Tool and assembly equipment

Abstract

The utility model provides a tool and an assembly device, the tool is used for installing a bushing, the tool comprises a main body, the main body comprises a first boss and a second boss which are adjacently connected, the inner side surface of the first boss and the inner side surface of the second boss are enclosed to form a through hole, and the first boss is higher than the second boss; when the lining is assembled, the lining is moved towards the direction of the first boss till the lining abuts against the inner side face of the first boss, and then the lining is moved downwards and penetrates through the through hole along the inner side face of the second boss till the lining enters the cavity. The first boss and the second boss are arranged so that the lining can abut against the inner side face of the first boss to guarantee the levelness between the lining and the cavity, then the lining can abut against the inner side face of the second boss to guarantee the concentricity of the lining and the cavity, finally, the lining penetrates through the through hole to fall into the cavity, the lining can move more smoothly, and the service life of the lining is prolonged. The installation precision and the installation efficiency are improved, meanwhile, the problem that the lining is stuck in the cavity during assembly is avoided, and the risk that the lining is damaged is reduced.

Description

Technical Field

[0001] This utility model relates to the field of mechanical assembly, and in particular to a tooling and assembly equipment. Background Technology

[0002] Semiconductor deposition technology is a key technology for forming thin films with specific functions on wafer surfaces. This process is typically carried out in a vacuum environment, using physical or chemical methods to deposit metals, non-metals, or other compound materials onto the wafer surface in vapor phase, forming a dense thin film. To ensure the stable operation of the thin film deposition equipment and improve its process performance, a bushing is installed inside the reaction chamber of the equipment. The bushing has a certain influence on the uniformity, stability, and purity of the thin film deposition. However, when installing the bushing into the reaction chamber, because the bushing's size is often very close to the inner diameter of the chamber, jamming can easily occur. Since there are other hardware components inside the reaction chamber, the operating space is limited during installation. If jamming occurs, it will be difficult to remove the bushing intact, and it may even damage the bushing. Utility Model Content

[0003] The present invention provides a tooling and assembly equipment to improve the installation accuracy and efficiency of installing the bushing into the cavity, reduce the risk of the bushing getting stuck in the cavity, and avoid damaging the bushing.

[0004] This utility model provides a tooling, which includes:

[0005] The main body includes a first protrusion and a second protrusion connected adjacent to each other. The inner side surfaces of the first protrusion and the second protrusion form a through hole, and the first protrusion is higher than the second protrusion.

[0006] When assembling the bushing, the bushing is moved toward the first boss until it abuts against the inner side of the first boss, and then the bushing is moved downward and passes through the through hole along the inner side of the second boss until it enters the cavity.

[0007] In the tooling provided by this utility model, the diameter of the through hole is consistent with the diameter of the cavity.

[0008] In the tooling provided by this utility model, the bottom length of the inner side of the first boss is less than half the circumference of the through hole.

[0009] In the tooling provided by this utility model, the tooling further includes a limiting block, which is connected to the outer side of the main body, and the bottom end of the limiting block protrudes outward from the bottom end of the main body for abutting against the cavity.

[0010] In the tooling provided by this utility model, there are multiple limiting blocks, and the multiple limiting blocks are respectively located at intervals on both sides of the main body.

[0011] In the tooling provided by this utility model, all of the plurality of limiting blocks are connected to the side of the first boss.

[0012] In the tooling provided by this utility model, the limiting block includes a fixed limiting block and a detachable limiting block. The fixed limiting block and the detachable limiting block are located on different sides. The fixed limiting block is fixedly connected to the main body, and the detachable limiting block is detachably connected to the main body.

[0013] In the tooling provided by this utility model, threaded holes are provided on both sides of the main body that are opposite to each other, and the detachable limiting block is locked to the threaded hole on one side by a screw.

[0014] In the tooling provided by this utility model, there are two fixed limiting blocks, and the two fixed limiting blocks are respectively located at both ends of the same side of the main body.

[0015] This utility model also provides an assembly device, which includes:

[0016] Tooling, wherein the tooling is any of the tooling described above;

[0017] A thin film deposition apparatus includes a cavity, wherein a reaction chamber is provided within the cavity;

[0018] When assembling the bushing into the reaction chamber, the tooling is assembled above the chamber, and the through hole is correspondingly set with the opening of the reaction chamber.

[0019] This application, by setting a first boss and a second boss, ensures that the bushing first abuts against the inner side of the first boss to guarantee the horizontal state between the bushing and the cavity, and then abuts against the inner side of the second boss to ensure the concentricity of the bushing and the cavity. Finally, the bushing passes through the through hole and falls into the cavity, improving installation accuracy, making the movement of the bushing smoother, improving installation efficiency, and avoiding the problem of the bushing getting stuck in the cavity during assembly, thus reducing the risk of bushing damage. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a structural diagram of the tooling in an embodiment of the present utility model;

[0022] Figure 2 This is a top view of the tooling in an embodiment of the present utility model;

[0023] Figure 3 This is a rear view of the tooling in an embodiment of the present utility model;

[0024] Figure 4 This is a side view of the tooling in an embodiment of the present utility model;

[0025] Figure 5 This is another side view of the tooling in an embodiment of this utility model.

[0026] The labels for the attached figures are as follows:

[0027] 1. Tooling; 11. Main body; 111. First boss; 112. Second boss; 113. Through hole; 114. Threaded hole; 12. Limiting block; 121. Fixed limiting block; 122. Removable limiting block; 13. Screw. Detailed Implementation

[0028] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The preferred embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0029] Reference Figures 1 to 5 As shown, this invention illustrates an embodiment of the tooling 1 and assembly equipment. The tooling 1 is used to install a bushing and includes a main body 11. The main body 11 includes a first boss 111 and a second boss 112 connected adjacent to each other. The inner side surfaces of the first boss 111 and the second boss 112 form a through hole 113, and the first boss 111 is higher than the second boss 112. When assembling the bushing, the bushing is moved towards the first boss 111 until it abuts against the inner side surface of the first boss 111, and then the bushing is moved downward and passes through the through hole 113 along the inner side surface of the second boss 112 until it enters the cavity.

[0030] Specifically, bushings play a crucial role in semiconductor manufacturing equipment, particularly in thin film deposition equipment. Bushings are installed inside the reaction chamber within the equipment's cavity to improve the uniformity, stability, and purity of the deposited thin film on the wafer surface. Simultaneously, bushings extend the cavity's lifespan and prevent damage from corrosive gases, high temperatures, and byproducts. As consumable and independently mounted components, bushings can be easily replaced during maintenance to extend the equipment's lifespan. Replacement is simple, and the cost of the bushing is lower than the cost of the entire cavity, thus reducing maintenance costs. However, when maintaining or assembling the bushing into the cavity, direct installation can easily lead to the bushing getting stuck inside the cavity, complicating the assembly process and potentially damaging the bushing.

[0031] Therefore, the tooling 1 of this application is used to install a bushing, thereby assisting in the installation of the bushing into the cavity. The tooling 1 includes a main body 11, which includes a first boss 111 and a second boss 112. The first boss 111 and the second boss 112 are adjacent and connected, and the inner side surfaces of the first boss 111 and the second boss 112 are both arc surfaces. The inner side surfaces of the first boss 111 and the second boss 112 form a through hole 113, which penetrates the upper and lower sides of the main body 11 for the bushing to pass through and enter the cavity. The height of the first boss 111 is higher than the height of the second boss 112. Therefore, the inner side surface of the first boss 111 is located above the through hole 113, so that the inner side surface of the first boss 111 first abuts against the bushing.

[0032] When assembling the bushing into the cavity, first place the tooling 1 above the cavity, then move the bushing towards the first boss 111 until the bushing abuts against the inner side of the first boss 111, so that the sidewall of the bushing fits tightly against the inner side of the first boss 111. At this time, ensure that the bushing remains horizontal with the cavity when falling. Then move the bushing towards the through hole 113, that is, move the bushing downwards until the bushing abuts against the inner side of the second boss 112. The sidewall of the bushing fits tightly against the inner side of the second boss 112, so that the bushing passes through the through hole 113 along the inner side of the second boss 112 and moves into the cavity. This ensures that the center of the bushing is aligned with the center of the cavity, making the assembly of the bushing into the cavity smoother and avoiding the phenomenon of the bushing getting stuck in the cavity due to improper placement. This improves assembly accuracy and efficiency, and also reduces the wear of the bushing.

[0033] This application, by setting the first boss 111 and the second boss 112, ensures that the bushing first abuts against the inner side of the first boss 111 to guarantee the horizontal state between the bushing and the cavity, and then abuts against the inner side of the second boss 112 to ensure the concentricity of the bushing and the cavity. Finally, the bushing passes through the through hole 113 and falls into the cavity, improving installation accuracy, making the movement of the bushing smoother, improving installation efficiency, and avoiding the problem of the bushing getting stuck in the cavity during assembly, thus reducing the risk of bushing damage.

[0034] In one embodiment, the diameter of the through hole 113 is the same as the diameter of the cavity (not shown in the figure). Specifically, the cavity refers to the equipment that needs to house the bushing, and in this embodiment, it specifically refers to the cavity of a thin film deposition equipment; the through hole 113 connects the upper and lower ends of the main body 11, and the through hole 113 is formed by the inner side of the first boss 111 and the inner side of the second boss 112. Therefore, when the diameter of the through hole 113 is the same as the diameter of the cavity, when the bushing falls from top to bottom into the cavity, the bushing first abuts against the first boss 111 to ensure that the bushing is horizontal with the cavity, and the bushing falls to abut against the second boss 112 and continues to fall. During the process, since the diameter of the through hole 113 is consistent with the diameter of the cavity, the bushing and the cavity are concentric, allowing the bushing to pass more smoothly through the through hole 113 and then through the cavity opening into the interior space of the cavity. The cavity opening is used to avoid other structural components so that other structural components can be installed inside the cavity. The cavity diameter refers to the diameter of the cavity opening. The cavity opening communicates with the through hole 113, and the through hole 113 is located directly above the cavity opening. Therefore, the assembly efficiency of the bushing can be improved and the risk of jamming can be reduced.

[0035] In a specific embodiment, refer to Figures 1 to 2As shown, the bottom length of the inner side of the first boss 111 is less than half the circumference of the through hole 113. Specifically, the through hole 113 is formed by the inner side of the first boss 111 and the inner side of the second boss 112. Both the inner side of the first boss 111 and the inner side of the second boss 112 are arc surfaces, and the bottom length of the inner side of the first boss 111 is less than half the circumference of the through hole 113. That is, the circumference of the inner side of the first boss 111 is less than the circumference of the inner side of the second boss 112. This facilitates the movement of the bushing toward the inner side of the first boss 111, so that the sidewall of the bushing fits more closely to the inner side of the first boss 111, improving the stability of the horizontal state of the bushing and the cavity, and improving assembly efficiency. At the same time, since the extension length of the first boss 111 is less than half the circumference of the through hole 113, the area of ​​the first boss 111 is less than half the area of ​​the main body 11. This ensures the horizontal limiting function of the first boss 111 on the bushing while also reducing production costs.

[0036] More specifically, the first boss 111 and the second boss 112 are arranged adjacent to each other. Therefore, the inner side surface of the first boss 111 and the inner side surface of the second boss 112 are arranged adjacent to each other. The bottom length of the inner side surface of the first boss 111 is less than half the circumference of the through hole 113. Therefore, the bottom length of the inner side surface of the first boss 111 is less than the bottom length of the inner side surface of the second boss 112. That is, the circumferential extension length of the second boss 112 along the through hole 113 is greater than the circumferential extension length of the first boss 111 along the through hole 113. This ensures the horizontal state of the bushing and the cavity, while also increasing the contact area between the side wall of the bushing and the inner side surface of the second boss 112. This ensures a tight fit between the bushing and the second boss 112, thereby improving the concentricity accuracy of the bushing and the cavity. This improves the installation accuracy and efficiency of the tooling 1 in assisting the installation of the bushing, and further reduces the risk of the bushing getting stuck inside the cavity.

[0037] In one embodiment, reference is made to Figures 1 to 5As shown, the tooling 1 also includes a limiting block 12, which is connected to the outside of the main body 11. The bottom end of the limiting block 12 protrudes from the bottom end of the main body 11 and is used to abut against the cavity. Specifically, the tooling 1 is assembled above the cavity during use, allowing the bushing to be assembled into the cavity from top to bottom. To ensure that the tooling 1 can be accurately assembled above the cavity and that the through hole 113 is aligned with the mounting hole of the cavity, the tooling 1 also includes a limiting block 12. The limiting block 12 is used to limit the position of the tooling 1. The limiting block 12 is connected to the outer side of the main body 11, and the limiting block 12 extends vertically downward from the end connected to the main body 11, so that the bottom end of the limiting block 12 protrudes outward from the bottom end of the main body 11, thereby allowing the bottom end of the limiting block 12 to abut against the outer wall of the cavity. This allows the main body 11 to be accurately assembled above the cavity, improving the efficiency and accuracy of the tooling 1 during assembly; at the same time, it reduces the shaking of the main body 11 when assisting in the assembly of the bushing, improving installation accuracy and efficiency.

[0038] In a specific embodiment, refer to Figures 1 to 5 As shown, multiple limiting blocks 12 are provided, and the multiple limiting blocks 12 are respectively spaced apart on adjacent sides of the main body 11. Specifically, multiple limiting blocks 12 are provided, and the multiple limiting blocks 12 cooperate to limit the main body 11 above the cavity. The multiple limiting blocks 12 are respectively spaced apart on adjacent sides of the main body 11, that is, the multiple limiting blocks 12 are respectively spaced apart on the front and left side of the main body 11, or the multiple limiting blocks 12 are respectively spaced apart on the front and right side of the main body 11, or the multiple limiting blocks 12 are respectively spaced apart on the rear and left side of the main body 11, or the multiple limiting blocks 12 are respectively spaced apart on the rear and right side of the main body 11, which can be determined according to actual needs. The settings are not limited here; thereby limiting the adjacent sides of the main body 11 according to the positions of the multiple limiting blocks 12, further avoiding instability when the main body 11 is assembled in the cavity, so as to prevent the main body 11 from shaking when assembling the bushing, which would cause the bushing and the cavity to not maintain a horizontal state or be out of concentricity, and thus the bushing would get stuck in the cavity during installation, causing wear of the bushing; at the same time, the multiple limiting blocks 12 can also further accurately position the placement of the main body 11, improving operation efficiency.

[0039] In one embodiment, reference is made to Figures 1 to 5As shown, the plurality of limiting blocks 12 are all connected to the side of the first protrusion 111. Specifically, the first protrusion 111 is provided to protrude upward from the top of the main body 11, thus the first protrusion 111 has a certain height. The plurality of limiting blocks 12 are all connected to the side of the first protrusion 111. Since the limiting block 12 extends downward from the end connected to the first protrusion 111, the bottom end of the limiting block 12 protrudes outward from the bottom end of the main body 11, thereby increasing the connection area between the limiting block 12 and the first protrusion 111, thereby improving the fixation and stability of the connection between the limiting block 12 and the main body 11, so that the assembly of the main body 11 and the cavity is more stable and precise.

[0040] In a specific embodiment, refer to Figures 1 to 5 As shown, the limiting block 12 includes a fixed limiting block 121 and a detachable limiting block 122. The fixed limiting block 121 and the detachable limiting block 122 are located on different sides. The fixed limiting block 121 is fixedly connected to the main body 11, and the detachable limiting block 122 is detachably connected to the main body 11. Specifically, the limiting block 12 includes a fixed limiting block 121 and a detachable limiting block 122. The fixed limiting block 121 is fixedly connected to the main body 11 and cannot be disassembled. The connection between the fixed limiting block 121 and the main body 11 is fixed. The detachable limiting block 122 is detachably connected to the main body 11, allowing the connection position of the detachable limiting block 122 with the main body 11 to be changed according to actual needs. Furthermore, the detachable limiting block 122 and the fixed limiting block 121 are located on different sides of the main body 11. On both sides, the fixed limiting block 121 and the detachable limiting block 122 are located on adjacent sides. Therefore, the fixed limiting block 121 and the detachable limiting block 122 together limit the position of the main body 11, preventing the main body 11 from shaking or deviating from its position. At the same time, the user can adjust the position of the detachable limiting block 122 according to the different installation positions of the bushings of the cavity, so that the tooling 1 can adapt to different bushing installation positions, which facilitates the flexible use of the tooling 1, improves the practicality of the tooling 1, reduces costs and improves installation efficiency.

[0041] For example, in a thin film deposition apparatus, the cavity includes two reaction chambers, a left chamber and a right chamber, respectively located on the left and right sides of the cavity. When the bushing is installed in the left chamber of the cavity, the tooling 1 needs to be installed on the left side of the cavity. In this case, the detachable limiting block 122 can be installed on the left side of the main body 11, so that the detachable limiting block 122 and the fixed limiting block 121 together limit the main body 11 to the upper left side of the cavity. When the bushing is installed in the right chamber of the cavity, the... The tooling 1 needs to be installed on the right side of the cavity. At this time, the detachable limiting block 122 can be installed on the right side of the main body 11 so that the detachable limiting block 122 and the fixed limiting block 121 together limit the main body 11 to the upper right side of the cavity. This allows the main body 11 to be accurately positioned using only one detachable limiting block 122 and one fixed limiting block 121, reducing costs. At the same time, there is no need to replace different tooling 1s. The bushings can be installed on the two reaction chambers simply by adjusting the position of the detachable limiting block 122, thereby improving installation efficiency.

[0042] In one embodiment, reference is made to Figures 4 to 5 As shown, threaded holes 114 are provided on both sides of the main body 11, and the detachable limiting block 122 is locked to one of the threaded holes 114 by screws 13. Specifically, the detachable limiting block 122 is detachably connected to the main body 11. In this embodiment, the detachable limiting block 122 and the main body 11 are detachably connected by screws 13. The main body 11 has threaded holes 114 on both sides, that is, threaded holes 114 are provided on both sides adjacent to the main body 11 and the fixed limiting block 121. According to usage requirements, the detachable limiting block 122 can be locked to one of the threaded holes 114 by screws 13, so that the detachable limiting block 122 and the fixed limiting block 121 together secure the main body 11. Positioned on the cavity, the stability of the main body 11 installed on the cavity is improved; the connection between the detachable limiting block 122 and the main body 11 is simple. As needed, the detachable limiting block 122 can be connected to the main body 11 by locking the screw 13 to the threaded hole 114. When it is necessary to change the installation position of the bushing, simply unscrew the screw 13 and then lock the detachable limiting block 122 to the threaded hole 114 on the other side of the main body 11. The method of installing and removing the detachable limiting block 122 and the main body 11 is simple, improves work efficiency, and has low cost.

[0043] In a specific embodiment, refer to Figures 1 to 3As shown, two fixed limiting blocks 121 are provided, and the two fixed limiting blocks 121 are respectively located at both ends of the same side of the main body 11. Specifically, two fixed limiting blocks 121 are provided, and the two fixed limiting blocks 121 are spaced apart along the length direction of the main body 11. The two fixed limiting blocks 121 are respectively located at both ends of the same side of the main body 11, that is, the two fixed limiting blocks 121 are located on the same side of the main body 11, and the positions of the two fixed limiting blocks 121 near the adjacent sides of the main body 11 are designed near the corners of the main body 11, thereby improving the stability of the positioning of the main body 11 by the fixed limiting blocks 121 and the detachable limiting blocks 122, and further avoiding the shaking phenomenon caused by the instability of one side of the main body 11.

[0044] In one embodiment, the fixing limiting block 121 and the main body 11 are an integral structure. Specifically, the fixing limiting block 121 and the main body 11 are fixedly connected. Designing the fixing limiting block 121 and the main body 11 as an integrally formed structure can improve the structural strength of the fixing limiting block 121 and the main body 11, increase the service life of the tooling 1, and at the same time, the tooling 1 can be directly integrally formed during production without other assembly processes, thereby reducing costs.

[0045] This embodiment also provides an assembly device (not shown in the figure), which includes a tooling 1 and a thin film deposition device. The tooling 1 can be any type of tooling 1 provided by this utility model. Since the specific structure and working principle of the tooling 1 have been described in detail in the previous description, they will not be repeated here for the sake of brevity. The thin film deposition device includes a cavity, and a reaction chamber is provided in the cavity. When assembling the bushing to the reaction chamber, the tooling 1 is assembled above the cavity, and the through hole 113 is correspondingly set with the opening of the reaction chamber.

[0046] In this embodiment, the assembly equipment uses the tooling 1 provided by this utility model. The tooling 1 can assist in installing the bushing into the reaction chamber inside the cavity of the thin film deposition equipment, thereby improving the assembly efficiency and accuracy of the assembly equipment, avoiding the bushing jamming during assembly, and reducing the wear of the bushing.

[0047] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A tooling for installing bushings, characterized in that, include: The main body includes a first protrusion and a second protrusion connected adjacent to each other. The inner side surfaces of the first protrusion and the second protrusion form a through hole, and the first protrusion is higher than the second protrusion. When assembling the bushing, the bushing is moved toward the first boss until it abuts against the inner side of the first boss, and then the bushing is moved downward and passes through the through hole along the inner side of the second boss until it enters the cavity.

2. The tooling according to claim 1, characterized in that, The diameter of the through hole is the same as the diameter of the cavity.

3. The tooling according to claim 1, characterized in that, The bottom length of the inner side of the first boss is less than half the circumference of the through hole.

4. The tooling according to claim 1, characterized in that, The tooling also includes a limiting block, which is connected to the outside of the main body. The bottom end of the limiting block protrudes from the bottom end of the main body and is used to abut against the cavity.

5. The tooling according to claim 4, characterized in that, The limiting blocks are provided in multiple ways, and the multiple limiting blocks are respectively located at intervals on both sides of the main body.

6. The tooling according to claim 5, characterized in that, All of the plurality of limiting blocks are connected to the side of the first boss.

7. The tooling according to claim 4, characterized in that, The limiting block includes a fixed limiting block and a detachable limiting block. The fixed limiting block and the detachable limiting block are located on different sides. The fixed limiting block is fixedly connected to the main body, and the detachable limiting block is detachably connected to the main body.

8. The tooling according to claim 7, characterized in that, The main body has threaded holes on both sides that are opposite each other, and the detachable limiting block is locked to one of the threaded holes by screws.

9. The tooling according to claim 7, characterized in that, There are two fixed limiting blocks, and the two fixed limiting blocks are respectively located at both ends of the same side of the main body.

10. An assembly device, characterized in that, include: The tooling is the tooling described in any one of claims 1-9; A thin film deposition apparatus includes a cavity, wherein a reaction chamber is provided within the cavity; When assembling the bushing into the reaction chamber, the tooling is assembled above the chamber, and the through hole is correspondingly set with the opening of the reaction chamber.

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