CZT detector test angle response measuring device

Abstract

The utility model discloses a CZT detector test angle response measuring device, which relates to the technical field of semiconductor testing and comprises a base, a fixing mechanism, a measuring cover, a driving mechanism and a plurality of radioactive sources. The fixing mechanism is installed on the base and used for fixing a to-be-tested piece. The measuring cover is hemispherical, is rotationally mounted on the base and is used for covering the fixing mechanism; a plurality of placing holes are formed in the measuring cover and are used for installing radioactive sources in a one-to-one correspondence manner; the driving mechanism is installed on the base, connected with the measuring cover and used for driving the measuring cover to rotate. By means of the design, testing at different angles is achieved, the testing efficiency is improved, and meanwhile comparison parameters of multiple angles can be measured through one device.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a CZT detector testing angle response measurement device. Background Technology

[0002] Existing testing techniques have limitations in providing comprehensive performance evaluation of semiconductor chips, especially CZT (cadmium zinc telluride) chips. CZT chips are a material widely used in nuclear radiation detectors, and accurate performance evaluation is crucial for ensuring the detector's high sensitivity and high resolution. However, traditional testing devices typically only allow measurements in one or two dimensions, failing to provide a comprehensive performance evaluation in three-dimensional space; for example, measuring chip characteristics by moving a probe only in the XY plane. This limitation makes it impossible to accurately evaluate the chip's performance in the Z-axis direction.

[0003] In summary, existing testing technologies cannot accurately evaluate the all-around performance of CZT chips in three-dimensional space, which limits in-depth understanding and optimization of chip performance. Therefore, it is particularly necessary to develop a three-dimensional angular response testing device capable of accurately measuring the CZT chip at any point in the X, Y, and Z directions. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a CZT detector test angle response measurement device, which can accurately measure the position of the CZT chip at any point in the X, Y, and Z directions.

[0005] To achieve the above technical objectives, this application provides a CZT detector test angle response measurement device, including a base, a fixing mechanism, a measuring cover, a driving mechanism, and several radiation sources;

[0006] The fixing mechanism is mounted on the base and is used to fix the test piece;

[0007] The measuring cover is hemispherical and rotatably mounted on the base to form a cover for the fixing mechanism;

[0008] The measuring cover is provided with several placement holes for installing the radiation source one by one;

[0009] The drive mechanism is mounted on the base and connected to the measuring cover, and is used to drive the measuring cover to rotate.

[0010] Furthermore, the fixing mechanism includes at least two clamping blocks and at least one clamping drive assembly;

[0011] At least two of the clamping blocks are circumferentially distributed, forming a clamping space between them to hold the workpiece to be tested;

[0012] At least one of the clamping blocks is connected to the clamping drive assembly to be able to move toward or away from the center of the clamping space.

[0013] Furthermore, the clamping drive assembly includes a guide rod, a fixing block, and a first elastic element;

[0014] The guide rod moves through the fixed block and is connected at one end to the clamping block;

[0015] The first elastic element is connected between the fixed block and the clamping block, and is used to provide an elastic force for the clamping block to move closer to the center of the clamping space.

[0016] Furthermore, the first elastic element is a compression spring, which is fitted onto the guide rod.

[0017] Furthermore, the base is provided with an annular groove surrounding the fixing mechanism;

[0018] The measuring cover has a flange on the bottom outside;

[0019] The flange can be engaged in the annular groove and rotate on the annular groove.

[0020] Furthermore, it also includes a pressure plate;

[0021] The pressure plate is mounted on the base and at least partially covers the annular groove to confine the flange within the annular groove;

[0022] The pressure plate is ring-shaped and is detachably connected to the base by several fasteners.

[0023] Furthermore, it also includes several pre-tightening components;

[0024] The pre-tightening components are installed on the pressure plate, with one end passing through the pressure plate and pressing against the flange.

[0025] Furthermore, the preload element is a damping preload adjuster.

[0026] Furthermore, the drive mechanism includes a drive motor and a transmission assembly;

[0027] The drive motor is mounted on the base, and the drive end is connected to the measuring cover through the transmission assembly to drive the measuring cover to rotate;

[0028] The transmission assembly includes a driving gear and a driven gear ring;

[0029] The driven gear ring is fixed to the bottom of the inner side of the measuring cover;

[0030] The drive gear is fixed to the drive end of the drive motor and meshes with the measuring cover.

[0031] Furthermore, several cushioning pads are installed on the bottom of the base.

[0032] As can be seen from the above technical solutions, the CZT detector test angle response measurement device designed in this application has the following beneficial effects:

[0033] 1. By rotating the measuring cover, response testing can be performed at every angle from 0° to 360° in the horizontal x-axis direction. Rotating to the x-axis simultaneously with the z-axis, the test can be conducted at the center point of the device under test (CZT chip), with each angle ranging from 15° to 90° from the top of the z-axis. This allows for testing of a different area along the x-axis, enabling comprehensive testing of the chip.

[0034] 2. By using a radiation source, test signals can be fed back from different angles to the test piece, and data results from different locations can be compared to determine whether there are differences in the test results obtained from different locations.

[0035] 3. The drive mechanism is used for drive control, making operation quick and convenient. Attached Figure Description

[0036] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0037] Figure 1 This is a perspective view of a CZT detector testing angle response measuring device provided in this application;

[0038] Figure 2 This is a front view of a CZT detector testing angle response measuring device provided in this application;

[0039] In the diagram: 1. Base; 11. Buffer pad; 2. Measuring cover; 21. Placement hole; 3. Fixing mechanism; 4. Pressure plate; 41. Fastener; 42. Pre-tightening component; 5. Drive mechanism. Detailed Implementation

[0040] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0041] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0042] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0043] This application discloses a CZT detector testing angle response measurement device.

[0044] Please see Figure 1 One embodiment of a CZT detector testing angle response measurement device provided in this application includes:

[0045] The system includes a base 1, a fixing mechanism 3, a measuring cover 2, a driving mechanism 5, and several radiation sources (not shown in the figure).

[0046] The fixing mechanism 3 is installed on the base 1 and is used to fix the test piece.

[0047] The measuring cover 2 is hemispherical and rotatably mounted on the base 1, forming a cover for the fixing mechanism 3. Through the carefully designed rotating measuring cover 2, precise testing at any angle from 0 to 360 degrees in the horizontal x-axis direction can be easily achieved. When the measuring cover 2 is rotated to the x-axis position, the center point of the device under test (e.g., a CZT chip) can be located simultaneously on the z-axis using precise positioning technology. From the top position of the z-axis at 15 to 90 degrees, each angle can form a specific angular region with the x-axis, allowing for testing of different areas. This design enables comprehensive, thorough testing of the chip, ensuring the comprehensiveness and accuracy of the test results.

[0048] The measuring shroud 2 has several mounting holes 21 for mounting radiation sources. The number and location of the mounting holes 21 can be designed according to actual needs and are not limited. Using the radiation source, precise test signal feedback can be obtained from the test piece at different angles. In this way, we can collect data results from different locations and perform comparative analysis. This testing method helps to determine whether there are significant differences in the results measured at different locations, thereby evaluating the performance consistency of the test piece in various directions.

[0049] The drive mechanism 5 is mounted on the base 1 and connected to the measuring cover 2, and is used to drive the measuring cover 2 to rotate. Using the drive mechanism 5 for drive control makes the operation process quick and convenient. The entire test process can be easily controlled through simple operation without complicated settings or adjustments, which greatly improves work efficiency and test convenience.

[0050] In summary, the measuring device designed in this application improves the efficiency of testing at different angles, and also enables a single device to measure comparative parameters at multiple angles.

[0051] The above is Embodiment 1 of a CZT detector testing angle response measuring device provided in this application. The following is Embodiment 2 of a CZT detector testing angle response measuring device provided in this application. Please refer to the following for details. Figures 1 to 2 .

[0052] Based on the solution of Embodiment 1 above:

[0053] Furthermore, the fixing mechanism 3 includes at least two clamping blocks and at least one clamping drive assembly; the at least two clamping blocks are circumferentially distributed, forming a clamping space for clamping the workpiece to be tested; at least one clamping block is connected to the clamping drive assembly so as to move closer to or further away from the center of the clamping space. A fixed base can also be added, which is detachably mounted on the base 1, and the clamping blocks and clamping drive assembly are mounted on the fixed base.

[0054] The clamping drive assembly is designed to allow the clamping blocks to be flexibly positioned to accommodate test pieces of different sizes and shapes. This design not only improves testing accuracy but also enhances the versatility and applicability of the measuring device.

[0055] Through the above design, it is possible to manually disassemble and replace test pieces of different sizes and specifications. The overall randomness and variability are strong, which meets the constraints for different chip sizes and test source specifications, thereby ensuring the high compatibility of this device.

[0056] Furthermore, the clamping drive assembly includes a guide rod, a fixed block, and a first elastic element; the guide rod moves through the fixed block and is connected at one end to the clamping block; the first elastic element is connected between the fixed block and the clamping block to provide an elastic force for the clamping block to move toward the center of the clamping space.

[0057] The design of the first elastic element allows the clamping block to maintain a stable clamping force when holding the workpiece under test. Simultaneously, when it is necessary to remove the workpiece, the clamping block can be easily released, facilitating operation. Furthermore, the first elastic element also acts as a buffer, protecting the workpiece from damage during the clamping process.

[0058] Furthermore, the first elastic element is a compression spring, which is fitted onto the guide rod.

[0059] The use of compression springs not only ensures the stability of the clamping blocks during the clamping process but also allows the clamping force to be adjusted as needed. By changing the spring force, it is possible to achieve stable clamping of test pieces of different sizes and weights, further improving the adaptability and flexibility of the measuring device. At the same time, the packaged design of the compression springs simplifies the structure, making the entire clamping drive assembly more compact and easier to install and maintain.

[0060] Furthermore, the base 1 is provided with an annular groove surrounding the fixing mechanism 3; the bottom of the measuring cover 2 is provided with a flange; the flange can be inserted into the annular groove and rotate on the annular groove.

[0061] The design of the annular groove and the flange ensures the stability and accuracy of the measuring cover 2 during rotation. By engaging the flange with the annular groove, a reliable connection is achieved between the measuring cover 2 and the base 1, preventing shaking or displacement during testing and thus guaranteeing the accuracy of the test results.

[0062] Furthermore, a pressure plate 4 is also included; the pressure plate 4 is mounted on the base 1 and forms at least partial coverage of the annular groove to confine the flange within the annular groove; the pressure plate 4 is annular and is detachably connected to the base 1 by a number of fasteners 41 (the fasteners 41 can be four, specifically screws / bolts, etc., without limitation).

[0063] The design of the pressure plate 4 not only enhances the connection stability between the measuring cover 2 and the base 1, but also facilitates user operation and maintenance. Through its detachable connection, users can easily remove the pressure plate 4 to clean, inspect, or replace the measuring cover 2 or the annular groove, improving the maintainability and service life of the measuring device. Simultaneously, the annular design of the pressure plate 4 ensures uniform coverage of the annular groove, provides better restraint on the flange, and enhances the overall aesthetics.

[0064] Furthermore, since the drive mechanism 5 generates a vibration frequency during operation, it will cause the measuring cover 2 to vibrate, thereby causing the radiation source to fall off. To solve this problem, this application also designs a number of pre-tightening parts 42 (the number can be four, and there is no specific limitation). The number of pre-tightening parts 42 are installed on the pressure plate 4, and one end passes through the pressure plate 4 and can press against the flange with a certain clamping force.

[0065] The design of the pre-tightening component 42 effectively absorbs the vibration energy generated during the operation of the drive mechanism 5, reducing the vibration amplitude of the measuring cover 2 and thus significantly lowering the risk of radiation source detachment. By adjusting the clamping force of the pre-tightening component 42, a more stable clamping of the flange can be achieved, further enhancing the connection strength between the measuring cover 2 and the base 1, while ensuring that the measuring cover 2 can rotate normally. Furthermore, the adjustability of the pre-tightening component 42 allows users to fine-tune the measuring device according to actual conditions, ensuring it always remains in optimal working condition. This design not only improves the stability and safety of the measuring device but also provides users with a more convenient and efficient operating experience.

[0066] Furthermore, the preload element 42 is a damping preload adjuster. Specifically, the damping preload adjuster may include a threaded element and a second elastic element. The threaded element passes through the pressure plate 4 and is threadedly connected to the pressure plate 4. The distance at which one end of the threaded element passes through the pressure plate 4 can be adjusted by rotating the threaded element. The second elastic element is connected to the end of the threaded element that passes through the pressure plate 4 and can contact the flange. The second elastic element may be a structure with certain elastic properties, and there are no restrictions. In order to reduce the contact friction with the flange, the end of the second elastic element that contacts the flange may be spherical or equipped with ball bearings, and there are no specific restrictions.

[0067] Furthermore, the drive mechanism 5 includes a drive motor and a transmission assembly; the drive motor is mounted on the base 1, and the drive end is connected to the measuring cover 2 through the transmission assembly to drive the measuring cover 2 to rotate; the transmission assembly includes a drive gear and a driven gear ring; the driven gear ring is fixed to the bottom of the inner side of the measuring cover 2; the drive gear is fixed to the drive end of the drive motor and meshes with the measuring cover 2.

[0068] The precise control of the measuring chamber 2 is achieved through the coordinated use of the drive motor and transmission components. The drive motor provides power, which is transmitted to the measuring chamber 2 via the meshing of the driving gear and the driven gear ring, causing it to rotate smoothly and accurately. This transmission method is not only simple and compact in structure, but also highly efficient, ensuring the stability and reliability of the measuring chamber 2 during testing. Furthermore, due to the use of gear transmission, it also has a self-locking function. When the drive motor stops working, the measuring chamber 2 remains in its current position, preventing accidental rotation due to external forces, further enhancing the safety of the measuring device.

[0069] Furthermore, several cushioning pads 11 are installed on the bottom of the base 1.

[0070] The design of the buffer pads 11 not only improves the stability of the measuring device during placement but also reduces the impact of external vibrations on the measurement process, further ensuring the accuracy of the test results. The buffer pads 11 are typically made of soft and elastic materials, such as rubber or silicone, which effectively absorb and disperse vibration energy, thus protecting the measuring device from damage. Simultaneously, the buffer pads 11 also increase the friction between the measuring device and the placement surface, preventing slippage or displacement during testing and improving the safety and reliability of the test.

[0071] The usage process of the CZT detector test angle response measurement device designed in this application is as follows:

[0072] 1. Place the zinc cadmium telluride chip (test piece) in the center position (this position coincides with the center of the measuring cover after placement) and fix it with the fixing mechanism 3. Then place the measuring cover 2 into the annular groove of the base 1 to prevent it from shifting to the left or right and being out of center. Then place the pressure plate 4 in and fix it with 4 fasteners 41 (screws) to limit the movement and prevent it from shaking up, down, left or right.

[0073] 2. The center of the hemispherical measuring cover 2 is taken as the origin of the coordinate system and marked as point O. The XYO coordinate plane is defined as the rotation reference plane of the measuring cover 2, and this plane is precisely marked with angle scales from 0° to 360°. Assuming that a placement hole 21 is opened at a position where the measuring cover 2 is collinear with the X-axis coordinate system, then using this placement hole 21 as the first opening point, along the Z-axis direction, a placement hole 21 is opened every 15° (this angle is the angle between the line connecting point O and the center point of the placement hole 21 on the measuring cover 2 and the XYO coordinate plane) until the vertex position where the measuring cover 2 is collinear with the Z-axis.

[0074] During measurement, a placement hole 21 at an angle in the Z-axis direction (e.g., a 15° placement hole) is selected to place the radiation source. When the measurement system is stationary, the indicator value of the measuring device automatically returns to zero on the scale, which serves as the initial reference for the measurement. During the measurement process, the measuring cover 2 first rotates around the XYO rotation reference plane; each rotation angle increment is 15° (e.g., next time a 30° placement hole 21 is selected to place the radiation source), until the cumulative rotation angle reaches 90°, completing one full rotation cycle.

[0075] By emitting rays from a radiation source and combining the different angles of the measuring hood on the XYO rotation plane and the different angular positions on the Z-axis space, the performance parameters at different points are accurately measured and compared, thereby comprehensively evaluating the performance of the measured object under different spatial positions and angles.

[0076] 3. During the process, the pre-tightening component 42 is used to apply pre-pressure to the pressure plate 4, while the rotation speed of the drive motor of the drive mechanism 5 is reduced, so as to achieve the purpose of smooth rotation of the measuring cover 2.

[0077] After the test is completed, the motor system of the starting mechanism can be calibrated to ensure that the test always starts from the starting point.

[0078] The above provides a detailed description of a CZT detector testing angle response measuring device provided in this application. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A CZT detector testing angle response measurement device, characterized in that, It includes a base (1), a fixing mechanism (3), a measuring cover (2), a driving mechanism (5), and several radiation sources; The fixing mechanism (3) is installed on the base (1) and is used to fix the test piece; The measuring cover (2) is hemispherical and is rotatably mounted on the base (1) to form a cover for the fixing mechanism (3); The measuring cover (2) is provided with several placement holes (21) for installing the radiation source one by one; The drive mechanism (5) is mounted on the base (1) and connected to the measuring cover (2) to drive the measuring cover (2) to rotate.

2. The CZT detector test angle response measurement device according to claim 1, characterized in that, The fixing mechanism (3) includes at least two clamping blocks and at least one clamping drive assembly; At least two of the clamping blocks are circumferentially distributed, forming a clamping space between them to hold the object to be tested; At least one of the clamping blocks is connected to the clamping drive assembly to be able to move toward or away from the center of the clamping space.

3. The CZT detector test angle response measuring device according to claim 2, characterized in that, The clamping drive assembly includes a guide rod, a fixing block, and a first elastic element; The guide rod moves through the fixed block and is connected at one end to the clamping block; The first elastic element is connected between the fixed block and the clamping block, and is used to provide an elastic force for the clamping block to move closer to the center of the clamping space.

4. The CZT detector test angle response measuring device according to claim 3, characterized in that, The first elastic element is a compression spring, which is fitted onto the guide rod.

5. The CZT detector test angle response measuring device according to claim 1, characterized in that, The base (1) is provided with an annular groove surrounding the fixing mechanism (3); The measuring cover (2) has a flange on the bottom outside; The flange can be engaged in the annular groove and rotate on the annular groove.

6. The CZT detector test angle response measuring device according to claim 5, characterized in that, Also includes a pressure plate (4); The pressure plate (4) is mounted on the base (1) to at least partially cover the annular groove, thereby confining the flange within the annular groove; The pressure plate (4) is annular and is detachably connected to the base (1) by a number of fasteners (41).

7. The CZT detector test angle response measuring device according to claim 6, characterized in that, It also includes several pre-tensioning components (42); The pre-tightening components (42) are installed on the pressure plate (4), and one end passes through the pressure plate (4) and can press against the flange.

8. The CZT detector test angle response measuring device according to claim 7, characterized in that, The preload component (42) is a damping preload adjuster.

9. The CZT detector test angle response measuring device according to claim 1, characterized in that, The drive mechanism (5) includes a drive motor and a transmission assembly; The drive motor is mounted on the base (1), and the drive end is connected to the measuring cover (2) through the transmission assembly, for driving the measuring cover (2) to rotate; The transmission assembly includes a driving gear and a driven gear ring; The driven gear ring is fixed to the bottom of the inner side of the measuring cover (2); The drive gear is fixed to the drive end of the drive motor and meshes with the measuring cover (2).

10. The CZT detector test angle response measuring device according to claim 1, characterized in that, The bottom of the base (1) is equipped with several cushioning pads (11).

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