Clamp for gluing mask substrate

Abstract

The utility model discloses a fixture for gluing a mask substrate, and belongs to the field of mask plate gluing. The fixture for gluing the mask substrate comprises a base with a placement groove, first sealing rings are arranged at the four corners in the placement groove in a surrounding mode, supporting columns are arranged in the middles of the interiors of the four first sealing rings, first air exhaust cavities are formed in the supporting columns, and communicating cavities are formed in the base in a surrounding mode. The fixture solves the problem that the lower end of a whole mask substrate of an existing fixture is uniformly adsorbed by one sealing ring, the error-tolerant rate is poor, the interior of the containing groove is divided into four areas, the four areas conduct independent adsorption and assist with one another, the pressure of the adsorption position is continuously detected through the pressure sensor in the adsorption process, and the adsorption efficiency is improved. And after the pressure is reduced, the piston head at the lower end of the second sealing ring longitudinally slides to provide additional adsorption force for adsorption.

Description

Technical Field

[0001] This utility model relates to the field of photomask coating, specifically a fixture for coating photomask substrates. Background Technology

[0002] A mask substrate adhesive applicator is a tool specifically designed to fix the mask substrate during the adhesive application process. Through a specific adsorption mechanism, it can firmly hold the mask substrate placed on it, ensuring that the substrate will not shift or shake during the adhesive application operation. The use of this applicator improves the accuracy and efficiency of adhesive application and avoids problems such as uneven adhesive application caused by substrate instability.

[0003] Chinese patent CN220804145U discloses a fixture for applying adhesive to extremely small-sized photomasks. By using a base with an outer diameter adapted to the size of any mass-produced photomask and providing a receiving groove on the base, the extremely small-sized photomask to be coated is placed in the receiving groove. Then, the base is placed in the coating position of the coating machine. By using the fit between the base and the coating machine, the problem of incompatibility between the extremely small-sized photomask and the coating machine is solved, enabling the coating machine to perform adhesive coating operations on incompatible extremely small-sized photomasks.

[0004] During the adsorption and fixation process of the aforementioned patented mask coating fixture, the entire lower end of the mask substrate is uniformly contacted by a sealing ring to form an adsorption area. However, the fact that the entire lower end of the mask substrate is uniformly adsorbed by a single sealing ring has a poor fault tolerance rate. It is easy for gaps to be generated due to foreign matter adhering to the surface of the sealing ring, which can affect adsorption. This can cause the substrate to loosen during the coating process, resulting in a reduction in the coating effect. Utility Model Content

[0005] The purpose of this invention is to provide a fixture for coating a mask substrate. By dividing the placement groove into four areas, the four areas can be independently adsorbed and mutually assist each other. During the adsorption process, a pressure sensor continuously detects the pressure at the adsorption position. After the pressure decreases, the piston head at the lower end of the second sealing ring slides longitudinally to provide additional adsorption force, thus solving the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a mask substrate coating fixture, comprising a base with a placement groove, wherein a first sealing ring is arranged around each of the four corners of the placement groove, and a support column is arranged in the middle of each of the four first sealing rings. A first suction chamber is arranged inside the support column, and a connecting cavity is arranged around the inside of the base. The first suction chamber passes through the support column and extends into the connecting cavity. A second sealing ring with a second suction chamber is arranged in each of the four support columns facing the middle of the placement groove. A piston head is arranged at the lower end of the second suction chamber. A pressure sensor is arranged on one side of the first suction chamber at the upper end of the support column. The pressure sensor detects the pressure of the corresponding area wrapped by the first sealing ring during adsorption. After the pressure drops to a set value, the threaded rod can be actively rotated to drive the piston head to move longitudinally. The longitudinal movement of the piston head will draw gas from the second suction chamber, thereby achieving adsorption at the second sealing ring position. The second sealing ring assists in the adsorption at the first sealing ring position.

[0007] Preferably, a third suction chamber is provided at the lower end of the connecting cavity. After the connecting cavity is connected, the third suction chamber can simultaneously extract air from the four support column positions.

[0008] Preferably, a fixing frame is provided at the lower end of the placement groove corresponding to the position of the second sealing ring. The second suction chamber passes through the second sealing ring and is embedded inside the fixing frame. After the mask substrate is initially extracted by the position of the first suction chamber, the mask substrate will move vertically downward and contact the second sealing ring, so that the second suction chamber inside the second sealing ring forms a sealed space, which can provide additional adsorption force.

[0009] Preferably, the lower end of the piston head is provided with a connecting block that is fixed by adhesive, and the lower end of the outer side of the connecting block is provided with a threaded rod that is threaded together. The rotation of the threaded rod can drive the piston head to adjust its horizontal position longitudinally.

[0010] Preferably, both sides of the connecting block are provided with movable rails recessed inside the fixed frame, and sliding blocks integral with the connecting block are slidably provided on the outside of the two movable rails. The piston head can move smoothly longitudinally by means of the restriction of the movable rails.

[0011] Preferably, a micro motor is provided at the lower end of the threaded rod, and the pressure sensor is electrically connected to the micro motor. The heights of the first sealing ring, the second sealing ring, and the support column decrease sequentially. The micro motor drives the threaded rod, enabling the threaded rod to adjust the horizontal position of the piston head at the upper end.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0013] This invention uses four first sealing rings inside the placement groove to simultaneously wrap and contact four areas on the back of the mask substrate. During the gas extraction and adsorption process, four support pillars are connected through a connecting cavity. Gas is directly and simultaneously extracted from the areas wrapped by the four first sealing rings from the third suction chamber to complete the adsorption. Due to adsorption, the first sealing rings bend, causing the mask substrate to contact the second sealing ring before contacting the support pillar. After the mask substrate contacts the second sealing ring and the support pillar in sequence, the suction force is detected by a pressure sensor. If there are foreign objects between the first sealing ring and the mask substrate, creating a gap, [further action is taken]. The suction will decrease, causing the pressure value detected by the pressure sensor to decrease. When the pressure value of the pressure sensor is lower than the set value, the micro motor corresponding to the threaded rod will be activated. The rotation of the threaded rod will drive the piston head to slide longitudinally in the second suction chamber and actively suck up the space between the second sealing ring and the mask substrate. After the pressure value of the pressure sensor decreases due to the weak adsorption capacity at the first sealing ring position, the adsorption at the first sealing ring position is assisted by the second sealing ring position which can contact the mask substrate position, providing temporary suction. The four adsorption positions combined with the four second sealing rings can provide stable adsorption capacity, thereby improving the overall fault tolerance of the furniture. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall external structure of this utility model;

[0015] Figure 2 For the present utility model Figure 1 Enlarged view of a portion of region A in the middle;

[0016] Figure 3 This is a schematic diagram showing the positional relationship of the third air extraction chamber in this utility model;

[0017] Figure 4 This is a cross-sectional view of the gas extraction trajectory inside the communicating cavity of this utility model;

[0018] Figure 5 This is a cross-sectional view of the internal structure of the fixed frame of this utility model;

[0019] Figure 6 For the present utility model Figure 5 Enlarged view of a portion of region B in the middle.

[0020] In the diagram: 1. Placement slot; 2. Enlarged slot; 3. First sealing ring; 4. Support column; 5. First suction chamber; 6. Pressure sensor; 7. Second sealing ring; 8. Second suction chamber; 9. Third suction chamber; 10. Fixing frame; 11. Connecting cavity; 12. Restricting ring; 13. Piston head; 14. Connecting block; 15. Movable rail; 16. Sliding block; 17. Threaded rod; 18. Micro motor; 19. Base. Detailed Implementation

[0021] The present invention will be further described below with reference to specific embodiments.

[0022] like Figure 1 As shown, a mask substrate coating fixture of this embodiment includes a base 19. The base 19 has a recessed placement groove 1 for placing the mask substrate inside. The four corners of the placement groove 1 are provided with enlarged grooves 2. The recessed enlarged grooves 2 make it easy to take out and place the mask substrate, which is convenient for the gripping and placement of the external robotic arm.

[0023] In this embodiment, a first sealing ring 3 is arranged around each of the four corners inside the placement groove 1. The lower end of the first sealing ring 3 is embedded in the base 19. After the mask substrate is placed inside the placement groove 1, the four first sealing rings 3 can contact the back of the mask substrate at the same time to complete the contact. The four first sealing rings 3 can provide four adsorption positions, which has a high fault tolerance. When there is a foreign object in one of the first sealing rings 3 and the adsorption capacity is weak, the first sealing rings 3 in other corner positions can provide adsorption force.

[0024] To facilitate simultaneous adsorption within the first sealing ring 3, a support column 4 is provided at the center of each of the four first sealing rings 3. The support column 4 contains a first suction chamber 5, and a connecting cavity 11 is arranged around the inside of the base 19. Figure 3 and Figure 4 As shown, a third suction chamber 9 is provided at the lower end of the connecting cavity 11. The first suction chamber 5 passes through the support column 4 and extends into the interior of the connecting cavity 11. A gas extraction device is connected at the position of the third suction chamber 9. Through the extraction at the position of the third suction chamber 9, combined with the connection at the position of the connecting cavity 11 and the extension of the first suction chamber 5, the areas of the four first sealing rings 3 can be independently adsorbed on different areas of the back of the mask substrate.

[0025] When the area enclosed by the first sealing ring 3 is subjected to adsorption force, the first sealing ring 3 will bend. In order to support the mask substrate that is in contact with the upper end of the first sealing ring 3, such as... Figure 6 As shown, each of the four support columns 4 is provided with a second sealing ring 7 facing the middle of the placement groove 1. The second sealing ring 7 and the first sealing ring 3 are both made of rubber, which can improve the adhesion to the back of the mask substrate and improve the adsorption force.

[0026] A fixing frame 10 is provided at the lower end of the placement groove 1 corresponding to the position of the second sealing ring 7. A second suction chamber 8 is provided inside the second sealing ring 7. The second suction chamber 8 passes through the second sealing ring 7 and is embedded inside the fixing frame 10. When an adsorption force is generated at the position of the first suction chamber 5, the bending of the first sealing ring 3 can make the back of the mask substrate contact the lower end of the second sealing ring 7. At this time, the second sealing ring 7 and the back of the mask substrate form a sealed second suction chamber 8. The adsorption force generated at the position of the second suction chamber 8 can be used to fix the mask substrate.

[0027] It is worth mentioning that a piston head 13 is provided at the lower end of the second suction chamber 8. The second suction chamber 8 can be extracted by the piston head 13 sliding longitudinally along the inside of the second suction chamber 8. This can provide additional adsorption force at the position of the second sealing ring 7, which can replace and assist the adsorption and fixation of the back of the mask substrate at the position of the first sealing ring 3.

[0028] In this embodiment, a connecting block 14 is provided at the lower end of the piston head 13, and the connecting block 14 and the piston head 13 are fixed together by adhesive. A threaded rod 17 is provided at the lower end of the outside of the connecting block 14, and the threaded rod 17 is embedded in the inside of the connecting block 14 and engages with the internal thread of the connecting block 14. The rotation of the threaded rod 17 can generate relative movement with the connecting block 14 and the piston head 13. Movable rails 15 are provided on both sides of the connecting block 14, and the movable rails 15 are recessed inside the fixed frame 10. Sliding blocks 16 are slidably provided on the outside of the two movable rails 15, and the sliding blocks 16 are integral with the connecting block 14. By rotating the position of the threaded rod 17 and restricting the sliding blocks 16 by the movable rails 15, the piston head 13 can be changed from rotational movement to longitudinal linear movement. The longitudinal linear movement of the piston head 13 can adsorb the mask substrate attached to the position of the second suction chamber 8.

[0029] To actively activate the threaded rod 17 after the adsorption effect at the first sealing ring 3 position decreases, the threaded rod 17 is actively rotated, such as... Figure 5 As shown, a micro motor 18 is provided at the lower end of the threaded rod 17, and the outer wall of the micro motor 18 is fixedly connected to the fixed frame 10 by bolts. The output shaft of the micro motor 18 is fixedly connected to the center position of the lower end of the threaded rod 17 by bolts. The micro motor 18 can actively drive the threaded rod 17 to rotate and adjust the position of the piston head 13 horizontally.

[0030] Among them, such as Figure 2As shown, a pressure sensor 6 is provided on one side of the first suction chamber 5 at the upper end of the support column 4. The pressure sensor 6 is electrically connected to the micro motor 18. After adsorption at the position of the first sealing ring 3 and causing the first sealing ring 3 and the second sealing ring 7 to bend, the adsorption will cause the mask substrate to squeeze the pressure sensor 6. A minimum pressure value is set for the pressure sensor 6. After the adsorption force is generated at the position of the first suction chamber 5, the pressure sensor 6 continuously detects the pressure. After the pressure sensor 6 detects that the pressure is lower than the set value, the pressure sensor 6 sends a start signal to the micro motor 18. The micro motor 18 starts and is driven by the output shaft to adjust the longitudinal horizontal position through the threaded fit and the limitation of the movable rail 15, so as to realize the auxiliary adsorption at the position of the second sealing ring 7.

[0031] To enclose and protect the piston head 13 and the interior of the fixing frame 10 at its lower end, a limiting ring 12 is provided around the upper end of the piston head 13. The limiting ring 12 is an integral structure with the base 19. When the piston head 13 is not needed for adsorption, it fits tightly against the lower end of the limiting ring 12. The fit between the limiting ring 12 and the piston head 13 also prevents foreign objects from falling into the fixing frame 10.

[0032] The heights of the first sealing ring 3, the second sealing ring 7, and the support column 4 decrease sequentially. During the adsorption process, the mask substrate will sequentially contact the first sealing ring 3 and the second sealing ring 7. Finally, the support column 4 supports the mask substrate. When a gap is created at the position of the first sealing ring 3 due to foreign objects, the suction force will still allow the mask substrate to move longitudinally and contact the second sealing ring 7. The area of ​​the first sealing ring 3 at one position is difficult to seal, but the remaining three areas of the first sealing ring 3 can ensure that the mask substrate can be adsorbed and contact the second sealing ring 7. This allows the second suction chamber 8 inside the second sealing ring 7 to be in a sealed area, which can realize the adsorption capacity brought about by the longitudinal movement of the piston head 13.

[0033] Working principle: When using a clamp to adsorb and fix the mask substrate placed inside the furniture, the adsorption position of the mask substrate is placed towards the inside of the placement groove 1, and the four corners of the mask substrate contact the first sealing ring 3. The pump at the lower end of the third suction chamber 9 is activated. The pump directly extracts the area covered by the first sealing ring 3 through the third suction chamber 9, the connecting chamber 11, and the support column 4. After the area covered by the first sealing ring 3 is adsorbed, the first sealing ring 3 will bend. The bent first sealing ring 3 will cause the mask substrate to contact the lower second sealing ring 7. As the adsorption continues at the support column 4, the second sealing ring 7 and the first sealing ring 3 bend, and the mask substrate contacts the support column 4 and is supported by the support column 4. During the support process of the support column 4, the pressure sensor 6 detects the pressure. Foreign objects on the surface of the first sealing ring 3 corresponding to the pressure sensor 6 cause the first... A gap is created between the sealing ring 3 and the mask substrate. After the first sealing ring 3 fails to adhere due to the gap, the pressure sensor 6 will reduce the detected pressure. When the pressure sensor 6 is lower than the set value, the micro motor 18 at the lower end of the second suction chamber 8 inside the first sealing ring 3 will start. The start of the micro motor 18 will cause the threaded rod 17 to rotate. Through the restriction of the sliding block 16 by the movable rail 15, the connecting block 14 will drive the piston head 13 to slide longitudinally inside the second suction chamber 8, actively extracting and replacing the first sealing ring 3 position with the second sealing ring 7 position for adsorption. When the adsorbed and fixed mask substrate is taken out, the piston head 13 slides longitudinally in the second suction chamber 8 and resets. At the same time as resetting, the adsorption at the third suction chamber 9 position is stopped, the adsorption can be stopped, and the mask substrate after coating can be taken out.

[0034] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0035] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention.

Claims

1. A fixture for applying adhesive to a mask substrate, comprising a base (19) having a placement groove (1), characterized in that, The four corners of the placement groove (1) are all surrounded by a first sealing ring (3). The middle of the four first sealing rings (3) is provided with a support column (4). The inside of the support column (4) is provided with a first suction chamber (5). The inside of the base (19) is surrounded by a connecting cavity (11). The first suction chamber (5) passes through the support column (4) and extends into the connecting cavity (11). The four support columns (4) are all provided with a second sealing ring (7) with a second suction chamber (8) facing the middle of the placement groove (1). The lower end of the second suction chamber (8) is provided with a piston head (13). A pressure sensor (6) is provided on one side of the first suction chamber (5) at the upper end of the support column (4).

2. The mask substrate coating fixture according to claim 1, characterized in that, A third air extraction chamber (9) is provided at the lower end of the connecting cavity (11).

3. The mask substrate coating fixture according to claim 1, characterized in that, A fixing frame (10) is provided at the lower end of the placement groove (1) corresponding to the position of the second sealing ring (7). The second air extraction chamber (8) passes through the second sealing ring (7) and is embedded inside the fixing frame (10).

4. The mask substrate coating fixture according to claim 1, characterized in that, The lower end of the piston head (13) is provided with a connecting block (14) that is fixed by adhesive, and the lower end of the connecting block (14) is provided with a threaded rod (17) with thread engagement.

5. A fixture for coating a mask substrate according to claim 4, characterized in that, Both sides of the connecting block (14) are provided with movable rails (15) recessed inside the fixed frame (10), and the outside of the two movable rails (15) are slidably provided with sliding blocks (16) that are integral with the connecting block (14).

6. A fixture for coating a mask substrate according to claim 5, characterized in that, The lower end of the threaded rod (17) is provided with a micro motor (18), and the pressure sensor (6) is electrically connected to the micro motor (18). The heights of the first sealing ring (3), the second sealing ring (7), and the support column (4) decrease sequentially.

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