Storage box convenient for taking and placing semiconductor silicon wafers

Abstract

The utility model discloses a storage box convenient for taking and placing semiconductor silicon wafers in the related technical field of silicon wafer storage boxes, which comprises a support placing frame and a lower support protective box, an upper protective cover is arranged above the lower support protective box in a matched manner, an upper clamping limiting seat is arranged at the inner top of the upper protective cover, and a lower clamping limiting seat is arranged at the inner top of the lower protective cover. The upper clamping and limiting seat is provided with a clamping and limiting groove, the supporting and placing frame is provided with a silicon wafer placing groove, the two ends of the supporting and placing frame are provided with protective end plates, the protective end plates are of an arc-shaped sinking structure, and the position height of the protective end plates is lower than the height of the top face of the supporting and placing frame body. The silicon wafer storage rack is provided with the supporting and placing rack, the lower supporting and protecting box and the upper protecting cover, the supporting and placing rack is of a basket type structure, the upper protecting cover and the lower supporting and protecting box are of a split type structure, the supporting and placing rack can be integrally taken out, and the protecting end plates of arc-shaped sinking structures are arranged at the two ends of the supporting and placing rack, so that silicon wafers can be conveniently taken and placed.

Description

Technical Field

[0001] This utility model belongs to the technical field of silicon wafer storage boxes, specifically, it relates to a storage box that facilitates the placement and removal of semiconductor silicon wafers. Background Technology

[0002] Semiconductor silicon wafers are thin films made from high-purity polycrystalline silicon as raw material, formed by monocrystalline silicon fabrication processes to create silicon rods, which are then finely cut. They are the basic material for manufacturing chips and play a crucial role in the semiconductor industry chain. In the production process of semiconductor silicon wafers, silicon rods are cut into thin wafers, which are then further processed to form the semiconductor silicon wafers we commonly see. Because silicon wafers need to be handled and transported during production, storage devices are used to temporarily hold them. Most existing silicon wafer storage devices are basket structures, with the wafers placed in the baskets. While the basket structure facilitates wafer transport, the wafers are exposed to the external environment, making them susceptible to contamination during handling, handling, and storage. There is also a risk that the wafers may fall out of the baskets.

[0003] In view of this, this utility model is proposed. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a storage box that facilitates the placement and removal of semiconductor silicon wafers. The basic concept of the technical solution adopted by this utility model to solve the above technical problem is as follows:

[0005] A storage box for easy placement and removal of semiconductor silicon wafers includes a support frame and a lower support protective box. An upper protective cover is fitted on top of the lower support protective box. An upper locking limit seat is located at the top inner position of the upper protective cover, and the upper locking limit seat has a locking limit groove. The support frame has a silicon wafer placement groove. Protective end plates are located at both ends of the support frame. The protective end plates have an arc-shaped recessed structure, and their height is lower than the top surface of the main body of the support frame. A support base is located below the support frame. A fixed bracket is located at one end of the bottom of the lower support protective box, and a movable bracket is located at the other end. Fixed blocks are located at both ends of the fixed bracket, and movable blocks are located at both ends of the movable bracket. The positions and spacing of the fixed and movable blocks are adapted to the support base, thereby fixing the position of the support frame.

[0006] As a further embodiment of this utility model: a support base is provided on the bottom surface of the lower support protective box, and an installation groove is provided on the bottom surface of the support base. A support buffer pad is installed in the installation groove to prevent the lower support protective box from falling.

[0007] As a further improvement of this utility model: the upper clamping and limiting seat is an open trapezoidal structure, and multiple sets of clamping and limiting grooves and silicon wafer placement grooves are provided. The positions of the clamping and limiting grooves and the silicon wafer placement grooves correspond one-to-one, which is used to effectively space and protect individual silicon wafers.

[0008] As a further improvement of this utility model: the upper protective cover is provided with fixing buckles on both sides, the lower support protective box is provided with corresponding matching tongues on both sides, and the top of the upper protective cover is provided with a transfer handle to facilitate the overall movement of the box.

[0009] As a further embodiment of this utility model: flip handles are installed on both sides of the upper end of the support placement frame, the lower outer side of the support placement frame is a sloping structure, and side support blocks are fixedly installed on both sides inside the lower support protective box. Supporting sloping surfaces are provided on the side support blocks. The supporting sloping surfaces are adapted to the sloping structure on the outer side of the support placement frame to improve the stability of the support placement frame inside the lower support protective box.

[0010] As a further improvement of this utility model: the side support block is a right-angled trapezoidal structure, a support protective pad is provided on the support inclined surface, the fixed card seat is fixedly connected to the lower support protective box, and a clamping protective pad is provided on the inner side of both the movable card block and the fixed card block to effectively buffer and protect the clamping position.

[0011] As a further improvement of this utility model: a telescopic guide rod is fixedly provided on the outer side of the movable card seat. The telescopic guide rod is telescopically connected to the telescopic fitting sleeve. The telescopic fitting sleeve has a hollow structure. A telescopic spring is provided on the outer side of the telescopic guide rod. The telescopic guide rod can be telescopically adjusted relative to the telescopic fitting sleeve, which facilitates the placement and removal of the support frame.

[0012] By adopting the above technical solution, this utility model has the following beneficial effects compared with the prior art.

[0013] This utility model is provided with a support and placement frame, a lower support and protective box and an upper protective cover. The support and placement frame is a basket-type structure, and the upper protective cover and the lower support and protective box are separate structures, so that the support and placement frame can be taken out as a whole. Both ends of the support and placement frame are provided with protective end plates with an arc-shaped sunken structure to facilitate the placement and removal of silicon wafers.

[0014] The lower support protective box of this utility model is provided with a fixed bracket and a movable bracket at the bottom position to fix the position of the support placement frame. The upper protective cover is provided with an upper clamping limit seat on the inner side to protect and fix the upper part of the silicon wafer. It can effectively seal the silicon wafer during transportation and storage, improve safety, and the movable bracket is designed with a telescopic structure to facilitate the operation of the support placement frame.

[0015] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings. Attached Figure Description

[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments and descriptions of the present invention are used to explain the present invention, but do not constitute an undue limitation of the present invention. Obviously, the drawings described below are merely some embodiments; those skilled in the art can obtain other drawings based on these drawings without creative effort. In the drawings:

[0017] Figure 1 This is a schematic diagram of the split structure of this utility model;

[0018] Figure 2 This is a front view of the split-state of this utility model;

[0019] Figure 3 This is a cross-sectional view of the combined state of this utility model;

[0020] Figure 4 This is a schematic diagram of the installation of the movable card holder of this utility model.

[0021] In the diagram: 1. Support placement frame; 2. Lower support protective box; 3. Upper protective cover; 4. Fixing buckle; 5. Matching latch; 6. Flip handle; 7. Protective end plate; 8. Support base frame; 9. Silicon wafer placement slot; 10. Upper clamping limit seat; 11. Clamping limit slot; 12. Side support block; 13. Support inclined surface; 14. Support protective pad; 15. Fixed card seat; 16. Fixed card block; 17. Movable card seat; 18. Movable card block; 19. Telescopic matching sleeve; 20. Telescopic guide rod; 21. Telescopic spring; 22. Clamping protective pad; 23. Transfer handle; 24. Support base; 25. Support buffer pad.

[0022] It should be noted that these accompanying drawings and textual descriptions are not intended to limit the scope of the present invention in any way, but rather to illustrate the concept of the present invention to those skilled in the art by referring to specific embodiments. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. The following embodiments are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0024] like Figures 1 to 4As shown, a storage box for easy handling of semiconductor silicon wafers includes a support frame 1 and a lower support protective box 2. An upper protective cover 3 is provided on the upper part of the lower support protective box. An upper clamping limit seat 10 is provided at the top inner part of the upper protective cover 3, and a clamping limit groove 11 is provided on the upper clamping limit seat 10. A silicon wafer placement groove 9 is provided on the support frame 1. Protective end plates 7 are provided at both ends of the support frame 1. The protective end plates 7 have an arc-shaped recessed structure, and their height is lower than the top surface height of the main body of the support frame 1. A support base 8 is provided below the support frame 1. A fixed card seat 15 is provided at one end of the bottom of the lower support protective box, and a movable card seat 17 is provided at the other end. Fixed card blocks 16 are provided at both ends of the fixed card seat 15, and movable card blocks 18 are provided at both ends of the movable card seat 17. The positions and spacing of the fixed card blocks 16 and the movable card blocks 18 are adapted to the support base 8. The fixed card seats 15 and the movable card seats 17 are used to fix the position of the support frame 1.

[0025] The lower support protective box 2 has a support base 24 on its bottom surface, and the bottom surface of the support base 24 has an installation groove. A support buffer pad 25 is installed in the installation groove to prevent the lower support protective box 2 from falling.

[0026] The upper clamping limit seat 10 has an open trapezoidal structure. Multiple sets of clamping limit grooves 11 and silicon wafer placement grooves 9 are provided. The positions of the clamping limit grooves 11 and silicon wafer placement grooves 9 are used one-to-one to effectively space and protect individual silicon wafers.

[0027] The upper protective cover 3 has fixing buckles 4 on both sides, and the lower supporting protective box 2 has corresponding matching tongues 5 on both sides. The top of the upper protective cover 3 has a transfer handle 23 to facilitate the overall movement of the box.

[0028] Flip handles 6 are installed on both sides of the upper end of the support frame 1. The lower outer side of the support frame 1 has a sloping structure. Side support blocks 12 are fixedly installed on both sides inside the lower support protective box 2. Supporting slopes 13 are provided on the side support blocks 12. The supporting slopes 13 are adapted to the sloping structure on the outer side of the support frame 1 to improve the stability of the support frame 1 inside the lower support protective box 2.

[0029] The side support block 12 has a right-angled trapezoidal structure. A support protective pad 14 is provided on the support inclined surface 13. The fixed card seat 15 is fixedly connected to the lower support protective box 2. The inner surfaces of the movable card block 18 and the fixed card block 16 are provided with clamping protective pads 22 to effectively buffer and protect the clamping position.

[0030] A telescopic guide rod 20 is fixedly installed on the outer side of the movable card holder 17. The telescopic guide rod 20 is telescopically connected to the telescopic fitting sleeve 19. The telescopic fitting sleeve 19 is a hollow structure. A telescopic spring 21 is installed on the outer side of the telescopic guide rod 20. The telescopic guide rod 20 can be telescopically adjusted relative to the telescopic fitting sleeve 19 to facilitate the placement and removal of the support frame 1.

[0031] The working principle of this utility model is as follows: a semiconductor silicon wafer is placed in the silicon wafer placement slot 9 of the support placement frame 1. The support placement frame 1 is provided with flip handles 6 on both sides to facilitate the extraction of the support placement frame 1. When the support placement frame 1 is placed into the lower support protective box 2, one end of the support base frame 8 presses against the movable card seat 17. The movable card seat 17 pushes the telescopic guide rod 20 to move into the telescopic fitting sleeve 19. The telescopic spring 21 is compressed, and the support base frame 8 of the support placement frame 1 is placed between the fixed card seat 15 and the movable card seat 17. The position of the support placement frame 1 is effectively fixed during the return process using the elastic force of the telescopic spring 21. The lower support protective box 2 is provided with side support blocks 12 that are adapted to the support placement frame 1 on both sides to effectively support and limit the two sides of the support placement frame 1, further improving the placement stability of the support placement frame 1.

[0032] Then, the upper protective cover 3 is fastened on top of the support placement frame 1 and the lower support protective box 2. The upper protective cover 3 has an upper clamping limit seat 10 at the top of its inner side. The upper clamping limit seat 10 has a clamping limit groove 11, which is used to clamp and fix the upper part of the silicon wafer, thereby improving the placement stability of the silicon wafer. The upper protective cover 3 and the lower support protective box 2 are fixed together by the cooperation of the fixing buckle 4 and the locking tongue 5. The opening and closing process is simple.

[0033] This utility model includes a support and placement frame 1, a lower support and protective box 2, and an upper protective cover 3. The support and placement frame 1 is a basket-type structure, and the upper protective cover 3 and the lower support and protective box 2 are separate structures, allowing the support and placement frame 1 to be removed as a whole. Both ends of the support and placement frame 1 are provided with arc-shaped sunken protective end plates 7 to facilitate the placement and removal of silicon wafers. The bottom of the lower support and protective box 2 is provided with a fixed bracket 15 and a movable bracket 17 for fixing the position of the support and placement frame 1. The upper protective cover 3 is provided with an upper clamping limit seat 10 on its inner side for protecting and fixing the upper part of the silicon wafer. This can effectively seal the silicon wafer during transportation and storage, improving safety. The movable bracket 17 is a telescopic structure, making it convenient to operate the support and placement frame 1 during the placement and removal process.

[0034] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-described technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A storage box for facilitating the taking and placing of semiconductor silicon wafers, comprising a support placing rack (1) and a lower support protection box (2), characterized in that, An upper protective cover (3) is provided above the lower support protective box (2). An upper clamping limit seat (10) is provided at the inner top of the upper protective cover (3). A clamping limit groove (11) is provided on the upper clamping limit seat (10). A silicon wafer placement groove (9) is provided on the support placement frame (1). Protective end plates (7) are provided at both ends of the support placement frame (1). The protective end plates (7) are arc-shaped recessed structures. The height of the protective end plates (7) is lower than that of the support placement frame. (1) The top surface height of the main body, a support base (8) is provided below the support placement frame (1), a fixed card seat (15) is provided at one end of the bottom of the lower support protective box (2), and a movable card seat (17) is provided at the other end. Fixed card blocks (16) are provided at both ends of the fixed card seat (15), and movable card blocks (18) are provided at both ends of the movable card seat (17). The positions and spacing of the fixed card blocks (16) and the movable card blocks (18) are adapted to the support base (8).

2. The storage box for easy handling of semiconductor silicon wafers according to claim 1, characterized in that, The bottom surface of the lower support protective box (2) is provided with a support base (24), and the bottom surface of the support base (24) is provided with an installation groove, in which a support buffer pad (25) is installed.

3. The storage box according to claim 2, wherein, The upper clamping limiting seat (10) is an open trapezoidal structure. Multiple sets of clamping limiting grooves (11) and silicon wafer placement grooves (9) are provided. The positions of the clamping limiting grooves (11) and silicon wafer placement grooves (9) correspond one-to-one.

4. The storage box according to claim 3, wherein, The upper protective cover (3) is provided with fixing buckles (4) on both sides, the lower support protective box (2) is provided with matching tongues (5) on both sides, and the top of the upper protective cover (3) is provided with a transfer handle (23).

5. A storage box for easy handling of semiconductor silicon wafers according to claim 4, characterized in that, The upper two sides of the support frame (1) are equipped with flip handles (6). The lower outer side of the support frame (1) is a sloping structure. The lower support protective box (2) is fixedly provided with side support blocks (12) on both sides. The side support blocks (12) are provided with support slopes (13). The support slopes (13) are adapted to the sloping structure on the outer side of the support frame (1).

6. The storage box according to claim 5, wherein The side support block (12) is a right trapezoidal structure. A support protective pad (14) is provided on the support inclined surface (13). The fixed card seat (15) is fixedly connected to the lower support protective box (2). A clamping protective pad (22) is provided on the inner side of the movable card block (18) and the fixed card block (16).

7. The storage box according to claim 6, wherein, A telescopic guide rod (20) is fixedly provided on the outside of the movable card holder (17). The telescopic guide rod (20) is telescopically connected to the telescopic fitting sleeve (19). The telescopic fitting sleeve (19) is a hollow structure. A telescopic spring (21) is provided on the outside of the telescopic guide rod (20).

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