Surface cleaning device for diamond single crystal substrate

Abstract

The utility model relates to the field of semiconductor material processing, and discloses a surface cleaning device for a diamond single-crystal substrate, which comprises an ultrasonic cleaning machine provided with a cleaning mechanism; the cleaning mechanism comprises a hydraulic cylinder, a push frame, a servo motor, a rotating shaft, a rotating plate, a main air bag, an inner blocking air bag, an inflation pipe, a piston rod, a moving piece and a lead screw. A hydraulic rod of the hydraulic cylinder is fixedly connected with the pushing frame, the servo motor is fixedly installed on the pushing frame, the output end of the servo motor is fixedly connected with the rotating shaft, and the rotating plate is fixedly installed on the rotating shaft. The ultrasonic cleaning and hot air drying device has the advantages that the flexible material of the air bag can absorb impact force, damage such as scratches and fragmentation of the substrates due to rigid collision is avoided, compared with a traditional cleaning mode, the yield of the substrates is greatly improved, the ultrasonic cleaning function and the hot air drying function are integrated in the same device, the overall machining period is shortened, and the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material processing technology, and in particular to a surface cleaning device for diamond single crystal substrates. Background Technology

[0002] Diamond single-crystal substrates have broad application prospects in high-power, high-frequency electronic devices due to their excellent physicochemical properties. However, during the preparation and processing of diamond single-crystal substrates, contaminants such as abrasive particles can remain on their surface. These particles can severely affect the surface quality and performance of the substrate, thereby impacting the fabrication and performance of subsequent devices. Therefore, cleaning is necessary.

[0003] In existing technologies, ultrasonic cleaning machines are often used to clean diamond single-crystal substrates. The diamond single-crystal substrate is placed in the ultrasonic cleaning machine for ultrasonic cleaning. However, this method cannot effectively protect the diamond single-crystal substrate. The diamond single-crystal substrate is prone to friction and collision with each other during cleaning, which has certain limitations. Furthermore, it cannot be dried quickly after cleaning. Therefore, it is necessary to design a surface cleaning device for diamond single-crystal substrates to solve the above problems.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0005] The purpose of this invention is to provide a surface cleaning device for diamond single crystal substrates to solve the above-mentioned problems.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a surface cleaning device for diamond single crystal substrates, comprising:

[0007] An ultrasonic cleaner, wherein the ultrasonic cleaner is equipped with a cleaning mechanism;

[0008] The cleaning mechanism includes a hydraulic cylinder, a pusher, a servo motor, a rotating shaft, a rotating plate, a main airbag, an inner baffle airbag, an inflation tube, a piston rod, a moving part, and a lead screw;

[0009] The hydraulic cylinder's hydraulic rod is fixedly connected to the push frame. The servo motor is fixedly mounted on the push frame. The output end of the servo motor is fixedly connected to the rotating shaft. The rotating plate is fixedly mounted on the rotating shaft. The main airbag is fixedly mounted on the rotating plate. The inner baffle airbag is fixedly mounted inside the main airbag and communicates with the inside of the main airbag. The inflation tube is fixedly mounted on the main airbag. The piston rod is slidably and sealed on the inflation tube. The moving part is fixedly connected to the piston rod. The lead screw is threadedly connected to the moving part.

[0010] A further feature of this invention is that the cleaning mechanism includes a support, a cover, a hot air pipe, and a branch pipe. The support is fixedly installed on the top of the ultrasonic cleaner, the hydraulic cylinder is fixedly installed on the top of the support, the cover is fixedly installed on the support, the hot air pipe is fixedly installed on the support, and the branch pipe is fixedly installed on the hot air pipe and the cover.

[0011] A further feature of this invention is that the top of the rotating plate has multiple assembly holes, and the main airbag is fixedly installed in the assembly holes.

[0012] The main airbag is assembled using the above technical solution.

[0013] A further feature of this invention is that the inflation tube is fixedly installed on the rotating plate, and the inflation tube is connected to the inside of the main airbag.

[0014] A further feature of this invention is that a movable groove is provided at the bottom of the rotating plate, and the movable component is slidably installed in the movable groove.

[0015] By adopting the above technical solution, it is convenient for the moving parts to move laterally.

[0016] A further feature of this invention is that the lead screw is rotatably mounted on the rotating shaft and the rotating plate, and a screw hole is provided on the side of the moving part, with the lead screw threadedly connected to the screw hole.

[0017] By adopting the above technical solution, the moving part can move laterally.

[0018] A further feature of this invention is that the ultrasonic cleaner is equipped with a drain pipe, and a valve is installed on the drain pipe.

[0019] A further feature of this invention is that a diamond single-crystal substrate is sandwiched inside the main airbag, and the bottom of the diamond single-crystal substrate is in contact with the inner airbag.

[0020] The beneficial effects of this utility model are:

[0021] This invention, through its cleaning mechanism, combines the main airbag and the inner baffle airbag to not only fix the substrate but also form a buffer layer. When ultrasonic cleaning generates vibrations, the flexible material of the airbag can absorb the impact force, preventing the substrate from being scratched or cracked due to rigid collisions. Compared with traditional cleaning methods, this invention greatly improves the substrate yield. By integrating ultrasonic cleaning and hot air drying functions into the same device, there is no need to manually transfer the substrate to other equipment for drying after cleaning, reducing the time spent in intermediate steps and the risk of secondary contamination of the substrate, shortening the overall processing cycle, and improving production efficiency. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of a surface cleaning device for diamond single crystal substrates proposed in this utility model. Figure 1 .

[0024] Figure 2 This is a schematic diagram of the structure of a surface cleaning device for diamond single crystal substrates proposed in this utility model. Figure 2 .

[0025] Figure 3 yes Figure 1 A schematic diagram of part A in the diagram.

[0026] Figure 4 yes Figure 2 A schematic diagram of part B in the diagram.

[0027] In the diagram, 1. Ultrasonic cleaner; 2. Support frame; 3. Hydraulic cylinder; 4. Push frame; 5. Servo motor; 6. Rotating shaft; 7. Rotating plate; 8. Main airbag; 9. Inner baffle airbag; 10. Diamond single crystal substrate; 11. Inflation pipe; 12. Piston rod; 13. Moving part; 14. Lead screw; 15. Cover; 16. Hot air pipe; 17. Branch pipe. Detailed Implementation

[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation", "connection" and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood through the specific circumstances.

[0029] The technical solution of this utility model will now be clearly and completely described with reference to specific embodiments. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0030] See Figure 1 , Figure 2 , Figure 3 and Figure 4 This utility model provides a surface cleaning device for diamond single crystal substrates, comprising:

[0031] Ultrasonic cleaning machine 1 is equipped with a cleaning mechanism. It should be noted that the cleaning mechanism can flexibly clamp the diamond single crystal substrate 10 to prevent collisions and friction between the diamond single crystal substrates 10 and between the diamond single crystal substrate 10 and the ultrasonic cleaning machine 1. It can effectively protect the diamond single crystal substrate 10, and can also facilitate quick drying after cleaning.

[0032] The cleaning mechanism includes a hydraulic cylinder 3, a pusher 4, a servo motor 5, a rotating shaft 6, a rotating plate 7, a main airbag 8, an inner baffle airbag 9, an inflation tube 11, a piston rod 12, a moving part 13, and a lead screw 14;

[0033] The hydraulic rod of hydraulic cylinder 3 is fixedly connected to push frame 4. Servo motor 5 is fixedly mounted on push frame 4. The output end of servo motor 5 is fixedly connected to rotating shaft 6. Rotating plate 7 is fixedly mounted on rotating shaft 6. Main airbag 8 is fixedly mounted on rotating plate 7. Inner baffle airbag 9 is fixedly mounted inside main airbag 8 and communicates with the inside of main airbag 8. Inflation pipe 11 is fixedly mounted on main airbag 8. It should be noted that both inner baffle airbag 9 and main airbag 8 are annular. The function of inner baffle airbag 9 is to limit the bottom of diamond single crystal substrate 10, and then through inner baffle airbag 9 and main airbag 10... The expansion of the airbag 8 clamps and fixes the diamond single crystal substrate 10. The inner baffle airbag 9 only has a partial contact area with the diamond single crystal substrate 10. The larger area at the bottom of the diamond single crystal substrate 10 is connected to the bottom. Moreover, when cleaning the diamond single crystal substrate 10, both ends are cleaned. The contact area between the inner baffle airbag 9 and the main airbag 8 and the diamond single crystal substrate 10 will not affect the cleaning effect of the inner baffle airbag 9 and the main airbag 8. If there are still residues in the contact area between the diamond single crystal substrate 10 and the inner baffle airbag 9, it can be flipped over and cleaned again later.

[0034] The piston rod 12 is slidably and sealed on the inflation pipe 11, the moving part 13 is fixedly connected to the piston rod 12, and the lead screw 14 is threadedly connected to the moving part 13.

[0035] With the above structure, the diamond single crystal substrate 10 is placed into the main airbag 8, and the inner baffle airbag 9 limits the diamond single crystal substrate 10. Rotating the lead screw 14 causes the moving part 13 to drive the piston rod 12 to move, thereby inflating the inner baffle airbag 9 and the main airbag 8, so that the main airbag 8 clamps and fixes the diamond single crystal substrate 10. Then, the servo motor 5 is started, causing the rotating plate 7 to rotate 90°. Then, the hydraulic cylinder 3 is started, causing the rotating plate 7 to move into the ultrasonic cleaner 1 for ultrasonic cleaning of the diamond single crystal substrate 10. This can flexibly clamp the diamond single crystal substrate 10, preventing collisions and friction between the diamond single crystal substrates 10 and between the diamond single crystal substrate 10 and the ultrasonic cleaner 1, thus providing good protection for the diamond single crystal substrate 10. After cleaning, the hydraulic cylinder 3 is started, causing the rotating plate 7 to move out of the ultrasonic cleaner 1, and then the servo motor 5 is started, causing the rotating plate 7 to move into the cover 15.

[0036] Specifically, the cleaning mechanism also includes a bracket 2, a cover 15, a hot air pipe 16, and a branch pipe 17. The bracket 2 is fixedly installed on the top of the ultrasonic cleaner 1, the hydraulic cylinder 3 is fixedly installed on the top of the bracket 2, the cover 15 is fixedly installed on the bracket 2, the hot air pipe 16 is fixedly installed on the bracket 2, and the branch pipe 17 is fixedly installed on the hot air pipe 16 and the cover 15.

[0037] With the above structure, the hot air pipe 16 is connected to an external hot air blower. Part of the hot air can be blown out from the lower branch pipe of the hot air pipe 16 to blow hot air below the rotating plate 7, and the other part of the hot air can be blown out from the upper branch pipe of the hot air pipe 16 and blow hot air above the rotating plate 7 through the branch pipe 17. In this way, the diamond single crystal substrate 10 can be dried quickly. After drying, the screw 14 is rotated to make the inner baffle 9 and the main air bladder 8 contract, releasing the restriction on the diamond single crystal substrate 10. A collection box is placed under the cover 15, which facilitates the collection of the cleaned diamond single crystal substrate 10.

[0038] Specifically, the top of the rotating plate 7 has multiple assembly holes, the main airbag 8 is fixedly installed in the assembly holes, the inflation tube 11 is fixedly installed on the rotating plate 7, the inflation tube 11 is connected to the inside of the main airbag 8, the main airbag 8 holds a diamond single crystal substrate 10, the bottom of the diamond single crystal substrate 10 is in contact with the inner baffle airbag 9, it should be noted that this facilitates flexible clamping and fixing of the diamond single crystal substrate 10.

[0039] Specifically, the bottom of the rotating plate 7 is provided with a moving groove, the moving part 13 is slidably installed in the moving groove, the lead screw 14 is rotatably installed on the rotating shaft 6 and the rotating plate 7, the side of the moving part 13 is provided with a screw hole, and the lead screw 14 is threadedly connected to the screw hole. It should be noted that this allows the moving part 13 to move stably in the lateral direction.

[0040] Specifically, the ultrasonic cleaner 1 is equipped with a drain pipe, and a valve is installed on the drain pipe. It should be noted that the specific structure of the ultrasonic cleaner 1 is based on existing technology. The water is replaced regularly after a period of use to ensure cleanliness and thus guarantee the cleaning effect.

[0041] Working principle:

[0042] S1: First, place the diamond single crystal substrate 10 to be cleaned into the main airbag 8. At this time, the inner baffle airbag 9 initially limits the diamond single crystal substrate 10, so that the substrate is in a relatively stable position. Rotate the lead screw 14. Since the lead screw 14 is threadedly connected to the moving part 13, and the moving part 13 is laterally slidably installed in the moving groove at the bottom of the rotating plate 7, the rotation of the lead screw 14 will cause the moving part 13 to drive the piston rod 12 to move in the inflation tube 11. The inflation tube 11 is connected to the inside of the main airbag 8. The movement of the piston rod 12 will squeeze the gas in the inflation tube 11 into the main airbag 8 and the inner baffle airbag 9 connected to it, so that the main airbag 8 and the inner baffle airbag 9 expand. After the main airbag 8 expands, it flexibly clamps and fixes the diamond single crystal substrate 10. The inner baffle airbag 9 further stabilizes the bottom of the substrate. At the same time, since the contact area between the inner baffle airbag 9 and the diamond single crystal substrate 10 is limited, it will not affect the subsequent cleaning effect of the substrate too much.

[0043] S2: Start the servo motor 5. The output of the servo motor 5 drives the rotating shaft 6 to rotate, thereby rotating the rotating plate 7 fixed on the rotating shaft 6 by 90°. Adjust the main airbag 8 holding the diamond single crystal substrate 10 to a suitable direction. Start the hydraulic cylinder 3. The hydraulic rod of the hydraulic cylinder 3 pushes the pusher 4, which in turn drives the rotating plate 7 to move downward, so that the main airbag 8 holding the diamond single crystal substrate 10 is moved into the ultrasonic cleaner 1. The ultrasonic cleaner 1 is started. By generating ultrasonic waves, it acts on the cleaning fluid to perform ultrasonic cleaning on the diamond single crystal substrate 10, removing contaminants from the surface of the substrate. During the cleaning process, since the substrate is flexibly held by the main airbag 8, it can effectively prevent collisions and friction between substrates and between the substrate and the ultrasonic cleaner 1, thus playing a good protective role.

[0044] S3: After cleaning, start the hydraulic cylinder 3 to move the rotating plate 7 upward from the ultrasonic cleaner 1, start the servo motor 5 to rotate the rotating plate 7, and move the main airbag 8 holding the diamond single crystal substrate 10 into the cover 15. The hot air pipe 16 is connected to the external hot air fan. Part of the hot air is blown out from the lower branch pipe of the hot air pipe 16 to blow hot air below the rotating plate 7; the other part is blown out from the upper branch pipe of the hot air pipe 16 and blows hot air above the rotating plate 7 through the branch pipe 17. By blowing hot air from the top and bottom at the same time, the diamond single crystal substrate 10 is quickly dried to remove the cleaning liquid remaining on the substrate surface.

[0045] The foregoing has provided a detailed description of the surface cleaning device for diamond single-crystal substrates provided by this utility model. Specific embodiments have been used to illustrate the principle and implementation of this utility model. The descriptions of the embodiments above are merely for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A surface cleaning device for diamond single crystal substrates, characterized in that, include: An ultrasonic cleaner (1) is provided with a cleaning mechanism. The cleaning mechanism includes a hydraulic cylinder (3), a pusher (4), a servo motor (5), a rotating shaft (6), a rotating plate (7), a main airbag (8), an inner baffle airbag (9), an inflation tube (11), a piston rod (12), a moving part (13), and a lead screw (14); The hydraulic rod of the hydraulic cylinder (3) is fixedly connected to the push frame (4). The servo motor (5) is fixedly installed on the push frame (4). The output end of the servo motor (5) is fixedly connected to the rotating shaft (6). The rotating plate (7) is fixedly installed on the rotating shaft (6). The main airbag (8) is fixedly installed on the rotating plate (7). The inner baffle airbag (9) is fixedly installed on the inner side of the main airbag (8) and communicates with the inside of the main airbag (8). The inflation tube (11) is fixedly installed on the main airbag (8). The piston rod (12) is slidably and sealed on the inflation tube (11). The moving part (13) is fixedly connected to the piston rod (12). The lead screw (14) is threadedly connected to the moving part (13).

2. The surface cleaning device for diamond single crystal substrates according to claim 1, characterized in that, The cleaning mechanism also includes a bracket (2), a cover (15), a hot air pipe (16), and a branch pipe (17). The bracket (2) is fixedly installed on the top of the ultrasonic cleaner (1). The hydraulic cylinder (3) is fixedly installed on the top of the bracket (2). The cover (15) is fixedly installed on the bracket (2). The hot air pipe (16) is fixedly installed on the bracket (2). The branch pipe (17) is fixedly installed on the hot air pipe (16) and the cover (15).

3. The surface cleaning device for diamond single crystal substrates according to claim 1, characterized in that, The top of the rotating plate (7) has multiple assembly holes, and the main airbag (8) is fixedly installed in the assembly holes.

4. The surface cleaning device for diamond single crystal substrates according to claim 1, characterized in that, The inflation tube (11) is fixedly installed on the rotating plate (7), and the inflation tube (11) is connected to the inside of the main airbag (8).

5. The surface cleaning device for diamond single crystal substrates according to claim 1, characterized in that, The bottom of the rotating plate (7) is provided with a moving groove, and the moving part (13) is slidably installed in the moving groove.

6. The surface cleaning device for diamond single crystal substrates according to claim 1, characterized in that, The lead screw (14) is rotatably mounted on the rotating shaft (6) and the rotating plate (7). The moving part (13) has a screw hole on its side, and the lead screw (14) is threadedly connected to the screw hole.

7. The surface cleaning device for diamond single crystal substrates according to claim 1, characterized in that, The ultrasonic cleaner (1) is equipped with a drain pipe and a valve.

8. The surface cleaning device for diamond single crystal substrates according to claim 1, characterized in that, The main airbag (8) contains a diamond single crystal substrate (10), and the bottom of the diamond single crystal substrate (10) is in contact with the inner baffle airbag (9).

Images