Air inlet system of plasma equipment

Abstract

The utility model relates to the technical field of plasma processing, and provides a gas inlet system of plasma equipment, comprising: a mixing container for mixing an input liquid first substance and at least one second substance to obtain a mixed liquid with a boiling point lower than that of the first substance; wherein the mixed liquid is gasified in the mixing container to form mixed gas; and the separation part is communicated with the mixing container through a pipeline and is used for separating the gaseous first substance and the gaseous second substance in the mixed gas and leading out the gaseous first substance from a first gas inlet pipeline to supply the gaseous first substance to plasma equipment. Therefore, according to the scheme, heating is only needed to reach the heating temperature of the corresponding azeotropic point, compared with high temperature heating in the related technology, the temperature is greatly reduced, and energy conservation and consumption reduction are achieved.

Description

Technical Field

[0001] This disclosure relates to the field of plasma processing technology, and more particularly to the air intake system of plasma equipment. Background Technology

[0002] In wafer fabrication, photolithography accounts for approximately 35% of the total wafer manufacturing cost and 40-50% of the total time, making it the most critical process in semiconductor manufacturing. An indispensable step in photolithography is wafer stripping. After the photoresist has completed its pattern replication and transfer, any remaining photoresist on the wafer surface needs to be completely removed through a stripping process. Plasma dry stripping utilizes high-energy plasma to treat the photoresist surface, resulting in thorough and rapid stripping without the introduction of chemical substances, thus reducing corrosion and damage to the wafer material. It is currently the best method for photoresist stripping.

[0003] In third-generation semiconductor dry resist stripping, a gaseous first substance is introduced into the gas to assist the process. Water can help control the chemical reactions in the plasma. Especially when using oxygen plasma for resist stripping, the presence of the gaseous first substance can promote the decomposition of photoresist and the generation of gaseous products, thereby improving the resist stripping efficiency.

[0004] However, in related technologies, the method of generating a gaseous first substance involves heating water to 150°C using a steam generator and wrapping heating tape around the gas pipeline to maintain the temperature of the gaseous first substance and prevent water vapor from condensing in the pipeline, which could lead to process failure. This high-temperature processing method suffers from high losses, the gaseous first substance is greatly affected by temperature fluctuations, and the gas pipeline is generally located around the machine, making it difficult for personnel to approach and work in high ambient temperatures. Summary of the Invention

[0005] In view of the shortcomings of the prior art described above, the purpose of this disclosure is to provide an air intake system for plasma devices to solve the problems in the related art.

[0006] The first aspect of this disclosure provides a mixing container for mixing an input liquid first substance and at least one second substance to obtain a mixed liquid with a boiling point lower than that of the first substance; wherein the mixed liquid is vaporized within the mixing container to form a mixed gas; and a separation component, with a conduit connected to the mixing container, for separating the gaseous first substance and the second substance from the mixed gas, and for discharging the gaseous first substance through a first inlet conduit for supply to a plasma device.

[0007] In an embodiment of the first aspect, the separating component is connected to a recycling system and, via the recycling system, to the mixing container for recycling and reusing the second substance.

[0008] In an embodiment of the first aspect, a first control valve and a first flow detector are disposed in a first inlet pipe for conveying a first substance to a mixing container; a second control valve and a second flow detector are disposed in a second inlet pipe for conveying a second substance to a mixing container; and a first control unit is communicatively connected to the first control valve, the second control valve, the first flow detector, and the second flow detector, and is used to control the opening degree of the first control valve and the second control valve.

[0009] In an embodiment of the first aspect, the air intake system includes: a liquid level sensor and a pressure sensor, disposed in the mixing container, for detecting liquid level information and pressure information, respectively; and a second control unit, communicatively connected to the liquid level sensor, the pressure sensor, the first control valve, and the second control valve, for controlling the opening degree of the first control valve and the second control valve.

[0010] In an embodiment of the first aspect, the recovery system includes a recovery pipeline provided with a third control valve, a recovery buffer section and at least one check valve; and / or, the recovery system includes a separation and purification device for purifying the second substance.

[0011] In an embodiment of the first aspect, the recovery system includes a separation and purification device for purifying the second substance.

[0012] In an embodiment of the first aspect, the separation component includes a semi-permeable membrane; and / or, the reaction chamber of the plasma device is connected to an air extraction device for setting the reaction chamber to meet a preset pressure condition, the preset pressure condition including: a pressure condition that keeps the water in the reaction chamber in a gaseous state.

[0013] In an embodiment of the first aspect, the second substance is selected from at least one of the following: diethyl ether, ethyl acetate, and ethanol.

[0014] In the first aspect of the embodiment, a fourth control valve, a pressure regulating valve, and a mass flow controller are further provided in the pipeline between the mixing container and the separation component.

[0015] In an embodiment of the first aspect, the air intake system further includes a temperature controller for setting the temperature of the mixing container to allow the mixed liquid to vaporize.

[0016] In an embodiment of the first aspect, the intake system further includes: at least one reaction gas inlet pipe connected to the reaction chamber for introducing reaction gas.

[0017] In an embodiment of the first aspect, the first substance is selected as water, and the second substance is selected as at least one of the following: diethyl ether, ethyl acetate, and ethanol.

[0018] As described above, this disclosure relates to the field of plasma processing technology, providing an intake system for a plasma device, comprising: a mixing container for mixing an input liquid first substance and at least one second substance to obtain a mixed liquid with a boiling point lower than that of the first substance; wherein the mixed liquid is vaporized within the mixing container to form a mixed gas; and a separation component, with a pipeline connected to the mixing container, for separating the gaseous first and second substances from the mixed gas, and discharging the gaseous first substance through a first intake pipeline for supply to the plasma device. Therefore, the solution of this disclosure only requires heating to the corresponding azeotropic point, significantly reducing the temperature compared to the high temperatures of related technologies, thus saving energy and reducing consumption. Attached Figure Description

[0019] Figure 1 A schematic diagram of the piping structure of the air intake system of a plasma device according to an embodiment of the present disclosure is shown.

[0020] Figure 2 A table showing information about water forming azeotropes with different types of secondary substances.

[0021] Figure 3 A schematic diagram of the piping structure of the air intake system of the plasma device is shown in yet another embodiment of this disclosure.

[0022] Figure 4 This illustration shows a schematic diagram of a module for controlling the flow rates of the first and second substances in one embodiment of the present disclosure.

[0023] Figure 5 A schematic diagram of a module for controlling the flow rates of the first and second substances is shown in another embodiment of this disclosure.

[0024] Figure 6 A schematic diagram showing the structure of a mixing container with a liquid level sensor and a pressure sensor in one embodiment of the present disclosure is provided.

[0025] Figure 7 A schematic diagram showing the relationship between the boiling point of water and ambient air pressure. Detailed Implementation

[0026] The following specific examples illustrate the implementation of this disclosure. Those skilled in the art can easily understand other advantages and effects of this disclosure from the information disclosed herein. This disclosure can also be implemented or applied through other different specific embodiments, and various details in this disclosure can be modified or changed according to different viewpoints and application modules without departing from the spirit of this disclosure. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this disclosure can be combined with each other.

[0027] The embodiments of this disclosure will now be described in detail with reference to the accompanying drawings, so that those skilled in the art to which this disclosure pertains can readily implement it. This disclosure may be embodied in many different forms and is not limited to the embodiments described herein.

[0028] In this disclosure, references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic represented in connection with that embodiment or example is included in at least one embodiment or example of this disclosure. Furthermore, the specific features, structures, materials, or characteristics represented may be combined in any suitable manner in any one or a group of embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples represented in this disclosure, as well as the features of those different embodiments or examples.

[0029] Furthermore, the terms "first" and "second" are used for illustrative purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the representation of this disclosure, "a set" means two or more, unless otherwise explicitly specified.

[0030] For the purpose of clarity, devices unrelated to the description are omitted, and the same or similar components throughout the specification are given the same reference numerals.

[0031] Throughout this specification, when it is said that a device is "connected" to another device, this includes not only "direct connection" but also "indirect connection" by placing other components in between. Furthermore, when it is said that a device "comprises" a certain constituent element, unless otherwise stated otherwise, this does not exclude other constituent elements, but rather implies that other constituent elements may be included.

[0032] While the terms first, second, etc., are used in some examples herein to refer to various elements, these elements should not be limited by these terms. These terms are used only to distinguish one element from another. For example, first interface and second interface, etc., are used. Furthermore, as used herein, the singular forms “a,” “an,” and “the” are intended to also include the plural forms unless the context indicates otherwise. It should be further understood that the terms “comprising,” “including,” indicate the presence of the stated feature, step, operation, element, module, item, kind, and / or group, but do not exclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, modules, items, kinds, and / or groups. The terms “or” and “and / or” as used herein are interpreted as inclusive, or mean any one or any combination thereof. Thus, “A, B, or C” or “A, B, and / or C” means “any one of: A; B; C; A and B; A and C; B and C; A, B, and C.” Exceptions to this definition will only occur if the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0033] The technical terms used herein are for reference only to specific embodiments and are not intended to limit the scope of this disclosure. The singular form used herein includes the plural form unless the statement explicitly indicates otherwise. The word "comprising" as used in this specification means to specify a particular characteristic, region, integer, step, operation, element, and / or component, and does not exclude the presence or addition of other characteristics, regions, integers, steps, operations, elements, and / or components.

[0034] Although not explicitly defined, all terms, including technical and scientific terms used herein, shall have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains. Terms defined in commonly used dictionaries shall be further interpreted as having a meaning consistent with the relevant technical literature and the message of the present disclosure, and shall not be over-interpreted as having an ideal or overly formulaic meaning unless otherwise defined.

[0035] Currently, in third-generation semiconductor dry resist stripping, a gaseous first substance is introduced into the gas to assist the process due to the requirements of the manufacturing process. Water can help control the chemical reactions in the plasma. Especially when using oxygen plasma for resist stripping, the presence of the gaseous first substance can promote the decomposition of photoresist and the generation of gaseous products, thereby improving the resist stripping efficiency.

[0036] However, in related technologies, the method of generating a gaseous first substance involves heating water to 150°C using a steam generator and wrapping a heating tape around the gas pipeline to maintain the temperature of the gaseous first substance and prevent water vapor from condensing in the pipeline, which could lead to process failure. This high-temperature processing method suffers from high losses, the gaseous first substance is greatly affected by temperature fluctuations, and the gas pipeline is generally located around the machine, making it difficult for personnel to approach and work in high ambient temperatures.

[0037] Therefore, this disclosure provides a plasma equipment intake system that, by mixing water with a second substance to lower the boiling point, obtains a mixed gas containing a gaseous first substance at a lower heating temperature. The gaseous first substance can then be obtained by separating the mixed gas. This effectively reduces the heating temperature, thus solving the problems in related technologies. It should be noted that the plasma processing equipment in this disclosure can be a resist removal device, where adding the mixed liquid gas significantly improves the resist removal effect. Alternatively, it can be equipment for other processes, such as etching / deposition processes, where injecting the mixed liquid gas into the plasma may also require improving plasma stability and increasing yield.

[0038] like Figure 1 The diagram shows a schematic of the piping structure of the air intake system of a plasma device according to an embodiment of the present disclosure.

[0039] The air intake system 100 includes a mixing container 103, which can be connected to a first inlet pipe 101, a second inlet pipe 102, and a separation component 105.

[0040] The first inlet pipe 101 has a first inlet for introducing a liquid first substance, such as water (H2O). The first inlet pipe 101 is connectable to an inlet of the mixing container 103. In some embodiments, the first inlet pipe 101 is provided with a first control valve 106 for controlling the connection / disconnection between the first inlet pipe 101 and the mixing container 103. As an example, the first control valve 106 may be a valve capable of opening / closing and regulating flow, and may be a manual valve or a programmable valve, etc. In some alternative embodiments, for example... Figure 1 In the example, the first inlet pipe 101 may also be provided with a first flow detector 107, which can be used to detect the flow rate of water in the first inlet pipe 101 in order to determine the volume of water flowing into the mixing container 103.

[0041] The second inlet pipe 102 has a second inlet for introducing a liquid second substance. The second inlet pipe 102 is connectable / disconnectable to another inlet of the mixing container 103. In some embodiments, the second inlet pipe 102 is provided with a second control valve 108 for controlling the connection / disconnection between the second inlet pipe 102 and the mixing container 103. As an example, the second control valve 108 may be a valve capable of opening / closing and regulating flow, and may be a manual valve or a programmable valve, etc. In some alternative embodiments, for example... Figure 1 In the example, the second inlet pipe 102 may also be provided with a second flow detector 109, which can be used to detect the flow rate of the second substance in the second inlet pipe 102 in order to determine the volume of the second substance flowing into the mixing container 103.

[0042] The mixing container 103 is connected to the first inlet pipe 101 and the second inlet pipe 102 in a way that allows it to be switched on and off, and is used to mix the first substance and the second substance into a liquid mixture with a boiling point lower than that of the first substance. As an optional example, the mixing container 103 may be equipped with a temperature controller 104 for setting the temperature to vaporize the liquid mixture. The temperature controller 104 is configured corresponding to the mixing container 103 and heats the liquid mixture in the mixing container 103 to boiling to form a mixed gas. The boiling point of the liquid mixture is lower than that of water. By selecting a suitable type of second substance, mixing with water can lower the boiling point of the liquid mixture, mainly because the interaction forces between the components in the liquid mixture reduce the gas pressure of the liquid mixture, thus lowering the boiling point; conversely, if the components in the liquid mixture repel each other, the gas pressure will increase, and the boiling point will be higher than the boiling points of each component. This embodiment requires the case where the boiling point of the liquid mixture is lower than that of water. To explain the principle in detail, according to Raoult's law, the gas pressure of a liquid mixture is equal to the simple sum of the gas pressures of its components. However, due to the interaction forces between the components, the gas pressure of the liquid mixture may be lower than the simple sum of the gas pressures of its components, thus lowering the boiling point. For example, when water and ethanol are mixed, the boiling point of the water-ethanol mixture is lower than that of water alone. Furthermore, a mixture of water and certain types of secondary substances in a specific ratio will become an azeotrope, meaning that under a fixed pressure, water and the secondary substance will boil together at that azeotropic point. The azeotropic point of the mixture will be lower than the boiling points of each component in the mixture, that is, at least lower than the boiling points of water and the secondary substance alone. For example, water and ethanol mixed at a ratio of 5:95 under normal pressure have an azeotropic point of 78.15°C. Since the boiling point of water is 100°C and the boiling point of ethanol is 78.5°C, it is clear that the azeotropic point of the water-ethanol azeotrope is lower than the boiling points of water and ethanol alone.

[0043] The principle of selecting the second substance is explained in detail. In some embodiments, the second substance may be an ester, ether, or ketone. Further exemplarily, the second substance may be determined based on one or more of the following: a lower azeotropic point, lower material toxicity, and lower preparation difficulty / cost.

[0044] Let's illustrate with examples. For instance... Figure 2 The table shown displays information about azeotropes formed by water with different types of secondary substances. This table lists the boiling points and preset proportions of ethanol, n-propanol, isopropanol, n-butanol, isobutanol, tert-butanol, isoamyl alcohol, n-pentanol, chloroethanol, diethyl ether, acetonitrile, acrylonitrile, formic acid, propionic acid, ethyl acetate, dioxane, chloroform, carbon tetrachloride, dichloroethane, and benzene when they form azeotropes with water.

[0045] Regarding the condition of "lower azeotropic point," it is desirable for the azeotrope formed by the second substance and water to have a lower azeotropic point. For example, the temperature at which water begins to feel hot is around 43°C, because the pain receptors in the human body are activated at this temperature. The specific sensation varies from person to person, and different parts of the skin have different sensitivities to temperature. Generally speaking, from a comfort perspective, water temperatures between 30°C and 35°C feel cool to warm, while around 40°C begins to approach body temperature and feels relatively warm. At around 45°C, people will feel the heat when handling food, but can still tolerate it for a short time. Water at 50°C will feel noticeably hot to most people upon contact, but short-term contact will not cause burns. Water temperatures above 60°C are generally very hot to people; prolonged or rapid contact can lead to skin burns, especially to the oral mucosa, where temperatures above 65°C can cause burns. Water temperatures of 70°C and above will cause an immediate burning sensation upon contact, posing an immediate risk of burns. Therefore, in some embodiments of this disclosure, the azeotropic point of the azeotrope can be selected within the range of 30℃~40℃, 40℃~50℃, 50℃~60℃, 60℃~70℃, or 70℃~80℃, preferably within 30℃~40℃, and second preferably within 40℃~50℃. Thus, in the above information table, based on the azeotropic point condition, ether, which has an azeotropic point of 34℃ with water, is preferably chosen as the second substance; secondly preferably, chloroform can also be chosen as the second substance; and even more preferably, carbon tetrachloride, benzene, ethyl acetate, etc., can be chosen as the second substance.

[0046] Regarding the condition of "lower material toxicity," while considering minimizing heating temperature, the degree of toxicity to humans also needs to be considered. Among the various substances mentioned above, benzene is a carcinogen, and acetonitrile, acrylonitrile, chloroform, and carbon tetrachloride all have high toxicity. In comparison, ether has only a certain degree of anesthetic toxicity and requires a much lower level of sealing / ventilation protection than the other substances. Therefore, choosing ether can balance the requirements of lower heating temperature and lower toxicity. Thus, benzene, acetonitrile, acrylonitrile, chloroform, and carbon tetrachloride are unlikely to be the preferred second substance; ether is often chosen instead. Of course, it can also be used when the protective and environmental protection configuration meets safety requirements (such as airtightness to prevent gas leakage).

[0047] In some embodiments, a trade-off also needs to be made between the amount of the second substance and the desired boiling point of the mixed liquid. Taking diethyl ether as an example, under standard atmospheric pressure, when the diethyl ether content is approximately 99%, an azeotropic composition is achieved, with an azeotropic point of 34°C. If the diethyl ether content gradually decreases, the boiling point is approximately 37°C when the diethyl ether content is 90%; approximately 40°C when the diethyl ether content is 80%; approximately 43°C when the diethyl ether content is 70%; and approximately 46°C when the diethyl ether content is 60%.

[0048] When the ether content is 50%, the boiling point is approximately 49°C. Further exploration revealed that when the volume ratio of ether to water is 20% to 80%, the boiling point of the mixed liquid is between 60°C and 70°C. Preferably, the volume ratio of ether to water can be chosen to achieve a boiling point of 50°C to 60°C. Based on the above analysis, this method effectively lowers the boiling point of water compared to the original method, while also effectively reducing the amount of the second substance used, thus effectively reducing toxicity risks and costs.

[0049] Other substances, such as ethanol, n-propanol, isopropanol, n-butanol, isobutanol, tert-butanol, isoamyl alcohol, and n-amyl alcohol, are all irritating but have relatively low toxicity. However, their azeotropic points with water are between 78°C and 98°C, so the cooling effect is not ideal. Therefore, in some embodiments, the boiling point can be lowered by reducing the ambient pressure for use.

[0050] Regarding the condition of "low preparation difficulty / cost," the industrial preparation of alcohol and ether CHO combinations is not particularly difficult. However, the process of doping with halogen elements or forming cyclic structures of organic compounds is more complex and may require catalysts. For example, the preparation of dioxane requires the addition of a metal catalyst, and its azeotropic point is 87.8℃. Therefore, considering the preparation difficulty / cost and the achieved cooling effect, dioxane may not be used as a second substance.

[0051] Considering the above conditions, preferably, one of the following can be selected as the second substance: diethyl ether, ethyl acetate, or ethanol.

[0052] Therefore, it can be understood that by selecting the type of the second substance, a liquid mixture with a boiling point as low as possible below that of the first substance can be obtained (it can also possess characteristics such as low toxicity and low preparation difficulty / cost), and an azeotrope can be formed at a predetermined ratio, thus achieving an even lower azeotropic point. Consequently, when heating the liquid mixture to boiling and forming steam, the heating temperature can be significantly reduced, thereby achieving energy savings and avoiding the problem of burns from high temperatures. It should be noted that when controlling the mixing ratio of the second substance and water in the mixing container 103, it is not necessarily necessary to meet the preset ratio of the azeotrope. If the boiling point of the liquid mixture can be lowered to the required temperature without achieving an azeotrope, then mixing can be performed without adhering to the preset ratio. Of course, the preferred scenario is to form an azeotrope to obtain the lowest possible azeotropic point.

[0053] Therefore, the heating temperature of the temperature controller 104 can be greatly reduced. For example, when ether is selected as the second substance, after mixing in the required ratio, such as a water-to-ether volume ratio of 8:2, it is only necessary to heat to 60°C to 70°C or higher to bring the mixed liquid to a boil, which is significantly lower than the boiling point of water. Even if the temperature is increased for heating efficiency, it is still significantly lower than the original 150°C heating temperature required to produce steam, thereby effectively reducing costs.

[0054] Since a liquid mixture of the second substance and the first substance is used, after the mixed gas of the liquid mixture is generated, it is necessary to separate it for use as the intake gas of the reaction chamber of the plasma processing equipment.

[0055] The separation component 105 is connected to the mixing container 103. The separation component 105 separates water vapor and a second substance from the mixed gas, and discharges the gaseous first substance to the reaction chamber 200 of the plasma processing equipment via the first inlet pipe 110. As an optional example, a fourth control valve 126, a pressure regulating valve 112, and a mass flow controller 113 (MFC) are also provided in the pipeline between the mixing container 103 and the separation component 105. Further exemplarily, the fourth control valve 126 is mainly used for controlling the on / off state and opening degree of the pipeline between the mixing container 103 and the separation component 105. The pressure regulating valve 112 is used to adjust the pipeline pressure between the mixing container 103 and the separation component 105, and the mass flow controller 113 is used to set the flow rate of the mixed gas between the mixing container 103 and the separation component 105.

[0056] In some embodiments, the separation component 105 includes a semi-permeable membrane for separating a gaseous first substance and a second substance in a gas mixture using membrane separation. Membrane separation utilizes a specially designed semi-permeable membrane to separate gas molecules based on their size and diffusion rate. These membranes are typically made of special polymers or ceramic materials that selectively allow certain gas molecules to pass through while blocking others. As an example, separation can be achieved using a semi-permeable membrane based on the size and diffusion rate of gas molecules. For instance, diethyl ether (C2H5OC2H5) has a molecular weight of 74.12, while water (H2O) has a molecular weight of 18.02. If the pore size of the semi-permeable membrane is smaller than the size of an ether molecule (approximately 0.4 nanometers) while allowing water molecules (0.3 nanometers) to pass through, the effect of ether retention and water molecule permeation can be achieved. It is understood that the pore size of the semi-permeable membrane may also change accordingly with changes in the type of the second substance to achieve separation by separate retention and permeation.

[0057] like Figure 3 The diagram shows a schematic diagram of the piping structure of the air intake system of a plasma device in another embodiment of this disclosure.

[0058] This embodiment uses Figure 1 Based on the embodiments. In this embodiment, the separation component 105 can also be connected to a recycling system and connected to the mixing container via the recycling system to recover and recycle the second substance. As an example, the recycling system may include a recycling pipeline 114, which is connectable / disconnectable to the second inlet pipeline 102 to allow the second substance to be discharged to the second inlet pipeline 102 for recycling. Optionally, the recycling pipeline 114 is provided with a third control valve 122, a recycling buffer section 115, and at least one check valve 116. As an example, in Figure 3The diagram exemplarily shows two check valves 116, respectively located near the second inlet pipe 102 and the separation component 105, with the third control valve 122 and the recovery buffer section 115 positioned between the two check valves 116. It is understood that the flow direction of the check valves 116 is unidirectional, flowing from the separation component 105 to the second inlet pipe 102. The recovery buffer section 115 is used to temporarily store the recovered second substance for selective return to the second inlet pipe 102. In some embodiments, the gaseous second substance can be pre-converted into a liquid state in the recovery buffer section 115 via condensation or other methods for use in the second inlet pipe 102. Alternatively, the second inlet pipe 102 can be maintained at a pressure or temperature sufficient to keep the second substance liquid, thus converting the gaseous second substance from the recovery pipe 114 into a liquid state. In some alternative embodiments, since the recovered second substance may also contain a gaseous first substance, the recovery system may further include a separation and purification device for purifying the second substance. As an example, a separation and purification device for purifying and removing water from the second substance may also be provided in the recovery pipeline 114. This separation and purification device may be located before or after the recovery buffer section 115 in the direction of flow. In some embodiments, the separation and purification device may contain a desiccant for water absorption (such as anhydrous calcium chloride, anhydrous magnesium sulfate, sodium, etc.). Alternatively, water in the second substance may be removed by means such as rotary evaporation.

[0059] In some embodiments, such as Figure 1 , Figure 3 In this embodiment, the intake system 100 may further include at least one reactant gas inlet pipe connected to the reaction chamber 200 for introducing reactant gases. The reactant gases include, but are not limited to, oxygen, nitrogen, and argon. As an example, the intake system 100 may include a second intake pipe 117 and a third intake pipe 118. The second intake pipe 117 is connected to the reaction chamber 200 for introducing nitrogen. The third intake pipe 118 is connected to the reaction chamber 200 for introducing process gases such as oxygen. Further, a fifth control valve 119 and a sixth control valve 120 may be respectively installed in the second intake pipe 117 and the third intake pipe 118.

[0060] In some embodiments, the reaction chamber 200 is connected to a vacuum device for setting a pressure environment in the reaction chamber 200 to meet preset pressure conditions. The preset pressure conditions include a pressure condition that keeps the water in the reaction chamber 200 in a gaseous state. That is, the vacuum device sets the pressure in the reaction chamber 200, for example, by reducing pressure to lower the boiling point of water, so that the first gaseous substance remains in a gaseous state after entering. As an example, see [reference needed]. Figure 7The diagram shows the relationship between the boiling point of water and ambient air pressure. At higher vacuum levels, such as a pressure of 1000 Pa, the boiling point of water is only 6.9696°C, making it easily retained in a gaseous state. In some embodiments, the pumping device may include one or more of a dry pump (300) and a molecular pump (400). The dry pump (300) is a dry vacuum pump that can set the reaction chamber (200) at a certain vacuum level, while the molecular pump (400) can set the reaction chamber (200) at a higher vacuum level.

[0061] For reference Figure 4 The diagram illustrates a module schematic for controlling the flow rates of a first substance and a second substance according to an embodiment of this disclosure. In this embodiment, the first control valve 106 and the second control valve 108 are programmable valves with adjustable opening degrees.

[0062] exist Figure 4 In the process, the air intake system 100 also includes a first control unit 121. The first control unit 121 is communicatively connected to the first control valve 106 and the second control valve 108, and is used to adjust the opening of the first control valve 106 and the second control valve 108 based on the flow information monitored by the first flow detector 107 and the second flow detector 109 indicating that the volume ratio of water flowing into the mixing container 103 and the second substance approaches a preset ratio when the second inlet pipe 102 does not introduce the second substance recovered from the separation component 105. Specifically, the situation where the second inlet pipe 102 does not introduce the recovered second substance includes two cases: one is when the air intake system 100 does not have the recovery system, for example... Figure 1 Example 1; Another approach is to set up a recycling system, for example... Figure 3However, the recovery line 114 is disconnected (e.g., the fourth control valve 126 is closed). At this time, since the recovered second substance, which may be mixed with water, is not used, and only the second substance from the supply source is used, the flow information passed through the second flow detector 109 is the accurate flow rate of the second substance. Since the volume can be obtained from the flow rate and time, the accurate volume of the second substance entering the mixing container 103 can be obtained by reading the flow information of the second flow detector 109. Based on the flow information of the first flow detector 107 and the second flow detector 109, the volume ratio of water and the second substance entering the mixing container 103 can be accurately determined. Thus, it can be further determined that the volume ratio of water and the second substance in the mixing container 103 meets the preset ratio for forming an azeotrope. For example, when the volume of water flowing into the mixing container 103 is determined to be V1 based on the flow information of the first flow detector 107, and the volume of the second substance flowing into the mixing container 103 is determined to be V2 based on the flow information of the second flow detector 109, assuming that the preset ratio of water to the second substance is 8:2, when V1:V2 is greater than 8 / 2, the flow rate of the second substance is increased to make V2 larger, thereby reducing V1:V2 to reach 8:2.

[0063] Of course, if the second inlet pipe 102 receives the recovered water-containing second substance, the flow information of the second flow detector 109 cannot accurately reflect the volume of the second substance entering the mixing container 103. In this case, the control of the opening degree of the first control valve 106 and the second control valve 108 can be determined by detecting the volume ratio between water and the second substance in the mixed liquid in the mixing container 103.

[0064] Optionally, in, for example Figure 3 In the embodiment where a recycling system is provided, the first control unit 121 can also be communicatively connected to the third control valve 122 to disconnect the recycling pipeline 114 when it is necessary to determine the volume ratio of water and the second substance in the mixing container 103 based on the flow information of the first flow detector 107 and the second flow detector 109.

[0065] like Figure 5 The diagram shown illustrates a module schematic for controlling the flow rates of the first and second substances in another embodiment of this disclosure.

[0066] In this embodiment, the air intake system 100 includes a level sensor 123, a pressure sensor 124, and a second control unit 125. (See reference) Figure 6As shown, the liquid level sensor 123 and pressure sensor 124 are disposed in the mixing container 103, and are used to detect liquid level information and pressure information, respectively. As an example, the liquid level sensor 123 and pressure sensor 124 can be disposed on the inner wall of the mixing container 103. The pressure sensor 124 is submerged in the liquid inside the mixing container 103, and can be disposed on the side wall or bottom wall of the mixing container 103. The liquid level sensor 123 can be disposed on the side wall or bottom wall of the mixing container 103. In some embodiments, the liquid level sensor 123 can be implemented as a liquid level sensor based on the principles of buoyancy, pressure, capacitance, ultrasound, or electromagnetic waves, such as a float-type liquid level sensor (using the change of buoyancy of a float in a liquid to detect the liquid level), a capacitive liquid level sensor (using the change of capacitance to measure the liquid level), an ultrasonic liquid level sensor (calculating the liquid level based on the propagation time of sound waves by emitting and receiving ultrasonic signals), a radar liquid level sensor (using electromagnetic waves to calculate the liquid level by measuring the propagation time of electromagnetic waves), a magnetic float level gauge (using the principle of buoyancy and magnetic coupling, the permanent magnet inside the float transmits the liquid level to the magnetic float indicator panel through magnetic coupling), a magnetostrictive liquid level gauge (using the magnetostrictive effect to determine the liquid level by measuring the time difference between the pulse current and the torsional wave), a hydrostatic liquid level sensor (based on the principle that the hydrostatic pressure of the liquid is proportional to the liquid level height, converting the hydrostatic pressure into an electrical signal), or a pressure level transmitter, etc. In some embodiments, the pressure sensor 124 converts pressure into an electrical signal and outputs it. The pressure sensor 124 measures changes in pressure and converts them into electrical signals. Depending on the principle, it can be implemented as a piezoresistive, piezoelectric, capacitive, or inductive type.

[0067] The second control unit 125 is communicatively connected to the liquid level sensor 123, pressure sensor 124, first control valve 106, and second control valve 108. It is used to determine the density and volume of the mixed liquid based on the liquid level and pressure information using a liquid pressure algorithm. Furthermore, using the mass density formula, it determines the volume ratio of water to the mixed liquid in the mixing container 103 based on the density and volume of the mixed liquid, the density of water, and the density of the second substance. This allows it to control the opening of the first control valve 106 and the second control valve 108 to bring the volume ratio closer to a specific ratio until a preset ratio is reached. As an example, the liquid pressure algorithm is a method for calculating liquid pressure. The formula for calculating the liquid pressure at a point in a liquid is as follows:

[0068] p=ρgh (1)

[0069] Where ρ represents the density of the liquid; g represents the acceleration due to gravity; and h represents the vertical distance from the point to the liquid surface, i.e., the depth.

[0070] Based on the mass density formula, the following formula can be obtained:

[0071] ρ1V1+ρ2V2=ρ(V1+V2) (2)

[0072] Where ρ1 is the density of water, V1 is the volume of water in mixing container 103; ρ2 is the density of the second substance, V2 is the volume of the second substance in mixing container 103; and ρ is the density of the mixed liquid.

[0073] According to equation (2), it can be transformed into V1 / V2=(ρ-ρ2) / (ρ1-ρ) (3)

[0074] Based on the pressure information detected by the pressure sensor 124, i.e., p in equation (1), and the liquid level information detected by the liquid level sensor 123, i.e. h in equation (1), the density ρ of the mixed liquid in the mixing container 103 can be calculated. Then, according to equation (3), the volume ratio of water and the second substance in the mixed liquid in the mixing container 103 can be calculated. Then, the opening degree of the first control valve 106 and the second control valve 108 can be adjusted according to the volume ratio to make the volume ratio approach the specific ratio to reach the preset ratio. For example, when the volume of water or the second substance is too low to reach the preset ratio, the volume can be increased by increasing the flow rate of water or the second substance to achieve the preset ratio.

[0075] Therefore, in this embodiment, regardless of whether the second pipeline introduces the recovered second substance through the recovery pipeline 114, valve control can be implemented based on the volume ratio calculated from the detection information of the pressure sensor 124 and the level sensor 123. Thus, it is not necessary to set up the first flow detector 107 and the second flow detector 109. Of course, since only the volume ratio can be calculated and not the specific volume of each component, the first flow detector 107 and the second flow detector 109 can also be retained to obtain the specific flow information of each inlet pipeline. Furthermore, the flow rates of the two inlet pipelines can be used as a reference, for example, to determine whether the flow is normal to identify any blockages or other faults in the pipeline, or to compare the volume ratios obtained from the pressure sensor 124 and the level sensor 123 to estimate their reliability, in order to diagnose whether there are any abnormalities, such as blockages or leaks, in the pressure sensor 124, the level sensor 123, the mixing container 103, or the upstream pipeline of the mixing container 103.

[0076] Of course, the above calculation and detection process is just an example. The present disclosure aims to provide a hardware circuit connection structure that can implement the above calculation and detection. The specific control method can be changed according to actual needs, and the present disclosure does not involve software method improvement.

[0077] In summary, this disclosure relates to the field of plasma processing technology, providing an intake system for a plasma device, comprising: a mixing container for mixing an input liquid first substance and at least one second substance to obtain a mixed liquid with a boiling point lower than that of the first substance; wherein the mixed liquid is vaporized within the mixing container to form a mixed gas; and a separation component, with a pipeline connected to the mixing container, for separating the gaseous first and second substances from the mixed gas, and discharging the gaseous first substance through a first intake pipeline for supply to the plasma device. Therefore, the solution of this disclosure only requires heating to the corresponding azeotropic point, significantly reducing the temperature compared to the high temperatures of related technologies, thus saving energy and reducing consumption.

[0078] The above embodiments are merely illustrative of the principles and effects of this disclosure and are not intended to limit this disclosure. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this disclosure. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this disclosure should still be covered by the protection scope of this disclosure.

Claims

1. A gas inlet system for a plasma apparatus, characterized by, include: A mixing container for mixing an input liquid first substance and at least one second substance to obtain a mixed liquid with a boiling point lower than that of the first substance; wherein the mixed liquid is vaporized within the mixing container to form a mixed gas. A separation component, with a pipeline connected to the mixing container, is used to separate the gaseous first substance and the second substance in the mixed gas, and to export the gaseous first substance through the first inlet pipeline for supply to the plasma device; The separation component is connected to the recycling system and, through the recycling system, to the mixing container for the recovery and recycling of the second substance.

2. The air intake system of claim 1, wherein, include: A first control valve and a first flow detector are located in a first inlet pipe that conveys the first substance to the mixing container; The second control valve and the second flow detector are located in the second inlet pipe that conveys the second substance to the mixing container; The first control unit is communicatively connected to the first control valve, the second control valve, the first flow detector, and the second flow detector, and is used to control the opening degree of the first control valve and the second control valve.

3. The air intake system of claim 1, wherein, include: A liquid level sensor and a pressure sensor are installed in the mixing container to detect liquid level information and pressure information, respectively. The second control unit is communicatively connected to the liquid level sensor, pressure sensor, first control valve, and second control valve, and is used to control the opening degree of the first control valve and the second control valve.

4. The air intake system of claim 1, wherein The recovery system includes a recovery pipeline, which is equipped with a third control valve, a recovery buffer section and at least one check valve; and / or, the recovery system includes a separation and purification device for purifying the second substance.

5. The air intake system of claim 1, wherein, The separation component includes a semi-permeable membrane; and / or, the reaction chamber of the plasma device is connected to an air extraction device for setting the reaction chamber to meet a preset pressure condition, the preset pressure condition including: a pressure condition that keeps the water in the reaction chamber in a gaseous state.

6. The air intake system of claim 1, wherein A fourth control valve, a pressure regulating valve, and a mass flow controller are also installed in the pipeline between the mixing container and the separation component.

7. The air intake system of claim 1, wherein Includes a temperature controller for setting the temperature of the mixing container to allow the mixed liquid to vaporize.

8. The air intake system of claim 1, wherein Also includes: At least one reactive gas inlet pipe is connected to the reaction chamber of the plasma device for introducing reactive gas.

9. The air intake system of claim 1, wherein, The first substance is selected as water, and the second substance is selected as one of the following: diethyl ether, ethyl acetate, or ethanol.

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