Sheet feeding and discharging tool and coating equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a sheet feeding and discharging tool and coating equipment, and solves the problem that the coating uniformity is affected due to the fact that a sheet is heated to extend and then wrinkles. The sheet feeding and discharging tool comprises a clamping and sealing assembly, a clamping assembly and an elastic sealing piece. The clamping and sealing assembly is movably connected to a furnace body. The clamping assembly is movably connected to the furnace body; the elastic sealing piece is arranged between the clamping assembly and the furnace body, the elastic sealing piece can deform under pressure to block the discharging port, and under the action of resilience force of the elastic sealing piece, the sheet clamped by the clamping sealing assembly and the clamping assembly is kept in a tensioned state. According to the sheet feeding and discharging tool and the coating equipment provided by the invention, the sheet can be always kept in a tensioned state in the coating process, and the coating uniformity is ensured.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a sheet loading and unloading fixture and a coating equipment. Background Technology

[0002] Lithium-ion batteries are a type of battery that uses lithium metal or lithium alloys as positive / negative electrode materials and a non-aqueous electrolyte solution. They are characterized by high energy density, lightweight, fast charging and discharging, and long lifespan, and have a wide range of applications. To improve the energy density of lithium-ion batteries, the electrode sheets used are obtained by depositing a thin film of silicon-containing material onto both sides of a metal sheet in the thickness direction using plasma-enhanced chemical vapor deposition (PECVD). To improve the equipment's throughput and deposition efficiency, the metal sheets placed in the reactor for processing need to be as large and long as possible. However, due to the inherent ductility of the metal sheets, they elongate under high temperatures, causing them to lose tension during the process and affecting the uniformity of the deposition. Utility Model Content

[0003] In view of this, the present disclosure provides a sheet loading and unloading fixture and a coating equipment to solve the problem in the related art where sheet wrinkles are caused by thermal elongation, which affects the uniformity of coating.

[0004] In a first aspect, one embodiment of this disclosure provides a sheet loading and unloading fixture applied to a coating equipment. The coating equipment includes a furnace body with a reaction chamber configured to accommodate at least one sheet. The furnace body has at least one inlet and at least one outlet on each side in a first direction, with the inlet and outlet corresponding one-to-one in the first direction. The corresponding inlet and outlet are configured to allow the sheet to enter and exit the reaction chamber. The sheet loading and unloading fixture includes a clamping and sealing assembly movably connected to the side of the furnace body with the inlet, for loading the sheet into the reaction chamber from the inlet. In the case of the chamber, the clamping and sealing assembly is configured to be operable to clamp one end of the sheet and to be operable to block the feed port; the clamping assembly is movably connected to the side of the furnace body with the discharge port, and when the sheet extends out of the discharge port from the reaction chamber, the clamping assembly is configured to be operable to clamp the other end of the sheet; an elastic seal is disposed between the clamping assembly and the furnace body, the elastic seal can deform under pressure to block the discharge port, and under the action of the rebound force of the elastic seal, the sheet clamped by the clamping and sealing assembly and the clamping assembly is kept in a taut state.

[0005] In some embodiments, the clamping assembly includes: at least one fixing block movably connected to the side of each discharge port away from the reaction chamber; an elastic seal is disposed between the fixing block and the side wall of the furnace body; the fixing block is capable of approaching or moving away from the furnace body in a first direction under external force; the fixing block has a through hole arranged in the first direction and corresponding to the discharge port, the through hole being configured for the sheet to pass through; at least one first clamping block movably connected to the side of the fixing block away from the discharge port; the vertical height of the upper surface of the first clamping block is less than or equal to the vertical height of the bottom of the through hole; at least one second clamping block is vertically disposed above the first clamping block; at least one first driving member is disposed on the fixing block; the first driving member is connected to at least one of the first clamping block and the second clamping block; the first driving member is capable of driving the first clamping block and / or the second clamping block to clamp the sheet and block the through hole, or to loosen the sheet and allow the through hole to connect the reaction chamber and the external environment.

[0006] In some embodiments, the elastic seal is configured as a bellows with elastic deformation capability, the bellows extending along a first direction; the bellows is disposed between the fixing block and the furnace body, the bellows connects the discharge port and the through hole, the sheet passes through the cavity of the bellows and is clamped by the clamping assembly, the cavity of the bellows is projected onto the furnace body in the first direction and covers the discharge port, and the cavity of the bellows is projected onto the fixing block in the first direction and covers the through hole.

[0007] In some embodiments, the clamping assembly further includes: a plurality of first sealing gaskets, respectively disposed on opposite sides of the first clamping block and the second clamping block, wherein when the first clamping block and the second clamping block clamp the sheet, the first sealing gaskets abut against the sheet and deform therefrom, and the first sealing gaskets are configured to block the through holes.

[0008] In some embodiments, the clamping assembly further includes: a guide post connected to the side of the fixing block facing the furnace body; a guide sleeve connected to the furnace body, the guide sleeve having a guide hole, the guide post extending into the guide hole and slidably connected to the guide sleeve, the extension direction of the guide hole being parallel to a first direction.

[0009] In some embodiments, the clamping and sealing assembly includes: a connecting rod extending vertically and movably connected to a side near the feed inlet; at least one first clamping plate group slidably connected to the connecting rod; at least one second clamping plate group slidably connected to the connecting rod, the first clamping plate group and the second clamping plate group being vertically opposite each other and located on both sides of each feed inlet; at least one second driving member connected to the first clamping plate group and the second clamping plate group respectively, the second driving member being capable of driving the first clamping plate group and the second clamping plate group to slide relative to the connecting rod in the vertical direction, so that the first clamping plate group and the second clamping plate group move closer to each other or further away from each other; at least one third driving member connected to the side of the furnace body where the feed inlet is located, the third driving member being connected to the connecting rod, and when the first clamping plate group and the second clamping plate group clamp the sheet, the third driving member being capable of driving the connecting rod to move towards the feed inlet, so that the first clamping plate group and the second clamping plate group clamping the sheet block the feed inlet.

[0010] In some embodiments, the first clamping plate assembly includes: a first clamping plate slidably connected to the connecting rod; and a second sealing gasket connected to the side of the first clamping plate facing the second clamping plate assembly; the second clamping plate assembly includes: a second clamping plate slidably connected to the connecting rod; and a third sealing gasket connected to the side of the second clamping plate facing the first clamping plate assembly; when the first clamping plate assembly and the second clamping plate assembly clamp the sheet, the second sealing gasket and the third sealing gasket respectively abut against the sheet, and the second sealing gasket and the third sealing gasket clamping the sheet are configured to block the feed inlet.

[0011] In some embodiments, there are multiple feed ports, which are arranged at intervals in a vertical direction. Each corresponding feed port and discharge port is configured to allow one sheet to enter and exit the reaction chamber. The sheet is made of metal. The sheet loading and unloading fixture further includes an electrode assembly, which is electrically connected to the multiple sheets respectively. When the clamping and sealing assembly and the clamping assembly load the multiple sheets into the reaction chamber, the multiple sheets are arranged at intervals in a vertical direction in the reaction chamber. The electrode assembly is configured such that each pair of adjacent sheets has opposite polarities.

[0012] In some embodiments, the furnace body is further comprising: an unwinding assembly disposed on the side of the furnace body having a feed inlet, wherein at least one sheet is wound around the unwinding assembly, the unwinding assembly being configured to continuously supply sheet to the reaction chamber such that each sheet passes sequentially through a set of corresponding feed inlets and outlets.

[0013] In some embodiments, the device further includes a heating assembly connected to the inner wall of the reaction chamber, and the heating assembly is disposed in a second direction at least on one side of the reaction chamber, the heating assembly being configured to heat a sheet placed in the reaction chamber, the second direction being perpendicular to the first direction.

[0014] Secondly, embodiments of this disclosure also provide a coating apparatus, comprising: a furnace body having a reaction chamber configured to accommodate at least one sheet; at least one feed inlet and at least one discharge outlet are respectively provided on both sides of the furnace body in a first direction; the feed inlet and discharge outlet are respectively provided in a one-to-one correspondence in the first direction; and the corresponding feed inlet and discharge outlet are configured to allow the sheet to enter and exit the reaction chamber; and the sheet loading and unloading fixture described above is movably connected to the furnace body, and the sheet loading and unloading fixture is configured to load the sheet into or unload it from the reaction chamber.

[0015] The sheet loading and unloading fixture and coating equipment provided in this disclosure utilizes a clamping and sealing assembly and an elastic seal outside the furnace body to clamp and fix the sheet at both ends passing through the inlet and outlet, and to seal the inlet and outlet to maintain the reaction chamber in a vacuum state. Furthermore, when the sheet is clamped, the elastic seal between the furnace body sidewall and the clamping assembly remains in a compressed deformation state, ensuring the sheet is always tensioned by a rebound force. Even when the sheet elongates due to heat, the rebound force generated by the compression deformation of the elastic seal maintains the sheet in a taut state, preventing wrinkles and ensuring coating uniformity, thereby improving coating quality.

[0016] In addition, compared with the original scheme of first loading the sheet onto the boat structure and then loading the whole into the reaction chamber of the furnace, this disclosure eliminates the boat structure and directly loads the sheet onto the furnace body. This makes it easier to load and unload the sheet, saving time and reducing costs. At the same time, the reaction chamber can hold more sheet at a time, increasing the coating capacity. Attached Figure Description

[0017] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure.

[0019] Figure 2 The diagram shown is a schematic diagram of a sheet material loading and unloading fixture provided in an embodiment of the present disclosure, which is installed in a furnace body.

[0020] Figure 3 The diagram shown is a schematic diagram of a sheet material loading and unloading fixture installed in a furnace body according to another embodiment of this disclosure.

[0021] Figure 4The diagram shows a sheet loading and unloading fixture provided in an embodiment of the present disclosure, which is installed at a discharge port of the furnace body.

[0022] Figure 5 The diagram shown is a schematic diagram of a clamping assembly and an elastic seal used to clamp a sheet material according to an embodiment of this disclosure.

[0023] Figure 6 The diagram shown is a schematic diagram of a sheet material that passes through a through hole when the clamping assembly and the elastic seal are engaged, according to an embodiment of the present disclosure.

[0024] Figure 7 The diagram shown is a schematic diagram of a clamping assembly and an elastic seal used to clamp a sheet material according to an embodiment of this disclosure.

[0025] Figure 8 The diagram shown is a schematic diagram of a clamping assembly and an elastic seal provided in an embodiment of this disclosure, which clamps the sheet and seals the through hole.

[0026] Figure 9 The diagram shown is a schematic of a clamping and sealing assembly provided in an embodiment of the present disclosure, which is disposed in a furnace body.

[0027] Figure 10 The image shown is a side view of a clamping and sealing assembly provided in an embodiment of this disclosure, disposed in a furnace body.

[0028] Figure 11 The image shown is a front view of a coating apparatus provided in an embodiment of this disclosure.

[0029] Figure label:

[0030] 100. Coating equipment; 10. Sheet loading and unloading fixture; 1. Clamping and sealing assembly; 11. Connecting rod; 12. First clamping plate assembly; 121. First clamping plate; 122. Second sealing gasket; 13. Second clamping plate assembly; 131. Second clamping plate; 132. Third sealing gasket; 14. Second driving component; 15. Third driving component; 2. Clamping assembly; 21. Fixing block; 21a. Through hole; 22. Second clamping block; 23. First clamping block; 24. First driving component; 241 1. First drive unit; 242. Second drive unit; 25. Guide sleeve; 26. Guide post; 27. First sealing gasket; 3. Elastic seal; 31. Bellows; 31a. Tube cavity; 4. Unwinding assembly; 41. Mounting plate; 42. Guide roller; 5. Electrode assembly; 6. Heating assembly; 20. Furnace body; 20a. Feed inlet; 20b. Discharge outlet; 201. Reaction chamber; 202. Viewing window; 30. Sheet; X, First direction; Y, Second direction; Z, Vertical direction. Detailed Implementation

[0031] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0032] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure. Figure 2 The diagram shown is a schematic diagram of a sheet material loading and unloading fixture provided in an embodiment of the present disclosure, which is installed in a furnace body. Figure 3 The diagram shown is a schematic of a sheet material loading and unloading fixture installed in a furnace body according to another embodiment of this disclosure. Arrow X points to a first direction, arrow Y points to a second direction, and arrow Z points to a vertical direction. The first direction X, the second direction Y, and the vertical direction Z are all perpendicular to each other, and will not be emphasized separately thereafter.

[0033] This disclosure provides a sheet material loading and unloading fixture, such as... Figures 1 to 3 This is applied to a coating equipment 100, which includes a furnace body 20 having a reaction chamber 201. A sheet loading and unloading fixture 10 is configured to install and fix at least one unprocessed sheet 30 in the reaction chamber 201 of the furnace body 20, so as to coat the sheet 30 located in the reaction chamber 201 on at least one side in the thickness direction, or to unload the processed sheet 30 in the reaction chamber 201 and replace it with a new unprocessed sheet 30.

[0034] Optionally, the furnace body 20 is provided with at least one feed port 20a and at least one discharge port 20b on both sides of the first direction X. The feed port 20a and discharge port 20b are arranged in a one-to-one correspondence in the first direction X. Each corresponding feed port 20a and discharge port 20b is configured to allow a sheet 30 to enter and exit the reaction chamber 201. The sheet loading and unloading fixture 10 is movably connected to the furnace body 20 to facilitate loading and unloading of the sheet 30, so that at least a portion of the sheet 30 loaded into the furnace body 20 is located in the reaction chamber 201, thereby coating at least one side of the surface of the sheet 30 located in the reaction chamber 201 in the thickness direction.

[0035] It is understood that the coating equipment 100 can be a PECVD equipment, which includes a PECVD furnace body 20 with a reaction chamber 201, and the sheet 30 can be a metal sheet. The PECVD equipment is used to deposit a silicon-based material on both sides of the metal sheet in the thickness direction, thereby forming an electrode sheet in a lithium battery. It should be emphasized that the shape and size of the furnace body 20 can be schematically adjusted according to actual needs. In this embodiment of the present disclosure, in order to facilitate continuous and efficient coating of the metal sheet 30 and improve production capacity, the furnace body 20 is set as a square body, and the corresponding reaction chamber 201 is set as a square cavity. The sheets 30 in the reaction chamber 201 are at least two or more arranged at Z intervals in the vertical direction, and the feed port 20a and discharge port 20b on the furnace body 20 for multiple sheets 30 to enter and exit the reaction chamber 201 are also set as multiple according to the number of sheets 30. In other examples, the coating equipment 100 can also be a low-pressure chemical vapor deposition (LPCVD) equipment, an atmospheric pressure chemical vapor deposition (APCVD) equipment, etc. In this case, the sheet 30 being processed can be a silicon wafer or a metal sheet. One or more silicon wafers or metal sheets can be directly loaded onto the furnace body 20 through the sheet loading and unloading fixture 10, without specific limitations.

[0036] Specifically, the sheet loading and unloading fixture 10 includes a clamping and sealing assembly 1, a clamping assembly 2, and an elastic seal 3. The clamping and sealing assembly 1 is movably connected to the side of the furnace body 20 where the feed inlet 20a is provided. When the sheet 30 enters the reaction chamber 201 from the feed inlet 20a, the clamping assembly 2 is movably connected to the side of the furnace body 20 where the discharge outlet 20b is provided. When the sheet 30 extends out of the reaction chamber 201 from the discharge outlet 20b, the clamping assembly 2 is configured to be able to move to clamp the other end of the sheet 30. The elastic seal 3 is disposed between the clamping assembly 2 and the furnace body 20. The elastic seal 3 can deform under pressure to block the discharge outlet 20b, and under the action of the rebound force of the elastic seal 3, the sheet 30 clamped by the clamping and sealing assembly 1 and the clamping assembly 2 is kept in a taut state.

[0037] It is understood that the feed inlet 20a and the discharge outlet 20b are located on the two side walls of the furnace body 20 in the length direction (also the first direction X). The distance between the two side walls of the furnace body 20 in the length direction is much greater than the distance between the two side walls of the furnace body 20 in the width direction (also the direction perpendicular to the first direction X in the horizontal plane), so that the length of the sheet 30 placed in the reaction chamber 201 is longer, such as greater than or equal to 1m, in order to improve production capacity and coating efficiency, without specific limitation.

[0038] Optionally, the furnace body 20 has a viewing window 202 on one side wall in the width direction to facilitate observation of the reaction chamber 201. Furthermore, a heating assembly 6 can be provided on the other side wall of the furnace body 20 in the width direction (i.e., the inner side wall opposite the viewing window 202 along the second direction Y) for heating the sheet 30 placed in the reaction chamber 201. In other embodiments, heating assemblies 6 can be provided on both sides of the reaction chamber 201 in the second direction Y, which will not be described in detail.

[0039] The sheet loading and unloading fixture 10 provided in this embodiment utilizes the cooperation of a clamping and sealing assembly 1, a clamping assembly 2, and an elastic seal 3 disposed outside the furnace body 20 to clamp and fix the sheet 30 at both ends passing through the feed inlet 20a and the discharge outlet 20b, and to seal the feed inlet 20a and the discharge outlet 20b to maintain the reaction chamber 201 in a vacuum state. Furthermore, when the sheet 30 is clamped, the elastic seal 3 disposed between the side wall of the furnace body 20 and the clamping assembly 2 remains in a compressed and deformed state, ensuring that the sheet 30 is always tensioned by the rebound force. Even when the sheet 30 elongates due to heat, the rebound force generated by the compression deformation of the elastic seal 3 keeps the sheet 30 in a tensioned state, preventing wrinkles from forming on the sheet 30 and affecting the uniformity of the coating, thereby improving the coating quality.

[0040] In addition, compared with the original scheme of first loading the sheet 30 onto the boat structure and then loading the whole into the reaction chamber 201 of the furnace body 20, this disclosure eliminates the boat structure and directly loads the sheet 30 onto the furnace body 20. This makes it easier to load and unload the sheet 30, saving time and reducing costs. At the same time, the reaction chamber 201 can accommodate more sheets 30 at a time, further improving the coating capacity and coating efficiency.

[0041] It is understandable that during the process of loading the sheet 30 into the reaction chamber 201 of the furnace body 20, after the sheet 30 passes through the corresponding feed inlet 20a and discharge outlet 20b, the order in which the clamping sealing assembly 1, clamping assembly 2, and elastic seal 3 operate can be different. For example, the clamping assembly 2 can operate before the clamping sealing assembly 1. Specifically, after the sheet 30 passes through the corresponding feed inlet 20a and discharge outlet 20b, the clamping assembly 2 first clamps the sheet 30 on the discharge outlet 20b side, and then provides a pulling force to the sheet 30 from the discharge outlet 20b towards the feed inlet 20a. Under the action of the pulling force, the clamping assembly 2 moves towards the discharge outlet 20b. At this time, the elastic seal 3, which is located between the clamping assembly 2 and the furnace body 20, is compressed and deformed. The elastic seal 3 blocks the outlet 20b and maintains it in a compressed state. Then, the clamping seal assembly 1 is activated to clamp the sheet 30 on the side of the inlet 20a and block the inlet 20a. The external pulling force from the outlet 20b to the inlet 20a is released, so that the sheet 30 can be maintained in a taut state. Alternatively, the clamping seal assembly 1 can be activated before the clamping assembly 2. Specifically, after the sheet 30 passes through the opposite inlet 20a and outlet 20b, the clamping seal assembly 1 located on the side of the inlet 20a is activated first to clamp the sheet 30 on the side of the inlet 20a. The external robot arm applies a pulling force from the inlet 20a to the outlet 20b on the side of the outlet 20b, and the clamping seal assembly 1 blocks the inlet 20a. Simultaneously, the pusher on the external robotic arm applies a pushing force to the elastic seal 3, compressing it so that one end of the elastic seal 3 adheres to the side wall of the furnace body 20 and blocks the discharge port 20b. Then, the clamping assembly 2 actuates, clamping the sheet 30 at the other end of the elastic seal 3. Finally, all force applied by the external robotic arm is released, allowing the sheet 30 to remain in a taut state. It should be emphasized that the order of action of the clamping sealing assembly 1, clamping assembly 2, and elastic seal 3 can be adaptively adjusted according to actual needs. In this embodiment, for ease of explanation and understanding, the following detailed description uses the example of clamping assembly 2 acting before clamping sealing assembly 1.

[0042] The following describes in detail the specific structure of the sheet loading and unloading fixture 10, taking the deposition of metal sheets on both sides of the thickness direction using PECVD equipment as an example. At this time, there are multiple feed ports 20a, which are arranged at intervals along the vertical direction Z. Each corresponding feed port 20a and discharge port 20b is configured to allow one sheet 30 to enter and exit the reaction chamber 201.

[0043] Figure 4 The diagram shows a sheet loading and unloading fixture provided in an embodiment of the present disclosure, which is installed at a discharge port of the furnace body. Figure 5The diagram shown is a schematic diagram of a clamping assembly and an elastic seal used to clamp a sheet material according to an embodiment of this disclosure. Figure 6 The diagram shown is a schematic diagram of a sheet material that passes through a through hole when the clamping assembly and the elastic seal are engaged, according to an embodiment of the present disclosure. Figure 7 The diagram shown is a schematic diagram of a clamping assembly and an elastic seal used to clamp a sheet material according to an embodiment of this disclosure. Figure 8 The diagram shown is a schematic diagram of a clamping assembly and an elastic seal provided in an embodiment of this disclosure, which clamps the sheet and seals the through hole.

[0044] like Figure 4 and Figure 5 The clamping assembly 2 includes at least one fixing block 21, at least one first clamping block 23, at least one second clamping block 22, and at least one first driving member 24. Each fixing block 21, first clamping block 23, second clamping block 22, and first driving member 24 corresponds to a discharge port 20b. Specifically, the fixing block 21 is movably connected to the side of the discharge port 20b away from the reaction chamber 201. An elastic sealing member 3 is disposed between the fixing block 21 and the side wall of the furnace body 20. Under the action of external force, the fixing block 21 can move closer to or away from the discharge port 20b along the first direction X. The fixing block 21 has a through hole 21a arranged along the first direction X and corresponding to the discharge port 20b. The through hole 21a is configured to allow the sheet 30 to pass through. The first clamping block 23 is movably connected to the side of the fixing block 21 away from the discharge port 20b. The vertical height of the upper surface of the first clamping block 23 is less than 1 / 3 of the sheet 30. Or equal to the vertical height of the bottom of the through hole 21a; the second clamping block 22 is vertically Z-oriented above the first clamping block 23; the first driving member 24 is disposed on the fixing block 21, and the first driving member 24 is connected to at least one of the first clamping block 23 and the second clamping block 22. The first driving member 24 can drive the first clamping block 23 and / or the second clamping block 22 to move, so that the first clamping block 23 and the second clamping block 22 clamp the sheet 30 and block the through hole 21a, or loosen the sheet 30 and make the through hole 21a connect the reaction chamber 201 and the external environment.

[0045] Specifically, the first driving member 24 includes a first driving part 241, which is connected to a second clamping block 22. The upper surface of the first clamping block 23 is flush with the lower sidewall that forms the through hole 21a. When the sheet 30 extends out of the reaction chamber 201 through the through hole 21a, the first driving part 241 can drive the second clamping block 22 to move closer to the first clamping block 23 in the vertical direction Z, so that the extended sheet 30 is clamped between the first clamping block 23 and the second clamping block 22. When the sheet 30 in the reaction chamber 201 has completed coating, the first driving part 241 can drive the second clamping block 22 to move away from the first clamping block 23 in the vertical direction Z. The sheet 30 is released and the through hole 21a is in a state of communicating with the reaction chamber 201 and the external environment, so as to facilitate the replacement of the sheet 30.

[0046] In an optional embodiment, the first driving unit 241 can be connected to the first clamping block 23 and the second clamping block 22 respectively. The first driving unit 241 can drive the first clamping block 23 and the second clamping block 22 to have opposite movements in the vertical direction Z. When it is necessary to clamp the sheet 30, the first driving unit 241 can bring the first clamping block 23 and the second clamping block 22 closer to each other, and when it is necessary to release the sheet 30, the first driving unit 241 can move the first clamping block 23 and the second clamping block 22 away from each other. Optionally, the first driving unit 241 can be configured to be driven by a motor and connected to the first clamping block 23 and the second clamping block 22 respectively through a conveyor belt assembly or a commutator, so that the first clamping block 23 and the second clamping block 22 can move simultaneously in opposite directions in the vertical direction Z, without specific limitation.

[0047] In some embodiments, the elastic seal 3 is configured as a bellows 31 with elastic deformation capability. The bellows 31 extends along the first direction X and is disposed between the fixing block 21 and the furnace body 20. The bellows 31 connects the discharge port 20b and the through hole 21a. The sheet 30 passes through the cavity 31a of the bellows 31 and is clamped by the clamping assembly 2. The orthogonal projection of the cavity 31a of the bellows 31 toward the furnace body 20 in the first direction X covers the discharge port 20b, and the orthogonal projection of the cavity 31a of the bellows 31 toward the fixing block 21 in the first direction X covers the through hole 21a. When the sheet 30 passes through the through hole 21a and is clamped by the first clamping block 23 and the second clamping block 22, the bellows 31 is in a state of compression deformation. Under the action of its own elastic force, the two ends of the bellows 31 can respectively abut against the side wall of the furnace body 20 and the fixing block 21, and connect the discharge port 20b and the through hole 21a. At this time, if the furnace cavity is evacuated, the cavity 31a of the bellows 31 will also be evacuated.

[0048] Optionally, when the first clamping block 23 and the second clamping block 22 clamp the sheet 30, in order to seal the through hole and maintain the furnace cavity and the cavity 31a of the bellows 31 in a vacuum state during evacuation, special attention needs to be paid to the sealing performance of the through hole 21a while clamping the sheet 30. Therefore, when setting the first clamping block 23 and the second clamping block 22, the first clamping block 23 and the second clamping block 22 can be made to fit tightly against the fixing block 21 (not shown in the figure), and when the first driving part 241 drives the first clamping block 23 and / or the second clamping block 22 to move in the vertical direction Z, the first clamping block 23 and the second clamping block 22 are always in contact with the fixing block 21 and cover the through hole 21a to prevent gas from flowing out from the gap between the first clamping block 23 and / or the second clamping block 22 and the fixing block 21. Or, as Figure 6The first driving member 24 may further include a second driving part 242, which is disposed on the fixing block 21. The first clamping block 23, the second clamping block 22, and the first driving part 241 are connected to the connecting plate, and the second driving part 242 is connected to the connecting plate. Figure 7 and Figure 8 When the first driving unit 241 drives the first clamping block 23 and / or the second clamping block 22 to clamp the sheet 30, the second driving unit 242 can drive the connecting plate to move along the first direction X, so as to drive the first clamping block 23 and the second clamping block 22 to move together along the first direction X towards the through hole 21a, until the through hole 21a is blocked, thereby achieving the blocking of the through hole 21a. It can be adaptively adjusted according to actual needs and is not specifically limited.

[0049] Optionally, the second drive unit 242 can be a cylinder mounted on the fixing block 21. The cylinder's push rod extends along the first direction X and is connected to the connecting plate. It can be adaptively adjusted according to actual needs without being specifically limited.

[0050] Optionally, the clamping assembly 2 further includes a plurality of first sealing gaskets 27, which are respectively disposed on opposite sides of the first clamping block 23 and the second clamping block 22. When the first clamping block 23 and the second clamping block 22 clamp the sheet 30, the first sealing gaskets 27 abut against the sheet 30 and deform, so that the first sealing gaskets 27 surround the sheet 30 to further improve the sealing performance of the through hole 21a.

[0051] In some embodiments, the clamping assembly 2 further includes a cooperating guide post 26 and a guide sleeve 25. The guide post 26 is connected to the side of the fixing block 21 facing the furnace body 20, and the guide sleeve 25 is connected to the furnace body 20. The guide sleeve 25 has a guide hole, and the guide post 26 extends into the guide hole and is slidably connected to the guide sleeve 25. The extension direction of the guide hole is parallel to the first direction X. This provides guidance for the direction of deformation of the bellows 31 under pressure, allowing the fixing block 21 to move closer to the furnace body 20 along the first direction X, preventing deviation in the direction of movement.

[0052] In some embodiments, the clamping assembly 2 may not have a through hole 21a (not shown in the figure). Each discharge port 20b has a movably connected support frame on both sides in the vertical direction Z for placing a first clamping block 23 and a second clamping block 22 that can reciprocate in the vertical direction Z. The first clamping block 23 and the second clamping block 22 are used to clamp the sheet 30. The clamping assembly 2 also includes a sleeved guide plate and a guide plate sleeve. The guide plate is disposed on the side wall of the furnace body 20, the guide plate sleeve is slidably connected to the guide plate, and the support frame is disposed on the guide plate sleeve. The elastic seal 3 may be configured as a deformable rubber sleeve. The rubber sleeve may be sleeved around the guide plate, and both ends of the rubber sleeve abut against the furnace body 20 and the guide plate sleeve, respectively. A portion of the rubber sleeve may extend to the position of the discharge port 20b to block at least part of the discharge port 20b. When the first clamping block 23 and the second clamping block 22 clamp the sheet 30, the sheet 30 is under tension, causing the support frame to move closer to the furnace body 20. This causes the rubber sleeve to be compressed and deformed, further sealing the discharge port 20b. Even when the sheet 30 is heated and elongates, the restoring force of the rubber sleeve keeps the sheet 30 in a stretched state, and the reduced deformation of the rubber sleeve does not affect the sealing of the discharge port 20b. The clamping assembly 2 and the elastic seal 3 can also be configured with other mating structures, without specific limitations.

[0053] Figure 9 The diagram shown is a schematic of a clamping and sealing assembly provided in an embodiment of the present disclosure, which is disposed in a furnace body. Figure 10 The image shown is a side view of a clamping and sealing assembly provided in an embodiment of this disclosure, disposed in a furnace body.

[0054] like Figure 1 , Figure 2 , Figure 9 and Figure 10The clamping and sealing assembly 1 includes a connecting rod 11, at least one first clamping plate assembly 12, at least one second clamping plate assembly 13, at least one second driving member 14, and at least one third driving member 15. The connecting rod 11 extends vertically in the Z direction and is movably connected to the side near the feed inlet 20a. The first clamping plate assembly 12 is slidably connected to the connecting rod 11, and the second clamping plate assembly 13 is slidably connected to the connecting rod 11. The first clamping plate assembly 12 and the second clamping plate assembly 13 are arranged opposite each other in the vertical Z direction and are respectively located on both sides of each feed inlet 20a. The second driving member 14 is connected to the first clamping plate assembly 12 and the second clamping plate assembly 13 respectively. The second driving member 14 can drive the first clamping plate group 12 and the second clamping plate group 13 to slide relative to the connecting rod 11 in the vertical direction Z, so that the first clamping plate group 12 and the second clamping plate group 13 are closer to each other or further away from each other. The third driving member 15 is connected to the side of the furnace body 20 where the feed port 20a is provided. The third driving member 15 is connected to the connecting rod 11. When the first clamping plate group 12 and the second clamping plate group 13 clamp the sheet 30, the third driving member 15 can drive the connecting rod 11 to move towards the feed port 20a, so that the first clamping plate group 12 and the second clamping plate group 13 clamping the sheet 30 block the feed port 20a.

[0055] Understandably, after the sheet 30 is passed through the corresponding feed inlet 20a and discharge outlet 20b, and the clamping assembly 2 clamps the sheet 30 on the discharge outlet 20b side, a pulling force is provided to the sheet 30 in the direction from the discharge outlet 20b to the feed inlet 20a. The fixing block 21 will drive the sheet 30 to move along the first direction X towards the furnace body 20, causing the elastic seal 3 to be compressed and deformed and seal the discharge outlet 20b. At this time, the elastic seal 3 is compressed and deformed to the maximum extent. In this state, the second driving component 14 drives the feed inlet 20a to move closer to each other in the vertical direction Z, corresponding to a first clamping plate group 12 and a second clamping plate group 13, to clamp the sheet 30 at the feed inlet 20a. Then, the third driving component 15 drives the first clamping plate group 12 and the second clamping plate group 13 to move as a whole in the first direction X toward the furnace body 20, so that the first clamping plate group 12 and / or the second clamping plate group 13 block the feed inlet 20a. At this time, as the first clamping plate group 12 and the second clamping plate group 13 move, the sheet 30 will also move, so that the compression degree of the elastic sealing element 3 is reduced, but it is still in a compressed state, thus completing the installation and fixing of one sheet 30, until multiple sheets 30 are installed onto the furnace body 20 in sequence. It should be emphasized that after the sheet 30 is installed, the compression degree of the elastic seal 3 only needs to be greater than the elongation of the sheet 30 due to high temperature, so as to ensure that the sheet 30 can always be tightened under the action of the restoring force of the elastic seal 3 during the coating process and the reaction chamber 201 can always be maintained in a vacuum state. The degree of compression deformation of the elastic seal 3 under different conditions can be adaptively adjusted according to actual needs, without specific limitations.

[0056] In some alternative embodiments, such as Figure 10 The first clamping plate assembly 12 includes a first clamping plate 121 and a second sealing gasket 122. The first clamping plate 121 is slidably connected to the connecting rod 11, and the second sealing gasket 122 is connected to the side of the first clamping plate 121 facing the second clamping plate assembly 13. The second clamping plate assembly 13 includes a second clamping plate 131 and a third sealing gasket 132. The second clamping plate 131 is slidably connected to the connecting rod 11, and the third sealing gasket 132 is connected to the side of the second clamping plate 131 facing the first clamping plate assembly 12. When the first clamping plate assembly 12 and the second clamping plate assembly 13 clamp the sheet 30, the second sealing gasket 122 and the third sealing gasket 132 respectively abut against the sheet 30, and the second sealing gasket 122 and the third sealing gasket 132 clamping the sheet 30 are configured to block the feed inlet 20a. The sealing gaskets further improve the sealing performance of the feed inlet 20a.

[0057] Optionally, the second drive unit 14 can be configured as two sets arranged along the second direction Y. The second drive unit 14 may include a motor, a drive shaft, a driven shaft, and a conveyor belt. The motor is connected to the drive shaft, and the drive shaft and driven shaft are arranged along the vertical direction Z. The conveyor belt is sleeved on the drive shaft and driven shaft. The first clamping plate 121 is connected to the conveyor belt of one set at the position corresponding to each feed port 20a, and the second clamping plate 131 is connected to the conveyor belt of the other set at the position corresponding to each feed port 20a. The motors in the two sets drive the two drive shafts to rotate in opposite directions, so that the first clamping plate 121 and the second clamping plate 131 move in opposite directions in the vertical direction Z, so as to clamp or release the sheet 30.

[0058] It is understood that when the first clamping plate group 12 and the second clamping plate group 13 clamp the sheet 30, the orthogonal projection of the first clamping plate group 12, the sheet 30, and the second clamping plate group 13 onto the furnace body 20 in the first direction X at least covers the feed inlet 20a. This ensures that the feed inlet 20a can be sealed when the third driving member 15 drives the first clamping plate group 12 and the second clamping plate group 13 to adhere to the side wall of the furnace body 20 along the first direction X. Optionally, the third driving member 15 can be configured as a cylinder connected to the side wall of the furnace body 20, with the cylinder's push rod extending along the first direction X and connected to the connecting rod 11. This can be adaptively adjusted according to actual needs without specific limitations.

[0059] In other embodiments, the clamping and sealing assembly 1 may also be configured as a cooperating structure, such as the clamping assembly 2 including a fixing block 21, a first clamping block 23, a second clamping block 22 and a first driving member 24, to achieve clamping of the sheet 30 at the feed inlet 20a and sealing of the feed inlet 20a, which will not be described in detail here.

[0060] Figure 11 The image shown is a front view of a coating apparatus provided in an embodiment of this disclosure.

[0061] like Figure 1 and Figure 11 The sheet loading and unloading fixture 10 also includes an electrode assembly 5, which is electrically connected to a plurality of sheets 30. When the clamping and sealing assembly 1 and the clamping assembly 2 load the plurality of sheets 30 into the reaction chamber 201, the plurality of sheets 30 are arranged at intervals along the vertical direction Z in the reaction chamber 201. The electrode assembly 5 is configured such that each pair of adjacent sheets 30 has opposite polarities.

[0062] Optionally, the electrode assembly 5 may include a positive electrode and a negative electrode that are electrically connected to an external power source respectively. The positive electrode and the negative electrode may be insulatedly connected to the side wall of the furnace body 20, or they may be insulatedly connected to the clamping and sealing assembly 1 or the clamping assembly 2. They can be adapted to actual needs and are not specifically limited.

[0063] In some embodiments, the sheet loading and unloading fixture 10 may further include an unwinding assembly 4, which is disposed on the side of the furnace body 20 having a feed inlet 20a. At least one sheet 30 is wound around the unwinding assembly 4, which is configured to continuously supply the sheet 30 to the reaction chamber 201, such that each sheet 30 passes sequentially through a set of corresponding feed inlets 20a and outlets 20b. The unwinding assembly 4 enables continuous feeding, eliminating the need for cutting the sheet 30 when loading it into the furnace body 20. After coating is completed, the clamping sealing assembly 1 and clamping assembly 2 release the clamping of the sheet 30, allowing the coated sheet 30 to be pulled out. The clamping sealing assembly 1 and clamping assembly 2 then clamp the portion of the sheet 30 that subsequently enters the furnace body 20, and the coated portion of the sheet 30 is then cut. This saves time in assembling and cutting the sheet 30, thereby improving work efficiency.

[0064] Optionally, the unwinding assembly 4 includes a mounting plate 41 and a plurality of rotating shafts disposed on the mounting plate 41. Each rotating shaft is used to place a roll of sheet 30 to correspond to a set of feed ports 20a and discharge ports 20b. The rotating shaft can be connected to a drive motor, which can control the rotating shaft to rotate forward or backward to realize the unwinding or rewinding of the sheet 30.

[0065] Optionally, the positive or negative electrode can be disposed on the rotating shaft so that when the sheet 30 is placed on the rotating shaft, the electrode contacts the sheet 30 so that the whole roll of sheet 30 has the corresponding polarity.

[0066] It is understandable that a guide roller 42 can be provided on one side of each rotating shaft. The guide roller 42 is aligned with a feed port 20a in the first direction X. The sheet 30 on the rotating shaft enters the feed port 20a through the guide roller 42. The guide roller 42 makes the sheet 30 parallel to the horizontal plane.

[0067] This disclosure also provides a coating apparatus, such as Figure 1 The coating equipment 100 includes a furnace body 20 and a sheet loading / unloading fixture 10. The furnace body 20 has a reaction chamber 201, which is configured to accommodate at least one sheet 30. The furnace body 20 is provided with at least one feed port 20a and at least one discharge port 20b on both sides in the first direction X. The feed port 20a and the discharge port 20b are respectively provided in a one-to-one correspondence in the first direction X. The corresponding feed port 20a and discharge port 20b are configured to allow the sheet 30 to enter and exit the reaction chamber 201. The sheet loading / unloading fixture 10 is movably connected to the furnace body 20 and is configured to load the sheet 30 into or unload it from the reaction chamber 201.

[0068] It is understood that the specific structure and specific cooperation method of the furnace body 20 and the sheet loading and unloading tooling 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0069] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0070] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0071] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0072] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0073] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0074] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A sheet material loading and unloading tool, characterized by, An application is made in a coating equipment, the coating equipment including a furnace body with a reaction chamber configured to accommodate at least one sheet. The furnace body has at least one inlet and at least one outlet on each side in a first direction, the inlet and outlet being arranged in a one-to-one correspondence in the first direction. The corresponding inlet and outlet are configured to allow the sheet to enter and exit the reaction chamber. The sheet loading and unloading fixture includes: A clamping and sealing assembly is movably connected to the side of the furnace body where the feed inlet is located. When the sheet enters the reaction chamber from the feed inlet, the clamping and sealing assembly is configured to be able to clamp one end of the sheet and to block the feed inlet. A clamping assembly is movably connected to the side of the furnace body where the discharge port is located. When the sheet extends out of the discharge port from the reaction chamber, the clamping assembly is configured to be able to clamp the other end of the sheet. An elastic seal is disposed between the clamping assembly and the furnace body. The elastic seal can deform under pressure to block the discharge port, and under the action of the elastic seal's rebound force, the sheet clamped by the clamping sealing assembly and the clamping assembly is kept in a taut state.

2. The sheet material handling tooling of claim 1, wherein, The clamping assembly includes: At least one fixing block is movably connected to the side of each of the discharge ports away from the reaction chamber. The elastic seal is disposed between the fixing block and the side wall of the furnace body. The fixing block can move closer to or away from the furnace body in a first direction under the action of external force. The fixing block is provided with a through hole arranged in the first direction and corresponding to the discharge port. The through hole is configured to allow the sheet to pass through. At least one first clamping block is movably connected to the side of the fixed block away from the discharge port, and the vertical height of the upper surface of the first clamping block is less than or equal to the vertical height of the bottom of the through hole; At least one second clamping block is vertically disposed above the first clamping block; At least one first driving member is disposed on the fixed block. The first driving member is connected to at least one of the first clamping block and the second clamping block. The first driving member can drive the first clamping block and / or the second clamping block to move so that the first clamping block and the second clamping block clamp the sheet and block the through hole, or loosen the sheet and allow the through hole to connect to the external environment.

3. The sheet material handling tooling of claim 2, wherein, The elastic seal is configured as a bellows with elastic deformation capability, and the bellows extends along the first direction; The corrugated pipe is disposed between the fixed block and the furnace body. The corrugated pipe connects the discharge port and the through hole. The sheet passes through the cavity of the corrugated pipe and is clamped by the clamping assembly. The orthogonal projection of the cavity of the corrugated pipe onto the furnace body in the first direction covers the discharge port, and the orthogonal projection of the cavity of the corrugated pipe onto the fixed block in the first direction covers the through hole.

4. The sheet material loading and unloading fixture according to claim 2, characterized in that, The clamping assembly further includes: Multiple first sealing gaskets are respectively disposed on the opposite side of the first clamping block and the second clamping block. When the first clamping block and the second clamping block clamp the sheet, the first sealing gaskets abut against the sheet and deform, and the first sealing gaskets are configured to block the through hole.

5. The sheet material loading and unloading fixture according to claim 2, characterized in that, The clamping assembly further includes: Guide column, connected to the side of the fixing block facing the furnace body; A guide sleeve is connected to the furnace body. The guide sleeve has a guide hole. The guide post extends into the guide hole and is slidably connected to the guide sleeve. The extension direction of the guide hole is parallel to the first direction.

6. The sheet material loading and unloading fixture according to claim 1, characterized in that, The clamping and sealing assembly includes: A connecting rod extends vertically and is movably connected to a side near the feed inlet; At least one first clamping plate assembly is slidably connected to the connecting rod; At least one second clamping plate assembly is slidably connected to the connecting rod, and the first clamping plate assembly and the second clamping plate assembly are arranged opposite each other in the vertical direction and are respectively located on both sides of each feed port; At least one second driving member is connected to the first clamping plate group and the second clamping plate group respectively. The second driving member can drive the first clamping plate group and the second clamping plate group to slide relative to the connecting rod in the vertical direction, so that the first clamping plate group and the second clamping plate group move closer to each other or further away from each other. At least one third driving member is connected to the side of the furnace body where the feed inlet is located. The third driving member is connected to the connecting rod. When the first clamping plate group and the second clamping plate group clamp the sheet, the third driving member can drive the connecting rod to move towards the feed inlet so that the first clamping plate group and the second clamping plate group clamping the sheet block the feed inlet.

7. The sheet material loading and unloading fixture according to claim 6, characterized in that, The first clamping plate assembly includes: The first clamping plate is slidably connected to the connecting rod; The second sealing gasket is connected to the side of the first clamping plate facing the second clamping plate assembly; The second clamping plate assembly includes: The second clamping plate is slidably connected to the connecting rod; The third sealing gasket is connected to the side of the second clamping plate facing the first clamping plate assembly; When the first clamping plate group and the second clamping plate group clamp the sheet, the second sealing gasket and the third sealing gasket respectively abut against the sheet, and the second sealing gasket and the third sealing gasket clamping the sheet are configured to block the feed port.

8. The sheet material handling tooling of any of claims 1-7, wherein, The number of feed ports is multiple, and the multiple feed ports are arranged at intervals along the vertical direction. Each corresponding feed port and discharge port is configured to allow one sheet to enter and exit the reaction chamber. The sheet is made of metal. The sheet material loading and unloading fixture also includes: An electrode assembly is electrically connected to a plurality of the sheets, wherein the plurality of sheets are arranged vertically spaced in the reaction chamber when the clamping and sealing assembly and the clamping assembly load the plurality of sheets into the reaction chamber, and the electrode assembly is configured such that each pair of adjacent sheets has opposite polarities.

9. The sheet material handling tooling of any of claims 1-7, wherein, Also includes: An unwinding assembly is disposed on the side of the furnace body having the feed inlet, at least one sheet is wound around the unwinding assembly, the unwinding assembly being configured to continuously supply the sheet to the reaction chamber such that each sheet passes sequentially through a corresponding set of the feed inlets and the discharge outlets; And / or, A heating assembly is connected to the inner wall of the reaction chamber and is disposed in a second direction at least on one side of the reaction chamber. The heating assembly is configured to heat the sheet placed in the reaction chamber, and the second direction is perpendicular to the first direction.

10. A coating apparatus, characterized in that, include: The furnace body has a reaction chamber configured to accommodate at least one sheet. The furnace body has at least one feed inlet and at least one discharge outlet on each side in a first direction. The feed inlet and the discharge outlet are arranged in a one-to-one correspondence in the first direction. The corresponding feed inlet and discharge outlet are configured to allow the sheet to enter and exit the reaction chamber. The sheet loading and unloading fixture according to any one of claims 1-9 is movably connected to the furnace body, and the sheet loading and unloading fixture is configured to load the sheet into the reaction chamber or unload it from the reaction chamber.

Images