Screen printing plate
By designing a combination structure of main openings and supplementary openings on the screen, the problem of uneven grid line morphology was solved, the uniformity and conductivity of the grid lines were improved, and the conversion efficiency of the solar cell was increased.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HANGZHOU JINGBAO PRECISION TECHNOLOGY CO LTD
- Filing Date
- 2025-02-11
- Publication Date
- 2026-04-28
AI Technical Summary
When printing solar cell grid lines, conventional screen printing plates have grid knots at the grid line openings, resulting in uneven grid line morphology, affecting the cross-sectional shape of the electrode grid lines, increasing internal resistance, and reducing the conversion efficiency of solar cells.
Design a screen structure including a slurry scraping layer and a patterned film layer. The slurry scraping layer has an initial opening and a gap. The patterned film layer has a main opening and a supplementary opening. The supplementary opening is connected to the main opening. The size of the supplementary opening is larger than the gap. Optimize the design of the grid openings to ensure the slurry flowability and uniformity.
By adding openings, the uniformity of the grid morphology and conductivity are improved, the risk of clogging is reduced, the stability of printing and electrical performance are enhanced, and the conversion efficiency of the solar cell is improved.
Smart Images
Figure CN224170661U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of solar cell technology, specifically to a screen printing plate. Background Technology
[0002] Screen printing is currently the mainstream technology for manufacturing metal grid electrodes in solar cells. However, as the cost of solar cells decreases, the width of the printed grid lines is also getting smaller. Conventional screens generally have knots at the grid line openings, which affect the morphology of the printed grid lines and lead to uneven grid lines.
[0003] Therefore, how to design and develop a screen structure that can make the grid lines uniform in the shaded areas, refine the grid line width, optimize the cross-sectional shape of the electrode grid lines, reduce internal resistance, increase light absorption, and thus improve the conversion efficiency of solar cells is an urgent problem to be solved in this field. Utility Model Content
[0004] This utility model aims to solve one of the technical problems in related technologies to a certain extent. To this end, this utility model provides a screen printing plate.
[0005] To achieve the above objectives, as a first aspect of this application, a screen printing plate is disclosed. The screen printing plate includes a slurry coating layer and a pattern film layer stacked along the thickness direction. The slurry coating layer has a plurality of initial openings arranged along a predetermined direction, with a gap between adjacent initial openings. At least one grid line opening is formed on the pattern film layer. The length direction of the grid line opening is consistent with the predetermined direction, such that a plurality of initial openings exist at the grid line opening. The grid line opening includes a main opening and at least one supplementary opening. The length direction of the main opening is consistent with the length direction of the grid line opening. The supplementary opening is disposed at the edge of the main opening and communicates with the main opening. The interval between the supplementary opening and the initial opening corresponds.
[0006] Furthermore, the dimension of the supplementary opening along the length direction of the gate line opening is greater than the dimension of the interval along the length direction of the gate line opening.
[0007] Furthermore, the difference in size between the supplementary opening and the interval along the length direction of the gate opening is between 1 μm and 100 μm.
[0008] Furthermore, the size of the supplementary opening along the width direction of the gate line opening is in the range of 1 μm to 100 μm, and the size of the supplementary opening along the length direction of the gate line opening is in the range of 1 μm to 100 μm.
[0009] Furthermore, the supplementary opening includes two supplementary sub-openings, which are respectively disposed on both sides of the main opening and are opposite to each other.
[0010] Furthermore, the shape of the supplementary sub-opening is at least one of the following: arc, triangle, rectangle, and trapezoid.
[0011] Furthermore, multiple grid line openings are arranged parallel to each other along the predetermined direction.
[0012] Furthermore, the width of the main opening is in the range of 1 μm to 100 μm.
[0013] Furthermore, the slurry coating includes multiple warp and weft threads, which intersect to define the initial opening and the interval, with the warp threads and corresponding weft threads overlapping at the intersections; or
[0014] The slurry coating includes multiple long connecting lines and multiple short connecting lines. The multiple long connecting lines are spaced apart along their width direction. Adjacent long connecting lines are connected by multiple short connecting lines. The multiple short connecting lines are spaced apart along the length direction of the long connecting lines, such that adjacent short connecting lines and adjacent long connecting lines define the initial opening and the interval.
[0015] Furthermore, the material of the patterned film layer includes one of organic films, metal films, and inorganic films.
[0016] The beneficial effects of this utility model are:
[0017] The screen mesh includes initial openings and spacing. The spacing between the initial openings provides good mechanical strength and stability, effectively preventing deformation of the screen due to uneven stress during use. The structure of the paste coating layer with multiple initial openings and spacing supports the uniform distribution of the metal paste, ensuring the flowability of the paste within the grid openings and improving the forming accuracy of the pattern. However, the spacing of the paste coating layer at the conventional grid openings can hinder the paste flow, resulting in uneven grid morphology. Therefore, this application designs multiple grid openings in the pattern film layer. The design of the supplementary openings allows the paste to still flow through specific areas where the screen is blocked, thereby forming a continuous and uniform grid morphology. The combined design of the main opening and the supplementary openings expands the width of the grid openings, increasing the flow width of the metal paste at the blocked areas and increasing the amount of metal paste flowing out at the blocked positions. At the same time, it makes the grid height more uniform and the width consistent at this position. The connectivity of the supplementary openings provides additional paths for the grid openings, allowing the paste to more fully fill the grid line area, thereby improving conductivity. Meanwhile, the main opening maintains consistency along its length, which helps improve the flow efficiency of the metal paste and thus promotes the uniformity of the conductive path. The supplementary opening is located at the edge of the main opening and connects to it. This design increases the flexibility of paste flow and expands its applicability, especially in high-density, multi-linewidth designs, where this structure effectively reduces the risk of clogging. The presence of the supplementary opening allows the grid opening design to adapt to a wider range of metal paste characteristics, improving the compatibility of the screen printing plate in different manufacturing processes. The presence of obstructions at the grid openings, with the supplementary opening corresponding to these obstructions (i.e., gaps), ensures that the metal paste can flow sufficiently into the supplementary openings to avoid obstruction by the gaps, thereby forming a more reliable and stable conductive connection at critical nodes. This design further enhances the printing uniformity and stability of the grid lines, reduces the risk of failures such as grid breakage and incomplete printing, and improves the electrical performance and reliability of the finished product.
[0018] These features and advantages of this utility model will be disclosed in detail in the following specific embodiments and accompanying drawings. The preferred embodiments or means of this utility model will be shown in detail in conjunction with the accompanying drawings, but are not intended to limit the technical solutions of this utility model. In addition, each of these features, elements and components appearing in the following text and drawings is multiple and is labeled with different symbols or numbers for convenience, but all represent parts with the same or similar structure or function. Attached Figure Description
[0019] The present invention will be further described below with reference to the accompanying drawings:
[0020] Figure 1 A schematic diagram of one embodiment of the screen printing plate provided by this utility model;
[0021] Figure 2Schematic diagrams of two embodiments of the screen printing plate provided by this utility model;
[0022] Figure 3 A schematic diagram of one embodiment of the mesh screen provided by this utility model;
[0023] Figure 4 A cross-sectional structural schematic diagram of one embodiment of the mesh screen provided by this utility model;
[0024] Figure 5 This is a schematic diagram of another embodiment of the mesh screen provided by this utility model.
[0025] Explanation of reference numerals in the attached figures
[0026] 1: Screen printing plate; 10: Slurry coating; 10a: Initial opening; 10b: Interval;
[0027] 12: Patterned film layer; 12b1: Main opening; 12b2: Supplementary opening;
[0028] 1a: Mesh screen; 11a: Weft; 11b: Warp;
[0029] 2: Metal mesh plate; 21: Metal film; 21a: Metal opening Detailed Implementation
[0030] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described are intended to explain this utility model and should not be construed as limiting it.
[0031] The terms "an embodiment," "example," or "trademark" used in this specification refer to a particular feature, structure, or characteristic described in connection with the embodiment itself that may be included in at least one embodiment disclosed in this application. The phrase "in an embodiment" appearing in various places throughout the specification does not necessarily refer to the same embodiment.
[0032] The screen printing pattern area typically consists of a mesh and an organic film. The pattern of the metal grid lines is determined by the opening pattern on the organic film. Currently, there are two main types of organic films: photosensitive emulsion and PI film coated with an adhesive layer. For photosensitive emulsion, the pattern is created through exposure and development; for PI film coated with an adhesive layer, the pattern is created through laser film opening. During the printing process, the ink first passes through the mesh layer, then through the opening pattern on the organic film, ultimately forming the target pattern on the substrate. The total thickness of the screen is mainly determined by the thickness of the mesh layer, and the mesh layer does not shape the cross-sectional shape (line type) of the printing grid lines. At the grid line opening patterns, the mesh often has knots where the weft and warp threads intersect. These knots significantly obstruct the metal ink, resulting in less leakage. Consequently, after printing, the grid lines corresponding to these knots are lower in height and narrower in width, easily leading to problems such as broken grid lines and incomplete printing.
[0033] For solar cells, the shape of the electrode grid lines has a significant impact on power generation performance. For example, the grid line width affects the light-receiving area of the solar cell, and the cross-sectional area of the grid lines affects the internal resistance of the solar cell. Therefore, optimizing the shape of the electrode grid lines is an important way to improve the conversion efficiency of solar cells. In the past 10 years, the printing width of solar cell electrode grid lines has decreased from about 100 micrometers to below 20 micrometers, playing a crucial role in improving the conversion efficiency of solar cells. With the current printing line width already below 20 micrometers, further reducing the printing line width is significantly more difficult. When screen printing such fine grid lines, the influence of mesh knots will be more significant, further reducing the uniformity of the grid lines. If mesh knots are reduced by means of wire pulling, on the one hand, the mesh count will be reduced, resulting in a decrease in the support strength at the opening, which will also cause printing deformation and greatly reduce the lifespan of the mesh. Furthermore, wire pulling will increase labor costs.
[0034] As the first aspect of this application, a web version is disclosed, such as Figure 1As shown, the screen printing plate 1 includes a slurry coating layer 10 and a pattern film layer 12 stacked along the thickness direction. The slurry coating layer 10 has a plurality of initial openings 10a arranged along a set direction, with a gap 10b between adjacent initial openings. The pattern film layer 12 has at least one grid line opening formed on it. The length direction of the grid line opening is consistent with the set direction, such that there are a plurality of initial openings 10a at the grid line opening. The grid line opening includes a main opening 12b1 and at least one supplementary opening 12b2. The length direction of the main opening 12b1 is consistent with the length direction of the grid line opening. The supplementary opening 12b2 is disposed at the edge of the main opening 12b1 and communicates with the main opening 12b1. The gap between the supplementary opening 12b2 and the initial opening 10a corresponds. Preferably, the dimension of the supplementary opening 12b2 along the length direction of the grid line opening is larger than the dimension of the gap 10b along the length direction of the grid line opening. More preferably, the difference between the dimension of the supplementary opening 12b2 and the gap 10b in the length direction of the grid line opening is between 1 μm and 100 μm.
[0035] This application does not impose any special limitations on the slurry coating layer; in some instances, such as Figure 2 , Figure 3 and Figure 5 As shown, the sizing coating comprises multiple warp and weft threads, which intersect to define the initial opening and spacing. The warp threads and corresponding weft threads overlap at the intersections. The sizing coating can be a mesh; in other examples, such as... Figure 2 As shown, the slurry coating includes multiple long connecting lines and multiple short connecting lines. The long connecting lines are spaced apart along their width direction, and adjacent long connecting lines are connected by multiple short connecting lines. The short connecting lines are spaced apart along the length direction of the long connecting lines, so that adjacent short connecting lines and adjacent long connecting lines define an initial opening and a gap. The slurry coating can be a metal film.
[0036] As an optional implementation, the size of the supplementary opening along the width direction of the gate line opening is in the range of 1 μm to 100 μm, and the size of the supplementary opening along the length direction of the gate line opening is in the range of 1 μm to 100 μm.
[0037] In other embodiments, the present invention discloses a mesh screen 1a, such as... Figure 2As shown, the screen printing plate 1a includes a mesh and a patterned film layer stacked along the thickness direction. The mesh includes multiple weft threads 11a and multiple warp threads 11b arranged in a cross pattern. Multiple grid openings are formed on the patterned film layer. As an optional embodiment, the patterned film layer also includes a protective layer. The grid openings are located between adjacent protective layers, allowing the metal paste flowing from the mesh to exit through the grid openings. The cross structure of the mesh provides good mechanical strength and stability, effectively preventing deformation of the screen printing plate 1a due to uneven stress during use. The mesh structure supports the uniform distribution of the metal paste, ensuring the fluidity of the paste within the grid openings and improving the forming accuracy of the pattern. However, the knots in the cross structure can hinder the paste flow, leading to uneven grid morphology.
[0038] Based on this, the grid opening includes a main opening 12b1 and at least one supplementary opening 12b2. The length direction of the main opening 12b1 is consistent with the length direction of the grid opening, so that the shape and direction of the grid opening can accurately match the required grid morphology. This design helps the slurry flow more smoothly at the main opening 12b1, thereby ensuring the basic shape and uniformity of the grid and improving the quality of the final product.
[0039] The supplementary opening 12b2 is located at the edge of the main opening 12b1 and communicates with it, providing an additional channel for slurry flow. Especially when encountering knots at the grid openings, the supplementary opening 12b2 reduces slurry blockage at these locations, improving slurry distribution uniformity. The presence of the supplementary opening 12b2 also avoids obstruction of slurry flow by cross-connection points (knots), thereby improving the smoothness and consistency of the local grid morphology. The interconnected design of the main opening 12b1 and the supplementary opening 12b2 makes the overall slurry flow smoother. Because the supplementary opening 12b2 is distributed at the edge of the main opening 12b1 and optimized for knot locations, the slurry can bypass the knots and flow downwards through the supplementary opening 12b2, effectively reducing slurry accumulation or flow interruptions and ensuring uniform width of the grid openings globally.
[0040] The supplementary opening 12b2 makes the width of the grid openings in some locations larger than the width of the main opening 12b1. This local optimization design can significantly improve the flow behavior of the slurry at the cross-connection points. By increasing the width of the openings at these specific locations, the flow rate of the slurry is balanced when passing through the grid junction, and the resulting grid lines are more uniform in width and thickness, reducing problems such as "louvers" and "cloud patterns" in the grid lines that occur in traditional processes.
[0041] This application does not impose special restrictions on the location of the supplementary opening, as long as at least one parallel 11a and / or longitude 11b intersects the length direction of the grid opening at the grid line opening, and the supplementary opening corresponds to the parallel 11a or longitude that intersects the length direction of the grid line opening. For example, the supplementary opening can be as follows: Figure 2 The location distribution is shown. For example, in some embodiments, such as... Figure 3 and Figure 5 As shown, at least one intersection point of weft 11a and warp 11b exists at the opening of the grid line. The supplementary opening 12b2 corresponds to the intersection point at the grid line opening, which can specifically solve the obstruction problem caused by the intersection of weft 11a and warp 11b. This precise design avoids the accumulation and blockage of the ink at these key locations, allowing the ink to pass through more smoothly and improving the stability and consistency of the printing process.
[0042] For ease of understanding, Figure 4 This is a cross-sectional schematic diagram of the mesh screen 1a of this application, wherein the width of the grid line opening at the mesh knot is greater than the width of the grid line opening at the non-mesh knot.
[0043] When the main opening 12b1, the supplementary opening 12b2, and their connectivity are combined, an optimized paste flow path design is formed. This design significantly improves paste flow efficiency and reduces uneven flow caused by insufficient width of the mesh knots and grid openings. Simultaneously, it significantly enhances the reliability of the screen printing process on the mesh screen 1a, ensuring a more regular and uniform grid line shape and reducing the defect rate. Furthermore, this structural design is highly adaptable, allowing adjustments for different mesh specifications and graphic film layer requirements, thus possessing broader application potential.
[0044] This application does not impose special limitations on the number and location of the supplementary openings 12b2, as long as they serve to widen the grid opening. For example, one supplementary opening 12b2 can be provided on one side of the intersection point, or on both sides of the intersection point. Alternatively, a supplementary opening 12b2 can be provided at only one intersection point, or multiple supplementary openings 12b2 can be provided at multiple intersection points. Preferably, multiple latitude lines and / or multiple longitude lines intersect the length direction of the grid opening at the grid opening, with each supplementary opening corresponding to one of the latitude or longitude lines. Each intersection point that might obstruct slurry flow can be optimized using supplementary openings 12b2, ensuring smooth slurry flow at each intersection point and significantly reducing localized flow obstruction caused by dense grid distribution, thus ensuring consistent flow throughout the grid opening. The multiple supplementary openings 12b2 are spaced apart along the length direction of the grid opening, allowing for uniform slurry distribution throughout the grid opening. Even with long grid openings, this spacing design ensures balanced ink flow pressure along the length, preventing uneven ink distribution due to insufficient local openings. This one-to-one spacing of multiple supplementary openings 12b2 with each cross-connection point allows the screen printing plate 1a to better adapt to different types of mesh fabrics (where the density of weft 11a and warp 11b may vary) and graphic film structures. Whether the grid opening length increases or the density of mesh intersections changes, adaptation can be achieved by adjusting the number and spacing of the supplementary openings 12b2. Through the spacing of multiple supplementary openings 12b2, the ink receives additional channel optimization at each cross-connection point, thus avoiding flow rate instability caused by an unreasonable design of a single opening. This design improves the stability of the entire printing process and reduces the defect rate.
[0045] In some embodiments, such as Figure 2 , Figure 3 and Figure 5 As shown, the supplementary opening 12b2 includes two supplementary sub-openings, which are respectively disposed on both sides of the main opening 12b1 and are opposite to each other. This arrangement allows for a more symmetrical slurry flow area, resulting in more uniform and consistent grid lines.
[0046] This application does not impose any special limitations on the shape of the supplementary opening 12b2 or the supplementary sub-opening, as long as it satisfies the function of widening the grid opening. For example, the mesh knot is usually a cross-shaped blockage. In order to match the intersection connection point of the mesh knot, the supplementary opening 12b2 is selected to have an opening with a transition shape. For example, the shape of the supplementary sub-opening is at least one of the following: arc, triangle, rectangle or trapezoid. These opening shapes have an arc surface or a slope, and the opening gradually tightens at the farthest end.
[0047] To ensure the reasonable placement of the supplementary openings 12b2, the spacing between adjacent supplementary openings 12b2 should match the spacing between adjacent weft threads 11a or adjacent warp threads 11b of the mesh. Specifically, for example, when the length direction of the grid opening is consistent with the direction of the weft thread 11a, supplementary openings 12b2 will be set at the intersection of the warp thread 11b and the weft thread 11a. Supplementary openings 12b2 are not required between adjacent warp threads 11b. Therefore, the spacing between adjacent warp threads 11b corresponds to the spacing between adjacent supplementary openings 12b2. Generally, the spacing between the metal wires of the mesh is between 1μm and 100μm. Preferably, the spacing between adjacent supplementary openings 12b2 is between 1μm and 100μm.
[0048] The printing of the supplementary opening 12b2 affects the morphology of the grid lines. In order to make the morphology of the grid lines more uniform, the size of the supplementary opening 12b2 needs to match the size of the grid knot. Specifically, the width of the supplementary opening 12b2 matches the width of the cross connection point, and the length of the supplementary opening 12b2 matches the length of the cross connection point. Here, matching means that the length of the supplementary opening 12b2 needs to be greater than or equal to the size of the cross connection point along the length of the grid line opening. Preferably, the width of the supplementary opening 12b2 is in the range of 1μm to 100μm, and the length of the supplementary opening 12b2 is in the range of 1μm to 100μm.
[0049] As an optional implementation, multiple grating openings are arranged parallel to each other along the length of the meridian 11b and / or parallel 11a. For example, if some grating openings do not pass through the mesh, supplementary openings 12b2 can be provided in some of the grating openings, or supplementary openings 12b2 can be provided in all grating openings. The width of the main opening 12b1 is in the range of 1μm to 100μm. When supplementary openings 12b2 are added, the width of the main opening 12b1 can be made smaller without worrying about the blocking effect of the mesh causing problems such as grating breakage. The reduction in the width of the main opening 12b1 effectively reduces the light-occupying area of the grating lines, increases the light transmittance, and thus improves the photoelectric conversion efficiency of optoelectronic devices (such as solar cells, photodetectors, etc.). In particular, when the width of the main opening 12b1 is in a narrow range, the proportion of light blocked by the grating lines can be significantly reduced, allowing more light to be absorbed.
[0050] This application does not impose any special limitations on the tension angle of the mesh screen 1a, such as... Figure 2 , Figure 3 and Figure 5 As shown, the mesh can be stretched at 0°, 22.5°, or 45°. Preferably, the angle between the weft thread 11a and the warp thread 11b is in the range of 0° to 90°. The supplementary opening 12b2 can be applied to the mesh screen 1a with the above-mentioned stretching angle.
[0051] This application does not impose any special limitations on the material of the graphic film layer, as long as it can form grid openings. In order to further improve the strength and printing accuracy of the screen printing plate 1a, the material of the graphic film layer preferably includes one of organic film, metal film and inorganic film.
[0052] As an optional implementation, this application also discloses a metal mesh stencil, such as... Figure 2 As shown, the metal screen printing plate 2 includes a metal film 21 and a pattern film layer 12 stacked along the thickness direction. The metal film 21 includes a plurality of metal openings 21a spaced apart along a first direction. Compared with a mesh screen printing plate, the metal screen printing plate has a more uniform thickness and no thickness fluctuations at the intersections and overlaps, resulting in a smoother squeegee surface, more uniform ink leakage, and more uniform and stable grid line morphology during printing. At least one grid line opening is formed on the pattern film layer 12. The length direction of the grid line opening is consistent with the first direction, and the grid line opening corresponds to the plurality of metal openings 21a. The grid line opening includes a main opening and at least one supplementary opening. The length direction of the main opening is consistent with the length direction of the grid line opening, and the supplementary opening is located at the edge of the main opening and communicates with the main opening. The intervals between the supplementary openings and the metal openings correspond. The grid line morphology printed by the metal screen printing plate is more stable than that of the mesh screen printing plate, and the line width can be smaller, resulting in better uniformity. However, the metal screen still has a connection structure between the metal openings, which can cause some obstruction to the ink. Therefore, adding openings to the above-mentioned graphic film layer design can further optimize the printing morphology of the metal screen.
[0053] The above are merely specific embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Those skilled in the art should understand that this utility model includes, but is not limited to, the contents described in the accompanying drawings and the specific embodiments above. Any modifications that do not depart from the functional and structural principles of this utility model will be included within the scope of the claims.
Claims
1. A screen printing plate, said screen printing plate (1) comprising a slurry coating layer (10) and a pattern film layer (12) stacked along the thickness direction, characterized in that, The slurry coating layer has a plurality of initial openings (10a) arranged along a set direction, with a gap (10b) between adjacent initial openings. At least one grid line opening is formed on the patterned film layer. The length direction of the grid line opening is consistent with the set direction, such that there are a plurality of initial openings at the grid line opening. The grid line opening includes a main opening (12b1) and at least one supplementary opening (12b2). The length direction of the main opening (12b1) is consistent with the length direction of the grid line opening. The supplementary opening is disposed at the edge of the main opening and communicates with the main opening. The interval between the supplementary opening and the initial opening corresponds.
2. The screen printing plate according to claim 1, characterized in that, The dimension of the supplementary opening along the length direction of the gate line opening is greater than the dimension of the interval along the length direction of the gate line opening.
3. The screen printing plate according to claim 2, characterized in that, The difference between the size of the supplementary opening and the spacing along the length of the gate opening is between 1 μm and 100 μm.
4. The screen printing plate according to claim 3, characterized in that, The size of the supplementary opening along the width direction of the gate line opening is in the range of 1 μm to 100 μm, and the size of the supplementary opening along the length direction of the gate line opening is in the range of 1 μm to 100 μm.
5. The screen printing plate according to claim 1, characterized in that, The supplementary opening includes two supplementary sub-openings, which are respectively located on both sides of the main opening and are opposite to each other.
6. The screen printing plate according to claim 5, characterized in that, The shape of the supplementary sub-opening is at least one of the following: arc, triangle, rectangle, and trapezoid.
7. The screen printing plate according to claim 1, characterized in that, Multiple grid line openings are arranged parallel to each other along the predetermined direction.
8. The screen printing plate according to any one of claims 1 to 7, characterized in that, The width of the main opening is in the range of 1 μm to 100 μm.
9. The screen printing plate according to any one of claims 1 to 7, characterized in that, The slurry coating includes multiple warp and weft lines, which intersect to define the initial opening and the interval; the warp lines and corresponding weft lines overlap at the intersections; or The slurry coating includes multiple long connecting lines and multiple short connecting lines. The multiple long connecting lines are spaced apart along their width direction. Adjacent long connecting lines are connected by multiple short connecting lines. The multiple short connecting lines are spaced apart along the length direction of the long connecting lines, such that adjacent short connecting lines and adjacent long connecting lines define the initial opening and the interval.
10. The screen printing plate according to any one of claims 1 to 7, characterized in that, The material of the patterned film layer includes one of organic films, metal films, and inorganic films.