Boat structure and coating apparatus
By designing clamping and tension adjustment components in the boat structure, the problem of uneven coating caused by the elongation of metal sheets at high temperatures was solved, thus improving the coating quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LAPLACE RENEWABLE ENERGY TECH CO LTD
- Filing Date
- 2025-06-19
- Publication Date
- 2026-06-23
Smart Images
Figure CN224395016U_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and coating equipment. Background Technology
[0002] Lithium-ion batteries are a type of battery that uses lithium metal or lithium alloys as positive / negative electrode materials and a non-aqueous electrolyte solution. They are characterized by high energy density, lightweight, fast charging and discharging, and long lifespan, and have a wide range of applications. To improve the energy density of lithium-ion batteries, the electrode sheets used are obtained by depositing a thin film of silicon-containing material onto both sides of a metal sheet in the thickness direction using plasma-enhanced chemical vapor deposition (PECVD). To improve the equipment's throughput and deposition efficiency, the metal sheet, supported in a boat structure and placed in the reactor for processing, needs to be as large and long as possible. However, due to the inherent ductility of the metal sheet, it elongates under high temperatures, causing it to be unable to maintain a taut state during the process, thus affecting the uniformity of the deposition. Utility Model Content
[0003] In view of this, the present disclosure provides a boat structure and a coating equipment to solve the problem in the related art where the sheet becomes wrinkled due to thermal elongation, which affects the uniformity of the coating.
[0004] In a first aspect, one embodiment of this disclosure provides a boat structure configured to carry a plurality of metal sheets. The boat structure includes: a fixing component having a reaction space configured for the plurality of metal sheets to be spaced apart along a first direction; a first clamping component connected to the fixing component and configured to clamp one end of a metal sheet; a second clamping component connected to the fixing component and configured to clamp the other end of a metal sheet, the second clamping component and the first clamping component being disposed opposite to each other on both sides of the reaction space in a second direction, the second direction intersecting the first direction; and a tension adjusting component connected to the fixing component, the tension adjusting component being disposed on at least one side of the reaction space in the second direction. When a metal sheet is clamped by the first clamping component and the second clamping component, the tension adjusting component can be actuated to drive at least one of the first clamping component, the second clamping component, and the metal sheet to actuate, so that the metal sheet located in the reaction space is kept in a tensioned state.
[0005] In some embodiments, when the metal sheet is clamped by the first clamping assembly and the second clamping assembly, the tension adjusting assembly abuts against the metal sheet located outside the reaction space and is in a compressed state. Under the action of the rebound force of the tension adjusting assembly, it can drive the metal sheet to move and tension the metal sheet; and / or, at least one of the first clamping assembly and the second clamping assembly is slidably connected to the fixed assembly, and the tension adjusting assembly can push the slidably connected first clamping assembly and / or second clamping assembly to move in a second direction away from the reaction space.
[0006] Secondly, embodiments of this disclosure also provide a coating apparatus, comprising: a boat structure as described above, the boat structure being configured to carry a plurality of metal sheets; and a furnace body having a reaction chamber, the reaction chamber being configured to accommodate the boat structure carrying the metal sheets.
[0007] The boat structure and coating equipment provided in this disclosure utilize a first clamping component and a second clamping component to clamp multiple metal sheets, which are arranged at intervals in a reaction space. A tension adjustment component drives one of the first clamping component, the second clamping component, and the metal sheets to move, thereby ensuring that the multiple metal sheets in the reaction space are always kept in a taut state. Even when the metal sheets elongate due to heat, the tension adjustment component can adaptively adjust the movement of at least one of the first clamping component, the second clamping component, and the metal sheets to keep the metal sheets in a taut state, thus preventing wrinkles from forming on the metal sheets and affecting the coating uniformity, thereby improving the coating quality. Attached Figure Description
[0008] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.
[0009] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure.
[0010] Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure.
[0011] Figure 3 As shown Figure 2 A magnified view of part A in the boat structure shown.
[0012] Figure 4 As shown Figure 2 A magnified view of part B in the boat structure shown.
[0013] Figure 5 The diagram shown is a schematic diagram of a boat structure provided in another embodiment of this disclosure.
[0014] Figure 6 As shown Figure 5 A magnified view of part C in the boat structure shown.
[0015] Figure 7 The diagram shown is a schematic diagram of a first clamping assembly provided in an embodiment of this disclosure.
[0016] Figure 8 The image shown is a partially exploded view of the first clamping component and the fixing component in cooperation according to an embodiment of this disclosure.
[0017] Figure 9 The diagram shown is a partial schematic of the cooperation between the tension adjustment component and the fixing component provided in an embodiment of this disclosure.
[0018] Figure 10 The image shown is a partially exploded view of the tension adjustment component and the fixing component provided in an embodiment of this disclosure.
[0019] Figure 11 The diagram shown is a partial schematic of the tension adjustment component and the fixing component in cooperation according to another embodiment of this disclosure.
[0020] Figure 12 The image shown is a partially exploded view of the tension adjustment component and the fixing component provided in another embodiment of this disclosure.
[0021] Figure 13 The image shown is an exploded view of a tension adjustment assembly provided in an embodiment of this disclosure.
[0022] Figure 14 The diagram shown is a schematic diagram of a boat structure provided in another embodiment of this disclosure.
[0023] Figure 15 As shown Figure 14 A magnified view of part D in the boat structure shown.
[0024] Figure 16 The image shown is a partially exploded view of the tension adjustment component and the fixing component provided in another embodiment of this disclosure.
[0025] Figure 17 The diagram shown is a schematic diagram of the tension adjustment component and the fixing component in cooperation according to another embodiment of this disclosure.
[0026] Figure 18 The diagram shown is a schematic diagram of a boat structure provided in another embodiment of this disclosure.
[0027] Figure 19 As shown Figure 18A magnified view of part E in the boat structure shown.
[0028] Figure 20 The image shown is a partially exploded view of the tension adjustment component and the fixing component provided in another embodiment of this disclosure.
[0029] Figure 21 The diagram shown is a schematic diagram of the tension adjustment component and the fixing component in cooperation according to another embodiment of this disclosure.
[0030] Figure label:
[0031] 100. Coating equipment; 10. Boat structure; 101. Reaction space; 1. Fixing component; 111. Receiving groove; 112. First chamber; 12. First conductive connector; 12a. Movement space; 121. First guide rail; 122. Second guide rail; 13. First insulating component; 131. Locking block; 132. Protrusion; 1321. Through hole; 133. Guide surface; 13a. Groove; 14. Second insulating component; 15. Second conductive connector; 2. First clamping component; 21. First body part; 211. First receiving cavity; 212. First mounting groove; 213. First limiting groove; 22. First connecting rod; 23. First fixing component; 221 1. Limiting block; 3. Second clamping assembly; 4. Tension adjustment assembly; 41. Elastic assembly; 411. Elastic element; 412. Pressure plate; 4121. Slot; 413. Rotating shaft; 414. Guide plate; 415. Torsion spring; 4151. First abutment part; 4152. Second abutment part; 42. Gravity wedge block; 421. Inclined surface; 43. Second magnetic element; 44. First magnetic element; 5. Electrode assembly; 51. First electrode block; 52. Second electrode block; 53. Conductive connecting plate; 20. Furnace body; 201. Reaction chamber; 202. Furnace opening; 203. Furnace door; 30. Metal sheet; X, First direction; Y, Second direction; Z, Vertical direction. Detailed Implementation
[0032] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.
[0033] This disclosure provides a boat structure, such as Figure 1 and Figure 2The boat structure 10 is configured to carry a plurality of metal sheets 30. The boat structure 10 is applied to a coating equipment 100, which includes a furnace body 20 having a reaction chamber 201. The coating equipment 100 is configured to coat the surfaces of the metal sheets 30 housed on the boat structure 10 within the reaction chamber 201.
[0034] It is understood that the multiple metal plates 30 carried on the boat structure 10 are arranged at intervals along the first direction X, and each metal plate 30 extends along the second direction Y. The first direction X and the second direction Y are perpendicular to the vertical direction Z, that is, the first direction X and the second direction Y are perpendicular to each other on the horizontal plane, which will not be emphasized separately thereafter.
[0035] Optionally, the furnace body 20 is provided with a furnace opening 202 communicating with the reaction chamber 201 on at least one side in the second direction Y. The furnace opening 202 is provided with a furnace door 203 for opening and closing the furnace opening 202. The boat structure 10 carrying the metal sheet 30 can enter and exit the reaction chamber 201 through the furnace opening 202, so as to remove the processed boat structure 10 from the reaction chamber 201 or move the unprocessed boat structure 10 into the reaction chamber 201.
[0036] It is understood that the coating equipment 100 can be a PECVD equipment, which includes a PECVD furnace 20 with a reaction chamber 201. The PECVD equipment is specifically used to deposit a layer of silicon-based material on both sides of the metal sheet 30 in the thickness direction, thereby forming the electrode sheet in the lithium battery. It should be emphasized that the shape and size of the furnace 20 can be illustratively adjusted according to actual needs and are not specifically limited.
[0037] It is important to emphasize that the metal sheet 30 is relatively thin, and its thickness can be adaptively adjusted according to the thickness of the electrode sheets required for lithium batteries. To improve the production capacity of the coating equipment 100, the length of the reaction chamber 201 in the second direction Y is increased. Correspondingly, the length of the boat structure 10 placed in the reaction chamber 201 in the second direction Y is also increased, thus lengthening the length of the individual metal sheet 30 carried by the boat structure 10. During the coating process, the boat structure 10 carrying multiple metal sheets 30 is placed in the reaction chamber 201 for coating. Due to the influence of its own material, the metal sheet 30 is prone to stretching at high temperatures, especially in the length direction, which causes wrinkles to appear on the metal sheet 30 carried by the boat structure 10, thereby affecting the coating quality.
[0038] To address the aforementioned problems, this disclosure improves the boat structure 10. Specifically, the boat structure 10 includes a fixing component 1, a first clamping component 2, a second clamping component 3, and a tension adjustment component 4. The fixing component 1 has a reaction space 101, which is configured to allow a plurality of metal sheets 30 to be arranged at intervals along a first direction X. The first clamping component 2 is connected to the fixing component 1 and is configured to clamp one end of the metal sheet 30. The second clamping component 3 is connected to the fixing component 1 and is configured to clamp the metal sheet 30. At the other end, the second clamping assembly 3 and the first clamping assembly 2 are disposed opposite each other on both sides of the reaction space 101 in the second direction Y. The tension adjustment assembly 4 is connected to the fixing assembly 1 and is disposed on at least one side of the reaction space 101 in the second direction Y. When the metal sheet 30 is clamped by the first clamping assembly 2 and the second clamping assembly 3, the tension adjustment assembly 4 can be activated to drive at least one of the first clamping assembly 2, the second clamping assembly 3 and the metal sheet 30 to move, so that the metal sheet 30 located in the reaction space 101 is kept in a tensioned state.
[0039] It is understood that the reaction space 101 can be understood as follows: after the first clamping component 2 and the second clamping component 3 clamp multiple metal sheets 30, the area of the multiple metal sheets 30 exposed between the two first clamping components 2 and the second clamping component 3 that can be coated is used as the reaction space 101. The size and position of the reaction space 101 can be adaptively adjusted according to the actual area that the multiple metal sheets 30 can be coated, without specific limitations.
[0040] The boat structure 10 provided in this embodiment uses a first clamping component 2 and a second clamping component 3 to clamp multiple metal sheets 30, which are arranged at intervals in the reaction space 101. A tension adjustment component 4 drives at least one of the first clamping component 2, the second clamping component 3, and the metal sheets 30 to move, thereby ensuring that the multiple metal sheets 30 in the reaction space 101 are always kept in a taut state. Even when the metal sheets 30 are heated and elongated, the tension adjustment component 4 can adaptively adjust the movement of at least one of the first clamping component 2, the second clamping component 3, and the metal sheets 30 to keep the metal sheets 30 in a taut state, thus preventing wrinkles from forming on the metal sheets 30 and affecting the uniformity of the coating, thereby improving the coating quality.
[0041] In some embodiments, such as Figures 2 to 6 The boat structure 10 also includes an electrode assembly 5, which is connected to the fixing assembly 1. The electrode assembly 5 is configured to allow two adjacent metal sheets 30 to have opposite polarities, so that the metal sheets 30 discharge and deposit a film on their own surface, thereby reducing the complexity of the boat structure 10.
[0042] The fixing component 1 includes multiple first conductive connectors 12, multiple first insulating components 13, multiple second conductive connectors 15, and multiple second insulating components 14. The multiple first conductive connectors 12 are disposed on one side of the reaction space 101 in the second direction Y. The first clamping component 2 is conductively connected to the first conductive connectors 12. The multiple first insulating components 13 are disposed on one side of the reaction space 101 in the second direction Y. The multiple first conductive connectors 12 and multiple first insulating components 13 are staggered in the first direction X. The multiple second conductive connectors 15 are disposed on the other side of the reaction space 101 in the second direction Y. The multiple first conductive connectors 12 and multiple second conductive connectors 15 correspond one-to-one. The second clamping component 3 is conductively connected to the second conductive connectors 15. At least one of each corresponding set of first conductive connectors 12 and second conductive connectors 15 is electrically connected to the electrode component 5. The multiple second insulating components 14 are disposed on the other side of the reaction space 101 in the second direction Y. The multiple second conductive connectors 15 and multiple second insulating components 14 are staggered in the first direction X.
[0043] Optionally, such as Figures 3 to 5 The electrode assembly 5 includes at least one first electrode block 51 and at least one second electrode block 52. When the first electrode block 51 and the second electrode block 52 are disposed on a side close to the first clamping assembly 2, such as... Figure 3 The first electrode block 51 is used to electrically connect the odd number of the plurality of first conductive connectors 12 arranged along the first direction X, and the second electrode block 52 is used to electrically connect the even number of the plurality of first conductive connectors 12 arranged along the first direction X. When the first electrode block 51 and the second electrode block 52 are disposed on the side close to the second clamping assembly 3, as... Figure 4 The first electrode block 51 is used to electrically connect the odd number of the multiple second conductive connectors 15 arranged along the first direction X, and the second electrode block 52 is used to electrically connect the even number of the multiple second conductive connectors 15 arranged along the first direction X.
[0044] Optionally, such as Figure 5The electrode assembly 5 also includes a conductive connecting plate 53, which extends along the second direction Y and is conductively connected to at least one first electrode block 51 and at least one second electrode block 52 opposite each other in the second direction Y. Specifically, there may be two conductive connecting plates 53, which are spaced apart in the first direction X. The two conductive connecting plates 53, multiple first conductive connectors 12, and multiple second conductive connectors 15 enclose a reaction space 101. It should be emphasized that when the number of metal sheets 30 carried by the boat structure 10 is large, the number of conductive connecting plates 53 may also be more than two, such as three or four. In addition to two conductive connecting plates 53 forming part of the reaction space 101, the other conductive connecting plates 53 may also be inserted into the reaction space 101 as reinforcing structures, so that multiple conductive connecting plates 53 are spaced apart along the first direction X, and the reaction space is divided into multiple subspaces arranged along the first direction X. Each subspace can accommodate multiple metal sheets 30, which will not be described in detail.
[0045] It is understood that the tension adjustment component 4 can be disposed only on one side of the reaction space 101 in the second direction Y. For example, it can be disposed only on the side with the first clamping component 2, with the tension adjustment component 4 located between the first clamping component 2 and the reaction space 101 in the second direction Y. Specifically, the tension adjustment component 4 can be disposed on the first insulating member 13. Alternatively, it can be disposed only on the side with the second clamping component 3, with the tension adjustment component 4 located between the second clamping component 3 and the reaction space 101 in the second direction Y. Specifically, the tension adjustment component 4 can be disposed on the second insulating member 14. Or, the tension adjustment component 4 can be disposed on both sides of the reaction space 101 in the second direction Y, with the tension adjustment component 4 disposed on both the first insulating member 13 and the second insulating member 14. It can be adaptively adjusted according to actual needs and is not specifically limited. In the embodiments of this application, the tension adjustment component 4 is disposed on both sides of the reaction space 101, that is, the tension adjustment component 4 is disposed on the first insulating member 13 and the second insulating member 14 located on both sides of the reaction space 101.
[0046] Optionally, such as Figure 7 and Figure 8 For the first clamping assembly 2, which is electrically connected to the first conductive connector 12, and the second clamping assembly 3, which is electrically connected to the second conductive connector 15, the first clamping assembly 2 can be fixedly connected to the first conductive connector 12 or slidably connected to the first conductive connector 12, and the second clamping assembly 3 can be fixedly connected to the second conductive connector 15 or slidably connected to the second conductive connector 15, and can be adaptively adjusted according to the specific structure of the tension adjustment assembly 4.
[0047] It is understood that the first clamping assembly 2 includes multiple first body parts 21, multiple first connecting rods 22, and multiple first fixing members 23. The first body part 21 is provided with a first receiving cavity 211 extending in the vertical direction Z, and the first body part 21 is provided with a first mounting groove 212 communicating with the first receiving cavity 211. The first body part 21 is connected to the first conductive connector 12. The first connecting rod 22 extends in the vertical direction Z. One end of the metal sheet 30 is wound around the first connecting rod 22. The first connecting rod 22 with the metal sheet 30 wound around it can enter the first receiving cavity 211 through the first mounting groove 212. The first connecting rod 22 is electrically connected to the first body part 21. The first fixing member 23 is connected to one end of the first connecting rod 22. The first fixing member 23 is engaged in the first receiving cavity 211 to restrict the movement of the first connecting rod 22.
[0048] Optionally, the cross-sectional shape of the first fixing member 23 is set to match the cross-sectional shape of the first receiving cavity 211 to achieve the snap-fit of the first fixing member 23. The cross-sectional shape of the first receiving cavity 211 may include a square, triangle, polygon, or other structures, without specific limitation.
[0049] Optionally, such as Figure 7 When the first clamping assembly 2 is fixedly connected to the first conductive connector 12, the first body part 21 can be fixedly connected to the first conductive connector 12 to form an integral structure. The first connecting rod 22 can be easily and quickly removed or inserted into the first receiving cavity 211 to facilitate the replacement of the metal sheet 30 wound on the first connecting rod 22. Figure 8 When the first clamping component 2 is slidably connected to the first conductive connector 12, the first body part 21 may be provided with a component that is independent of the first conductive connector 12. After the first conductive connector 12 is combined with the adjacent first insulating component 13, the first conductive connector 12 is provided with a first guide rail 121 on the side of the first conductive connector 12 facing the reaction space 101 in the second direction Y. The first guide rail 121 is conductively connected to the first conductive connector 12.
[0050] It is understood that when the first clamping component 2 is slidably connected to the first conductive connector 12, the first guide rail 121 can be configured as an integral structure fixedly connected to the first conductive connector 12, or it can be configured as a separate structure that can contact the first conductive connector 12. That is, the first guide rail 121 can be configured with the first insulating member 13. After the first conductive connector 12 and the first insulating member 13 are combined, a movement space 12a extending along the second direction Y is formed between the first conductive connector 12 and the first insulating member 13. The first guide rail 121 contacts the first conductive connector 12. The first body part 21 is slidably connected to the first guide rail 121 so that the metal sheet 30 is indirectly conductively connected to the first conductive connector 12. This will not be described in detail.
[0051] Optionally, such as Figure 7 The first body portion 21 is also provided with a limiting groove. The limiting groove and the first receiving cavity 211 are arranged opposite each other on both sides of the first body portion 21 in the vertical direction Z, and the first receiving cavity 211 is located above the limiting groove. The end of the first connecting rod 22 away from the first fixing member 23 is provided with a limiting block 221, and the first fixing member 23 is located above the limiting block 221 in the vertical direction Z. When the first connecting rod 22 is moved from top to bottom in the vertical direction Z to pass through the first receiving cavity 211, as the first fixing member 23 of the first connecting rod 22 extends into the first receiving cavity 211 and engages with it, the limiting block 221 at the lower end of the first connecting rod 22 enters the limiting groove to restrict the first connecting rod 22 from continuing to move downward.
[0052] In some optional embodiments, the second clamping assembly 3 includes a plurality of second body portions, a plurality of second connecting rods, and a plurality of second fixing members. The second body portion is provided with a second receiving cavity extending in the vertical direction Z, and the second body portion is provided with a second mounting groove communicating with the second receiving cavity. The second body portion is connected to the second conductive connector 15. The second connecting rod extends in the vertical direction Z, and the other end of the metal sheet 30 is wound around the second connecting rod. The second connecting rod with the metal sheet 30 wound around it can enter the second receiving cavity through the second mounting groove, and the second connecting rod is electrically connected to the second body portion. The second fixing member is connected to the other end of the second connecting rod and is engaged in the second receiving cavity to restrict the movement of the second connecting rod.
[0053] It should be emphasized that the second clamping component 3 has the same structure as the first clamping component 2. For the specific structure and the specific cooperation method with the fixing component 1, please refer to the relevant description of the first clamping component 2, which will not be repeated here.
[0054] In some embodiments, such as Figure 2 , Figure 3 , Figure 5 and Figure 6 When the tension adjustment component 4 is configured to be actuated and thus drive the metal sheet 30 to move, at least a portion of the structure in the tension adjustment component 4 can be configured as a component with elastic deformation capability. When the metal sheet 30 is clamped by the first clamping component 2 and the second clamping component 3, the tension adjustment component 4 abuts against the metal sheet 30 located outside the reaction space 101 and is in a compressed state. Under the action of the rebound force of the tension adjustment component 4, it can drive the metal sheet 30 to move and tension the metal sheet 30. During the coating process of the metal sheet 30 in the reaction chamber 201, when it is elongated due to high temperature, the tension adjustment component 4, which is in a compressed state, can adaptively drive the metal sheet 30 to move using the rebound force generated by the pressure, so that the metal sheet 30 can always be maintained in a taut state.
[0055] When the tension adjustment component 4 is configured to move and thus drive the metal sheet 30, the specific structure of the boat structure 10 is as follows. It should be emphasized that, for ease of understanding and explanation, the following description and related drawings illustrate the relevant mating structure when the tension adjustment component 4 is positioned near the first clamping component 2, but are not limited to this.
[0056] like Figure 2 , Figure 3 , Figure 5 and Figure 6 The fixing component 1 is provided with a plurality of receiving slots 111 communicating with the reaction space 101. The plurality of receiving slots 111 are disposed in the second direction Y at least one side of the reaction space 101. The metal sheet 30 held by the first clamping component 2 and the second clamping component 3 can pass through the receiving slots 111 to extend into the reaction space 101. The receiving slot 111 includes a first chamber 112 disposed in the first direction X at least one side of the metal sheet 30. When the tension adjusting component 4 abuts against the metal sheet 30 and is in a compressed state, the tension adjusting component 4 includes a plurality of elastic components 41, at least partially located in the receiving slot 111. The elastic components 41 and the first chamber 112 are disposed opposite to each other on both sides of a metal sheet 30. The elastic components 41 abut against the metal sheet 30 and are in a compressed state. Under the action of the rebound force of the elastic components 41, a portion of the metal sheet 30 can be driven to extend into the opposite first chamber 112, so that the metal sheet 30 located in the reaction space 101 is kept in a tensioned state.
[0057] In an alternative embodiment, such as Figure 9 and Figure 10 The elastic component 41 includes an elastic element 411 and a pressure plate 412. The elastic element 411 is connected to the fixing component 1 and extends into the receiving groove 111. The elastic element 411 extends along the first direction X. The pressure plate 412 is connected to at least one end of the elastic element 411 in the first direction X. The orthographic projection of the pressure plate 412 in the first direction X onto the first chamber 112 is located inside the first chamber 112. When the metal sheet 30 is clamped by the first clamping component 2 and the second clamping component 3, the pressure plate 412 abuts against the surface of the metal sheet 30 on the side away from the first chamber 112 and puts the elastic element 411 in a compressed state.
[0058] Optionally, the pressure plate 412 may be disposed only at one end of the elastic member 411 (not shown in the figure). In this case, a receiving groove 111 is provided for a metal sheet 30 to pass through, and a first chamber 112 is disposed on one side of the receiving groove 111 in the first direction X. The elastic member 411 and the pressure plate 412 are disposed on the other side of the receiving groove 111 opposite to the first chamber 112 in the first direction X, such that the pressure plate 412 and the first chamber 112 are disposed opposite to each other on both sides of the metal sheet 30 in the first direction X. Alternatively, the pressure plate 412 may be disposed at both ends of the elastic member 411 (e.g., Figure 10In this case, a receiving groove 111 is provided for two adjacent metal sheets 30 to pass through. First chambers 112 are provided on both sides of the receiving groove 111 in the first direction X. An elastic element 411 and two connected pressure plates 412 are located between two adjacent metal sheets 30 within the receiving groove 111, so that the two pressure plates 412 abut against the two metal sheets 30 respectively. Each pressure plate 412 and the first chamber 112 are positioned opposite each other on both sides of a metal sheet 30. The elastic element 411 can simultaneously provide a restoring force to both metal sheets 30 (e.g., ...). Figure 3 (As indicated by the double arrow M), the two metal plates 30 are moved into their respective first chambers 112 to achieve tension. The two adjacent metal plates 30 share a single elastic component 41, which helps reduce costs.
[0059] Optionally, the elastic element 411 can be configured as a spring, bellows, or the like with elastic deformation capability. In this embodiment, the elastic element 411 can be configured as a bellows, and the two pressure plates 412 can be pre-welded to both ends of the bellows at room temperature, thus sealing the cavity of the bellows. During the coating process, due to the vacuum state, a pressure difference occurs inside and outside the bellows, causing the bellows to expand and elongate along the first direction X (the bellows can be in a compressed state before expansion and elongation), thereby providing a force to the corresponding metal sheet 30 in the direction of the first chamber 112. When the metal sheet 30 is heated and elongated, it can adaptively drive the metal sheet 30 to move into the first chamber 112, thereby ensuring that the metal sheet 30 in the reaction space 101 is always kept in a taut state.
[0060] Optionally, when the two pressure plates 412 are respectively connected to both ends of the bellows, the two pressure plates 412 can also be provided with opposing clamping plates in the first direction X, with a gap between the two clamping plates to form a clamping groove 4121. The fixing component 1 is provided with a clamping block 131 that extends at least partially into the receiving groove 111. The clamping groove 4121 can be engaged with the clamping block 131 to quickly and conveniently realize the loading and unloading of the elastic component 41 and reduce the assembly difficulty.
[0061] In an alternative embodiment, such as Figures 11 to 13The elastic component 41 includes a rotating shaft 413, a guide plate 414, and a torsion spring 415. The rotating shaft 413 is fixedly connected to the fixing component 1. The guide plate 414 is rotatably connected to the rotating shaft 413 (the axis of the rotating shaft 413 is parallel to the vertical direction Z). The guide plate 414 extends at least partially into the receiving groove 111 and is rotatable relative to the rotating shaft 413. The torsion spring 415 is connected to the rotating shaft 413 and has a first abutment portion 4151 and a second abutment portion 4152 extending in the radial direction of the rotating shaft 413. The first abutment portion 4151 and the second abutment portion 4152 extend in the radial direction of the rotating shaft 413. The first connecting line of the rotating shaft 413 and the second abutting part 4152 have a first included angle with the connecting line of the rotating shaft 413. The first abutting part 4151 abuts against the fixing component 1, and the second abutting part 4152 abuts against the guide plate 414. When the metal sheet 30 is clamped by the first clamping component 2 and the second clamping component 3, the guide plate 414 is disposed opposite to the side of the metal sheet 30 away from the first chamber 112. The clamped metal sheet 30 abuts against the guide plate 414 and drives the guide plate 414 to rotate. The pressure on the torsion spring 415 decreases from the first included angle to the second included angle.
[0062] Optionally, a set of mating rotating shafts 413, guide plates 414, and torsion springs 415 (not shown in the figure) may be provided in a receiving groove 111. In this case, a metal sheet 30 passes through a receiving groove 111, and a first chamber 112 is disposed on one side of the receiving groove 111 in the first direction X. The guide plate 414 is disposed on the other side of the receiving groove 111 opposite to the first chamber 112 in the first direction X, such that the guide plate 414 and the first chamber 112 are disposed opposite to each other on both sides of the metal sheet 30 in the first direction X. Alternatively, two sets of rotating shafts 413, guide plates 414, and torsion springs 415 (e.g., ...) may be provided in a receiving groove 111. Figure 13 In this case, a receiving groove 111 is provided for two adjacent metal sheets 30 to pass through. A first chamber 112 is provided on both sides of the receiving groove 111 in the first direction X. A guide plate 414 is located between two adjacent metal sheets 30 within the receiving groove 111, so that the two guide plates 414 abut against the two metal sheets 30 respectively. Each guide plate 414 and the first chamber 112 are oppositely disposed on both sides of a metal sheet 30. A torsion spring 415 is correspondingly provided on each guide plate 414 to provide a rotational restoring force (e.g., ...) to the guide plate 414. Figure 6 (In the direction indicated by the middle arrow N), when the metal sheet 30 is heated and elongated, the guide plate 414 can rotate around the pivot 413, thereby driving the metal sheet 30 to move into the corresponding first chamber 112, thus achieving tensioning.
[0063] Optionally, the fixing component 1 is provided with a protrusion 132 extending into the receiving groove 111 (specifically, the first insulating member 13 or the second insulating member 14 may be provided with a protrusion 132). The protrusion 132 is provided with a through hole 1321 extending in the vertical direction Z. The guide plate 414 and the torsion spring 415 are respectively rotatably connected to the rotating shaft 413. The rotating shaft 413 passes through the through hole 1321 to torsionally connect the guide plate 414 to the protrusion 132. The first abutting part 4151 of the torsion spring 415 abuts against the protrusion 132, and the second abutting part 4152 abuts against the guide plate 414. Understandably, when the receiving groove 111 is configured to allow two metal pieces 30 to pass through, the protrusion 132 can be provided at the corresponding center of the receiving groove 111 in the first direction X. The protrusion 132 is provided with through holes 1321 on both sides of the first direction X, so as to connect two sets of rotating shafts 413, guide plates 414 and torsion springs 415 respectively.
[0064] It is understandable that the first included angle is the angle between the first and second connecting lines when the torsion spring 415 is not under force. When the first clamping assembly 2 and the second clamping assembly 3 clamp the metal sheet 30, the tension of the metal sheet 30 pushes the guide plate 414 to rotate toward the protrusion. Since the first abutting part 4151 abuts against the protrusion 132, the guide plate 414 drives the second abutting part 4152 to rotate toward the first abutting part 4151, thereby compressing the torsion spring 415. The first included angle gradually decreases to the second included angle. The abutment between the metal sheet 30 and the guide plate 414 keeps the torsion spring 415 under pressure. When the metal sheet 30 is heated and elongated, the restoring force of the torsion spring 415 increases the second included angle (the increased angle is not greater than the first included angle), so that the guide plate 414 drives the metal sheet 30 to move and extend into the first chamber 112, thereby ensuring that the metal sheet 30 is always in a taut state.
[0065] It is understandable that the specific values of the first and second included angles can be adjusted adaptively according to actual needs, without being specifically limited.
[0066] Furthermore, it should be emphasized that, in the above embodiments, the receiving groove 111 provided in the fixing component 1 can be formed by two adjacent first insulating members 13, with the first chamber 112 disposed on both sides of the first insulating member 13 in the first direction X. The receiving groove 111 on the side of the first clamping component 2 can be formed by two adjacent second insulating members 14, with the first chamber 112 disposed on both sides of the first insulating member 13 in the first direction X. The receiving groove 111 on the side of the second clamping component 3 can be formed by two adjacent second insulating members 14, with the first chamber 112 disposed on both sides of the second insulating member 14 in the first direction X, for ease of loading and unloading, which will not be described in detail.
[0067] In other embodiments, such as Figures 14 to 21When the tension adjustment component 4 is configured to actuate and thus drive at least one of the first clamping component 2 and the second clamping component 3, at least one of the first clamping component 2 and the second clamping component 3 is slidably connected to the fixed component 1. The tension adjustment component 4 can push the slidably connected clamping component to move along the second direction Y in a direction away from the reaction space 101. During the coating process of the metal sheet 30 in the reaction chamber 201, when it elongates due to high temperature, the tension adjustment component 4 can push the slidably connected first clamping component 2 and / or second clamping component 3 to move along the second direction Y in a direction away from the reaction space 101, so that the metal sheet 30 can always be maintained in a taut state.
[0068] like Figure 16 and Figure 17 The fixing component 1 is provided with multiple first guide rails 121 extending along the second direction Y. The multiple first guide rails 121 are arranged in the second direction Y at least on one side of the reaction space 101. At least one of the first clamping component 2 and the second clamping component 3 is slidably connected to the first guide rails 121. The fixing component 1 is provided with a guide surface 133 on the side near the first guide rails 121. The tension adjustment component 4 includes multiple gravity wedges 42. One end of the gravity wedge 42 abuts against the first clamping component 2 or the second clamping component 3 that is slidably connected in the second direction Y, and the other end is provided with an inclined surface 421 that cooperates with the guide surface 133. When the metal sheet 30 is clamped by the first clamping component 2 and the second clamping component 3, the gravity wedge 42 can cause the inclined surface 421 to move relative to the guide surface 133 under the action of gravity, so as to push the abutting first clamping component 2 or the second clamping component 3 to move in the second direction Y away from the reaction space 101.
[0069] It is understandable that, taking the side where the first clamping assembly 2 is set as an example, when the fixing assembly 1 on this side is composed of staggered first conductive connectors 12 and first insulating members 13, a movement space 12a extending along the second direction Y is enclosed between two adjacent first conductive connectors 12 and first insulating members 13. The first body part 21 and the guide surface 133 are arranged opposite to each other on both sides of the movement space 12a in the second direction Y, and the gravity wedge block 42 is accommodated between them. When the first clamping assembly 2 and the second clamping assembly 3 clamp the metal sheet 30, the first body part 21 is subjected to the tension of the metal sheet 30, which restricts the gravity wedge block 42 between the first body part 21 and the guide surface 133. When the metal sheet 30 is heated and elongated, the gravity wedge block 42 can move relative to the guide surface 133 under the action of gravity, thereby pushing the first body part 21 to move along the first guide rail 121 in a direction away from the reaction space 101, so as to adaptively tension the metal sheet 30.
[0070] like Figures 18 to 21The fixing component 1 is provided with multiple second guide rails 122 extending along the second direction Y. The multiple second guide rails 122 are arranged on at least one side of the reaction space 101 in the second direction Y. At least one of the first clamping component 2 and the second clamping component 3 is slidably connected to the second guide rails 122. The tension adjustment component 4 includes multiple first magnetic elements 44 and multiple second magnetic elements 43. The multiple first magnetic elements 44 are respectively arranged on at least one of the first clamping component 2 and the second clamping component 3. The multiple second magnetic elements 43 are arranged on the fixing component 1. The first magnetic elements 44 and the second magnetic elements 43 are arranged opposite to each other in the second direction Y. The first magnetic elements 44 and the second magnetic elements 43 have the same magnetic poles. When the metal sheet 30 is clamped by the first clamping component 2 and the second clamping component 3, the repulsive force between the first magnetic elements 44 and the second magnetic elements 43 pushes the corresponding first clamping component 2 or the second clamping component 3 to move in the second direction Y away from the reaction space 101.
[0071] It is understood that the second magnetic component 43 can be a magnetic material coated on one side of the first body part 21. The fixing component 1 is provided with a groove 13a, and the first magnetic component 44 can be snapped into the groove 13a from top to bottom to prevent the first magnetic component 44 from moving.
[0072] It is understood that the second guide rail 122 can be understood as the first guide rail 121 described in the above embodiments, and will not be described in detail.
[0073] This disclosure also provides a coating apparatus, such as Figure 1 The coating equipment 100 includes a furnace body 20 and a boat structure 10. The furnace body 20 has a reaction chamber 201, and the boat structure 10 is configured to carry a plurality of metal sheets 30. The reaction chamber 201 is configured to accommodate the boat structure 10 carrying the metal sheets 30.
[0074] It is understood that the specific structure and specific arrangement of the furnace body 20 and the boat structure 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.
[0075] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.
[0076] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.
[0077] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.
[0078] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.
[0079] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.
[0080] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.
Claims
1. A boat structure, characterized in that, The boat structure is configured to support multiple metal sheets and includes: A fixing component having a reaction space configured for a plurality of said metal sheets to be spaced apart along a first direction; A first clamping assembly is connected to the fixing assembly, and the first clamping assembly is configured to clamp one end of the metal sheet; A second clamping assembly, connected to the fixing assembly, is configured to clamp the other end of the metal sheet. The second clamping assembly and the first clamping assembly are disposed opposite each other on both sides of the reaction space in a second direction, which intersects the first direction. A tension adjustment component is connected to the fixing component. The tension adjustment component is disposed on at least one side of the reaction space in the second direction. When the metal sheet is clamped by the first clamping component and the second clamping component, the tension adjustment component can be activated to drive at least one of the first clamping component, the second clamping component and the metal sheet to maintain the metal sheet in the reaction space under tension.
2. The boat structure according to claim 1, characterized in that, When the metal sheet is held by the first clamping assembly and the second clamping assembly The tension adjustment component abuts against the metal sheet located outside the reaction space and is in a compressed state. Under the action of the rebound force of the tension adjustment component, it can drive the metal sheet to move and tension the metal sheet; and / or, At least one of the first clamping assembly and the second clamping assembly is slidably connected to the fixing assembly, and the tension adjustment assembly is capable of pushing the slidably connected first clamping assembly and / or second clamping assembly to move away from the reaction space along the second direction.
3. The boat structure according to claim 2, characterized in that, The fixing component is provided with a plurality of receiving slots communicating with the reaction space. The plurality of receiving slots are disposed on at least one side of the reaction space in the second direction. The metal sheet held by the first clamping component and the second clamping component can pass through the receiving slots to extend into the reaction space. The receiving slot includes a first chamber disposed on at least one side of the metal sheet in the first direction. When the tension adjustment assembly abuts against the metal sheet and is in a compressed state, the tension adjustment assembly includes: Multiple sets of elastic components are located at least partially in the receiving groove. The elastic components and the first chamber are disposed opposite each other on both sides of the metal sheet. The elastic components abut against the metal sheet and are in a compressed state. Under the action of the rebound force of the elastic components, a portion of the metal sheet can be driven into the opposite first chamber, so that the metal sheet located in the reaction space is kept in a taut state.
4. The boat structure according to claim 3, characterized in that, The elastic component includes: An elastic element is connected to the fixing assembly, the elastic element extends into the receiving groove, and the elastic element extends along the first direction; A pressure plate is connected to at least one end of the elastic member in the first direction. The orthogonal projection of the pressure plate into the first chamber in the first direction is located inside the first chamber. When the metal sheet is clamped by the first clamping assembly and the second clamping assembly, the pressure plate abuts against the surface of the metal sheet on the side opposite to the first chamber and compresses the elastic member.
5. The boat structure according to claim 3, characterized in that, The elastic component includes: The rotating shaft is fixedly connected to the fixing component; A guide plate is rotatably connected to the rotating shaft, the guide plate at least partially extending into the receiving groove, and the guide plate is rotatable relative to the rotating shaft; A torsion spring is connected to the rotating shaft. The torsion spring has a first abutting portion and a second abutting portion extending radially along the rotating shaft. The first abutting portion and a first line connecting the rotating shaft and the second abutting portion and the rotating shaft form a first angle. The first abutting portion abuts against the fixing assembly, and the second abutting portion abuts against the guide plate. When the metal sheet is clamped by the first clamping assembly and the second clamping assembly, the guide plate is positioned opposite the metal sheet on the side away from the first chamber. The clamped metal sheet abuts against the guide plate and drives the guide plate to rotate. The pressure on the torsion spring decreases from the first angle to the second angle.
6. The boat structure according to claim 2, characterized in that, When the tension adjustment assembly is capable of pushing at least one of the first clamping assembly and the second clamping assembly to move away from the reaction space along the second direction. The fixing component is provided with multiple first guide rails extending along the second direction, and the multiple first guide rails are disposed on at least one side of the reaction space in the second direction. At least one of the first clamping component and the second clamping component is slidably connected to the first guide rails. The fixing component is provided with a guide surface on the side near the first guide rails. The tension adjustment component includes: Multiple gravity wedges are provided. One end of each gravity wedge is slidably connected to the first or second clamping assembly in the second direction, and the other end is provided with an inclined surface that cooperates with the guide surface. When the metal sheet is clamped by the first and second clamping assemblies, the gravity wedges can move the inclined surface relative to the guide surface under the action of gravity, so as to push the first or second clamping assembly to move in the second direction away from the reaction space.
7. The boat structure according to claim 2, characterized in that, When the tension adjustment assembly is capable of pushing at least one of the first clamping assembly and the second clamping assembly to move away from the reaction space along the second direction. The fixing component is provided with multiple second guide rails extending along the second direction, and the multiple second guide rails are disposed on at least one side of the reaction space in the second direction. At least one of the first clamping component and the second clamping component is slidably connected to the second guide rails. The tension adjustment component includes: A plurality of first magnetic elements are respectively disposed in at least one of the first clamping assembly and the second clamping assembly; Multiple second magnetic elements are disposed on the fixing assembly. The first magnetic element and the second magnetic element are disposed opposite each other in the second direction. The first magnetic element and the second magnetic element have the same magnetic poles. When the metal sheet is clamped by the first clamping assembly and the second clamping assembly, the first magnetic element or the second magnetic element is pushed to move along the second direction away from the reaction space by the mutual repulsive force between the first magnetic element and the second magnetic element.
8. The boat structure according to any one of claims 1-7, characterized in that, Also includes: An electrode assembly, connected to the fixing assembly, is configured such that two adjacent metal plates have opposite polarities.
9. The boat structure according to claim 8, characterized in that, The fixing component includes: A plurality of first conductive connectors are disposed on one side of the reaction space in the second direction, and the first clamping assembly is conductively connected to the first conductive connectors; Multiple first insulating elements are disposed on one side of the reaction space in the second direction, and multiple first conductive connectors and multiple first insulating elements are arranged alternately in the first direction; A plurality of second conductive connectors are disposed on the other side of the reaction space in the second direction. A plurality of first conductive connectors and a plurality of second conductive connectors correspond one-to-one. The second clamping assembly is conductively connected to the second conductive connectors. At least one of each pair of corresponding first conductive connectors and second conductive connectors is electrically connected to the electrode assembly. A plurality of second insulating elements are disposed on the other side of the reaction space in the second direction, a plurality of second conductive connectors and a plurality of second insulating elements are arranged alternately in the first direction, and the tension adjustment assembly is connected to at least one of the first insulating elements and the second insulating elements.
10. The boat structure according to claim 9, characterized in that, The first clamping component includes: Multiple first body portions are provided with first receiving cavities extending in a vertical direction, and each first body portion is provided with a first mounting groove communicating with the first receiving cavity. The first body portion is connected to the first conductive connector. Multiple first connecting rods extend along the vertical direction. One end of the metal sheet is wound around the first connecting rod. The first connecting rod with the metal sheet wound around it can enter the first receiving cavity through the first mounting groove, and the first connecting rod is electrically connected to the first body part. Multiple first fixing members are respectively connected to one end of the first connecting rod, and the first fixing members are engaged with the first receiving cavity to restrict the movement of the first connecting rod; and / or, The second clamping assembly includes: Multiple second body portions are provided with second receiving cavities extending in a vertical direction, and each second body portion is provided with a second mounting groove communicating with the second receiving cavity. The second body portion is connected to the second conductive connector. Multiple second connecting rods extend along the vertical direction, and the other end of the metal sheet is wound around the second connecting rod. The second connecting rod with the metal sheet wound around it can enter the second receiving cavity through the second mounting groove, and the second connecting rod is electrically connected to the second body. Multiple second fasteners are respectively connected to the other end of the second connecting rod, and the second fasteners are engaged in the second receiving cavity to restrict the movement of the second connecting rod.
11. A coating apparatus, characterized in that, include: The boat structure according to any one of claims 1-10, wherein the boat structure is configured to support a plurality of metal sheets; The furnace body has a reaction chamber configured to house a boat structure carrying the metal sheet.