Integrated pipeline supply platform and semiconductor equipment
By designing an integrated piping supply platform in semiconductor equipment, an orderly and compact layout of auxiliary piping and process gas piping is achieved, solving the problem of complex piping wiring, improving installation efficiency and connection reliability, and reducing costs.
CN224162441UActive Publication Date: 2026-04-24MICROPOLARIS EQUIPMENT TECHNOLOGY CO LTD
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Patent Information
- Application Number
- CN202521171408.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-09
- Publication Date
- 2026-04-24
- Estimated Expiration
- 2035-06-09
AI Technical Summary
Technical Problem
The complex wiring and piping of current semiconductor devices increases manufacturing difficulty and cost.
Method used
An integrated pipeline supply platform is provided, which integrates auxiliary pipelines and process gas pipelines on the same platform body and arranges them at intervals in the vertical direction. Combined with the docking structure, the auxiliary pipelines can be docked with the outside and process chambers, simplifying the connection process.
Benefits of technology
It improves pipeline installation efficiency and connection reliability, enhances the integration and connection efficiency of semiconductor equipment, optimizes space utilization, and reduces material and installation difficulty.
✦ Generated by Eureka AI based on patent content.
Abstract
According to the integrated pipeline supply platform and the semiconductor equipment, the integrated pipeline supply platform is characterized in that an auxiliary pipeline and a process gas pipeline are integrally arranged on the same platform main body and are arranged at intervals in the vertical direction, so that the auxiliary pipeline and the process gas pipeline can be orderly integrated on the platform main body; physical interference among the pipelines is reduced, and ordering and compact layout of the integrated pipeline supply platform can be achieved; in addition, a factory affair butt joint window in the butt joint structure establishes a connecting channel for the auxiliary pipeline and the process gas pipeline with the outside, and butt joint of the integrated pipeline supply platform and factory affair facilities is simplified; and the chamber butt joint window provides a pipeline connection interface between the integrated pipeline supply platform and the plurality of process chambers, so that rapid and accurate butt joint between the platform and the plurality of process chambers is realized, the installation efficiency of pipelines in the semiconductor equipment and the reliability of pipeline connection are improved, and the integration level and the connection efficiency of the semiconductor equipment are enhanced.
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