Liftable MPCVD dish-shaped cavity

Abstract

The utility model discloses a liftable MPCVD (Micro Plasma Chemical Vapor Deposition) dish-shaped cavity, relates to the technical field of vapor deposition, and aims to solve the problem that the height of a central base station is fixed and can not meet substrate materials with different thicknesses and shapes, and the liftable MPCVD dish-shaped cavity comprises a cavity body, the central base station, a microwave feed inlet, quartz glass and a microwave power supply, the cavity is formed by connecting an upper cavity with an opening in the bottom end and a lower cavity with an opening in the top end and a closed bottom end through a sealing ring. A traditional fixed center base station is replaced by the liftable center base station, so that the height of the center base station is adjustable, and the center base station is suitable for substrate materials with different thicknesses and shapes.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition technology, specifically a liftable MPCVD disc cavity. Background Technology

[0002] In existing MPCVD dish-shaped cavities, the central abutment is typically fixed in height, and the quartz ring for the microwave feed inlet is also fixed between the central abutment and the lower cavity, making it impossible to adjust for substrate materials of varying thicknesses and shapes. This limitation results in insufficient ionization of the reactive gases during deposition, thus affecting deposition quality and efficiency. Therefore, developing a novel MPCVD dish-shaped cavity microwave feed inlet structure is crucial to meet the increasingly diverse material deposition requirements. Utility Model Content

[0003] To address the aforementioned problems, specifically those raised in the background section, this invention proposes a liftable MPCVD disc-shaped cavity, comprising a cavity, a central base, a microwave feed inlet, quartz glass, and a microwave power supply. The cavity consists of an upper cavity with an opening at the bottom and a lower cavity with an opening at the top and a closed bottom, connected by a sealing ring. The central base is located within the upper cavity, and a support column below the central base extends into the lower cavity. An air inlet and an exhaust outlet are respectively located at the center of the top and bottom of the upper cavity. The bottom of the lower cavity is open, and a telescopic assembly and a base plate are sequentially mounted at the bottom of the lower cavity via the sealing ring. The support column below the central base is connected to the base plate. A lifting mechanism capable of controlling the telescopic assembly's telescopic movement is installed on one side of the telescopic assembly.

[0004] A further feature of this invention is that a short-circuit piston and a spring are sequentially and movably sleeved on the outer wall of the support column below the central base. The two ends of the spring are respectively pressed against the short-circuit piston and the base plate. A step is provided below the microwave feed inlet to restrict the short-circuit piston. The short-circuit piston is flush with the bottom of the microwave feed inlet.

[0005] A further feature of this invention is that an infrared thermometer is disposed above the upper cavity, and the infrared thermometer points towards the central base.

[0006] A further feature of this invention is that the lifting mechanism adopts an optical servo motor lifting system, and the fixed end and the moving end of the optical servo motor lifting system are respectively connected and fixed to both ends of the telescopic component.

[0007] The beneficial technical effects of this utility model are as follows: By replacing the traditional fixed central base with a liftable central base, the height of the central base is adjustable to accommodate substrate materials of different thicknesses and shapes. The use of a high-precision optical servo motor allows for precise control of the central base height, achieving synchronous adjustment of sample growth rate and base descent speed with an accuracy of 1 mil per hour. This ensures that the sample and plasma fireball maintain an appropriate distance to accommodate different types of substrate materials. The telescopic assembly adapts to the gap between the base plate and the lower cavity, ensuring no air leakage during lifting and lowering, maintaining stable gas pressure within the cavity, and guaranteeing the reliability of the reaction environment. The design of the short-circuit piston, along with the spring and step design, ensures that the short-circuit piston is flush with the microwave feed inlet, effectively short-circuiting the microwave to improve reaction efficiency, optimize the deposition process, and facilitate the coupling of the sample and plasma fireball, thereby achieving more efficient energy utilization and improved material deposition quality. Attached Figure Description

[0008] Figure 1 A schematic diagram of the overall structure of this solution is shown.

[0009] Figure 2 A schematic diagram of the lower cavity structure is shown.

[0010] The attached diagram shows the following components: 1. Upper cavity; 2. Infrared thermometer; 3. Air inlet; 4. Central base; 5. Lower cavity; 6. Quartz glass; 7. Microwave power supply; 8. Microwave feed inlet; 9. Spring; 10. Lifting mechanism; 11. Telescopic assembly; 12. Short-circuit piston; 13. Exhaust port. Detailed Implementation

[0011] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0012] This invention proposes a height-adjustable MPCVD disc cavity, which replaces the traditional fixed central base 4 with a height-adjustable central base 4. By adjusting the height of the central base, it can adapt to substrate materials of different thicknesses and shapes.

[0013] The lifting mechanism 10 drives the base plate to move up and down, so that the central base 4 moves up and down with the base plate through the support column to adjust its height. The telescopic component 11 is used to adapt to the gap between the base plate and the lower cavity 5. With the help of the sealing ring, it ensures that no air leakage occurs during the lifting process, maintains the stable air pressure in the cavity, and ensures the reliability of the reaction environment.

[0014] The lifting mechanism 10 adopts a high-precision optical servo motor, which can accurately control the height of the central base. It can synchronously adjust the sample growth rate and the base descent rate with an accuracy of 1 mil per hour, ensuring that the sample and the plasma fireball always maintain an appropriate distance to adapt to different types of substrate materials.

[0015] The short-circuit piston 12 in the lower cavity 5 can adjust the optimal state of plasma coupling, ensuring the stability of the deposition process and the consistency of material properties. At the same time, through the cooperation of the spring 9 and the step, the short-circuit piston 12 can be flush with the microwave feed inlet 8 while the central base 4 moves, thus playing the role of microwave short-circuiting.

[0016] By setting an infrared thermometer 2 pointing towards the central base 4, the temperature inside the cavity can be monitored and adjusted in real time, ensuring the stability of the deposition process and the consistency of material properties.

[0017] Although the present invention has been described with reference to preferred embodiments, various modifications can be made to it and components can be replaced with equivalents without departing from the scope of the present invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0018] In the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0019] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0020] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0021] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A liftable MPCVD disc-shaped cavity, comprising a cavity, a central base (4), a microwave feed inlet (8), a quartz glass (6), and a microwave power supply (7), wherein the cavity is formed by an upper cavity (1) with an opening at the bottom and a lower cavity (5) with an opening at the top and a closed bottom, connected by a sealing ring; the central base (4) is disposed in the upper cavity (1); a support column below the central base (4) extends into the lower cavity (5); an air inlet (3) is disposed at the center of the top of the upper cavity (1), and an air outlet (13) is disposed at the bottom; characterized in that: The bottom end of the lower cavity (5) is set as an opening. The bottom end of the lower cavity (5) is sequentially equipped with a telescopic component (11) and a base plate through a sealing ring. The support column below the central base (4) is connected to the base plate. A lifting mechanism (10) capable of controlling the telescopic component to perform telescopic movement is installed on one side of the telescopic component (11).

2. The liftable MPCVD disc cavity according to claim 1, characterized in that: A short-circuit piston (12) and a spring (9) are sequentially and movably sleeved on the outer wall of the support column below the central base (4). The two ends of the spring (9) are respectively pressed against the short-circuit piston (12) and the base plate. A step is provided below the microwave feed inlet (8) to restrict the short-circuit piston (12). The short-circuit piston (12) is flush with the bottom of the microwave feed inlet (8).

3. The liftable MPCVD disc cavity according to claim 1, characterized in that: An infrared thermometer (2) is provided above the upper cavity (1), and the infrared thermometer (2) points towards the central base (4).

4. A liftable MPCVD disc cavity according to claim 1 or 2, characterized in that: The lifting mechanism (10) adopts an optical servo motor lifting system, and the fixed end and the moving end of the optical servo motor lifting system are respectively connected and fixed to the two ends of the telescopic component (11).

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