Automatic photoresist coating thickness adjusting device

Abstract

The utility model discloses an automatic photoresist coating thickness adjusting device, which comprises a mounting seat, a photoresist coating component, a first adjusting component, a second adjusting component, a third adjusting component, a fourth adjusting component and a fifth adjusting component, the top of the mounting seat is provided with a gluing component for fixing a substrate, and photoresist is coated on the top of the substrate; a supporting top plate is fixedly mounted at the top of the mounting seat through a supporting rod, and a photoresist thickness adjusting part for adjusting the thickness of photoresist on the surface of the substrate is mounted at the bottom of the supporting top plate; a photoresist thickness detection part for detecting the photoresist coating thickness is mounted at the top of the mounting seat; a controller is fixedly mounted on one side of the mounting seat, the gluing part, the glue thickness adjusting part and the glue thickness detecting part are all controlled by the controller, and the controller is used for uniformly controlling the gluing part, the glue thickness adjusting part and the glue thickness detecting part, so that the automatic adjustment of the photoresist coating thickness is realized, the manual intervention is reduced, and the production efficiency is improved. And the production efficiency and the adjusting precision are improved.

Description

Technical Field

[0001] This utility model relates to the field of photoresist coating technology, specifically to an automatic adjustment device for photoresist coating thickness. Background Technology

[0002] As the most crucial and critical component in semiconductor manufacturing, photoresist's coating thickness plays a decisive role in the quality of the final photolithographic pattern. Different photolithography processes impose extremely stringent and specific requirements on photoresist thickness. For example, in advanced semiconductor chip manufacturing processes, even minute deviations in photoresist thickness can lead to a significant degradation in chip performance. However, current photoresist coating processes face numerous challenges, making precise control of the coating thickness extremely difficult.

[0003] Most existing photoresist coating equipment lacks intelligent automatic thickness adjustment capabilities, often relying on manual adjustments based on operator experience. This is not only inefficient but also fails to meet the requirements of high-precision photolithography processes. With the ever-growing market demand for high-performance, high-reliability semiconductor devices and display products, developing a device capable of automatically and precisely adjusting the photoresist coating thickness according to preset parameters is of significant practical importance for improving the precision and stability of photolithography processes, reducing production costs, and enhancing product competitiveness. Utility Model Content

[0004] The purpose of this invention is to provide an automatic photoresist coating thickness adjustment device to solve the problem that most existing photoresist coating equipment lacks intelligent automatic thickness adjustment functions and often relies on manual adjustment by operators based on their experience. This is not only inefficient, but also difficult to meet the requirements of high-precision photolithography processes.

[0005] To achieve the above objectives, the main technical solution adopted by this utility model includes: an automatic photoresist coating thickness adjustment device, comprising: a mounting base, wherein a photoresist coating component for fixing a substrate is mounted on the top of the mounting base, and photoresist is coated on the top of the substrate; a support plate is fixedly mounted on the top of the mounting base via a support rod, and a photoresist thickness adjustment component for adjusting the thickness of the photoresist on the substrate surface is mounted on the bottom of the support plate; a photoresist thickness detection component for detecting the photoresist coating thickness is mounted on the top of the mounting base; and a controller is fixedly mounted on one side of the mounting base, wherein the photoresist coating component, the photoresist thickness adjustment component, and the photoresist thickness detection component are all controlled by the controller.

[0006] As a preferred technical solution, the adhesive coating component includes a first drive motor, a rotating platform, and a suction cup. The first drive motor is fixedly installed in the upper inner cavity of the mounting base. The bottom of the rotating platform is fixedly connected to the output shaft of the first drive motor. The suction cup is fixedly installed on the top of the rotating platform. The bottom of the substrate is attracted and connected to the suction cup.

[0007] As a preferred technical solution, the adhesive thickness adjustment component includes a fixing plate fixedly installed on the support top plate via a first connecting rod, a first bearing fixedly installed on the fixing plate, a guide rod movably installed in the inner ring of the first bearing, a connecting plate fixedly connected to the upper end of the guide rod, and a first mounting plate fixedly connected to the lower end of the guide rod.

[0008] The connecting plate is fixedly equipped with a first screw sleeve, which is threadedly connected to a first screw rod. The bottom of the supporting top plate is fixedly equipped with a second drive motor, and the output shaft of the second drive motor is fixedly connected to the upper end of the first screw rod.

[0009] The first mounting plate has a first mounting groove at its bottom. A third bearing is fixedly installed at both ends of the first mounting groove. A second screw is fixedly connected between the inner rings of the two third bearings. A second screw sleeve is threaded onto the second screw. A third drive motor is fixedly connected to one end of the first mounting plate. The output shaft of the third drive motor is fixedly connected to one end of the second screw.

[0010] The second screw sleeve is fixedly connected to the second mounting plate via the second connecting rod, and a scraper is fixedly installed on the bottom of the second mounting plate;

[0011] The second connecting rod is equipped with a cleaning component for cleaning residual adhesive on the surface of the scraper.

[0012] As a preferred technical solution, the cleaning component includes a third mounting plate, which is fixedly mounted on one side of the second mounting plate. A second mounting groove is provided at the bottom of the third mounting plate. Fourth bearings are fixedly mounted at both ends of the second mounting groove. A third screw is fixedly connected between the inner rings of the two fourth bearings. A third threaded sleeve is threaded onto the third screw. A scraper is fixedly connected to the third threaded sleeve through a third connecting rod. The scraper has a scraping groove, and the scraper is engaged inside the scraping groove. A fourth drive motor is fixedly mounted at one end of the third mounting plate, and the output shaft of the fourth drive motor is fixedly connected to one end of the third screw.

[0013] As a preferred technical solution, rubber pads are fixedly installed on both sides of the inner wall of the scraper groove, and the two sides of the scraper contact the rubber pads on both sides respectively.

[0014] As a preferred technical solution, a fixing frame is fixedly installed at the bottom of the supporting top plate, and a second bearing is fixedly installed on the fixing frame and the fixing plate respectively. The first screw is fixedly installed between the inner rings of the two second bearings.

[0015] As a preferred technical solution, the adhesive thickness detection component includes a fifth drive motor, which is fixedly installed at one end of the top of the mounting base. The output shaft of the fifth drive motor is fixedly connected to a mounting frame via a fourth connecting rod. A thickness sensor is installed on the mounting frame, and the detection end of the thickness sensor faces the substrate.

[0016] As a preferred technical solution, waste boxes are respectively snapped into the left and right sides of the mounting base, the upper part of the waste boxes is open, and the two ends of the scraper are respectively located above the two waste boxes.

[0017] The second bearing is a linear bearing.

[0018] The controller is electrically connected to the first drive motor, the second drive motor, the third drive motor, the fourth drive motor, the fifth drive motor, and the thickness sensor, respectively.

[0019] This utility model has at least the following beneficial effects:

[0020] This utility model provides an automatic photoresist coating thickness adjustment device, which uses a controller to uniformly control the coating component, the thickness adjustment component, and the thickness detection component, thereby realizing automatic adjustment of the photoresist coating thickness, reducing manual intervention, and improving production efficiency and adjustment accuracy.

[0021] The third screw is driven by the fourth drive motor to rotate, which causes the third screw sleeve to move the squeegee. This automatically cleans the residual adhesive on the squeegee surface, preventing the residual adhesive from affecting the subsequent coating process and ensuring the continuity and stability of the photoresist coating. The squeegee grooves on the squeegee can accurately cooperate with the squeegee to effectively remove the residual adhesive on the squeegee surface, thus improving the cleaning effect. Attached Figure Description

[0022] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments of this application and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0023] Figure 1 A three-dimensional view of the automatic photoresist coating thickness adjustment device of this utility model;

[0024] Figure 2 This is a side view of the automatic photoresist coating thickness adjustment device of this utility model;

[0025] Figure 3 This is a schematic diagram of the photoresist coating thickness detection component of the automatic photoresist coating thickness adjustment device of this utility model.

[0026] Figure 4 This is a first-view structural diagram of the photoresist coating thickness adjustment component of the automatic photoresist coating thickness adjustment device of this utility model.

[0027] Figure 5 This is a second-view structural diagram of the photoresist coating thickness adjustment component of the automatic photoresist coating thickness adjustment device of this utility model.

[0028] Figure 6 This is a schematic diagram of the cleaning component of the automatic photoresist coating thickness adjustment device of this utility model.

[0029] Explanation of icon numbers:

[0030] 1. Mounting base; 101. Support rod; 102. Waste box; 2. Base plate; 201. First drive motor; 202. Rotating platform; 203. Suction cup; 3. Support top plate; 301. First connecting rod; 4. Fixing plate; 401. First bearing; 402. Guide rod; 5. Connecting plate; 501. First threaded sleeve; 6. First screw; 601. Second drive motor; 602. Fixing bracket; 603. Second bearing; 7. First mounting plate; 701. First mounting groove; 702. Third bearing; 703. Second screw; 70 4. Second threaded sleeve; 705. Third drive motor; 706. Second connecting rod; 8. Second mounting plate; 801. Scraper; 9. Third mounting plate; 901. Second mounting groove; 902. Fourth bearing; 903. Third screw; 904. Third threaded sleeve; 905. Third connecting rod; 906. Scraper blade; 9061. Scraper groove; 9062. Rubber pad; 907. Fourth drive motor; 10. Fifth drive motor; 1001. Fourth connecting rod; 1002. Mounting frame; 1003. Thickness sensor; 11. Controller. Detailed Implementation

[0031] The following will describe in detail the implementation of this application with reference to the accompanying drawings and embodiments, so that the implementation process of how this application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0032] Example

[0033] Please refer to Figures 1 to 6As shown, this embodiment provides an automatic photoresist coating thickness adjustment device, including: a mounting base 1, on the top of the mounting base 1 is a coating component for fixing a substrate 2, and photoresist is coated on the top of the substrate 2; a support top plate 3 is fixedly mounted on the top of the mounting base 1 via a support rod 101, and a photoresist thickness adjustment component for adjusting the thickness of the photoresist on the surface of the substrate 2 is mounted on the bottom of the support top plate 3; a photoresist thickness detection component for detecting the photoresist coating thickness is mounted on the top of the mounting base 1; a controller 11 is fixedly mounted on one side of the mounting base 1, and the coating component, the photoresist thickness adjustment component, and the photoresist thickness detection component are all controlled by the controller 11. The controller 11 provides unified control of the coating component, the photoresist thickness adjustment component, and the photoresist thickness detection component, laying the foundation for automatic adjustment of the photoresist coating thickness, reducing manual intervention, and improving production efficiency and adjustment accuracy.

[0034] The photoresist coating component includes a first drive motor 201, a rotating platform 202, and a suction cup 203. The first drive motor 201 is fixedly installed in the upper inner cavity of the mounting base 1. The bottom of the rotating platform 202 is fixedly connected to the output shaft of the first drive motor 201. The suction cup 203 is fixedly installed on the top of the rotating platform 202. The bottom of the substrate 2 is attracted and connected to the suction cup 203. The first drive motor 201 drives the rotating platform 202 to rotate, and centrifugal force is used to uniformly coat the photoresist onto the substrate 2, ensuring the uniformity of the coating. The suction cup 203 can firmly hold the substrate 2, preventing the substrate 2 from shifting or shaking during rotation, ensuring the stability and quality of the coating process.

[0035] The adhesive thickness adjustment component includes a fixing plate 4 fixedly mounted on a supporting top plate 3 via a first connecting rod 301. A first bearing 401 is fixedly mounted on the fixing plate 4. A guide rod 402 is movably mounted in the inner ring of the first bearing 401. A connecting plate 5 is fixedly connected to the upper end of the guide rod 402, and a first mounting plate 7 is fixedly connected to the lower end. A first threaded sleeve 501 is fixedly mounted on the connecting plate 5, and a first screw 6 is threadedly connected to the first threaded sleeve 501. A second drive motor 601 is fixedly mounted at the bottom of the supporting top plate 3, and the output shaft of the second drive motor 601 is fixedly connected to the upper end of the first screw 6. A first mounting groove 701 is formed at the bottom of the first mounting plate 7. Third bearings 702 are fixedly mounted at both ends of the first mounting groove 701. A second screw 703 is fixedly connected between the inner rings of the two third bearings 702, and a second screw 703 is threadedly mounted on the second screw 703. The first mounting plate 704 has a screw sleeve 704. One end of the first mounting plate 7 is fixedly connected to a third drive motor 705. The output shaft of the third drive motor 705 is fixedly connected to one end of the second screw 703. The second screw sleeve 704 is fixedly connected to a second mounting plate 8 via a second connecting rod 706. A scraper 801 is fixedly mounted on the bottom of the second mounting plate 8. A cleaning component for cleaning residual adhesive on the surface of the scraper 801 is mounted on the second connecting rod 706. The first screw 6 is driven to rotate by the second drive motor 601, causing the first screw sleeve 501 to move the guide rod 402 up and down, thereby adjusting the height of the scraper 801 to adapt to the coating requirements of photoresist of different thicknesses. The second screw 703 is driven to rotate by the third drive motor 705, causing the second screw sleeve 704 to move the scraper 801 laterally, which can precisely adjust the thickness of the photoresist at different positions on the substrate 2, improving the flexibility and accuracy of the adjustment.

[0036] The cleaning component includes a third mounting plate 9, which is fixedly mounted on one side of the second mounting plate 8. The bottom of the third mounting plate 9 has a second mounting groove 901. Four bearings 902 are fixedly mounted at both ends of the second mounting groove 901. A third screw 903 is fixedly connected between the inner rings of the two fourth bearings 902. A third threaded sleeve 904 is threaded onto the third screw 903. A scraper 906 is fixedly connected to the third threaded sleeve 904 via a third connecting rod 905. The scraper 906 has a scraping groove 9061, and a scraper blade 801 is engaged inside the scraping groove 9061. A fourth drive motor 907 is fixedly mounted on one end of the mounting plate 9. The output shaft of the fourth drive motor 907 is fixedly connected to one end of the third screw 903. The fourth drive motor 907 drives the third screw 903 to rotate, causing the third screw sleeve 904 to move the squeegee 906. This automatically cleans the residual adhesive on the surface of the squeegee 801, preventing the residual adhesive from affecting the subsequent coating process and ensuring the continuity and stability of the photoresist coating. The squeegee groove 9061 on the squeegee 906 can accurately cooperate with the squeegee 801 to effectively scrape off the residual adhesive on the surface of the squeegee 801, improving the cleaning effect.

[0037] Rubber pads 9062 are fixedly installed on both sides of the inner wall of the scraper groove 9061. The two sides of the scraper 801 contact the rubber pads 9062 on both sides. The rubber pads 9062 have a certain degree of elasticity, which can prevent the scraper blade 906 from damaging the surface of the scraper 801 during the scraping of residual glue, thus extending the service life of the scraper. In addition, the rubber pads 9062 are in close contact with the scraper 801, which can better absorb and scrape off residual glue, further improving the cleaning effect.

[0038] The bottom of the supporting top plate 3 is fixedly installed with a fixing frame 602. The fixing frame 602 and the fixing plate 4 are respectively fixedly installed with second bearings 603. The first screw 6 is fixedly installed between the inner rings of the two second bearings 603. The second bearings 603 provide stable support for the first screw 6, ensuring the stability of the first screw 6 during rotation, thereby ensuring the accuracy of the height adjustment of the scraper 801.

[0039] The photoresist thickness detection component includes a fifth drive motor 10, which is fixedly mounted on the top end of the mounting base 1. The output shaft of the fifth drive motor 10 is fixedly connected to a mounting frame 1002 via a fourth connecting rod 1001. A thickness sensor 1003 is mounted on the mounting frame 1002, with the detection end of the thickness sensor 1003 facing the substrate 2. The fifth drive motor 10 drives the mounting frame 1002 to rotate via the fourth connecting rod 1001, enabling the thickness sensor 1003 to detect the photoresist thickness at different locations on the substrate 2, thus improving the comprehensiveness and accuracy of the detection. In addition, the thickness sensor 1003 can detect the photoresist coating thickness and feed the detection data back to the controller 11, providing an accurate basis for photoresist thickness adjustment.

[0040] The mounting base 1 has a waste box 102 attached to its left and right sides. The upper part of the waste box 102 is open. The two ends of the scraper 801 are located above the two waste boxes 102. The waste box 102 can collect the excess photoresist scraped by the scraper 801, preventing waste from splashing everywhere and keeping the working environment clean. In addition, the waste box 102 is installed by snap-fit, which is convenient for disassembly and cleaning, and improves the maintenance convenience of the device.

[0041] Among them, the second bearing 603 is a linear bearing, which can ensure the linear movement of the first screw 6 in the vertical direction, making the height adjustment of the scraper 801 more stable and accurate, and improving the accuracy of adhesive thickness adjustment.

[0042] The controller 11 is electrically connected to the first drive motor 201, the second drive motor 601, the third drive motor 705, the fourth drive motor 907, the fifth drive motor 10, and the thickness sensor 1003. The controller 11 can precisely control each drive motor according to the detection data fed back by the thickness sensor 1003, so as to realize the coordinated work of each link such as photoresist coating, photoresist thickness adjustment and detection, and ensure the automatic adjustment of photoresist coating thickness.

[0043] It is worth noting that the thickness sensor 1003 can be replaced with the Mi-Iridium OptoNCDT2300.

[0044] The controller 11 can be a PLC 6ES72350KD220XA8.

[0045] As is well known to those skilled in the art, the working principles and wiring methods of the first drive motor 201, the second drive motor 601, the third drive motor 705, the fourth drive motor 907, the fifth drive motor 10, the thickness sensor 1003, and the controller 11 are commonplace and belong to conventional methods or common knowledge. They will not be described in detail here. Those skilled in the art can arbitrarily select and match their models according to their needs or convenience.

[0046] Working principle:

[0047] First, the substrate 2 to be coated with photoresist is placed on the suction cup 203 on the top of the rotating platform 202. The suction cup 203 holds the substrate 2 together, ensuring that it is stable during the subsequent coating process.

[0048] The controller 11 sends a command to the first drive motor 201 to start the first drive motor 201 to drive the rotating platform 202 to rotate. During the rotation of the rotating platform 202, photoresist is applied to the top of the substrate 2 by an external coating device. The rotation of the rotating platform 202 uses centrifugal force to make the photoresist initially and evenly distributed on the surface of the substrate 2.

[0049] Then, the controller 11 controls the fifth drive motor 10 to start. The fifth drive motor 10 drives the mounting frame 1002 to rotate via the fourth connecting rod 1001, so that the detection end of the thickness sensor 1003 mounted on the mounting frame 1002 is aligned with the area on the substrate 2 coated with photoresist. The thickness sensor 1003 detects the thickness of the photoresist on the surface of the substrate 2 in real time and transmits the detected thickness data to the controller 11. After receiving the thickness data transmitted by the thickness sensor 1003, the controller 11 compares and analyzes it with the preset target photoresist thickness to determine... If the current photoresist thickness does not meet the requirements, the controller 11 controls the second drive motor 601 to drive the first screw 6 to rotate. Since the first screw sleeve 501 is threadedly connected to the first screw 6, and the guide rod 402 is fixedly connected to the first screw sleeve 501 through the connecting plate 5, the guide rod 402 will move up and down under the guidance of the first bearing 401, thereby driving the first mounting plate 7 and the scraper 801 installed below it to adjust the height. If the thickness is too large, the height of the scraper 801 is lowered; if the thickness is too small, the height of the scraper 801 is raised.

[0050] Then, the controller 11 controls the third drive motor 705 to start. The third drive motor 705 drives the second screw 703 to rotate, causing the second threaded sleeve 704, which is threaded on the second screw 703, to move. The second threaded sleeve 704 drives the second mounting plate 8 and the scraper 801 to move laterally through the second connecting rod 706, so as to precisely adjust the photoresist thickness at different positions on the substrate 2.

[0051] During the adjustment process, the thickness sensor 1003 continuously detects the photoresist thickness and feeds it back to the controller 11. The controller 11 continuously adjusts the adjustment parameters based on the feedback data until the photoresist thickness reaches the preset requirement.

[0052] After completing one photoresist thickness adjustment or reaching a certain working cycle, the controller 11 controls the fourth drive motor 907 to start. The fourth drive motor 907 drives the third screw 903 to rotate, causing the third threaded sleeve 904, which is threaded onto the third screw 903, to move. The third threaded sleeve 904 drives the scraper 906 to move through the third connecting rod 905. The scraping groove 9061 on the scraper 906 is engaged with the scraper 801. The rubber pads 9062 on both sides of the inner wall of the scraping groove 9061 are in close contact with the scraper 801. As the scraper 906 moves, the residual photoresist on the surface of the scraper 801 is scraped off. The scraped waste falls into the waste boxes 102 on both sides of the mounting base 1.

[0053] The foregoing description illustrates and describes several preferred embodiments of the present invention. However, as previously stated, it should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the inventive concept described herein through the foregoing teachings or techniques or knowledge in related fields. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

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