Electron detection device and electron beam imaging apparatus
By using an electronic filter component to adjust the signal channel area in the electronic detection device, the problem of signal loss when the electronic detector filters electronic signals is solved, thereby improving the efficiency of electronic signal reception and the detection effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DONGFANG JINGYUAN ELECTRON LTD
- Filing Date
- 2025-05-20
- Publication Date
- 2026-04-24
AI Technical Summary
Existing electronic detectors cause the loss of signals in the corresponding energy spectrum bands in the imaging signal when screening electronic signals, resulting in imaging signal loss.
An electronic filtering assembly is used, which includes filtering components for multiple signal channels. By adjusting the area of the signal channels, the electronic signals are filtered to ensure that electronic signals of different energy spectrum bands pass through in proportion, thereby reducing signal loss.
By adjusting the area of the signal channel, a wide range of adjustments to the electronic signal receiving efficiency were achieved, signal loss was reduced, and the detection effect of the sample under test was improved.
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Figure CN224164214U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing, and in particular to an electron detection device and an electron beam imaging device. Background Technology
[0002] Electron beam microscopy, such as scanning electron microscopy, is a commonly used method for microscopic characterization. In electron beam imaging equipment, the electron beam imaging detector (or simply electron detector) is used to receive electron signals carrying information about the sample being measured and to convert these signals into image signals. As the direct device for capturing electron signals, the receiving efficiency of the electron beam imaging detector directly determines the electron beam imaging effect.
[0003] In some application scenarios, it is necessary to filter the electronic signals received by the electronic detector. Existing filtering methods will cause the corresponding energy spectrum bands in the imaging signal to be missing, thus resulting in the loss of imaging signal. Utility Model Content
[0004] This application provides an electronic detection device and an electron beam imaging device, which can reduce signal loss and improve the detection effect of the sample to be tested.
[0005] According to a first aspect of this application, this application provides an electronic detection device, comprising:
[0006] A detector for receiving and processing electronic signals generated by an electron beam irradiating a sample under test; and an electron filter assembly for filtering the electronic signals to allow a preset amount of electronic signal to pass through. The electron filter assembly is located upstream of the detector along the propagation path of the electronic signals. The electron filter assembly includes multiple signal channels that allow the electronic signals to pass through. The signal passage area of the signal channels is configured to be adjustable to regulate the amount of electronic signal that travels to the detector via the signal channels.
[0007] In some embodiments, the electronic filtering assembly includes two or more filter elements spaced apart in the direction of electronic signal propagation, each filter element including a plurality of vias; in the same projection plane perpendicular to the propagation direction, the orthographic projections of the corresponding vias of the two or more filter elements at least partially overlap to form part of a signal channel, and the two or more filter elements are relatively movable to adjust the signal passage area of the signal channel.
[0008] In some embodiments, two or more filter components include a first filter component and a second filter component; the first filter component has a plurality of through holes including a plurality of first through holes, the second filter component has a plurality of through holes including a plurality of second through holes, and one of the first filter component and the second filter component is configured to be movable relative to the other to adjust the overlap area of the corresponding first through holes and second through holes.
[0009] In some embodiments, the electronic detection device includes a drive mechanism connected to at least one of a first filter component and a second filter component. The drive mechanism is used to drive one of the first filter component and the second filter component to move relative to the other, so as to adjust the overlap area of the corresponding first and second through holes.
[0010] In some embodiments, a plurality of first via arrays are arranged, and a plurality of second via arrays are arranged; the driving mechanism is configured to drive one of the first filter element and the second filter element to translate relative to the other along a direction perpendicular to the propagation direction of the electronic signal.
[0011] In some embodiments, a plurality of first vias are distributed on an annulus surrounding a reference axis, and a plurality of second vias are distributed on an annulus surrounding the reference axis; the drive mechanism is configured to drive one of the first filter element and the second filter element to rotate relative to the other about the reference axis.
[0012] In some embodiments, the first filter element is located upstream of the second filter element in the direction of electronic signal propagation. The first filter element is fixed relative to the detector, and a drive mechanism is connected to the second filter element and is used to drive the second filter element to move relative to the first filter element.
[0013] In some embodiments, at least a portion of the filter element is a filter made of graphite or graphene.
[0014] In some embodiments, the first filter element is grounded and the second filter element is connected to a power source so that a potential difference is formed between the second filter element and the first filter element.
[0015] According to a second aspect of this application, this application provides an electron beam imaging device, comprising:
[0016] An electron beam source for emitting an electron beam toward a sample to be tested; and an electron detection device according to any embodiment of the first aspect, the electron detection device being used to receive and process the electronic signal generated by the electron beam irradiating the sample to be tested.
[0017] This application embodiment filters the electronic signal directed towards the detector using an electronic filtering component, which is beneficial for adjusting the receiving efficiency of the electronic detection device. The signal passage area of the electronic filtering component's signal channel is adjustable, allowing for the indiscriminate filtering of electronic signals across different energy spectrum bands. This proportional filtering of electronic signals from different energy spectrum bands helps reduce signal loss and improve the detection effect on the sample. Furthermore, the signal passage area of the signal channel can be adjusted over a wide range, facilitating a broad adjustment of the electronic signal receiving efficiency. Attached Figure Description
[0018] The features, advantages, and technical effects of exemplary embodiments of this application will now be described with reference to the accompanying drawings.
[0019] Figure 1 This is a schematic diagram of the structure of an electronic detection device provided in some embodiments of this application.
[0020] Figure 2 yes Figure 1 A schematic diagram of the electronic filter assembly of the electronic detection device shown.
[0021] Figure 3 This is a schematic diagram of the structure of the first filter component of the electronic detection device provided in some embodiments of this application.
[0022] Figure 4 This is a schematic diagram of the structure of the second filter component of the electronic detection device provided in some embodiments of this application.
[0023] Figure 5 This is a schematic diagram of the structure of the first filter component of the electronic detection device provided in some other embodiments of this application.
[0024] Figure 6 This is a schematic diagram of the structure of the second filter component of the electronic detection device provided in other embodiments of this application.
[0025] Figure 7 This is a schematic diagram of the structure of an electron beam imaging device provided in some embodiments of this application.
[0026] The reference numerals in the accompanying drawings for the specific embodiments are as follows:
[0027] Electronic detection device 1, detector 10, electronic filter assembly 20, signal channel 21, first filter component 22, first via 221, second filter component 23, second via 231, drive mechanism 30, power supply 40, reference axis a, propagation direction X;
[0028] Sample to be tested 2, electron beam imaging equipment 3, electron beam source 4. Detailed Implementation
[0029] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this application, but not all embodiments.
[0030] The terms "first," "second," "third," etc., used in the specification, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or hierarchy. In the embodiments of this application, the same reference numerals denote the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments.
[0031] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.
[0032] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0033] In the embodiments of this application, "parallel" includes not only the case of absolute parallelism, but also the case of approximate parallelism as commonly understood in engineering; similarly, "perpendicular" also includes not only the case of absolute perpendicularity, but also the case of approximate perpendicularity as commonly understood in engineering. For example, if the angle between two directions is 85°-95°, the two directions can be considered perpendicular; if the angle between two directions is 0°-10°, the two directions can be considered parallel.
[0034] Figure 1 This is a schematic diagram of the structure of an electronic detection device provided in some embodiments of this application. Figure 2 yes Figure 1 A schematic diagram of the electronic filter assembly of the shown electronic detection device. (Refer to...) Figure 1 and Figure 2 The electron detection device 1 provided in this application embodiment includes a detector 10 and an electron filter assembly 20. The detector 10 is used to receive and process electronic signals generated by an electron beam irradiating a sample 2 to be tested. The electron filter assembly 20 is used to filter the electronic signals to allow a preset amount of electronic signal to pass through. The electron filter assembly 20 is disposed upstream of the detector 10 in the propagation path of the electronic signals. The electron filter assembly 20 includes a plurality of signal channels 21 that allow the electronic signals to pass through, and the signal passing area of the signal channels 21 is configured to be adjustable to adjust the amount of electronic signal reaching the detector 10 via the signal channels 21.
[0035] The initial electron signal generated by the electron beam irradiating the sample 2 is filtered by each signal channel 21 of the electron filter assembly 20 so that the preset amount of target electron signal is transmitted to the detector 10.
[0036] The electron signal generated by irradiating the sample 2 with an electron beam mainly includes secondary electrons and backscattered electrons. Secondary electrons mainly carry information such as the surface morphology of the sample 2, while backscattered electrons, with a higher depth, mainly carry information such as the composition and density of the sample 2.
[0037] Detector 10 is used to detect sample feature information carried by electronic signals. Optionally, detector 10 includes a signal conversion element for converting the electronic signals received by detector 10 into image information. Further, detector 10 also includes a signal amplification circuit for amplifying the electronic signals received by detector 10.
[0038] In the propagation path of the electronic signal, the electronic filter component 20 is located between the detector 10 and the sample 2 to filter the electronic signal emitted from the sample 2 to the detector 10.
[0039] In this embodiment, the initial electronic signal refers to the electronic signal generated by the electron beam irradiating the sample 2 under test that is not filtered by the electron filter component 20; the target electronic signal refers to the electronic signal generated by the electron beam irradiating the sample 2 under test that has been filtered by the electron filter component 20.
[0040] Signal channel 21 is used to allow a preset amount of electronic signal to pass through. The amount of electronic signal passing through signal channel 21 is related to the signal passage area of signal channel 21. For example, the larger the signal passage area of signal channel 21, the more electronic signal passes through signal channel 21, and the higher the receiving efficiency of detector 10; the smaller the signal passage area of signal channel 21, the less electronic signal passes through signal channel 21, and the lower the receiving efficiency of detector 10.
[0041] In this embodiment of the application, the signal passage area of the signal channel 21 can be the minimum cross-sectional area of the signal channel 21.
[0042] In this embodiment, the electronic filtering component 20 filters the electronic signal directed to the detector 10, which is beneficial for adjusting the receiving efficiency of the electronic detection device 1. The signal passage area of the signal channel 21 of the electronic filtering component 20 is adjustable, which can filter electronic signals of different energy spectrum bands indiscriminately, achieving proportional filtering of electronic signals of different energy spectrum bands, which helps to reduce signal loss and improve the detection effect of the sample to be tested. The signal passage area of the signal channel 21 can be adjusted within a large range, which is beneficial for achieving a wide range of adjustment of the electronic signal receiving efficiency.
[0043] In some embodiments, the electronic filtering assembly 20 includes two or more filtering elements spaced apart in the propagation direction X of the electronic signal, each filtering element including a plurality of vias. In the same projection plane perpendicular to the propagation direction of the electronic signal, the orthographic projections of corresponding vias of the two or more filtering elements at least partially overlap to form a portion of the signal channel 21. The two or more filtering elements are relatively movable relative to each other to adjust the signal passage area of the signal channel 21.
[0044] In this embodiment, the propagation direction X of the electronic signal refers to the direction in which the main part of the electronic signal is emitted from the sample to be tested to the detector 10. This direction is usually perpendicular to the surface of the sample to be tested and parallel to the optical axis of the electron beam.
[0045] The vias penetrate the filter components along the propagation direction X of the electronic signal. The vias in each filter component allow the electronic signal to pass through, while the rest of the filter component, excluding the vias, blocks the electronic signal. Each filter component filters the electronic signal. The electronic signal passing through all the filter components forms the target electronic signal and is transmitted to detector 10.
[0046] The orifices of two or more filter components can be set in a one-to-one correspondence or in a many-to-one correspondence.
[0047] Optionally, two or more filter elements may have matching shapes, and the distribution of multiple through-holes in each filter element may be similar, so that the multiple through-holes of the two or more filter elements may be correspondingly arranged. For example, each filter element may be rectangular, and the multiple through-holes of the filter element may be distributed in an array. For example, each filter element may be circular, and the multiple through-holes of the filter element may be distributed around the center of the filter element.
[0048] The signal channel 21 includes overlapping portions of corresponding vias of two or more filter elements, and gaps between adjacent filter elements corresponding to the overlapping portions. The signal channel 21 has a minimum cross-sectional area at the overlapping portions.
[0049] Of the two or more filter elements, at least one filter element is movable relative to the other filter elements to adjust the signal passage area of the signal channel 21.
[0050] In some examples, at least one filter element may be connected to a drive mechanism to move under the drive of the drive mechanism. In other examples, at least one filter element may also be movable under manual operation.
[0051] The relative movement between two or more filter components includes, but is not limited to, translation and rotation.
[0052] This embodiment of the application simplifies the structure and adjustment process of the electronic filter assembly 20 by adjusting the signal passage area of the signal channel 21 using two or more relatively movable filter components. The two or more filter components are spaced apart along the direction of electronic signal propagation X, preventing friction during relative movement and thus reducing particulate matter generation and its impact on the detection results.
[0053] In some embodiments, two or more filter elements include a first filter element 22 and a second filter element 23. Figure 3 This is a schematic diagram of the structure of the first filter component of the electronic detection device provided in some embodiments of this application. Figure 4 This is a schematic diagram of the structure of the second filter component of the electronic detection device provided in some embodiments of this application. (Refer to...) Figures 1 to 4 The first filter element 22 has a plurality of through-holes including a plurality of first through-holes 221, and the second filter element 23 has a plurality of through-holes including a plurality of second through-holes 231. One of the first filter element 22 and the second filter element 23 is configured to be movable relative to the other to adjust the overlap area of the corresponding first through-holes 221 and second through-holes 231. This overlap area refers to the overlap area of the orthographic projections of the first through-holes 221 and the second through-holes 231 onto the same projection plane perpendicular to the propagation direction X.
[0054] The second filter element 23 is closer to the detector 10 than the first filter element 22. Part of the electronic signal generated by the electron beam irradiating the sample 2 first passes through the first filter element 22 and then through the second filter element 23.
[0055] In some examples, the first filter element 22 is fixedly set, while the second filter element 23 is movable, so that the overlapping area of the corresponding first through hole 221 and second through hole 231 can be adjusted by the movement of the second filter element 23, which helps to simplify the structure and reduce the difficulty of adjustment.
[0056] In other examples, the second filter element 23 is fixedly set, while the first filter element 22 is movable, so that the overlapping area of the corresponding first through hole 221 and second through hole 231 can be adjusted by moving the first filter element 22, which helps to simplify the structure and reduce the difficulty of adjustment.
[0057] In some other examples, both the first filter element 22 and the second filter element 23 can be movably configured, which is beneficial to expanding the adjustable range of the signal passage area of the signal channel 21 within the limited range of movement of the first filter element 22 and the second filter element 23.
[0058] In some embodiments, the electronic detection device 1 includes a drive mechanism 30 connected to at least one of the first filter component 22 and the second filter component 23. The drive mechanism 30 is used to drive one of the first filter component 22 and the second filter component 23 to move relative to the other, so as to adjust the overlapping area of the corresponding first through hole 221 and second through hole 231.
[0059] In some examples, the first filter element 22 is fixedly disposed, and the drive mechanism 30 is connected to the second filter element 23 to drive the second filter element 23 to move relative to the first filter element 22.
[0060] In other examples, the second filter element 23 is fixedly disposed, and the drive mechanism 30 is connected to the first filter element 22 to drive the first filter element 22 to move relative to the second filter element 23.
[0061] In some other examples, the drive mechanism 30 is connected to the first filter element 22 and the second filter element 23 to selectively drive the first filter element 22 and / or the second filter element 23 to move.
[0062] The drive mechanism 30 may include a power module and a transmission assembly. The power module is used to output power, and the transmission assembly is connected to the power module and to at least one of the first filter element 22 and the second filter element 23, for transmitting the power output by the power module to at least one of the first filter element 22 and the second filter element 23.
[0063] Optionally, the power module may include an electric motor or a cylinder.
[0064] Optionally, the transmission assembly may include one or more of the following: a rack and pinion transmission assembly, a sprocket and chain transmission assembly, a worm gear transmission assembly, a belt transmission assembly, or any other suitable transmission assembly.
[0065] In some embodiments, a plurality of first vias 221 are arranged in an array, and a plurality of second vias 231 are arranged in an array. The drive mechanism 30 is configured to drive one of the first filter element 22 and the second filter element 23 to translate relative to the other.
[0066] Multiple first vias 221 are arranged in a multi-row, multi-column array, and multiple second vias 231 are arranged in a multi-row, multi-column array. Optionally, the number of rows and columns of the first vias 221 are the same as the number of rows and columns of the second vias 231, so that the multiple first vias 221 and the multiple second vias 231 correspond one-to-one.
[0067] The drive mechanism 30 can drive one of the first filter component 22 and the second filter component 23 to translate in any direction perpendicular to the propagation direction X of the electronic signal.
[0068] Optionally, both the first filter element 22 and the second filter element 23 are rectangular. The drive mechanism 30 can drive one of the first filter element 22 and the second filter element 23 to translate along the length, width, or diagonal of the rectangle.
[0069] Optionally, both the first via 221 and the second via 231 are rectangular to facilitate control of the overlap area of the first via 221 and the second via 231.
[0070] Optionally, the first via 221 and the second via 231 have the same hole area to increase the adjustable range of the overlap area of the first via 221 and the second via 231.
[0071] For multiple first through holes 221 and multiple second through holes 231 arranged in an array, the drive mechanism 30 drives one of the first filter component 22 and the second filter component 23 to translate relative to the other, which helps to control the area of the overlapping part of the first through holes 221 and the second through holes 231, reduces the difficulty of adjustment, and improves the adjustment accuracy.
[0072] Figure 5 This is a schematic diagram of the structure of the first filter component of the electronic detection device provided in some other embodiments of this application. Figure 6 This is a schematic diagram of the structure of the second filter component of an electronic detection device provided in other embodiments of this application. (Refer to...) Figures 5 to 6 In some embodiments, a plurality of first through-holes 221 are distributed on an annulus surrounding a reference axis a, and a plurality of second through-holes 231 are distributed on the annulus surrounding the reference axis a. The drive mechanism 30 is configured to drive one of the first filter element 22 and the second filter element 23 to rotate relative to the other about the reference axis a.
[0073] Optionally, the reference axis a is parallel to the propagation direction X of the electronic signal.
[0074] Optionally, both the first filter element 22 and the second filter element 23 are circular, and the reference axis a passes through the center of the first filter element 22 and the second filter element 23, which is conducive to the uniform distribution of multiple first through holes 221 and multiple second through holes 231.
[0075] Multiple first vias 221 may be distributed on one or more annular rings centered on reference axis a. Multiple second vias 231 may be distributed on one or more annular rings centered on reference axis a.
[0076] Optionally, the first via 221 and the second via 231 are arc-shaped. The inner and outer diameters of the corresponding first via 221 and second via 231 are the same, so as to control the overlap area of the first via 221 and the second via 231.
[0077] For the first through hole 221 and the second through hole 231 distributed along the outer periphery of the reference axis a, the drive mechanism 30 drives one of the first filter component 22 and the second filter component 23 to rotate relative to the other about the reference axis a, which is beneficial to control the area of the overlapping part of the first through hole 221 and the second through hole 231, reduce the difficulty of adjustment, and improve the adjustment accuracy.
[0078] In some embodiments, in the direction of electronic signal propagation X, the first filter element 22 is located upstream of the second filter element 23. The first filter element 22 is fixedly disposed relative to the detector 10, and the drive mechanism 30 is connected to the second filter element 23 and is used to drive the second filter element 23 to move relative to the first filter element 22.
[0079] The first filter element 22 is located upstream of the second filter element 23, in the direction of electronic signal propagation X. The first filter element 22 can be positioned between the second filter element 23 and the sample 2 to be tested. The first filter element 22 is fixedly disposed relative to the sample 2 to be tested. The first filter element 22 can block some of the dust or particulate matter generated during the movement of the second filter element 23, reducing the possibility of dust or particulate matter falling onto the sample 2 to be tested. This helps to reduce the risk of contamination of the sample 2 to be tested and improves the imaging effect of the sample 2 to be tested.
[0080] In some embodiments, at least a portion of the filter element is a filter screen made of graphite or graphene. The fact that at least a portion of the filter element is made of graphite or graphene, which has a near-zero secondary electron yield, helps to reduce the secondary electrons generated by at least a portion of the filter element and reduces the impact on the detection results of the electron detection device 1.
[0081] Optionally, the first filter element 22 is a filter made of graphite or graphene.
[0082] Optionally, the second filter element 23 is a filter made of graphite or graphene.
[0083] In some embodiments, the first filter element 22 is grounded and the second filter element 23 is connected to the power supply 40 so that a potential difference is formed between the second filter element 23 and the first filter element 22.
[0084] The first filter element 22 can be used as a ground electrode, and the second filter element 23 can be used as a bias electrode. After a voltage is applied to the second filter element 23, it can selectively filter electronic signals within a preset energy spectrum, thereby selectively receiving and processing electronic signals within the preset energy spectrum.
[0085] The second filter element 23 can filter different energy spectrum bands of electronic signals depending on the voltage applied to it.
[0086] For example, for electronic signals with an energy distribution range of 5keV-10keV, if the second filter component 23 applies a voltage of -6kV, it can effectively filter electronic signals with energy below 6keV, thereby selectively receiving and processing electronic signals with energy in the range of 6keV-10keV.
[0087] In the direction of electronic signal propagation X, the second filter element 23 is located downstream of the first filter element 22, and on the side of the first filter element 22 away from the sample 2 under test. Applying a voltage to the second filter element 23 helps to reduce the interference and influence of the electric field on the electronic signal.
[0088] According to a second aspect of this application, embodiments of this application also provide an electron beam imaging device for detecting wafer surface defects or critical dimensions. Figure 7 This is a schematic diagram of the structure of an electron beam imaging device provided in some embodiments of this application. The electron beam imaging device 3 provided in the embodiments of this application includes an electron beam source 4 and an electron detection device 1 provided in any embodiment of this application. The electron beam source 4 is used to emit an electron beam toward the sample 2 under test, i.e., the wafer. The electron detection device 1 is used to receive and process the electronic signals generated by the electron beam irradiating the sample 2 under test.
[0089] The electron beam imaging device 3 of this application can filter electron signals of each energy spectrum band without discrimination through the electron detection device 1, and realize proportional filtering of electron signals of different energy spectrum bands, which is beneficial to reduce the loss of imaging signals and improve the imaging effect of the electron beam imaging device 3.
[0090] Electron beam imaging equipment 3 includes, but is not limited to, scanning electron microscopes, transmission electron microscopes, electron beam exposure systems, etc.
[0091] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application, and they should all be covered within the scope of the claims and specification of this application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.
Claims
1. An electronic detection device, characterized in that, include: A detector for receiving and processing electronic signals generated by an electron beam irradiating a sample under test; as well as An electronic filtering assembly is used to filter the electronic signal to allow a preset amount of electronic signal to pass through. The electronic filtering assembly is disposed upstream of the detector along the propagation path of the electronic signal. The electronic filtering assembly includes multiple signal channels that allow the electronic signal to pass through. The signal passage area of the signal channels is configured to be adjustable to adjust the amount of electronic signal that travels to the detector via the signal channels.
2. The electronic detection device according to claim 1, characterized in that, The electronic filtering assembly includes two or more filtering components spaced apart in the direction of propagation of the electronic signal, and each filtering component includes multiple vias; Within the same projection plane perpendicular to the propagation direction, the orthographic projections of the corresponding vias of the two or more filter components at least partially overlap to form a portion of the signal channel, and the two or more filter components are relatively movable relative to each other to adjust the signal passage area of the signal channel.
3. The electronic detection device according to claim 2, characterized in that, The two or more filter components include a first filter component and a second filter component; The plurality of through-holes of the first filter element includes a plurality of first through-holes, and the plurality of through-holes of the second filter element includes a plurality of second through-holes. One of the first filter element and the second filter element is configured to be movable relative to the other to adjust the overlap area of the corresponding first through-holes and second through-holes.
4. The electronic detection device according to claim 3, characterized in that, The electronic detection device includes a drive mechanism connected to at least one of the first filter component and the second filter component. The drive mechanism is used to drive one of the first filter component and the second filter component to move relative to the other, so as to adjust the overlap area of the corresponding first through-hole and second through-hole.
5. The electronic detection device according to claim 4, characterized in that, Multiple first via arrays are arranged, and multiple second via arrays are arranged; The drive mechanism is configured to drive one of the first filter element and the second filter element to translate relative to the other along a direction perpendicular to the propagation direction.
6. The electronic detection device according to claim 4, characterized in that, A plurality of first vias are distributed on a ring surrounding a reference axis, and a plurality of second vias are distributed on a ring surrounding the reference axis; The drive mechanism is configured to drive one of the first filter element and the second filter element to rotate about the reference axis relative to the other.
7. The electronic detection device according to claim 4, characterized in that, In the propagation direction, the first filter element is located upstream of the second filter element; The first filter element is fixed relative to the detector, and the drive mechanism is connected to the second filter element and is used to drive the second filter element to move relative to the first filter element.
8. The electronic detection device according to claim 2, characterized in that, At least a portion of the filter components are filters made of graphite or graphene.
9. The electronic detection device according to claim 3, characterized in that, The first filter element is grounded, and the second filter element is connected to a power source so that a potential difference is formed between the second filter element and the first filter element.
10. An electron beam imaging device, characterized in that, include: An electron beam source is used to emit an electron beam toward the sample to be tested. as well as According to any one of claims 1-9, the electron detection device is used to receive and process the electronic signal generated by the electron beam irradiating the sample to be tested.