution was further optimized so that the liquid storage tank 5 was connected to the waste gas treatment equipment 29 through the third automatic valve 28.

[0032] To ensure safety, all metal pipes are made of SUS316 clean pipes and are equipped with a fifth pressure sensor 25 to monitor pipe pressure. Plastic pipes use anti-static PFA pipes, and all pipes are grounded. At the same time, the third automatic valve 28 is normally open, and hazardous gases in the liquid storage tank 5 are discharged into the waste gas treatment equipment 29 at any time. The liquid storage volume of the main equipment 31 is indirectly monitored through the fifth pressure sensor 25. The PLC program can automatically circulate and supply liquid to the main equipment 31, improving the equipment's working efficiency.

[0033] Further optimization of the scheme: the first gas supply unit includes a third pressure regulating valve 20, a fourth pressure sensor 19, and a filter 24, which are connected in sequence to the liquid storage tank 5.

[0034] The scheme is further optimized. The second air supply unit includes a second pressure regulating valve 18, a third pressure sensor 17, and a second pneumatic valve 23, which are connected in sequence to the liquid supply pump 9.

[0035] The scheme is further optimized. The third air supply unit includes a first pressure regulating valve 16, a second pressure sensor 15 and a first pneumatic valve 22, which are connected in sequence to the replenishment pump 13. The first pneumatic valve 22 and the second pneumatic valve 23 are controlled by a pneumatic reversing valve 21.

[0036] The nitrogen supplied from the plant passes through the through-plate connector on the side of the storage cabinet 33 and is divided into three paths. The first path, i.e., the first gas supply section, passes through the third pressure regulating valve 20, the fourth pressure sensor 19, and the filter 24 to enter the liquid storage tank 5, which is used to purge air from the liquid storage tank 5 to prevent air from dissolving into the diluent and causing process defects. The second path, i.e., the second gas supply section, passes through the second pressure regulating valve 18, the third pressure sensor 17, and the second pneumatic valve 23 to enter the liquid supply pump 9, which is used to power the liquid supply pump 9. The third path, i.e., the third gas supply section, passes through the first pressure regulating valve 16, the second pressure sensor 15, and the second pneumatic valve 23 to enter the replenishment pump 13, which is used to power the replenishment pump 13. The second pneumatic valve 23 and the first pneumatic valve 22 are both controlled by the pneumatic directional valve 21.

[0037] To further optimize the design, a first automatic valve 10 is installed between the liquid supply pump 9 and the waste liquid treatment equipment 11, and a third manual valve 8 is installed between the bottom of the storage tank 5 and the waste liquid treatment equipment 11.

[0038] When the liquid in storage tank 5 is not used for a long time or needs to be drained for other reasons, it can be drained using the liquid supply pump 9. The second manual valve 7 opens, the second automatic valve 26 closes, and the first automatic valve 10 opens. At this time, starting the liquid supply pump 9 will drain the liquid from the tank. Alternatively, it can be drained naturally by gravity. The second manual valve 7 opens, the third manual valve 8 opens, and the liquid automatically flows back to the waste liquid treatment equipment 11.

[0039] The left side of storage cabinet 33 has plant pipeline interfaces, with the organic exhaust interface at the upper left and the plant exhaust interface at the lower left. From top to bottom, the lower right side has the nitrogen inlet interface, the liquid supply interface, and the liquid drain interface. At the upper right are three nitrogen pressure regulating valves, which are used to regulate the nitrogen pressure of the replenishment pump 13, the liquid supply pump 9, and the storage tank 5, respectively.

[0040] In the description of this utility model, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0041] The embodiments described above are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Various modifications and improvements made to the technical solutions of the present utility model by those skilled in the art without departing from the spirit of the present utility model should fall within the protection scope defined by the claims of the present utility model.

Claims

1. A liquid supply apparatus characterized by comprising: The system includes a storage cabinet (33) placed on one side of the main equipment (31), an infrared sensor (32) installed inside the storage cabinet (33), a fire cabinet (34) installed on one side of the storage cabinet (33), a liquid storage tank (5) installed inside the storage cabinet (33), the liquid storage tank (5) being connected to the main equipment (31) via a liquid supply pump (9), the liquid storage tank (5) being connected to a diluent barrel (1) via a replenishment pump (13), an air supply mechanism installed on one side of the storage cabinet (33), the air supply mechanism including a first air supply section, a second air supply section and a third air supply section, the first air supply section being connected to the liquid storage tank (5), the second air supply section being connected to the liquid supply pump (9), the third air supply section being connected to the replenishment pump (13), the liquid storage tank (5) being connected to a waste gas treatment device (29), and the liquid storage tank (5) being connected to a waste liquid treatment device (11).

2. The liquid supply apparatus according to claim 1, wherein A one-way valve (12) and a liquid level sensor (2) are provided between the diluent container (1) and the replenishment pump (13), and a first manual valve (3) is provided between the replenishment pump (13) and the storage tank (5).

3. The liquid supply apparatus according to claim 1, wherein The top surface of the liquid storage tank (5) is respectively equipped with a first pressure sensor (4) and a liquid level sensor (6).

4. The liquid supply apparatus according to claim 1, wherein A second manual valve (7) is provided between the liquid storage tank (5) and the liquid supply pump (9), and a fifth pressure sensor (25), a second automatic valve (26) and a fifth manual valve (30) are provided sequentially between the liquid supply pump (9) and the main equipment (31).

5. The liquid supply apparatus according to claim 1, wherein The main equipment (31) is connected to the old diluent supply equipment (14) via the fourth manual valve (27).

6. The liquid supply device according to claim 1, characterized in that: The liquid storage tank (5) is connected to the waste gas treatment equipment (29) through the third automatic valve (28).

7. The liquid supply apparatus according to claim 1, wherein The first gas supply unit includes a third pressure regulating valve (20), a fourth pressure sensor (19), and a filter (24) that are connected in sequence to the liquid storage tank (5).

8. The liquid supply apparatus according to claim 1, wherein The second air supply unit includes a second pressure regulating valve (18), a third pressure sensor (17), and a second pneumatic valve (23) that are connected in sequence to the liquid supply pump (9).

9. The liquid supply apparatus according to claim 8, wherein The third air supply unit includes a first pressure regulating valve (16), a second pressure sensor (15), and a first pneumatic valve (22) that are connected in sequence to the replenishment pump (13). The first pneumatic valve (22) and the second pneumatic valve (23) are controlled by a pneumatic reversing valve (21).

10. The liquid supply apparatus according to claim 1, wherein A first automatic valve (10) is provided between the liquid supply pump (9) and the waste liquid treatment equipment (11), and a third manual valve (8) is provided between the bottom of the storage tank (5) and the waste liquid treatment equipment (11).

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