Observation window structure and PVD equipment

Abstract

The utility model relates to the technical field of semiconductors, in particular to an observation window structure and PVD equipment. The observation window structure comprises a connecting shell, an installation space is formed in the connecting shell, the connecting shell comprises a first connecting side and a second connecting side which are located on the two opposite sides of the installation space, and the second connecting side is used for being connected and installed with a vacuum chamber of the PVD equipment in a sealed mode; the observation window body is hermetically mounted on the first connecting side of the connecting shell through a mounting structure; the protection assembly comprises a protection plate and a protection control mechanism in control connection with the protection plate, the protection plate is located in the mounting space of the connecting shell and is vertically arranged close to the first connecting side, and the protection control mechanism drives the protection plate to ascend and descend so as to shield the observation window body or expose the observation window body. The observation window structure and the PVD equipment solve the technical problems that defective products in batches are produced due to the fact that workers cannot find abnormal conditions in a vacuum chamber in time, and cost is wasted due to the fact that an existing observation window needs to be replaced frequently.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to an observation window structure and a PVD device. Background Technology

[0002] The main processes in the semiconductor heterojunction industry are texturing, CVD (chemical vapor deposition), PVD (physical vapor deposition), and screen printing. The texturing process is used to remove organic matter and metal impurities from the surface of the silicon wafer. The CVD process deposits amorphous I, P, and N layers on the silicon wafer through chemical reactions. The PVD process deposits transparent conductive films on the silicon wafer through physical reactions. The screen printing process prints gate lines on the surface of the silicon wafer using paste.

[0003] The PVD process involves high-purity process gas molecules forming plasma under an external electric field in a vacuum environment. Gas ions bombard the target material, ejecting target atoms and depositing them onto a silicon wafer to form a conductive thin film. The stability of the glow discharge and the quality of the target material are key concerns in PVD. The PVD process typically uses an observation window in the chamber to confirm the glow discharge stability during the deposition of the transparent conductive film, checking for any tip discharge phenomena; to confirm the target material for breakdown or abnormalities such as nodules; and to confirm the cleanliness of the chamber and the absence of foreign objects falling into the chamber. However, existing technology and equipment have the following drawbacks:

[0004] 1. When the target atoms are bombarded by gas ions, their direction of detachment is uncertain, causing some target atoms to deposit on the observation window, blocking the employee's view and making it impossible to detect abnormalities in the chamber in time, resulting in the production of batches of defective products.

[0005] 2. Transparent conductive films commonly use ITO or VTTO targets. During deposition, dust particles are present in the chamber, and these particles fall onto the observation window, affecting the employee's view.

[0006] 3. The existing equipment's observation window needs to be replaced every maintenance cycle, which results in cost waste. Furthermore, if the sealing surface is not properly installed during replacement, there is a risk of air leakage, which will affect the efficiency of the solar cells. Utility Model Content

[0007] The purpose of this application is to provide an observation window structure and PVD equipment to solve the technical problems of workers being unable to detect abnormalities in the vacuum chamber of the PVD equipment in a timely manner, resulting in the production of batch defective products, and the need for frequent replacement of existing observation windows, which leads to wasted costs.

[0008] Firstly, this application provides an observation window structure, comprising:

[0009] A connecting housing having an internal mounting space includes a first connecting side and a second connecting side located on opposite sides of the mounting space. The second connecting side is used for a sealed connection and installation with the vacuum chamber of a PVD device.

[0010] The observation window body is sealed and mounted to the first connecting side of the connecting housing via a mounting structure; and

[0011] The protective assembly includes a protective plate and a protective control mechanism controlled to the protective plate. The protective plate is located in the installation space of the connecting housing and is vertically arranged near the first connecting side. The protective control mechanism drives the protective plate to rise and fall to cover the observation window body or expose the observation window body.

[0012] Furthermore, the protective control mechanism includes a first motor and a linkage component controlled and connected to the first motor. The linkage component includes a first connecting rod with one end fixedly connected to the output end of the first motor, a second connecting rod with one end rotatably connected to the other end of the first connecting rod, and a connecting block with one end rotatably connected to the other end of the second connecting rod. The other end of the connecting block is fixedly connected to the protective plate. The first motor controls the first connecting rod and the second connecting rod to drive the protective plate to move up and down to cover or expose the observation window body.

[0013] Furthermore, one or more sets of the aforementioned linkage components are fixedly connected to the bottom of the protective plate; or

[0014] Two sets of linkage components are provided, which are fixedly connected to the opposite sides of the protective plate away from the observation window body. One end of the first connecting rod of one linkage component is fixedly connected to the output end of the first motor. The two second connecting rods of the two sets of linkage components are fixedly connected to the opposite ends of the first crossbar, so that the first motor can drive the two sets of linkage components to move simultaneously.

[0015] Furthermore, the two sets of linkage components also include limiting blocks fixedly connected to the inner walls of opposite sides of the connecting housing. A limiting protrusion is provided on the side of the connecting block facing the limiting block, and a trajectory limiting groove is provided on the limiting block corresponding to the movement trajectory of the connecting block. The limiting protrusion moves within the trajectory limiting groove.

[0016] Furthermore, the inner walls of the opposite sides of the connecting housing are respectively provided with a first longitudinal limiting groove and a second longitudinal limiting groove corresponding to the opposite sides of the protective plate. The opposite sides of the protective plate are respectively inserted into the first longitudinal limiting groove and the second longitudinal limiting groove for vertical movement.

[0017] Furthermore, the observation window structure also includes a cleaning component, which is located within the installation space of the connecting housing, near the first connecting side, and between the observation window body and the protective plate;

[0018] The cleaning assembly includes a second motor, a first longitudinal transmission member and a second longitudinal transmission member fixedly installed on the inner walls of opposite sides of the connecting housing, and a transverse movable rod whose two ends are respectively connected to the first longitudinal transmission member and the second longitudinal transmission member. A cleaning scraper is laid on the side of the transverse movable rod facing the observation window body. The cleaning scraper is attached to the observation window body. The second motor is connected to the first longitudinal transmission member and / or the second longitudinal transmission member to control the transverse movable rod to move up and down, thereby controlling the cleaning scraper to move up and down to clean the observation window body.

[0019] Furthermore, the first longitudinal transmission component includes a hollow first connecting vertical frame and a first screw rod passing through the first connecting vertical frame. The second motor is mounted and fixed to the top of the first connecting vertical frame, and the output end of the second motor is fixedly connected to the top end of the first screw rod.

[0020] The second longitudinal transmission component includes a hollow second connecting vertical frame and a second limiting rod passing through the second connecting vertical frame.

[0021] The first connecting vertical frame and the second connecting vertical frame are respectively provided with a first longitudinal sliding groove and a second longitudinal sliding groove. One end of the transverse movable rod passes through the first longitudinal sliding groove and is threadedly connected to the first screw. The other end of the transverse movable rod passes through the second longitudinal sliding groove and is slidably connected to the second limiting rod.

[0022] Furthermore, the observation window structure also includes a dust collection component located below the cleaning component, the dust collection component being fixedly connected to the bottom of the connecting housing;

[0023] The dust collection assembly has a pull-out structure, which includes a collection body fixedly connected to the bottom of the connecting housing, and a dust collection box pulled out and connected inside the collection body. The tops of both the collection body and the dust collection box are open, and the openings are directly below the cleaning scraper of the cleaning assembly.

[0024] Furthermore, a fixing block is fixedly connected to the back of the dust collection box, and the upper surface of the fixing block is provided with a recessed limiting hole.

[0025] A connecting sleeve is fixedly connected to the back of the collecting body. The top of the connecting sleeve has an opening. A sliding rod is slidably connected through the top and bottom of the connecting sleeve. The top of the sliding rod has an abutting outer edge. The top of the sliding rod passes through the opening, and the circumferential edge of the opening can abut against the abutting outer edge of the sliding rod to lock the sliding rod. The bottom end of the sliding rod extends out of the bottom of the connecting sleeve and can be inserted into the limiting hole of the fixing block. A spring is connected to the outer sleeve of the sliding rod. The spring is located inside the connecting sleeve, and the top and bottom of the spring abut against the top of the connecting sleeve and the locking block fixedly connected to the bottom of the connecting sleeve, respectively.

[0026] Secondly, this application provides a PVD device, including a vacuum chamber and an observation window structure as described in any of the preceding claims. The second connecting side of the connecting housing of the observation window structure is sealed to the connecting side of the vacuum chamber, and the product condition inside the vacuum chamber can be observed through the observation window body of the observation window structure.

[0027] Compared with the prior art, the observation window structure and PVD equipment provided in this application can be installed and used with the vacuum chamber of the PVD equipment. The observation window structure includes a connecting housing with an internal installation space, an observation window body sealed and installed on a first connecting side of the connecting housing through an installation structure, and a protective component; the connecting housing includes a first connecting side and a second connecting side located on opposite sides of the installation space, the second connecting side being used for sealed connection and installation with the vacuum chamber of the PVD equipment, allowing personnel to observe the product condition inside the vacuum chamber through the observation window body; the protective component includes a protective plate vertically arranged within the installation space of the connecting housing and near its first connecting side, and a protective control mechanism controlled by the protective plate, which controls the raising and lowering of the protective plate to cover or expose the observation window body.

[0028] With this setup, when staff need to observe the product condition and other conditions inside the vacuum chamber—such as confirming the glow stability of the silicon wafer during transparent conductive film deposition, the presence of tip discharge, the presence of target material breakdown and nodules, etc.—as well as confirming the cleanliness of the vacuum chamber and the presence of foreign objects, the protective control mechanism can drive the protective plate to rise and fall, exposing the observation window. This allows staff to promptly observe the product condition and other conditions inside the vacuum chamber, enabling timely detection of product abnormalities, preventing the production of defective products, and ensuring product quality. Furthermore, when staff do not need to observe the vacuum chamber, the protective control mechanism can drive the protective plate to rise and fall, completely covering the observation window. This protects the observation window from target material atoms depositing on it during the internal reaction, ensuring the cleanliness of the observation window, reducing the frequency of observation window removal and maintenance, lowering equipment operating costs, and eliminating the risk of low cell efficiency due to abnormal sealing ring installation caused by frequent observation window replacements. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the overall structure of the observation window provided in the embodiment of this application;

[0031] Figure 2 This is a partial cross-sectional view of the observation window structure provided in the embodiments of this application;

[0032] Figure 3 This is a schematic diagram of the structure of the protective component provided in the embodiments of this application;

[0033] Figure 4 This is a schematic diagram of the protective component provided in an embodiment of this application from another angle;

[0034] Figure 5 This is a schematic diagram of the structure of the cleaning component provided in the embodiments of this application;

[0035] Figure 6 This is a schematic diagram of the cleaning component provided in an embodiment of this application from another angle;

[0036] Figure 7 This is a schematic diagram of the dust collection assembly provided in the embodiments of this application;

[0037] Figure 8 This is a partial structural diagram of the dust collection assembly provided in the embodiments of this application. Figure 1 ;

[0038] Figure 9 This is a partial structural diagram of the dust collection assembly provided in the embodiments of this application. Figure 2 .

[0039] Figure label:

[0040] 100-Observation window structure;

[0041] 10 - Connecting housing;

[0042] 11-Installation space;

[0043] 121 - First connecting side;

[0044] 122 - Second connecting side;

[0045] 13-Closed panel;

[0046] 20 - The main body of the observation window;

[0047] 31-Mounting frame;

[0048] 32 - Sealing ring;

[0049] 40 - Protective components;

[0050] 41-Protective plate;

[0051] 42-First motor;

[0052] 43 - First Link;

[0053] 44 - Second Link;

[0054] 45-Connecting block;

[0055] 451 - Limiting protrusion;

[0056] 46-Limit Block;

[0057] 461 - Track limiting groove;

[0058] 47 - First horizontal bar;

[0059] 48 - Motor housing;

[0060] 50 - Cleaning components;

[0061] 51-Second motor;

[0062] 52-First connecting vertical frame;

[0063] 521 - First longitudinal groove;

[0064] 53-Second connecting vertical frame;

[0065] 54 - First screw;

[0066] 55 - Second limit lever;

[0067] 56 - Lateral movable bar;

[0068] 561 - Cleaning scraper;

[0069] 60 - Dust collection assembly;

[0070] 61-Collection subject;

[0071] 611 - Top opening;

[0072] 612-Connecting sleeve;

[0073] 613 - Slide bar;

[0074] 6131 - Abutting the outer edge;

[0075] 614 - Spring;

[0076] 615-Card Block;

[0077] 62 - Dust collection box;

[0078] 621-Fixing Block;

[0079] 622 - Handle. Detailed Implementation

[0080] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0081] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0082] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0083] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0084] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0085] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0086] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0087] like Figure 1 and Figure 2 As shown, this application embodiment provides an observation window structure 100 and a PVD equipment using the observation window structure 100. The PVD equipment includes a vacuum chamber and the observation window structure 100. The second connection side 122 of the connection housing 10 of the observation window structure 100 is sealed to the connection side of the vacuum chamber. The operator can observe the product condition in the vacuum chamber through the observation window body 20 of the observation window structure 100.

[0088] like Figure 1 and Figure 2As shown, the observation window structure 100 provided in this embodiment includes a connecting housing 10, an observation window body 20, and a protective component 40. The connecting housing 10 has an internal installation space 11. The connecting housing 10 includes a first connecting side 121 and a second connecting side 122 located on opposite sides of the installation space 11. The observation window body 20 is sealed and installed on the first connecting side 121 of the connecting housing 10 by an installation structure. The installation structure may include a mounting frame 31 and a sealing ring 32 that are installed and connected to the connecting housing 10. The sealing ring 32 is used for isolation between the atmosphere and the vacuum environment, providing protection. High sealing performance to prevent air leakage; the second connecting side 122 is used for sealed connection and installation with the vacuum chamber of the PVD equipment; preferably, the second connecting side 122 is connected to a detachable sealing plate 13. When the observation window structure 100 is connected to the vacuum chamber of the PVD equipment, the sealing plate 13 can be removed, and the second connecting side 122 can be sealed and installed with the connecting side of the vacuum chamber. Before the observation window structure 100 is installed and used, the sealing plate 13 can maintain the overall sealing of the observation window structure, and even maintain the sealing of the internal vacuum environment, which is conducive to matching and connecting with the vacuum chamber.

[0089] The aforementioned protective component 40 includes a protective plate 41 and a protective control mechanism controlled to the protective plate 41. The protective plate 41 is located in the installation space 11 of the aforementioned connecting housing 10 and is vertically arranged near the first connecting side 121 of the connecting housing 10. The protective control mechanism drives the protective plate 41 to rise and fall to cover the observation window body 20 or expose the observation window body 20.

[0090] Compared with the prior art, the observation window structure 100 and the PVD equipment using it provided in this application embodiment can be installed and used with the vacuum chamber of the PVD equipment. The observation window structure 100 includes a connecting housing 10 with an internal installation space 11, an observation window body 20 sealed and installed on the first connecting side 121 of the connecting housing 10 through an installation structure, and a protective component 40; the connecting housing 10 includes a first connecting side 121 and a second connecting side 122 located on opposite sides of the installation space 11, the second connecting side 122 can be used for sealed connection and installation with the vacuum chamber of the PVD equipment, and the operator can observe the reaction of the product in the vacuum chamber through the observation window body 20; the protective component 40 includes a protective plate 41 vertically arranged in the installation space 11 of the connecting housing 10 and close to the first connecting side 121 of the connecting housing 10, and a protective control mechanism controlled by the protective plate 41, the protective control mechanism controlling the protective plate 41 to move up and down to cover or expose the observation window body 20.

[0091] With this setup, when staff need to observe the product condition and other conditions inside the vacuum chamber, such as confirming the glow stability of the silicon wafer during transparent conductive film deposition, the presence of tip discharge, the presence of target material breakdown and nodules, and confirming the cleanliness of the vacuum chamber and the presence of foreign objects, the protective control mechanism can drive the protective plate 41 to move up and down to expose the observation window body 20. This allows staff to observe the product condition and other conditions inside the vacuum chamber in a timely manner, enabling the timely detection of product abnormalities, preventing the production of defective products, and ensuring product quality. Furthermore, when staff do not need to observe the vacuum chamber, the protective control mechanism can drive the protective plate 41 to move up and down to completely cover the observation window body 20, protecting it and preventing target atoms from depositing on the observation window body 20 during the reaction inside the vacuum chamber. This ensures the cleanliness of the observation window body 20, reduces the frequency of observation window removal and maintenance, lowers equipment operating costs, and eliminates the risk of low cell efficiency due to abnormal air leakage caused by frequent replacement of the observation window and abnormal installation of the sealing ring 32.

[0092] like Figures 2 to 4 As shown, in a specific embodiment of the aforementioned protective components, the protective control mechanism may include a first motor 42 and a linkage component controlled and connected to the first motor 42. The linkage component includes a first connecting rod 43 with one end fixedly connected to the output end of the first motor 42, a second connecting rod 44 with one end rotatably connected to the other end of the first connecting rod 43, and a connecting block 45 with one end rotatably connected to the other end of the second connecting rod 44. The other end of the connecting block 45 is fixedly connected to a protective plate 41. Specifically, the protective plate 41 may have a slot, and the other end of the connecting block 45 is engaged and fixedly connected within the slot. The first motor 42 controls the first connecting rod 43 and the second connecting rod 44 to move the protective plate 41 up and down, thereby obscuring or exposing the observation window body 20. Preferably, the first motor 42 may be installed on the outer wall of the connecting housing 10 to reduce internal load and noise. Specifically, the output end of the first motor 42 may extend through the connecting housing 10 into its interior and be fixedly connected to one end of the first connecting rod 43. More preferably, a motor housing 48 for housing the first motor 42 may be provided on the outer side wall of the connecting housing 10.

[0093] In the foregoing embodiments, one optional embodiment is to set one or more sets of the aforementioned linkage components and fix them to the bottom position of the protective plate 41 to enhance the reliability and stability of the movement control.

[0094] Another optional embodiment is to provide two sets of the aforementioned linkage components, which are fixedly connected to opposite sides of the protective plate 41 away from the observation window body 20. One end of the first link 43 of one of these linkage components is fixedly connected to the output end of the first motor 42, and the two second links 44 of the two sets of linkage components are fixedly connected to opposite ends of the first crossbar 47, so that the first motor 42 can simultaneously drive the movement of both sets of linkage components, thereby improving balance and stability.

[0095] Based on the aforementioned embodiments, the two sets of linkage components may further include limiting blocks 46 fixedly connected to the inner walls of opposite sides of the connecting housing 10. A limiting protrusion 451 may be provided on the side of the connecting block 45 facing the limiting block 46. A trajectory limiting groove 461 may be provided on the limiting block 46 corresponding to the movement trajectory of the connecting block 45. The limiting protrusion 451 moves within the trajectory limiting groove 461, and preferably, the connecting block 45 contacts the limiting block 46. By setting the limiting block 46 for limiting movement, the movement of the protective plate can be made more stable. Preferably, the inner walls of opposite sides of the connecting housing 10 may be slotted corresponding to the positions where the limiting block 46 is located, embedding the limiting block 46 within the inner wall and reducing space occupation.

[0096] Another optional limiting method is that the inner walls of the opposite sides of the connecting housing 10 can be respectively provided with a first longitudinal limiting groove and a second longitudinal limiting groove corresponding to the opposite sides of the protective plate 41. The opposite sides of the protective plate 41 are respectively inserted into the first longitudinal limiting groove and the second longitudinal limiting groove for vertical movement, which can also play the role of longitudinal limiting movement of the protective plate 41.

[0097] like Figure 5 and Figure 6As shown, the observation window structure 100 provided in this application embodiment may further include a cleaning component 50, which is located in the installation space 11 of the connecting housing 10, and is disposed near its first connecting side 121, and is located between the observation window body 20 and the protective plate 41. The cleaning assembly 50 may include a second motor 51, a first longitudinal transmission member and a second longitudinal transmission member fixedly installed on the inner walls of opposite sides of the connecting housing 10, and a transverse movable rod 56 whose two ends are respectively connected to the first longitudinal transmission member and the second longitudinal transmission member. A cleaning scraper 561 is laid on the side of the transverse movable rod 56 facing the observation window body 20. The cleaning scraper 561 is attached to the observation window body 20 to facilitate the cleaning of dust adhering to the surface of the observation window body 20. The second motor 51 is connected to the first longitudinal transmission member and / or the second longitudinal transmission member to control the up and down movement of the transverse movable rod 56, thereby controlling the up and down movement of the cleaning scraper 561 to clean the observation window body 20, which facilitates the cleaning of dust adhering to the surface of the observation window body 20 and avoids affecting the observation line of the staff and the use of the equipment.

[0098] In one specific embodiment, the aforementioned first longitudinal transmission component may include a hollow first connecting vertical frame 52 and a first screw 54 passing through the first connecting vertical frame 52. A second motor 51 is mounted and fixed to the top of the first connecting vertical frame 52, and the output end of the second motor 51 is fixedly connected to the top end of the first screw 54. Preferably, the second motor 51 can be a micro motor to reduce its space occupation. The second longitudinal transmission component may include a hollow second connecting vertical frame 53 and a second limiting rod 55 passing through the second connecting vertical frame 53. The first connecting vertical frame 52 and the second connecting vertical frame 53 are respectively provided with a first longitudinal sliding groove 521 and a second longitudinal sliding groove. One end of the transverse movable rod 56 passes through the first longitudinal sliding groove 521 and is threadedly connected to the first screw 54. The other end of the transverse movable rod 56 passes through the second longitudinal sliding groove and is slidably connected to the second limiting rod 55. The second motor 51 drives the first screw 54 to rotate, thereby causing the transverse movable rod 56 to move up and down, which in turn causes the cleaning scraper 561 to move up and down against the observation window body 20, making the cleaning process more stable. Preferably, the first longitudinal connector and the second longitudinal connector can be embedded in the inner walls of opposite sides of the connecting housing 10 to reduce the space occupied.

[0099] like Figures 7 to 9As shown, another preferred embodiment is that the observation window structure 100 provided in this application embodiment may further include a dust collection component 60 located below the aforementioned cleaning component 50. The dust collection component 60 is fixedly connected to the bottom of the connecting housing 10. The dust collection component 60 is a pull-out structure, comprising a collection body 61 fixedly connected to the bottom of the connecting housing 10, and a dust collection box 62 pulled out and connected within the collection body 61. Both the collection body 61 and the dust collection box 62 have openings at the top, specifically as shown below. Figure 7 The top opening 611 is shown, and this top opening 611 is positioned directly below the cleaning scraper 561 of the cleaning assembly 50. The dust collection assembly 60 is designed to facilitate the collection of dust scraped off by the cleaning scraper 561, and also to facilitate regular handling by personnel, preventing dust from falling back into the vacuum chamber and contaminating the silicon wafer, and preventing contamination of the internal environment of the vacuum chamber.

[0100] A more preferred embodiment is, as follows: Figure 8 and Figure 9 As shown, a fixing block 621 can be fixedly connected to the back of the dust collection box 62, and the upper surface of the fixing block 621 can be provided with a recessed limiting hole; a connecting sleeve 612 can be fixedly connected to the back of the collection body 61, and the top of the connecting sleeve 612 is provided with an opening. A sliding rod 613 is slidably connected through the top and bottom of the connecting sleeve 612. The top of the sliding rod 613 is provided with an abutting outer edge 6131. ​​The top of the sliding rod 613 passes through the opening, and the circumferential edge of the opening can abut the sliding rod 613. The outer edge 6131 of the abutment locks the slide rod 613, preventing it from sliding downwards out of the connecting sleeve 612. The bottom end of the slide rod 613 extends out of the bottom of the connecting sleeve 612 and can be inserted into the limiting hole of the fixing block 621. A spring 614 is sleeved and connected to the outer periphery of the slide rod 613. The spring 614 is located inside the connecting sleeve 612, and the top and bottom of the spring 614 abut against the top of the connecting sleeve 612 and the locking block 615 which is fixedly connected to the bottom of the connecting sleeve 612, respectively. Preferably, a handle 622 can be fixedly installed on the front panel opposite to the back of the dust collection box 62 for easy pulling.

[0101] With this configuration, when the dust collection box 62 is pushed into the collection body 61 for dust collection, the elasticity of the spring 614 causes the bottom end of the slide rod 613 to move downwards and spring into the limiting hole of the fixing block 621, thereby limiting the dust collection box 62 and making the collection process more stable. When the dust collection box 62 is pulled out to clean the dust accumulated inside, the elasticity of the outward pulling force spring allows the dust collection box 62 to be easily pulled out without affecting its use.

[0102] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. An observation window structure, characterized in that, include: A connecting housing having an internal mounting space includes a first connecting side and a second connecting side located on opposite sides of the mounting space. The second connecting side is used for a sealed connection and installation with the vacuum chamber of a PVD device. The observation window body is sealed and mounted to the first connecting side of the connecting housing via a mounting structure; and The protective assembly includes a protective plate and a protective control mechanism controlled to the protective plate. The protective plate is located in the installation space of the connecting housing and is vertically arranged near the first connecting side. The protective control mechanism drives the protective plate to rise and fall to cover the observation window body or expose the observation window body.

2. The observation window structure according to claim 1, characterized in that, The protective control mechanism includes a first motor and a linkage component controlled and connected to the first motor. The linkage component includes a first connecting rod with one end fixedly connected to the output end of the first motor, a second connecting rod with one end rotatably connected to the other end of the first connecting rod, and a connecting block with one end rotatably connected to the other end of the second connecting rod. The other end of the connecting block is fixedly connected to the protective plate. The first motor controls the first connecting rod and the second connecting rod to drive the protective plate to move up and down to cover or expose the observation window body.

3. The observation window structure according to claim 2, characterized in that, One or more sets of the aforementioned linkage components are fixedly connected to the bottom of the protective plate; or Two sets of linkage components are provided, which are fixedly connected to the opposite sides of the protective plate away from the observation window body. One end of the first connecting rod of one linkage component is fixedly connected to the output end of the first motor. The two second connecting rods of the two sets of linkage components are fixedly connected to the opposite ends of the first crossbar, so that the first motor can drive the two sets of linkage components to move simultaneously.

4. The observation window structure according to claim 3, characterized in that, The two sets of linkage components also include limiting blocks fixedly connected to the inner walls of opposite sides of the connecting housing. A limiting protrusion is provided on the side of the connecting block facing the limiting block. The limiting block is provided with a trajectory limiting groove corresponding to the movement trajectory of the connecting block. The limiting protrusion moves within the trajectory limiting groove.

5. The observation window structure according to claim 3, characterized in that, The inner walls of the connecting housing on opposite sides are respectively provided with a first longitudinal limiting groove and a second longitudinal limiting groove corresponding to the opposite sides of the protective plate. The opposite sides of the protective plate are respectively inserted into the first longitudinal limiting groove and the second longitudinal limiting groove for vertical movement.

6. The observation window structure according to any one of claims 1 to 5, characterized in that, It also includes a cleaning component, which is located within the mounting space of the connecting housing, near the first connecting side, and between the observation window body and the protective plate; The cleaning assembly includes a second motor, a first longitudinal transmission member and a second longitudinal transmission member fixedly installed on the inner walls of opposite sides of the connecting housing, and a transverse movable rod whose two ends are respectively connected to the first longitudinal transmission member and the second longitudinal transmission member. A cleaning scraper is laid on the side of the transverse movable rod facing the observation window body. The cleaning scraper is attached to the observation window body. The second motor is connected to the first longitudinal transmission member and / or the second longitudinal transmission member to control the transverse movable rod to move up and down, thereby controlling the cleaning scraper to move up and down to clean the observation window body.

7. The observation window structure according to claim 6, characterized in that, The first longitudinal transmission component includes a hollow first connecting vertical frame and a first screw rod passing through the first connecting vertical frame. The second motor is mounted and fixed to the top of the first connecting vertical frame, and the output end of the second motor is fixedly connected to the top end of the first screw rod. The second longitudinal transmission component includes a hollow second connecting vertical frame and a second limiting rod passing through the second connecting vertical frame. The first connecting vertical frame and the second connecting vertical frame are respectively provided with a first longitudinal sliding groove and a second longitudinal sliding groove. One end of the transverse movable rod passes through the first longitudinal sliding groove and is threadedly connected to the first screw. The other end of the transverse movable rod passes through the second longitudinal sliding groove and is slidably connected to the second limiting rod.

8. The observation window structure according to claim 7, characterized in that, It also includes a dust collection assembly located below the cleaning assembly, the dust collection assembly being fixedly connected to the bottom of the connecting housing; The dust collection assembly has a pull-out structure, which includes a collection body fixedly connected to the bottom of the connecting housing, and a dust collection box pulled out and connected inside the collection body. The tops of both the collection body and the dust collection box are open, and the openings are directly below the cleaning scraper of the cleaning assembly.

9. The observation window structure according to claim 8, characterized in that, A fixing block is fixedly connected to the back of the dust collection box, and the upper surface of the fixing block is provided with a recessed limiting hole. A connecting sleeve is fixedly connected to the back of the collecting body. The top of the connecting sleeve has an opening. A sliding rod is slidably connected through the top and bottom of the connecting sleeve. The top of the sliding rod has an abutting outer edge. The top of the sliding rod passes through the opening, and the circumferential edge of the opening can abut against the abutting outer edge of the sliding rod to lock the sliding rod. The bottom end of the sliding rod extends out of the bottom of the connecting sleeve and can be inserted into the limiting hole of the fixing block. A spring is connected to the outer sleeve of the sliding rod. The spring is located inside the connecting sleeve, and the top and bottom of the spring abut against the top of the connecting sleeve and the locking block fixedly connected to the bottom of the connecting sleeve, respectively.

10. A PVD device, characterized in that, The invention includes a vacuum chamber and an observation window structure according to any one of claims 1-9, wherein the second connecting side of the connecting housing of the observation window structure is sealed to the connecting side of the vacuum chamber, and the product condition inside the vacuum chamber can be observed through the observation window body of the observation window structure.

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