Temperature thermocouple quick replacement device and vapor deposition furnace

Abstract

The utility model relates to the technical field of vapor deposition, in particular to a quick replacement device for a temperature thermocouple and a vapor deposition furnace, and the quick replacement device comprises a fixing assembly which comprises a fixing seat, one end of the fixing seat penetrating through and fixed on the side wall of the vapor deposition furnace is a connecting end, the other end of the fixing seat is a sealing end, the sealing end is in threaded connection with a pressing cap, and a limiting part is arranged in the sealing end; the temperature measuring assembly comprises a couple protection tube, the couple protection tube is of a hollow rod-shaped structure with one end open and one end closed, the couple protection tube is used for containing a temperature measuring thermocouple, the couple protection tube is sleeved with a limiting plate which abuts against the limiting part and the pressing cap in a matched mode, and no less than two sets of clamping parts used for clamping and fixing the temperature measuring thermocouple are evenly arranged around the couple protection tube in the circumferential direction; the device is simple in structure and convenient to install, the service life of the temperature thermocouple is effectively prolonged, the production efficiency is effectively improved, and the maintenance and replacement time is shortened.

Description

A rapid thermocouple replacement device and a vapor deposition furnace Technical Field

[0001] This utility model relates to a rapid thermocouple replacement device and a vapor deposition furnace, belonging to the field of vapor deposition technology. Background Technology

[0002] In the production of C / C composite materials (including carbon ceramic), the vapor deposition (CVI) process is key to ensuring product performance and reducing costs and consumption.

[0003] Vapor deposition refers to the process of heating a C / C composite material to a specific temperature (950-1100℃) in a furnace under vacuum conditions, introducing a carbon source gas (natural gas, a mixture of propylene and nitrogen, etc.), and maintaining a stable pressure (1000-5000 Pa). The carbon source gas decomposes into carbon and hydrogen, with the carbon permeating into the composite matrix, increasing its density and properties. Excess carbon is extracted by a vacuum pump. To achieve the desired product performance, vapor deposition time needs to be over 200 hours, and in some cases, even exceed 1000 hours.

[0004] The equipment required for vapor deposition is a vapor deposition furnace, which can be divided into induction furnaces and resistance furnaces according to the heating method. Regardless of the furnace type, thermocouples are needed for real-time monitoring to ensure accurate furnace temperature. Currently, the common method is to directly insert the thermocouple into the furnace for monitoring. However, in the furnace, at a high temperature of 950-1100℃ and in a carbon and nitrogen atmosphere, the thermocouples are prone to carburization and nitriding during each operation, resulting in embrittlement or cracking. In severe cases, this can lead to leakage, damaging products and equipment, and causing accidents. In milder cases, the thermocouple may break, requiring furnace shutdown, cooling, replacement, and restarting production, wasting energy and increasing production costs. Furthermore, after prolonged operation, the thermocouple's outer diameter increases and its surface becomes rough due to the high temperature and carburization inside the furnace, making it difficult to remove during replacement and severely affecting work efficiency. Therefore, researching a new type of rapid thermocouple replacement device and a vapor deposition furnace is of great practical significance. Summary of the Invention

[0005] This invention addresses the shortcomings of existing technologies by providing a rapid thermocouple replacement device and a vapor deposition furnace.

[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A quick replacement device for temperature measuring thermocouples includes: a fixing component, including a fixing seat, the fixing seat being a hollow columnar structure with open ends, one end of which is a connecting end and the other end being a sealing end, the sealing end being screwed with a pressure cap and a limiting part being provided inside the sealing end, the pressure cap having a through hole in the center; a temperature measuring component, including a thermocouple protective tube that passes through the pressure cap and the fixing seat in sequence and extends into the furnace, the thermocouple protective tube being a hollow rod-shaped structure with one end open and one end closed, which is used to accommodate the temperature measuring thermocouple, a limiting plate being sleeved on the thermocouple protective tube and abutting and cooperating with the limiting part and the pressure cap, and at least two sets of clamping parts for clamping and fixing the temperature measuring thermocouple being evenly provided around the circumference of the thermocouple protective tube, the clamping parts being located between the limiting plate and the open end of the thermocouple protective tube.

[0007] Furthermore, the limiting part is a stepped structure composed of multiple concentric limiting steps with different inner diameters, and each limiting step is provided with a sealing ring groove, and a sealing ring is provided in the sealing ring groove.

[0008] Furthermore, the clamping part includes a mounting housing fixedly connected to the surface of the thermocouple sheath. A connecting plate is provided inside the mounting housing. An operating rod and two guide rods located on both sides of the operating rod are connected to one side of the connecting plate. The end of the operating rod extends through to the outside of the mounting housing and is connected to a handle. A spring is sleeved on the guide rod and the guide rod slides in cooperation with the mounting housing. A connecting rod is provided on the other side of the connecting plate. The end of the connecting rod extends through to the inside of the thermocouple sheath and is connected to the clamping block.

[0009] Furthermore, the operating lever is rotatably connected to one side of the connecting plate. The operating lever includes a cylindrical segment with a circular cross-section and a rectangular segment with a rectangular cross-section. The mounting housing has a rectangular through hole for the operating lever to pass through and which is adapted to the rectangular segment. When the clamping part is in the state of clamping the thermocouple, the rectangular segment passes through the rectangular through hole.

[0010] Furthermore, the contact surface between the clamping block and the temperature measuring thermocouple is provided with staggered anti-slip textures.

[0011] Furthermore, one end of the opening of the thermocouple sheath is provided with an external thread.

[0012] Furthermore, the cross-sectional shape of the thermocouple sheath is square.

[0013] Furthermore, the fixed base is provided with a carbon source gas inlet in the area between the limiting part and the side wall of the vapor deposition furnace, and the outer surface of the thermocouple tube is provided with several spiral guide grooves in the area between the limiting plate and the closed end of the thermocouple tube.

[0014] Furthermore, the heat exchanger sheath has a double-layer structure, with the outer layer made of nickel-based high-temperature alloy and the inner layer made of silicon carbide.

[0015] This invention also provides a vapor deposition furnace, including the aforementioned rapid thermocouple replacement device.

[0016] The beneficial effects of this utility model are:

[0017] Firstly, this application isolates the temperature-measuring thermocouple from the carbon and nitrogen atmosphere inside the furnace. This solves the problem of damage caused by carburizing and nitriding, effectively extending the service life of the thermocouple. It also avoids the problem of the thermocouple's outer diameter increasing and surface becoming rough due to high furnace temperatures and carburizing after prolonged operation, making it difficult to remove during replacement. Furthermore, the device in this application has a simple structure and is easy to install; simply tightening the pressure cap secures the thermocouple tube and seals the furnace. In the event of a thermocouple malfunction during production, the furnace can be removed and replaced without stopping the furnace. The newly designed temperature-measuring thermocouple effectively improves production efficiency, reduces production costs, and shortens maintenance and replacement time. Secondly, by incorporating a clamping mechanism, the thermocouple is effectively fixed within the thermocouple sheath after installation, preventing contact between the thermocouple and the inner wall of the sheath. This solves both the problem of low measurement accuracy caused by the thermocouple touching the inner wall of the sheath and the problem of damage caused by vibrations during the operation of the vapor deposition furnace, further extending the service life of the thermocouple and reducing production costs. Attached Figure Description

[0018] Figure 1 is a cross-sectional structural diagram of the thermocouple quick replacement device provided in Embodiment 1 of this utility model.

[0019] Figure 2 is a schematic cross-sectional view of the fixing seat provided in Embodiment 1 of this utility model;

[0020] Figure 3 is a schematic cross-sectional view of the clamping part provided in Embodiment 1 of this utility model;

[0021] Figure 4 is an enlarged view of point A in Figure 2.

[0022] Reference numerals: 01, side wall of vapor deposition furnace; 02, clamping part; 1, fixing seat; 2, connecting end; 3, sealing end; 4, pressure cap; 5, limiting part; 51, limiting step; 52, sealing ring; 6, thermocouple sheath; 7, temperature measuring thermocouple; 8, limiting plate; 9, mounting shell; 10, connecting plate; 11, operating rod; 111, cylindrical section; 112, rectangular section; 12, guide rod; 13, handle; 14, connecting rod; 15, clamping block; 16, carbon source gas inlet; 17, spiral guide groove; 18, spring. Detailed Implementation

[0023] The specific embodiments of this utility model are described in detail below. This utility model can be implemented in many ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed herein.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used is for describing particular embodiments only and is not intended to limit the scope of this invention.

[0025] In the description of this utility model, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection or setting, a detachable connection or setting, or an integral connection or setting. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0027] Example 1

[0028] As shown in Figures 1-4, this utility model provides a quick-change device for temperature-measuring thermocouples, comprising: a fixing component, including a fixing base 1, the fixing base 1 being a hollow cylindrical structure open at both ends, one end of which is a connecting end 2 and the other end is a sealing end 3, the sealing end 3 being screwed with a pressure cap 4 and having a limiting part 5 inside the sealing end 3, the pressure cap 4 having a through hole in the center; and a temperature-measuring component, including a thermocouple protective tube 6 that passes through the pressure cap 4 and the fixing base 1 and extends into the furnace, the thermocouple protective tube 6 having a double-layered wall structure. The outer layer is made of nickel-based high-temperature resistant alloy, and the inner layer is made of silicon carbide. The thermocouple tube 6 is a hollow rod-shaped structure with one end open and the other end closed, which is used to accommodate the temperature measuring thermocouple 7. The thermocouple tube 6 is fitted with a limiting plate 8 that abuts against the limiting part 5 and the pressure cap 4, and at least two sets of clamping parts 02 for clamping and fixing the temperature measuring thermocouple 7 are evenly arranged around the thermocouple tube 6. The clamping parts 02 are located between the limiting plate 8 and the open end of the thermocouple tube 6. Preferably, four sets of clamping parts 02 are evenly arranged around the thermocouple tube 6. It should be noted that the connecting end 2 extends through the side wall 01 of the vapor deposition furnace and is welded and fixed both inside and outside the side wall. The through hole is for the thermocouple sheath 6 to pass through, and the closed end of the thermocouple sheath 6 extends into the furnace. The temperature measuring thermocouple 7 is inserted into the thermocouple sheath 6. The limiting plate 8 and the thermocouple sheath 6 are integral structures that are welded or processed. When the thermocouple sheath 6 is installed in place, one side of the limiting plate 8 abuts against the limiting part 5, and the other side abuts against the inner end face of the pressure cap 4. The limiting part 5 and the pressure cap 4 press against the limiting plate 8 to fix the thermocouple sheath 6 and seal the installation channel, preventing vacuum leakage inside the vapor deposition furnace.

[0029] Firstly, this application isolates the temperature-measuring thermocouple 7 from the carbon and nitrogen atmosphere inside the furnace through the above-mentioned settings. This solves the problem of damage to the temperature-measuring thermocouple 7 caused by carburizing and nitriding, effectively extending its service life. It also avoids the problem of the temperature-measuring thermocouple 7 becoming larger and rougher due to the high temperature and carburizing inside the furnace after prolonged operation, making it difficult to remove during replacement. Furthermore, the device in this application has a simple structure and is easy to install. Simply tightening the pressure cap 4 is sufficient to fix the thermocouple protective tube 6 and seal the furnace. If a temperature-measuring thermocouple 7 malfunctions during production, the furnace does not need to be stopped; the faulty thermocouple can be removed and replaced at any time. The qualified temperature measuring thermocouple 7 effectively improves production efficiency, reduces production costs, and shortens maintenance and replacement time. Secondly, by setting the clamping part 02, after the temperature measuring thermocouple 7 is installed in place, its position inside the thermocouple protective tube 6 can be effectively fixed, avoiding contact between the temperature measuring thermocouple 7 and the inner wall of the thermocouple protective tube 6. This solves the problem of low measurement accuracy caused by the temperature measuring thermocouple 7 touching the inner wall of the thermocouple protective tube 6, and also solves the problem of damage caused by the temperature measuring thermocouple 7 colliding with the inner wall of the thermocouple protective tube 6 due to vibration generated during the operation of the vapor deposition furnace. This further extends the service life of the temperature measuring thermocouple 7 and further reduces production costs.

[0030] Specifically, as shown in Figures 2 and 4, the limiting part 5 is a stepped structure composed of multiple concentric limiting steps 51 with different inner diameters. Each limiting step 51 is provided with a sealing ring groove, and a sealing ring 52 is provided in the sealing ring groove. It should be noted that the limiting part 5 and the fixing seat 1 are integral structures formed by processing. The size and thickness of the limiting plate 8 can be flexibly changed according to the selection of different limiting steps 51, so that the limiting plate 8 can always abut against the limiting part 5 and the pressure cap 4 after the thermocouple tube 6 is installed. If only one limiting step 51 is set, when using a thermocouple sheath 6 with a larger outer diameter, the effective area of ​​the limiting plate 8 will be too small compared to using a thermocouple sheath 6 with a smaller outer diameter, resulting in poor support strength and inability to effectively support the thermocouple sheath 6, thus affecting operational stability. This application sets multiple concentric limiting steps 51 with different diameters. When using a thermocouple sheath 6 with a larger outer diameter, the radial dimension of the limiting plate 8 is increased and it cooperates with the limiting step 51 with a larger inner diameter. This improves the applicability of this application while effectively enhancing the support strength and ensuring operational stability.

[0031] Specifically, as shown in Figure 3, the clamping part 02 includes a mounting housing 9 fixedly connected to the surface of the thermocouple tube 6. A connecting plate 10 is provided inside the mounting housing 9. An operating rod 11 and two guide rods 12 located on both sides of the operating rod 11 are connected to one side of the connecting plate 10. The end of the operating rod 11 extends through to the outside of the mounting housing 9 and is connected to a handle 13. A spring 18 is sleeved on the guide rod 12 and the guide rod 12 slides in cooperation with the mounting housing 9. A connecting rod 14 is provided on the other side of the connecting plate 10. The end of the connecting rod 14 extends through to the inside of the thermocouple tube 6 and is connected to a clamping block 15. This setup ensures that the thermocouple 7 can be automatically corrected within the thermocouple housing 6 without manual adjustment during installation, significantly reducing assembly difficulty. Furthermore, the combination of the rigid guidance of the operating rod 11 and guide rod 12 with the dynamic flexible pre-tightening of the spring 18 guarantees operational stability after installation and counteracts the failure of the thermocouple 7 to be fixed due to vibrations during the operation of the vapor deposition furnace, preventing the thermocouple 7 from shifting position or loosening and falling off under vibration conditions.

[0032] Specifically, as shown in Figure 3, the operating rod 11 is rotatably connected to one side of the connecting plate 10. The operating rod 11 includes a cylindrical segment 111 with a circular cross-section and a rectangular segment 112 with a rectangular cross-section. The cylindrical segment 111 and the rectangular segment 112 are integral structures formed by machining. The mounting housing 9 has a rectangular through hole for the operating rod 11 to pass through and to fit the rectangular segment 112. When the clamping part 02 is in the state of clamping the thermocouple, the rectangular segment 112 passes through the rectangular through hole. The rectangular segment 112, in conjunction with the rectangular through hole, serves as a limiting and guiding mechanism, further ensuring operational stability. When the thermocouple 7 needs to be disassembled or installed, pulling the handle 13 outwards causes the operating rod 11 to move outwards, which in turn moves the connecting plate 10 and the clamping block 15. When the cylindrical segment 111 of the operating rod 11 enters the rectangular through hole and the rectangular segment 112 is completely removed from the through hole, rotating the handle 13 by 90 degrees causes the operating rod 11 to rotate by 90 degrees, thereby enabling... The length extension direction of the rectangular segment 112 is perpendicular to the length extension direction of the rectangular through hole. When the handle 13 is released, the rectangular segment 112 of the operating rod 11 is limited to the outside of the mounting housing 9. After replacement, the handle 13 is rotated 90 degrees again, the clamping part 02 resets, and the clamping block 15 contacts the temperature-sensing thermocouple 7 and cooperates with the other three clamping blocks 15 to clamp the temperature-sensing thermocouple 7. This design eliminates the need for operators to continuously pull the handle 13 when disassembling or replacing the temperature-sensing thermocouple 7, further shortening maintenance and replacement time and effectively improving replacement efficiency.

[0033] Specifically, to further improve clamping stability and prevent the temperature measuring thermocouple 7 from sliding, the contact surface between the clamping block 15 and the temperature measuring thermocouple 7 is provided with staggered anti-slip textures.

[0034] Specifically, to further improve applicability, one end of the opening of the thermocouple sheath 6 is provided with an external thread for connection with the temperature measuring thermocouple 7 with its own threaded base.

[0035] Specifically, the thermocouple sheath 6 has a square cross-sectional shape. This design significantly improves the bending resistance of the thermocouple sheath 6, preventing it from bending under prolonged vibration conditions and effectively extending its service life. It also further prevents the temperature-measuring thermocouple 7 from contacting the inner wall of the thermocouple sheath 6, thus ensuring the accuracy of temperature measurement.

[0036] Specifically, as shown in Figure 1, the fixed base 1 is provided with a carbon source gas inlet 16 in the area between the limiting part 5 and the side wall 01 of the vapor deposition furnace. The carbon source gas inlet 16 is connected to a carbon source gas source. The outer surface of the thermocouple tube 6, located between the limiting plate 8 and the closed end of the thermocouple tube 6, is surrounded by several spiral guide grooves 17. Through this arrangement, the spiral guide grooves 17 guide the carbon source gas input through the carbon source gas inlet 16 to flow along a spiral path, forming a spiral airflow. This effectively improves the uniformity of the carbon source gas in the furnace, avoids local carbon accumulation on the surface of the workpiece, and ensures the processing quality. Furthermore, by forming a spiral airflow outside the thermocouple tube 6, the airflow disturbance significantly reduces the amount of deposits adhering to the outer surface of the thermocouple tube 6, effectively extending the service life of the thermocouple tube 6 and ensuring the accuracy of temperature measurement.

[0037] Example 2

[0038] This invention provides a vapor deposition furnace, including the rapid thermocouple replacement device described in Example 1.

[0039] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are exhaustively listed. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0040] For those skilled in the art, various modifications and improvements can be made without departing from the concept of this utility model, and these modifications and improvements are all within the protection scope of this utility model. The protection scope of this utility model is defined by the appended claims.

Claims

1. A quick-change device for temperature-measuring thermocouples, characterized in that, include: The fixing assembly includes a fixing base, which is a hollow columnar structure open at both ends. One end of the fixing base is a connecting end and the other end is a sealing end, which is threaded onto the side wall of the vapor deposition furnace. The sealing end is screwed with a pressure cap and a limiting part is provided inside the sealing end. The pressure cap has a through hole in its center. The temperature measuring assembly includes a thermocouple tube that passes through the pressure cap and the fixing base in sequence and extends into the furnace. The thermocouple tube is a hollow rod-shaped structure open at one end and closed at the other end, which is used to accommodate the temperature measuring thermocouple. A limiting plate is fitted on the thermocouple tube to abut against the limiting part and the pressure cap. At least two sets of clamping parts are evenly provided around the circumference of the thermocouple tube for clamping and fixing the temperature measuring thermocouple. The clamping parts are located between the limiting plate and the open end of the thermocouple tube.

2. The rapid replacement device for temperature measuring thermocouples according to claim 1, characterized in that, The limiting part is a stepped structure composed of multiple concentric limiting steps with different inner diameters. Each limiting step is provided with a sealing ring groove, and a sealing ring is provided in the sealing ring groove.

3. The rapid replacement device for temperature measuring thermocouples according to claim 1, characterized in that, The clamping part includes a mounting housing fixedly connected to the surface of the thermocouple sheath. A connecting plate is provided inside the mounting housing. An operating rod and two guide rods located on both sides of the operating rod are connected to one side of the connecting plate. The end of the operating rod extends through to the outside of the mounting housing and is connected to a handle. A spring is sleeved on the guide rod and the guide rod slides in cooperation with the mounting housing. A connecting rod is provided on the other side of the connecting plate. The end of the connecting rod extends through to the inside of the thermocouple sheath and is connected to the clamping block.

4. The rapid replacement device for temperature measuring thermocouples according to claim 3, characterized in that, The operating lever is rotatably connected to one side of the connecting plate. The operating lever includes a cylindrical segment with a circular cross-section and a rectangular segment with a rectangular cross-section. The mounting housing has a rectangular through hole for the operating lever to pass through and to fit the rectangular segment. When the clamping part is in the state of clamping a thermocouple, the rectangular segment passes through the rectangular through hole.

5. A quick-change device for temperature-measuring thermocouples according to claim 3 or 4, characterized in that, The contact surface between the clamp block and the temperature measuring thermocouple is provided with staggered anti-slip textures.

6. A quick-change device for temperature-measuring thermocouples according to claim 1 or 3, characterized in that, The opening end of the thermocouple sheath is provided with an external thread.

7. The rapid replacement device for temperature measuring thermocouples according to claim 1, characterized in that, The cross-sectional shape of the thermocouple sheath is square.

8. A quick-change device for temperature-measuring thermocouples according to claim 7, characterized in that, The fixed base is located in the area between the limiting part and the side wall of the vapor deposition furnace, and has a carbon source gas inlet that connects to the furnace. The outer surface of the thermocouple tube is surrounded by several spiral guide grooves in the area between the limiting plate and the closed end of the thermocouple tube.

9. A quick-change device for temperature-measuring thermocouples according to claim 1, characterized in that, The heat exchanger sheath has a double-layer structure, with the outer layer made of nickel-based high-temperature resistant alloy and the inner layer made of silicon carbide.

10. A vapor deposition furnace, characterized in that, Includes the rapid thermocouple replacement device according to any one of claims 1-9.

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