Scanning type film thickness measuring device

Abstract

The utility model discloses a scanning type film thickness measuring device, and belongs to the technical field of thickness gauges. Comprising a rack, a lower probe, an upper probe, a synchronous driving structure, two cross beams and two supporting rollers, the upper probe and the lower probe are oppositely arranged up and down, are respectively positioned above and below the thin film, and are respectively arranged on the two cross beams in a sliding manner; the synchronous driving structure is used for enabling the lower probe and the upper probe to synchronously move left and right; the two supporting rollers are arranged on the front side and the rear side of the rack respectively, can be arranged on the rack in a vertically adjustable mode and are located on the adjacent front portion and the adjacent rear portion of the upper portion of the lower probe respectively; the upper probe and the lower probe are an X-ray receiving probe and an X-ray transmitting probe respectively, and the distance between the upper probe and the lower probe is 10-20 mm; the front side and the rear side of the lower probe are gradually close from top to bottom, the left side or the right side is provided with a power interface, a data interface and a heat dissipation air inlet, and the other side is provided with an exhaust hole; and the radiating air inlet is connected with a compressed air supply device through an air pipe.

Description

Technical Field

[0001] This utility model belongs to the field of thickness gauge technology, and specifically relates to a scanning thin film thickness measuring device. Background Technology

[0002] A thin film is a thin, flexible, transparent sheet made of plastics, adhesives, rubber, or other materials. Examples include optical films, composite films, superconducting films, polyester films, nylon films, and plastic films. Films are widely used in the electronics, machinery, and printing industries. After production, to ensure film quality, thickness testing is required before shipment.

[0003] During the film production process, fluctuations such as temperature differences between day and night, inconsistent motor speeds due to grid voltage, and uneven heating of the die head can cause deviations in film thickness, with some areas being thicker and others thinner.

[0004] In existing technologies, the thickness of thin films can be measured using X-rays, ultrasound, lasers, and infrared rays.

[0005] For example, patent application number CN201720568786.6 discloses a low-cost, short-manufacturing-cycle X-ray thickness gauge, including a frame and an electrical control box mounted on the frame, an upper probe, a lower probe, a drive assembly, an upper sliding module that slides with the upper probe, and a lower sliding module that slides with the lower probe. The frame comprises two columns, an upper support beam and a lower support beam positioned between the two columns. The upper probe is mounted on the upper support beam, and the lower probe is mounted on the lower support beam. The columns, upper support beam, and lower support beam are all made of assembled aluminum profiles, and both ends of the upper and lower support beams are spliced ​​to the two columns. Both the upper and lower sliding modules are equipped with a drive belt, a groove for the drive belt, and a synchronous pulley. The lower sliding module is equipped with a small pulley that cooperates with the drive assembly. The drive assembly includes a motor, a large pulley, and a belt connecting the large and small pulleys. The upper and lower sliding modules are connected by a synchronous belt. The upper probe is equipped with an upper slider connected to a transmission belt, and the lower probe is equipped with a lower slider connected to a transmission belt. The upper probe is connected to the upper sliding module through a probe fixing frame. The upper slider is installed on the inner top of the probe fixing frame. The upper probe is connected to the probe fixing frame through an upper probe fixing seat, and the lower probe is connected to the lower slider through a lower probe fixing seat.

[0006] During actual use, the applicant discovered that the film is extremely thin. Compared to the substrate, the distance between the two probes is very small when using X-rays for thickness measurement. If the film droops downwards due to its own weight as it passes through the thickness measuring device, it not only affects the detection accuracy but may also cause the film to come into contact with the lower probe, scratching the underside of the film and rubbing against the lower probe. Utility Model Content

[0007] To address the aforementioned problems, this utility model provides a scanning thin film thickness measurement device. This device uses two support rollers to support the thin film and employs various methods to reduce the distance between the two support rollers, thereby ensuring effective support. The technical solution is as follows:

[0008] This utility model provides a scanning thin film thickness measurement device, which includes a frame 1, a lower probe 2, an upper probe 3, a synchronous drive structure, and two horizontal beams 9 arranged side by side. The horizontal beams 9 are arranged in a left-right direction and their two ends are mounted on the frame 1. The upper probe 3 and the lower probe 2 are arranged opposite each other, located above and below the film respectively, and are slidably mounted on the two horizontal beams 9. The synchronous drive structure is used to make the lower probe 2 and the upper probe 3 move synchronously in a left-right direction. The device also includes two support rollers 4 arranged side by side and located on the lower side of the film. Support rollers 4 are respectively located on the front and rear sides of the frame 1, and are adjustable up and down on the frame 1. They are located adjacent to the front and rear of the lower probe 2, respectively, and are arranged in the left and right direction. The upper probe 3 and the lower probe 2 are respectively the X-ray receiving probe and the X-ray emitting probe, and the distance between them is 10-20mm. The front and rear sides of the lower probe 2 gradually approach each other from top to bottom. A power interface 10, a data interface 11 and a heat dissipation air inlet 12 are provided on its left or right side, and an exhaust hole is provided on its other side. The heat dissipation air inlet 12 is connected to a compressed air supply device through an air pipe.

[0009] In this embodiment of the present invention, the frame 1 includes a bottom connecting frame, two side plates and a fixing seat at the lower end of the side plates. The two side plates are arranged side by side and are both vertically arranged. The bottom connecting frame is arranged in the left-right direction and is located between the lower ends of the two side plates. Two crossbeams 9 are respectively located at the lower and upper parts of the frame 1. The left and right ends of the crossbeams 9 are respectively fixed to the inner sides of the two side plates. The left and right ends of the support roller 4 are respectively located at the front or rear sides of the two side plates and are adjustable up and down on the side plates.

[0010] Specifically, in this embodiment of the present invention, the two ends of the support roller 4 are mounted on the side plate via bearing seats 13; the upper and lower parts of the bearing seats 13 are provided with elongated holes in the vertical direction, and the bearing seats 13 are fixed to the side plate by bolts passing through the elongated holes.

[0011] Furthermore, in this embodiment of the present invention, the top of the crossbeam 9 is provided with a linear guide rail 14 along the left and right direction, and the bottom of the lower probe 2 and the top of the upper probe 3 are both provided with guide rail sliders 15; the lower probe 2 is vertically upward and is located directly above the lower crossbeam 9, and it is slidably mounted on the linear guide rail 14 of the lower crossbeam 9 through the guide rail slider 15; the upper probe 3 is vertically downward and is located directly below the upper crossbeam 9, and it is slidably mounted on the linear guide rail 14 of the upper crossbeam 9 through the guide rail slider 15.

[0012] The synchronous drive structure in this embodiment includes a synchronous shaft 31, a servo motor 32, two synchronous belts 33, two active synchronous pulleys 34, and two driven synchronous pulleys 35. Each active synchronous pulley 34 corresponds to one driven synchronous pulley 35. The two synchronous belts 33 are respectively located at the upper and lower parts of the frame 1, with their middle portions connected to two guide rail sliders 15. The synchronous belts 33 are arranged in a left-right direction, with their two ends passing through two side plates and their two ends wrapped around the corresponding active synchronous pulleys 34 and driven synchronous pulleys 35. The active synchronous pulleys 34 and driven synchronous pulleys 35 are both arranged vertically. The two active synchronous pulleys 34 are arranged side by side on the outside of one side plate and are respectively located at the upper and lower ends of the synchronous shaft 31. The two driven synchronous pulleys 35 are arranged side by side on the outside of another side plate. The synchronous shaft 31 is arranged vertically on the outside of one side plate, with its middle portion connected to the servo motor 32.

[0013] The device in this embodiment of the present invention further includes two drag chains 16, which are respectively located on the front or rear side of the two crossbeams 9. The drag chains 16 are arranged in the left-right direction and are located between the guide rail slider 15 and the left or right side plate. The upper probe 3 is provided with a power interface 10 and a data interface 11 on its left or right side. The guide rail slider 15 is provided with a lubricating oil inlet 17. The power interface 10 is connected to the power supply device through a power cord. The data interface 11 is connected to the host computer through a signal line. The lubricating oil inlet 17 is connected to the lubricating oil supply device through a lubricating oil pipe. The air pipe, power cord, signal line and lubricating oil pipe are located in the corresponding drag chains 16.

[0014] In this embodiment of the present invention, the two cable chains 16 are located on the same side, and the power interface 10, data interface 11 and heat dissipation air inlet 12 are located on the same side.

[0015] Furthermore, the device in this embodiment of the present invention also includes a power end mounting box 5, a driven end mounting box 6, an upper housing 7, and a lower housing 8. The power end mounting box 5 and the driven end mounting box 6 are respectively located on the outer sides of the two side plates. The synchronous shaft 31, the servo motor 32, and the two active synchronous pulleys 34 are all located inside the power end mounting box 5, and the two driven synchronous pulleys 35 are located inside the driven end mounting box 6. The upper housing 7 and the lower housing 8 are both arranged in the left-right direction, and their left and right ends are respectively fixed to the inner sides of the two side plates. The upper housing 7 covers the upper crossbeam 9 and its guide rail slider 15, synchronous belt 33, and drag chain 16, and its bottom is open. It is located adjacent to and above the upper probe 3. The lower housing 8 covers the lower crossbeam 9 and its guide rail slider 15, synchronous belt 33, and drag chain 16, and its top is open. It is located adjacent to and below the lower probe 2.

[0016] Furthermore, in this embodiment of the present invention, the top of the power end mounting box 5 is provided with an audible and visual alarm 18, and the front or rear side of the driven end mounting box 6 is provided with a control button 19.

[0017] In this embodiment of the invention, the lower probe 2 includes a housing 21, a high-voltage power supply 22 at the bottom of the housing 21, a mounting frame 23 between the top of the housing 21 and the top of the high-voltage power supply 22, an X-ray emitter 24 located inside the mounting frame 23 and at the top of the housing 21, and voltage detection modules 25 and heat dissipation modules 26 on the left and right sides of the mounting frame 23. The power interface 10, data interface 11, and heat dissipation air inlet 12 are all located on the left or right side of the housing 21, and the exhaust port is located on the other side of the housing 21. The voltage detection module 25 is used to detect the voltage of the high-voltage power supply 22. The power interface 10, high-voltage power supply 22, voltage detection module 25, and X-ray emitter 24 are electrically connected in sequence. The heat dissipation module 26 is electrically connected to the power interface 10, and the signal output terminal of the voltage detection module 25 is electrically connected to the data interface 11. The input voltage of the high-voltage power supply 22 is 24V, and its output voltage is adjustable from 3000 to 6000V.

[0018] The beneficial effects of the technical solution provided by this utility model embodiment are as follows: This utility model embodiment provides a scanning thin film thickness measuring device, which supports the thin film through two support rollers and reduces the distance between the two support rollers by various means to ensure the support effect. These various means include:

[0019] First, by reducing the distance between the upper and lower probes, the excitation voltage of the lower probe is reduced, the power is reduced, and the heat generation is reduced. This allows for a more compact internal structure in the lower probe, resulting in a smaller overall size.

[0020] Second, compressed air is introduced into the downward probe to improve heat dissipation, making the internal structure of the downward probe more compact and thus smaller in size.

[0021] 3. The front and rear sides of the lower probe should gradually move closer together from bottom to top to avoid obstruction, with the interface located on the left or right side;

[0022] IV. Optimize the internal structure of the lower probe to reduce its volume;

[0023] 5. Allow the support rollers to be adjusted up and down to prevent the film from contacting the upper and lower probes. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the scanning thin film thickness measuring device in an embodiment of this utility model;

[0025] Figure 2 This is a schematic diagram of the internal structure of the scanning thin film thickness measuring device in this embodiment of the present invention;

[0026] Figure 3 This is a structural diagram of the left side panel;

[0027] Figure 4 This is a structural diagram of the right-side panel;

[0028] Figure 5 This is a schematic diagram of the lower probe structure.

[0029] In the diagram: 1. Frame, 2. Lower probe, 3. Upper probe, 4. Support roller, 5. Power end mounting box, 6. Driven end mounting box, 7. Upper housing, 8. Lower housing, 9. Crossbeam, 10. Power interface, 11. Data interface, 12. Cooling air inlet, 13. Bearing seat, 14. Linear guide rail, 15. Guide rail slider, 16. Cable chain, 17. Lubricating oil inlet, 18. Audible and visual alarm, 19. Control buttons;

[0030] 21 Housing, 22 High-voltage power supply, 23 Mounting frame, 24 X-ray emitter, 25 Voltage detection module, 26 Heat dissipation module;

[0031] 31 Synchronous shaft, 32 Servo motor, 33 Synchronous belt, 34 Active synchronous pulley, 35 Driven synchronous pulley. Detailed Implementation

[0032] To make the objectives, technical solutions and advantages of this utility model clearer, the utility model will be described in further detail below with reference to the accompanying drawings.

[0033] Example 1

[0034] See Figure 1-4Example 1 provides a scanning thin film thickness measurement device, which includes a frame 1, a lower probe 2, an upper probe 3, a synchronous drive structure, two crossbeams 9, and two drag chains 16. The frame 1 is arranged in a left-right direction and includes a bottom connecting frame, two side plates, and fixing seats at the lower ends of the side plates. The two side plates are arranged side by side and are specifically rectangular plates. The bottom connecting frame is arranged in a left-right direction and is located between the lower ends of the two side plates.

[0035] Two crossbeams 9 are arranged side by side, one above the other, at the bottom and one above the top of the frame 1. The crossbeams 9 are arranged in the left-right direction, with both ends on the frame 1 and fixed to the inner sides of two side plates. A linear guide rail 14 is provided on the top of the crossbeams in the left-right direction.

[0036] Two support rollers 4 are arranged side by side, one in front of the other, on the front and one behind the lower probe 2. The support rollers 4 are located on the lower side of the film and are arranged in the left-right direction. Their left and right ends are respectively located on the front or rear side of the two side plates and can be adjusted up and down on the side plates.

[0037] The upper probe 3 and lower probe 2 are arranged vertically opposite each other, located adjacent to each other above and below the thin film, respectively. They are slidably mounted on two crossbeams 9, serving as an X-ray receiving probe and an X-ray emitting probe, with a distance of 10-20 mm between them. Guide rail sliders 15 are provided at the bottom of the lower probe 2 and at the top of the upper probe 3. The lower probe 2 is vertically upward, located directly above the lower crossbeam 9, and is slidably mounted on the linear guide rail 14 of the lower crossbeam 9 via the guide rail slider 15. The upper probe 3 is vertically downward, located directly below the upper crossbeam 9, and is slidably mounted on the linear guide rail 14 of the upper crossbeam 9 via the guide rail slider 15.

[0038] The synchronous drive structure is used to enable the lower probe 2 and the upper probe 3 to move synchronously left and right. Specifically, the synchronous drive structure includes a synchronous shaft 31, a servo motor 32, two synchronous belts 33, two active synchronous pulleys 34, and two driven synchronous pulleys 35. Each active synchronous pulley 34 is paired with a corresponding driven synchronous pulley 35. The active synchronous pulleys 34 and their corresponding driven synchronous pulleys 35 are arranged side by side and located on the left and right sides of the corresponding crossbeam 9. The two synchronous belts 33 are located at the upper and lower parts of the frame 1, respectively, with their portions connected to two guide rail sliders 15. The synchronous belts 33 are arranged in the left and right direction, with two side plates (with through holes for the synchronous belts 33 to pass through) extending from both ends. Their ends are wrapped around the corresponding active synchronous pulleys 34 and driven synchronous pulleys 35. Both the active synchronous pulleys 34 and driven synchronous pulleys 35 are arranged vertically. Two driving synchronous pulleys 34 are arranged side-by-side vertically on the outside of a side plate (left or right side plate) and are respectively located at the upper and lower ends of the synchronous shaft 31. Two driven synchronous pulleys 35 are arranged side-by-side vertically on the outside of another side plate (right or left side plate). The synchronous shaft 31 is vertically arranged on the outside of a side plate, and its middle part is connected to the servo motor 32 for transmission (through synchronous belts and synchronous pulleys, etc.).

[0039] The lower probe 2 has its front and rear sides gradually approaching each other from top to bottom. It has a power interface 10, a data interface 11, and a cooling air inlet 12 on its left or right side, and an exhaust port on its other side. The upper probe 3 has a power interface 10 and a data interface 11 on its left or right side. The upper part of the guide rail slider 15 has a lubricating oil inlet 17. The power interface 10 is connected to the power supply device via a power cord, the data interface 11 is connected to the host computer via a signal line, the cooling air inlet 12 is connected to the compressed air supply device via an air pipe, and the lubricating oil inlet 17 is connected to the lubricating oil supply device via a lubricating oil pipe.

[0040] Two cable chains 16 are respectively located on the front or rear side of the two crossbeams 9. The cable chains 16 are arranged in a left-right direction and are located between the guide rail slider 15 and the left or right side plate. Air pipes (if any), power cables, signal cables, and lubricating oil pipes are located in the corresponding cable chains 16. The crossbeams 9 may also be provided with cable chain grooves in a left-right direction to support the cable chains 16. The two cable chains 16 are located on the same side (both on the front or rear side), and the power interface 10, data interface 11, and cooling air inlet 12 are located on the same side (both on the left or right side).

[0041] Specifically, in this embodiment of the invention, the two ends of the support roller 4 are mounted on the side plate via bearing seats 13. The upper and lower parts of the bearing seats 13 are provided with elongated holes in the vertical direction, and the bearing seats 13 are fixed to the side plate by bolts (arranged in the front-to-back direction) passing through the elongated holes. The support roller 4 can be adjusted up and down by loosening the bolts.

[0042] Example 2

[0043] See Figure 1 Example 2 provides a scanning thin film thickness measurement device, whose structure is basically the same as that of Example 1, except that the device in this example also includes a power end mounting box 5, a driven end mounting box 6, an upper housing 7, and a lower housing 8. The power end mounting box 5 and the driven end mounting box 6 are respectively located on the outside of the two side plates, arranged along the direction of the side plates, and are both rectangular box structures. The synchronous shaft 31, the servo motor 32, and the two active synchronous pulleys 34 are all located inside the power end mounting box 5, and the two driven synchronous pulleys 35 are located inside the driven end mounting box 6. The upper housing 7 and the lower housing 8 are both arranged in the left-right direction, and their left and right ends are respectively fixed to the inside of the two side plates. The upper housing 7 covers the upper crossbeam 9 and its guide rail slider 15, synchronous belt 33, and drag chain 16, and its bottom is open, located adjacent to and above the upper probe 3. The lower housing 8 covers the lower crossbeam 9 and its guide rail slider 15, synchronous belt 33 and cable chain 16, with its top open, located adjacent to and below the lower probe 2. The top of the power end mounting box 5 is equipped with an audible and visual alarm 18, and the front or rear side of the driven end mounting box 6 is equipped with control buttons 19 (specifically four, namely one emergency stop button and three normal buttons, arranged vertically side by side).

[0044] Example 3

[0045] See Figure 5Example 3 provides a scanning thin film thickness measurement device, whose structure is basically the same as that of Example 1, except that: the lower probe 2 in this example includes a housing 21, a high-voltage power supply 22, a mounting frame 23, an X-ray emitter 24, a voltage detection module 25, and a heat dissipation module 26. The housing 21 is vertically oriented and is specifically a truncated pyramid with a larger bottom and a smaller top, and has a window at the top. The high-voltage power supply 22, the mounting frame 23, the X-ray emitter 24, the voltage detection module 25, and the heat dissipation module 26 (including a fan and a sensor) are located inside the housing 21. The high-voltage power supply 22 is located at the bottom of the housing 21 and is arranged horizontally. It has a conventional structure, an input voltage of 24V, and an adjustable output voltage of 3000-6000V. The mounting frame 23 is located between the top of the housing 21 and the top of the high-voltage power supply 22. It is an upwardly open U-shaped structure and includes two side plates arranged side by side (vertically oriented). The X-ray emitter 24 is vertically oriented and located on the top of the housing 21, within the mounting frame 23. The voltage detection module 25 and the heat dissipation module 26 are respectively located on the outer sides of the two side plates of the mounting frame 23. A through-hole is provided on the mounting frame 23 at the location of the heat dissipation module 26. The power interface 10, data interface 11, and cooling air inlet 12 are all located on the left or right side of the housing 21, while the exhaust port is located on the other side of the housing 21. The voltage detection module 25 is used to detect the voltage of the high-voltage power supply 22. The power interface 10, high-voltage power supply 22, voltage detection module 25, and X-ray emitter 24 are sequentially electrically connected. The heat dissipation module 26 is electrically connected to the power interface 10, and the signal output terminal of the voltage detection module 25 is electrically connected to the data interface 11.

[0046] Example 4

[0047] See Figure 5 Example 4 provides a scanning thin film thickness measurement device, whose structure is basically the same as that of Example 3, except that the output voltage of the high-voltage power supply 13 in this example is 4800V, and the power of the lower probe 12 is 0.48W. The voltage detection module 25 is located on the left side of the mounting frame 23, and the heat dissipation module 26 is located on the right side of the mounting frame 23. The power interface 10, data interface 11, and heat dissipation air inlet 12 are all located on the left side of the housing 21, and the exhaust port is located on the right side of the housing 21.

[0048] Example 5

[0049] See Figure 1-2Example 5 provides a scanning thin film thickness measurement device, whose structure is basically the same as that of Example 1, except that: in this example, the power end mounting box 5 is located on the left side plate, and the driven end mounting box 6 is located on the right side plate. The lower probe 2 has a power interface 10, a data interface 11, and a cooling air inlet 12 on its left side, and the upper probe 3 has a power interface 10 and a data interface 11 on its left side. The cable chain 16 is located in front of the crossbeam 9, with its left end connected to the left side plate and its right end connected to the front of the guide rail slider 15.

[0050] Example 6

[0051] Example 6 provides a scanning thin film thickness measuring device, which has the same structure as that of Example 1, except that the device in this example is located on the thin film production line, upstream of the winding device.

[0052] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A scanning thin film thickness measurement device, comprising a frame (1), a lower probe (2), an upper probe (3), a synchronous drive structure, and two horizontal beams (9) arranged side by side, wherein the horizontal beams (9) are arranged in a left-right direction and their two ends are disposed on the frame (1); the upper probe (3) and the lower probe (2) are arranged opposite each other, respectively located above and below the adjacent thin film, and are slidably disposed on the two horizontal beams (9); the synchronous drive structure is used to make the lower probe (2) and the upper probe (3) move synchronously in a left-right direction; characterized in that, The device also includes two support rollers (4) arranged side by side and located on the lower side of the film; the two support rollers (4) are respectively located on the front and rear sides of the frame (1), and are adjustable on the frame (1). They are located on the adjacent front and adjacent rear of the lower probe (2), and are arranged in the left and right direction; the upper probe (3) and the lower probe (2) are respectively the X-ray receiving probe and the X-ray emitting probe, and the distance between them is 10-20mm; the front and rear sides of the lower probe (2) gradually approach each other from top to bottom, and a power interface (10), a data interface (11) and a heat dissipation air inlet (12) are provided on its left or right side, and an exhaust hole is provided on its other side; the heat dissipation air inlet (12) is connected to the compressed air supply device through an air pipe.

2. The scanning film thickness gauge of claim 1, wherein The frame (1) includes a bottom connecting frame, two side plates and a fixed seat at the lower end of the side plates. The two side plates are arranged side by side and are both vertical. The bottom connecting frame is arranged in the left and right direction and is located between the lower ends of the two side plates. Two crossbeams (9) are respectively located at the lower and upper parts of the frame (1). The left and right ends of the crossbeams (9) are respectively fixed to the inner sides of the two side plates. The left and right ends of the support roller (4) are respectively located at the front or rear sides of the two side plates and are adjustable up and down on the side plates.

3. The scanning film thickness gauge of claim 2, wherein The two ends of the support roller (4) are mounted on the side plate through bearing seats (13); the upper and lower parts of the bearing seats (13) are provided with elongated holes in the vertical direction, and the bearing seats (13) are fixed to the side plate by bolts passing through the elongated holes.

4. The scanning film thickness gauge of claim 2, wherein The top of the crossbeam (9) is provided with a linear guide rail (14) in the left and right direction. The bottom of the lower probe (2) and the top of the upper probe (3) are both provided with guide rail sliders (15). The lower probe (2) is set vertically upward and is located directly above the lower crossbeam (9). It is slidably mounted on the linear guide rail (14) of the lower crossbeam (9) through the guide rail slider (15). The upper probe (3) is set vertically downward and is located directly below the upper crossbeam (9). It is slidably mounted on the linear guide rail (14) of the upper crossbeam (9) through the guide rail slider (15).

5. The scanning film thickness gauge of claim 4, wherein, The synchronous drive structure includes a synchronous shaft (31), a servo motor (32), two synchronous belts (33), two active synchronous pulleys (34), and two driven synchronous pulleys (35), with each active synchronous pulley (34) corresponding to a driven synchronous pulley (35); the two synchronous belts (33) are respectively located at the upper and lower parts of the frame (1), with their portions connected to two guide rail sliders (15); the synchronous belts (33) are arranged in a left-right direction, with two side plates extending through their ends, and their ends wrap around... On the corresponding active synchronous pulley (34) and driven synchronous pulley (35); the active synchronous pulley (34) and driven synchronous pulley (35) are both vertically arranged; the two active synchronous pulleys (34) are arranged side by side on the outside of a side plate and are respectively located at the upper and lower ends of the synchronous shaft (31), and the two driven synchronous pulleys (35) are arranged side by side on the outside of another side plate; the synchronous shaft (31) is vertically arranged and is located on the outside of a side plate, and its middle part is connected to the servo motor (32) for transmission.

6. The scanning film thickness gauge of claim 5, wherein, The device also includes two cable chains (16), which are respectively located on the front or rear side of the two crossbeams (9). The cable chains (16) are arranged in the left and right direction and are located between the guide rail slider (15) and the left or right side plate. The upper probe (3) is provided with a power interface (10) and a data interface (11) on the left or right side. The guide rail slider (15) is provided with a lubricating oil inlet (17). The power interface (10) is connected to the power supply device through a power line. The data interface (11) is connected to the host computer through a signal line. The lubricating oil inlet (17) is connected to the lubricating oil supply device through a lubricating oil pipe. The air pipe, power line, signal line and lubricating oil pipe are located in the corresponding cable chain (16).

7. The scanning film thickness gauge of claim 6, wherein Two cable chains (16) are located on the same side, and the power interface (10), data interface (11) and heat dissipation air inlet (12) are located on the same side.

8. The scanning film thickness gauge of claim 6, wherein, The device also includes a power-end mounting housing (5), a driven-end mounting housing (6), an upper housing (7), and a lower housing (8). The power-end mounting housing (5) and the driven-end mounting housing (6) are respectively located on the outside of two side plates. The synchronous shaft (31), the servo motor (32), and the two active synchronous pulleys (34) are all located inside the power-end mounting housing (5), and the two driven synchronous pulleys (35) are located inside the driven-end mounting housing (6). The upper housing (7) and the lower housing (8) All are arranged in the left and right direction, and their left and right ends are respectively fixed to the inner side of the two side plates; the upper housing (7) covers the upper crossbeam (9) and the guide rail slider (15), synchronous belt (33) and drag chain (16) on it, and its bottom is open, and it is located adjacent to the upper probe (3) above; the lower housing (8) covers the lower crossbeam (9) and the guide rail slider (15), synchronous belt (33) and drag chain (16) on it, and its top is open, and it is located adjacent to the lower probe (2) below.

9. The scanning film thickness gauge of claim 8, wherein, The top of the power end mounting box (5) is equipped with an audible and visual alarm (18), and the front or rear side of the driven end mounting box (6) is equipped with a control button (19).

10. The scanning film thickness gauge of claim 1, wherein The lower probe (2) includes a housing (21), a high-voltage power supply (22) at the bottom of the housing (21), a mounting frame (23) between the top of the housing (21) and the top of the high-voltage power supply (22), an X-ray emitter (24) inside the mounting frame (23) and located at the top of the housing (21), and voltage detection modules (25) and heat dissipation modules (26) on the left and right sides of the mounting frame (23). The power interface (10), data interface (11), and heat dissipation air inlet (12) are all located on the left or right side of the housing (21). The exhaust port Located on the other side of the housing (21), the voltage detection module (25) is used to detect the voltage of the high voltage power supply (22). The power interface (10), the high voltage power supply (22), the voltage detection module (25) and the X-ray emitter (24) are electrically connected in sequence. The heat dissipation module (26) is electrically connected to the power interface (10). The signal output terminal of the voltage detection module (25) is electrically connected to the data interface (11). The input voltage of the high voltage power supply (22) is 24V, and its output voltage is adjustable and ranges from 3000 to 6000V.

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