Dedusting and purifying silicon tetrachloride flow controller

Abstract

The utility model discloses a dedusting and purifying silicon tetrachloride flow controller which comprises a fixing seat, a control box is arranged on the upper portion of the fixing seat, a main control board is arranged in the control box, an air channel is arranged in the fixing seat, an air outlet is formed in one side of the air channel, and a dust collecting device is arranged on the air outlet. A connecting pipe is arranged on the other side of the air channel, and a filtering mechanism is arranged on the side face of the connecting pipe. The power mechanism comprises the two sets of driving wheels, the driving wheels are arranged between the two sets of driving wheels, one set of driving wheels is connected with the driving shaft, the other set of driving wheels is rotationally connected with the filtering mechanism, the connecting shaft of the other set of driving wheels extends to the outer portion of the power mechanism and is connected with the driving motor, and the driving shaft is driven by the power mechanism to rotate. The circulating filter screen rotates to filter floating dust in silicon tetrachloride gas, blockage of the filter screen can be effectively reduced through circulating filtration, a plurality of groups of adsorption plates are arranged in the filtering mechanism to effectively adsorb the floating dust, and cleanliness of silicon tetrachloride is improved.

Description

Technical Field

[0001] This utility model relates to the field of flow controller technology, and more specifically to a silicon tetrachloride flow controller for dust removal and purification. Background Technology

[0002] Silicon tetrachloride (SiCl4) is a molecular crystal. It is gaseous at room temperature. Silicon chloride is an inorganic compound with the chemical formula SiCl4. High-purity silicon tetrachloride is a colorless and transparent liquid, while lower-purity silicon tetrachloride appears slightly yellow or pale yellow and has a suffocating odor. At room temperature and pressure, its density is 1.48, its melting point is -70℃, and its boiling point is 57.6℃. The boiling point increases with increasing pressure.

[0003] Silicon tetrachloride gas at room temperature requires the removal of suspended dust during transportation, and traditional dust removal methods are prone to clogging. Therefore, a new technical solution is needed to address this issue. Utility Model Content

[0004] The purpose of this invention is to provide a silicon tetrachloride flow controller for dust removal and purification, which solves the problem that traditional dust removal methods are prone to clogging when silicon tetrachloride gas at room temperature needs to be treated for floating dust contained inside during transportation.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a silicon tetrachloride flow controller for dust removal and purification, comprising: a fixed base, a control box disposed on the upper part of the fixed base and a main control board disposed inside the control box, an air passage disposed inside the fixed base and an air outlet disposed on one side of the air passage, a connecting pipe disposed on the other side of the air passage and a filter mechanism disposed on the side of the connecting pipe, an air inlet disposed on the side of the filter mechanism, a power mechanism disposed on the side of the filter mechanism and a drive shaft disposed inside the filter mechanism, and two sets of drive shafts are provided, with the two sets of drive shafts being connected to each other. A circulating filter screen is provided. The power mechanism includes two sets of drive wheels with a drive wheel between them. One set of drive wheels is connected to a drive shaft, and the other set is rotatably connected to the filter mechanism. The connecting shaft of the other set of drive wheels extends to the outside of the power mechanism and is connected to a drive motor. Several sets of adsorption plates are provided inside the filter mechanism. Two sets of flow channels are provided at the top of the air passage, and a differential pressure sensor is provided between the two sets of flow channels. A solenoid valve is provided on the side of the control box, and a connecting wire is provided on the upper part of the solenoid valve. The connecting wire is electrically connected to the main control board.

[0006] In a preferred embodiment of this utility model, the surface of the control box is provided with a display module, and the display module is electrically connected to the main control board through wires.

[0007] In a preferred embodiment of this utility model, the control box is provided with a pressure sensor and a temperature sensor, and the detection ends of the pressure sensor and the temperature sensor extend into the airway.

[0008] In a preferred embodiment of this utility model, several groups of adsorption plates are arranged at an angle and the adsorption plates are connected in pairs.

[0009] In a preferred embodiment of the present invention, the lower part of the filter mechanism is provided with a dirt collection tank and the lower part of the dirt collection tank is provided with a sealing cover, and the sealing cover is rotatably connected to the filter mechanism.

[0010] In a preferred embodiment of the present invention, the air passage is provided with a laminar flow mechanism and the laminar flow mechanism is located between two sets of flow passages.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] This invention features a control box located on the upper part of a fixed base, with a main control board inside. An air duct is located inside the fixed base, with an air outlet on one side and a connecting pipe on the other side. A filter mechanism is located on the side of the connecting pipe, and an air inlet is located on the side of the filter mechanism. A power mechanism with a drive shaft inside is located on the side of the filter mechanism. Two sets of drive shafts are arranged, with a circulating filter screen between them. The power mechanism includes two sets of drive wheels, with a drive wheel positioned between them. One set of drive wheels is connected to the drive shaft, and the other set is rotatably connected to the filter mechanism. The connecting shaft of the other set of drive wheels extends to the power mechanism. Externally connected to a drive motor, the power mechanism drives the drive shaft to rotate, causing the circulating filter to rotate and filter the floating dust in the silicon tetrachloride gas. Circulating filtration can effectively reduce filter clogging. Inside the filtration mechanism, several sets of adsorption plates are set to effectively adsorb floating dust, increasing the cleanliness of silicon tetrachloride. Two sets of flow channels are set at the top of the gas duct, and a differential pressure sensor is set between the two sets of flow channels. A solenoid valve is set on the side of the control box, and a connecting wire is set on the upper part of the solenoid valve. The connecting wire is electrically connected to the main control board. After the silicon tetrachloride gas flows into the gas duct, it enters the flow channel. The internal pressure difference is monitored by the differential pressure sensor, and the opening and closing of the solenoid valve is controlled by the main control board. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a top view of the structure of this utility model;

[0015] Figure 3 This is a schematic diagram of the cross-sectional structure of the fixing base of this utility model;

[0016] Figure 4 This is a cross-sectional structural diagram of the filtration mechanism of this utility model.

[0017] In the diagram: 1. Mounting base; 2. Control box; 3. Display module; 4. Solenoid valve; 5. Connecting wire; 6. Air outlet; 7. Filter mechanism; 8. Air inlet; 9. Power mechanism; 10. Connecting pipe; 11. Main control board; 12. Laminar flow mechanism; 13. Pressure sensor; 14. Temperature sensor; 15. Flow channel; 16. Differential pressure sensor; 17. Air passage; 18. Drive shaft; 19. Circulating filter; 20. Sealing cover; 21. Sludge collection tank; 22. Adsorption plate. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figure 1-4This utility model provides a technical solution: a silicon tetrachloride flow controller for dust removal and purification, comprising: a fixed base 1, a control box 2 disposed on the upper part of the fixed base 1, and a main control board 11 disposed inside the control box 2; an air passage 17 disposed inside the fixed base 1, with an air outlet 6 disposed on one side of the air passage 17; a connecting pipe 10 disposed on the other side of the air passage 17, and a filter mechanism 7 disposed on the side of the connecting pipe 10; an air inlet 8 disposed on the side of the filter mechanism 7; a power mechanism 9 disposed on the side of the filter mechanism 7, and a drive shaft 18 disposed inside the filter mechanism 7; two sets of drive shafts 18 are provided, and a circulating filter screen 19 is disposed between the two sets of drive shafts 18; the power mechanism 9 includes two... A set of drive wheels is provided, with drive wheels arranged between each other. One set of drive wheels is connected to the drive shaft 18, and the other set is rotatably connected to the filter mechanism 7. The connecting shaft of the other set of drive wheels extends to the outside of the power mechanism 9 and is connected to the drive motor. The filter mechanism 7 is provided with several sets of adsorption plates 22. The top of the air passage 17 is provided with two sets of flow channels 15, and a differential pressure sensor 16 is provided between the two sets of flow channels 15. The side of the control box 2 is provided with a solenoid valve 4, and the upper part of the solenoid valve 4 is provided with a connecting line 5. The connecting line 5 is electrically connected to the main control board 11. The control box 2 is provided on the upper part of the fixed base 1, and the main control board 11 is provided inside the control box 2. An air passage 17 is provided, with an air outlet 6 on one side. A connecting pipe 10 is provided on the other side of the air passage 17, and a filter mechanism 7 is provided on the side of the connecting pipe 10. An air inlet 8 is provided on the side of the filter mechanism 7. A power mechanism 9 is provided on the side of the filter mechanism 7, and a drive shaft 18 is provided inside. Two sets of drive shafts 18 are provided, and a circulating filter screen 19 is provided between the two sets of drive shafts 18. The power mechanism 9 includes two sets of drive wheels, with drive wheels provided between them. One set of drive wheels is connected to the drive shaft 18, and the other set is rotatably connected to the filter mechanism 7. The connecting shaft of the other set of drive wheels extends to the outside of the power mechanism 9 and is connected to a drive motor. The power mechanism 9 drives... The drive shaft 18 rotates, causing the circulating filter screen 19 to rotate, which can filter the floating dust in the silicon tetrachloride gas. The circulating filtration can effectively reduce the clogging of the filter screen. Several sets of adsorption plates 22 are set inside the filter mechanism 7 to effectively adsorb floating dust and increase the cleanliness of silicon tetrachloride. Two sets of flow channels 15 are set at the top of the gas duct 17, and a differential pressure sensor 16 is set between the two sets of flow channels 15. A solenoid valve 4 is set on the side of the control box 2, and a connecting line 5 is set on the upper part of the solenoid valve 4. The connecting line 5 is electrically connected to the main control board 11. After the silicon tetrachloride gas flows into the gas duct 17, it enters the flow channel 15. The internal pressure difference is monitored by the differential pressure sensor 16, and the opening and closing of the solenoid valve 4 is controlled by the main control board 11.

[0020] Further improvements, such as Figure 1As shown: The surface of the control box 2 is provided with a display module 3, and the display module 3 is electrically connected to the main control board 11 through wires. The display module 3 can display information such as the flow rate, pressure, temperature and filtration status of silicon tetrachloride gas in real time, so that the operator can intuitively understand the working status of the flow controller, and facilitate timely detection and adjustment of problems.

[0021] Further improvements, such as Figure 3 As shown: The control box 2 is equipped with a pressure sensor 13 and a temperature sensor 14, and the detection ends of the pressure sensor 13 and the temperature sensor 14 extend into the air passage 17. The pressure sensor 13 and the temperature sensor 14 can monitor the pressure and temperature in the air passage 17 in real time, provide accurate data support to the main control board 11, ensure that the flow controller works in the best condition, and prevent equipment damage caused by excessive pressure or temperature.

[0022] Further improvements, such as Figure 4 As shown: Several groups of adsorption plates 22 are arranged at an angle and connected in pairs. The angled adsorption plates 22 can more effectively capture and adsorb dust in silicon tetrachloride gas, thereby improving filtration efficiency.

[0023] Further improvements, such as Figure 4 As shown: The lower part of the filter mechanism 7 is provided with a dirt collection tank 21, and the lower part of the dirt collection tank 21 is provided with a sealing cover 20. The sealing cover 20 is rotatably connected to the filter mechanism 7. The dirt collection tank 21 can collect the dirt generated during the filtration process, which is convenient for subsequent cleaning. The design of the sealing cover 20 ensures the sealing of the dirt collection tank 21 and prevents dirt leakage from causing secondary pollution.

[0024] Further improvements, such as Figure 3 As shown: The gas passage 17 is provided with a laminar flow mechanism 12 and the laminar flow mechanism 12 is located between two sets of flow passages 15. The laminar flow mechanism 12 can enable silicon tetrachloride gas to form a stable laminar flow state in the gas passage 17, thereby improving the gas flow efficiency.

[0025] Working Principle: Silicon chloride gas enters the filter mechanism 7 through the inlet 8. The gas is effectively introduced into the filter mechanism 7, providing a foundation for subsequent filtration and purification processes. This ensures that the gas can fully contact and pass through the filter mechanism 7, improving filtration efficiency. The power mechanism 9 drives the drive shaft 18 to rotate, and the circulating filter screen 19 begins to rotate and filter the floating dust in the gas. The rotation of the circulating filter screen 19 continuously captures and separates the floating dust in the gas. The circulating filtration design effectively reduces the risk of filter screen clogging and improves the continuity and stability of filtration. The filtered gas undergoes further adsorption treatment through the adsorption plate 22 to remove residual floating dust. The adsorption plate 22 utilizes its adsorption properties to adsorb the residual floating dust in the gas, improving the efficiency of filtration. The purity of the silicon tetrachloride gas meets the gas quality requirements of subsequent processes. The gas enters the flow channel 15 through the laminar flow mechanism 12. The differential pressure sensor 16 monitors the pressure difference within the flow channel 15. The laminar flow mechanism 12 ensures a stable laminar flow state within the flow channel 15, while the differential pressure sensor 16 monitors pressure changes in the flow channel 15 in real time, improving gas flow efficiency. Simultaneously, the monitoring data from the differential pressure sensor 16 provides control data for the main control board 11. Based on the data from the differential pressure sensor 16, the main control board 11 controls the opening and closing of the solenoid valve 4, adjusting the gas flow rate. The main control board 11 precisely controls the solenoid valve 4 based on the real-time monitored data, achieving precise control of the silicon tetrachloride gas flow rate and meeting the gas flow requirements of different processes. This also improves the automation level and operating efficiency of the equipment. The contaminants generated during the filtration process are collected in the sludge collection tank 21 and cleaned regularly. The design of the sludge collection tank 21 facilitates the collection and cleaning of contaminants, maintaining the cleanliness and efficient operation of the filtration mechanism 7 and extending the equipment's service life. It also reduces equipment failures and downtime caused by contaminant blockage.

[0026] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0027] Finally, the following points should be noted: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installation", "connection", and "linkage" should be interpreted broadly, and can refer to mechanical or electrical connections, or internal connections between two components, or direct connections. "Up", "down", "left", "right", etc., are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may change.

[0028] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A dust-free, purified silicon tetrachloride flow controller characterized by: include: A fixed base (1) is provided with a control box (2) on its upper part and a main control board (11) is provided inside the control box (2). An air passage (17) is provided inside the fixed base (1) and an air outlet (6) is provided on one side of the air passage (17). A connecting pipe (10) is provided on the other side of the air passage (17) and a filter mechanism (7) is provided on the side of the connecting pipe (10). An air inlet (8) is provided on the side of the filter mechanism (7). A power mechanism (9) is provided on the side of the filter mechanism (7) and a drive shaft (18) is provided inside. Two sets of drive shafts (18) are provided and a circulating filter screen (19) is provided between the two sets of drive shafts (18). The force mechanism (9) includes two sets of drive wheels and a drive wheel is provided between the drive wheels. One set of drive wheels is connected to the drive shaft (18) and the other set is rotatably connected to the filter mechanism (7). The connecting shaft of the other set of drive wheels extends to the outside of the power mechanism (9) and is connected to the drive motor. The filter mechanism (7) is provided with several sets of adsorption plates (22). The top of the air passage (17) is provided with two sets of flow channels (15) and a differential pressure sensor (16) is provided between the two sets of flow channels (15). The side of the control box (2) is provided with a solenoid valve (4) and a connecting line (5) is provided on the upper part of the solenoid valve (4). The connecting line (5) is electrically connected to the main control board (11).

2. The silicon tetrachloride flow controller for dust removal and purification according to claim 1, characterized in that: The surface of the control box (2) is provided with a display module (3), and the display module (3) is electrically connected to the main control board (11) through wires.

3. The dust-free purified silicon tetrachloride flow controller according to claim 1, characterized in that: The control box (2) is equipped with a pressure sensor (13) and a temperature sensor (14), and the detection ends of the pressure sensor (13) and the temperature sensor (14) extend into the airway (17).

4. The dust-free purified silicon tetrachloride flow controller of claim 1, wherein: Several sets of the adsorption plates (22) are arranged at an angle and the adsorption plates (22) are connected in pairs.

5. The dust-free and purified silicon tetrachloride flow controller according to claim 1, characterized in that: The filter mechanism (7) is provided with a sludge collection tank (21) at its lower part and a sealing cover (20) is provided at the lower part of the sludge collection tank (21). The sealing cover (20) is rotatably connected to the filter mechanism (7).

6. The dust-free and purified silicon tetrachloride flow controller according to claim 1, characterized in that: The air passage (17) is provided with a laminar flow mechanism (12) and the laminar flow mechanism (12) is located between two sets of flow passages (15).

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